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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

DOI :

10.3791/53630-v

July 5th, 2016

July 5th, 2016

10,083 Views

1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

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Compact Lens less Digital Holographic Microscope

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