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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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7.4K Views

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13:05 min

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May 11th, 2019

DOI :

10.3791/59415-v

May 11th, 2019

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Peng Wu¹, Thomas Tiedje¹

¹Department of Electrical and Computer Engineering, University of Victoria

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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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