这方面的努力是完全支持由美国能源部基础能源科学，材料科学和工程处办公室。

1。样品生长制备<ol><li>清洁一个5毫米×5毫米×0.5毫米的单晶衬底具有带状漏切角度小于0.1度，如用丙酮，然后加入水，每次10分钟的超声波清洗器中的SrTiO 3或铝酸镧。 SrTiO 3的蚀刻基板，持续30秒的10％的氟化氢得到的TiO 2终止，并在水冲洗1分钟，然后在1100℃下退火10小时。清洗后，安装在基板上的加热器适用于超高真空条件。 </li><li>安装加热器到PLD真空室，打开密室氧源，填补了2×10E-5托氧气室。加热器的温度升高至800℃，并允许它20分钟退火。可以使用计算机控制的高温计或热电偶监测温度。 </li><li>膜沉积开始，开始使用1〜2 J / cm 2的激光频率为1的激光能量密度的准分子脉冲激光或2 Hz的频率。激光脉冲击中目标材料和产生一缕缕通量。焊剂将渗透通过氧环境和沉积到衬底上。 </li><li>反射式高能电子衍射（RHEED）可用于监测单元细胞的生长，并确认第7表面质量。这种技术可以很清楚的厚度监测。 </li><li>当薄膜的所希望的厚度，关闭激光，并降低加热器的温度在5℃/分钟。一旦加热器，冷却至室温后，关闭氧气源，取出样品。 </li><li> 易地退火可以用在氧化物材料中除去氧的生长后，或在真空中长时间后可能存在的不足之处。将样品置于管式炉中，在1大气压的氧气流动。提高温度从20°C至700°C时，5°C /分钟，退火2小时，然后降低温度从700°C到20°C时，2℃/ min的。一个重要的无TE是从来没有发布退火温度高于薄膜生长过程中所使用的灌装时氧空位，因为这可能会产生不利影响表面质量，而且可能会产生负面影响晶体质量。 </li></ol> 2。光刻制作<ol><li>超声波清洗样品在丙酮中，然后水，每次10分钟。可使用的光学显微镜来检查的样品表面是干净的大颗粒。 （ 图2a） </li><li>旋涂一层1微米厚的光致抗蚀剂。典型的旋转速度和持续时间大约6,000 rpm和80秒，但这些数字是依赖于特定的光致抗蚀剂的使用。将样品放置在热板上于115℃，持续2分钟，以固化的光致抗蚀剂。在光学显微镜下检查光致抗蚀剂的质量。涂层应出现均匀，不起泡。 </li><li>根据预定义的光刻掩膜与紫外线光掩模对准样品暴露与照射剂量，持续9秒约90毫焦耳/厘米2。同样，这些数字将是针对所使用的光致抗蚀剂。当使用正性光致抗蚀剂，光致抗蚀剂的部分被掩模覆盖，因此无法改变其化学性质，而部分由掩膜露天的PR将改变其属性，并可以溶解在化学显影剂。热的光致抗蚀剂和样品在110℃下80秒，以进一步固化曝光的光致抗蚀剂。 </li><li>冲洗样品在显影剂溶液，持续25-35秒。立即将样品取出，并在水冲洗30秒。如果使用正性光致抗蚀剂，光致抗蚀剂的部分由掩膜露天会被冲走，而覆盖的部分将保持。需要注意的是在显影步骤的持续时间是至关重要的，以精确控制光致抗蚀剂的尺寸和质量（ 图2b）。 </li><li>制备溶液的碘化钾，盐酸和水的比为1时01分01秒。使用塑料镊子冲洗吨他样品的酸约10秒。未受保护的部分的薄膜将被蚀刻掉。立即在纯水冲洗样品60秒。检查用光学显微镜，以查看是否已经完全蚀刻薄膜。如果不是这样，加2至3秒以上的酸腐蚀，并立即用纯净水冲洗，然后再次检查用光学显微镜。重复这个过程，直到所有的未受保护膜被蚀刻掉。此过程的蚀刻剂的强度和膜厚度的受。许多锰是典型的刻蚀率约1-4海里/秒1:1:1解决方案比上述。 </li><li>冲洗样品的丙酮溶液，持续20秒，以除去剩余的光致抗蚀剂。检查样品的质量与显微镜（ 图2c和2d）。 </li></ol> 3。焊线连接<ol><li>使用光掩模，重复步骤2.1-2.3以上利用光刻掩模，将离开开放地区电线上的适合接触垫。为5nm的Ti和100nm的金真空蒸发到样品上，并在丙酮中清洗。这将去除光刻胶，只留下所需的接触垫的几何形状（ 图3a）。 </li><li>使用GE清漆到样品装入样品冰球。允许15分钟治愈。 </li><li>样品固定位置上焊线机阶段和使用焊线机，铝导线连接从样品冰球钛/金触点（ 图3b）。然后进行电气测量。 </li></ol>

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没有利益冲突的声明。

不同于单元素半导体材料，例如Si，复杂的材料制造，可以是更困难的，因为这样的事实，该配合物的结构和多个元素都必须予以考虑。光刻制造复合氧化物装置的使用是相对较低的成本和快速的原型，而不是其他坐月子技术。但也有一些重要的限制了解。光刻创造约1微米的结构具有空间限制，所以不适合于真正的纳米级器件的制造。同样重要的是，化学蚀刻过程中所产生的边缘粗糙度为50nm的顺...

在第一和最重要的步骤之一，实现高品质的设备是外延氧化物薄膜的生长。甲单晶衬底被用作“模板”的靶材料沉积。脉冲激光沉积（PLD）是在不同的沉积方法，以获得良好的品质薄膜4,5的最佳途径之一。成长的过程涉及到把衬底加热到​​800℃左右，在氧气环境中，并使用激光脉冲击中目标的材料和要沉积到衬底上产生的磁通。 图1中所示的典型的系统。 虽然没有图案的薄膜已被证明揭示异国情调的新的物理6，减少膜的尺寸提供了更多的机会去探索新的现象和设备制造。光刻法可以用来缩小在面内的样本维数的顺序为1μm。光刻工艺的详细协议在下面讨论。这种技术是最广泛使用的基板可以举行不同的应变状态的外延片的局限效应对调查兼容。 由于许多复合氧化物具有有趣的特性在低温和/或高的磁场，电子的移动设备和测量设备之间的连接是非常重要的。可以形成高品质的接触，通过蒸发互惠在4 - 探头的几何形状和使用的引线接合器之间进行连接的焊盘和测量装置的接触垫。如果做得正确的话，这些连接可以轻松抵御极端的测量环境，在很宽的温度范围内的4 K到400 K和磁场范围可达±9 T.

<table border="1">
 <tbody>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Reagent/Material</td>
 </tr>
 <tr>
 <td>SrTiO3(001) &amp; LaAlO3(100) substrates</td>
 <td>CrysTec GmbH</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Microposit S1813 Photoresist</td>
 <td>Shipley</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>CD-26 Developer</td>
 <td>Shipley</td>
 <td>38490</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>GE varnish</td>
 <td>Lakeshore</td>
 <td>VGE-7031</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Equipment</td>
 </tr>
 <tr>
 <td>Reflected High Energy Electron Diffraction (RHEED)</td>
 <td>Staib Instruments</td>
 <td>&nbsp;</td>
 <td>35 kV TorrRHEED</td>
 </tr>
 <tr>
 <td>Mask Aligner</td>
 <td>ABM</td>
 <td>Model 85-3 (350 W) Lightsource</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Resistivity Puck</td>
 <td>Quantum Design</td>
 <td>P102</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Wire Bonder</td>
 <td>Kulicke &amp; Soffa</td>
 <td>04524-0XDA-000-00</td>
 <td>&nbsp;</td>
 </tr>
 </tbody>
</table>

fabrication of spatially confined complex oxides

复杂材料，如高温超导，多铁，和巨大的磁阻驻留在固有的强电子关联产生的电子和磁性性能。这些材料也具有很大的不同的电阻和磁的行为在哪个区域可以共存于一个单一的非晶合金材料的电子相分离。通过减少规模这些材料固有的大小的电子域及以下的长度尺度，新颖的行为可以被暴露。因为这和理解的基本物理驱动复杂的行为的事实，每个自旋电荷格子轨道有序参数涉及相关长度，空间减少这些材料的输运测量是关键的一步。这些材料也提供了很大的潜力成为下一代电子设备1-3。因此，在制造低维纳米或微细结构是非常重要的，以实现新的功能。这涉及到多个可控的高品质薄膜生长过程精确的电子性能表征。在这里，我们提出了高品质的微结构复杂的氧化锰酸装置的制造协议。详细的描述和薄膜生长的所需设备，光刻法，引线接合。

本文的重点主要是样品制备光刻和焊线方面。薄膜生长过程的更多细节，可以发现在我们最近的其他出版物8。 光刻法是一个重要的控制维度在调查电子相关长度和电子相分离9-13为目的的复合氧化物的方法， 图2示出了在这个过程中的部分步骤的光学图像。有必要指出的是，在所有这些步骤中，显影，蚀刻时间的精确控制是最关键的成功制造设备?...

Watch this Scientific Journal Video about Fabrication of Spatially Confined Complex Oxides at JoVE.com

Fabrication of Spatially Confined Complex Oxides

我们描述了使用脉冲激光沉积（PLD），光刻法和引线接合技术来创建微米尺度的复合氧化物的设备。利用PLD生长外延薄膜。光刻和引线键合技术被引入到创建实用的设备测量目的。

空间密闭的复合氧化物制备

Complex materials such as high Tc superconductors, multiferroics, and colossal magnetoresistors have electronic and magnetic properties that arise from ...

fabrication-of-spatially-confined-complex-oxides

Research

JoVE Journal

Engineering

9.4K 次观看.  Oak Ridge National Laboratory. 我们描述了使用脉冲激光沉积（PLD），光刻法和引线接合技术来创建微米尺度的复合氧化物的设备。利用PLD生长外延薄膜。光刻和引线键合技术被引入到创建实用的设备测量目的。

视频: Fabrication of Spatially Confined Complex Oxides

Measuring Spatially- and Directionally-varying Light Scattering from Biological Material

Light interacts with an organism's integument on a variety of spatial scales. For example in an iridescent bird: nano-scale structures produce color; the milli-scale structure of barbs and barbules largely determines the directional pattern of reflected light; and through the macro-scale spatial structure of overlapping, curved feathers, these directional effects create the visual texture. Milli-scale and macro-scale effects determine where on the organism's body, and from what viewpoints and under what illumination, the iridescent colors are seen. Thus, the highly directional flash of brilliant color from the iridescent throat of a hummingbird is inadequately explained by its nano-scale structure alone and questions remain. From a given observation point, which milli-scale elements of the feather are oriented to reflect strongly? Do some species produce broader "windows" for observation of iridescence than others? These and similar questions may be asked about any organisms that have evolved a particular surface appearance for signaling, camouflage, or other reasons.
In order to study the directional patterns of light scattering from feathers, and their relationship to the bird's milli-scale morphology, we developed a protocol for measuring light scattered from biological materials using many high-resolution photographs taken with varying illumination and viewing directions. Since we measure scattered light as a function of direction, we can observe the characteristic features in the directional distribution of light scattered from that particular feather, and because barbs and barbules are resolved in our images, we can clearly attribute the directional features to these different milli-scale structures. Keeping the specimen intact preserves the gross-scale scattering behavior seen in nature. The method described here presents a generalized protocol for analyzing spatially- and directionally-varying light scattering from complex biological materials at multiple structural scales.

We present a non-destructive method for sampling spatial variation in the direction of light scattered from structurally complex materials. By keeping the material intact, we preserve gross-scale scattering behavior, while concurrently capturing fine-scale directional contributions with high-resolution imaging. Results are visualized in software at biologically-relevant positions and scales.

从生物材料空间定向变化的光散射测量

Light interacts with an organism's integument on a variety of spatial scales. For example in an iridescent bird: nano-scale structures produce color; the ...

科研

工程学

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas allows the deposition of metal oxides with tunable morphology, structure, density and stoichiometry by a proper control of the plasma plume expansion dynamics. Such versatility can be exploited to produce nanostructured films from compact and dense to nanoporous characterized by a hierarchical assembly of nano-sized clusters. In particular we describe the detailed methodology to fabricate two types of Al-doped ZnO (AZO) films as transparent electrodes in photovoltaic devices: 1) at low O2 pressure, compact films with electrical conductivity and optical transparency close to the state of the art transparent conducting oxides (TCO) can be deposited at room temperature, to be compatible with thermally sensitive materials such as polymers used in organic photovoltaics (OPVs); 2) highly light scattering hierarchical structures resembling a forest of nano-trees are produced at higher pressures. Such structures show high Haze factor (&gt;80%) and may be exploited to enhance the light trapping capability. The method here described for AZO films can be applied to other metal oxides relevant for technological applications such as TiO2, Al2O3, WO3 and Ag4O4.

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Experimental Measurement of Settling Velocity of Spherical Particles in Unconfined and Confined Surfactant-based Shear Thinning Viscoelastic Fluids

An experimental study is performed to measure the terminal settling velocities of spherical particles in surfactant based shear thinning viscoelastic (VES) fluids. The measurements are made for particles settling in unbounded fluids&#160;and fluids between parallel walls. VES fluids over a wide range of rheological properties are prepared and rheologically characterized. The rheological characterization involves steady shear-viscosity and dynamic oscillatory-shear measurements to quantify the viscous and elastic properties respectively. The settling velocities under unbounded conditions are measured in beakers having diameters at least 25x the diameter of particles. For measuring settling velocities between parallel walls, two experimental cells with different wall spacing are constructed. Spherical particles of varying sizes are gently dropped in the fluids and allowed to settle. The process is recorded with a high resolution video camera and the trajectory of the particle is recorded using image analysis software. Terminal settling velocities are calculated from the data.
The impact of elasticity on settling velocity in unbounded fluids is quantified by comparing the experimental settling velocity to the settling velocity calculated by the inelastic drag predictions of Renaud et al.1&#160;Results show that elasticity of fluids can increase or decrease the settling velocity. The magnitude of reduction/increase is a function of the rheological properties of the fluids and properties of particles. Confining walls are observed to cause a retardation effect on settling and the retardation is measured in terms of wall factors.

This paper demonstrates the experimental procedure to measure terminal settling velocities of spherical particles in surfactant-based shear thinning viscoelastic fluids. Fluids over a wide range of rheological properties are prepared and settling velocities are measured for a range of particle sizes in unbounded fluids and fluids between parallel walls.

无约束和封闭表面活性剂中球形粒子沉降速度的实验测量 剪切变薄粘性流体

An experimental study is performed to measure the terminal settling velocities of spherical particles in surfactant based shear thinning viscoelastic ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Atomically Traceable Nanostructure Fabrication

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure.

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

原子纳米结构可追溯制造

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte

After reporting on the two-step anodization, nanoporous anodic aluminum oxides (AAOs) have been widely utilized in the versatile fields of fundamental sciences and industrial applications owing to their periodic arrangement of nanopores with relatively high aspect ratio. However, the techniques reported so far, which could be only valid for mono-surface anodization, show critical disadvantages, i.e., time-consuming as well as complicated procedures, requiring toxic chemicals, and wasting valuable natural resources. In this paper, we demonstrate a facile, efficient, and environmentally clean method to fabricate nanoporous AAOs in sulfuric and oxalic acid electrolytes, which can overcome the limitations that result from conventional AAO fabricating methods. First, plural AAOs are produced at one time through simultaneous multi-surfaces anodization (SMSA), indicating mass-producibility of the AAOs with comparable qualities. Second, those AAOs can be separated from the aluminum (Al) substrate by applying stair-like reverse biases (SRBs) in the same electrolyte used for the SMSAs, implying simplicity and green technological characteristics. Finally, a unit sequence consisting of the SMSAs sequentially combined with SRBs-based detachment can be applied repeatedly to the same Al substrate, which reinforces the advantages of this strategy and also guarantees the efficient usage of natural resources.

A protocol for fabricating nanoporous anodic aluminum oxides via simultaneous multi-surfaces anodization followed by stair-like reverse biases detachments is presented. It can be applied repeatedly to the same aluminum substrate, exhibiting a facile, high-yield, and environmentally clean strategy.

阳极氧化铝在硫酸和草酸电解质中的同时多表面 Anodizations 和阶梯式反向偏置剥离

After reporting on the two-step anodization, nanoporous anodic aluminum oxides (AAOs) have been widely utilized in the versatile fields of fundamental ...

Fabrication of Superhydrophobic Metal Surfaces for Anti-Icing Applications

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in industry. The wettability of the produced surface was analyzed by bouncing drop experiments and the topography was analyzed by confocal microscopy. In addition, we show various methodologies to measure its durability and anti-icing properties. Superhydrophobic surfaces hold a special texture that must be preserved to keep their water-repellency. To fabricate durable surfaces, we followed two strategies to incorporate a resistant texture. The first strategy is a direct incorporation of roughness to the metal substrate by acid etching. After this surface texturization, the surface energy was decreased by silanization or fluoropolymer deposition. The second strategy is the growth of a ceria layer (after surface texturization) that should enhance the surface hardness and corrosion resistance. The surface energy was decreased with a stearic acid film.
The durability of the superhydrophobic surfaces was examined by a particle impact test, mechanical wear by lateral abrasion, and UV-ozone resistance. The anti-icing properties were explored by studying the ability to repeal subcooled water, freezing delay, and ice adhesion.

We illustrate several methodologies to produce superhydrophobic metal surfaces and to explore their durability and anti-icing properties.

防结冰用超疏水性金属表面的制备

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in ...

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (Cu variant) entropy-stabilized oxides. Phase pure and chemically homogeneous (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) ceramic pellets are synthesized and used in the deposition of ultra-high quality, phase pure, single crystalline thin films of the target stoichiometry. A detailed methodology for the deposition of smooth, chemically homogeneous, entropy-stabilized oxide thin films by pulsed laser deposition on (001)-oriented MgO substrates is described. The phase and crystallinity of bulk and thin film materials are confirmed using X-ray diffraction. Composition and chemical homogeneity are confirmed by X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy. The surface topography of thin films is measured with scanning probe microscopy. The synthesis of high quality, single crystalline, entropy-stabilized oxide thin films enables the study of interface, size, strain, and disorder effects on the properties in this new class of highly disordered oxide materials.

The synthesis of high quality bulk and thin film (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O entropy-stabilized oxides is presented.

组分变熵稳定氧化物的体积和薄膜合成

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending deformation and low input. However, their monotonous bending motion form in two-dimensional (2-D) space keeps them away from wide applications. This paper presents a detailed fabrication method of soft pneumatic network actuators with oblique chambers, to explore their motions in three-dimensional (3-D) space. The design of oblique chambers enables actuators with tunable coupled bending and twisting capabilities, which gives them the possibility to move dexterously in flexible manipulators, to become biologically inspired robots and medical devices. The fabrication process is based on the molding method, including the silicone elastomer preparation, chamber and base parts fabrication, actuator assembly, tubing connections, checks for leaks, and actuator repair. The fabrication method guarantees the rapid manufacturing of a series of actuators with only a few modifications in the molds. The test results show the high quality of the actuators and their prominent bending and twisting capabilities. Experiments of the gripper demonstrate the advantages of the development in adapting to objects with different diameters and providing sufficient friction.

Here we present a fabrication method of soft pneumatic network actuators with oblique chambers. The actuators are capable of generating coupled bending and twisting motions, which broadens their application in soft robotics.