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Fabrication and Testing of Photonic Thermometers

5.6K Views

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08:44 min

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October 24th, 2018

DOI :

10.3791/55807-v

October 24th, 2018

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5,575 Views

Nikolai N. Klimov^1,2, Zeeshan Ahmed²

¹Joint Quantum Institute, University of Maryland, ²Physical Measurement Laboratory, National Institute of Standards and Technology

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Keywords Photonic Thermometers

Photonic Thermometry

Frequency based Measurements

Temperature Metrology

Optomechanical Temperature Standards

SOI Wafer Fabrication

E beam Lithography

ICP RIE Etching

Photonic Chip Dicing

V groove Array Alignment

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