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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

7.4K Views

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13:05 min

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May 11th, 2019

DOI :

10.3791/59415-v

May 11th, 2019

•
7,445 Views
1Department of Electrical and Computer Engineering, University of Victoria

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Plasma assisted Molecular Beam Epitaxy
Mg3N2
Zn3N2
II V Compound Semiconductors
Anti bixbyite Crystal Structure
MBE Growth
MgO Substrate
High temperature Annealing
RHEED
Quartz Crystal Microbalance
Sample Degassing
Sample Transfer
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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

7.4K Views

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