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Fabrication and Testing of Photonic Thermometers

5.6K Views

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08:44 min

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October 24th, 2018

DOI :

10.3791/55807-v

October 24th, 2018

•
5,598 Views
1Joint Quantum Institute, University of Maryland, 2Physical Measurement Laboratory, National Institute of Standards and Technology

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Keywords Photonic Thermometers
Photonic Thermometry
Frequency based Measurements
Temperature Metrology
Optomechanical Temperature Standards
SOI Wafer Fabrication
E beam Lithography
ICP RIE Etching
Photonic Chip Dicing
V groove Array Alignment
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