作者承认从美国国家航空和航天局（NASA）的玫瑰和APRA计划资金支持。 GC也承认大学空间研究协会在美国航空航天局管理他的任命。

1.微带线谐振器制造14（图3） <ol><li>清洁上硅绝缘体（SOI）晶片，其具有0.45微米厚的硅器件层，用新混合的 H 2 SO 4 :H 2 O 2（3:1）10分钟。然后冲洗用去离子水在晶片10分钟，并干燥用氮气枪。紧接其后的处理，浸在晶片的H 2○:HF（10:1），持续10秒和在去离子水中漂洗5分钟。 </li><li>制造剥离掩模，其由锗（Ge）/阳性光致抗蚀剂如S-1811 15 <ol><li>旋涂用减薄正性光刻胶双层（2份稀​​释剂-P:1份正光致抗蚀剂）的晶片以4000rpm进行30秒，然后电子束沉积的锗。 </li><li>图案葛使用光刻通过首先在晶片上施加六甲基二硅烷（HMDS）处理1分钟，然后剥离该过量以3000rpm进行30秒。 </li><li> SPI以2,000rpm进行30秒和​​烘烤的热板上在110℃下1分钟:N上变薄阳性光致抗蚀剂（1份正光刻胶2份稀释剂-P）。使用掩模对准曝光光刻胶和喷洒四甲基铵氢氧化基础的解决方案，制定有抗拒。 </li><li>反应离子蚀刻锗在70 W·阿什的SF 6 / O 2等离子底层光刻胶与O 2等离子达到削弱光刻胶。 </li><li>直流磁控溅射沉积铌（Nb）的地平面与在500 W和放置晶片的丙酮填充的烧杯内4小时将其提起，3.7 mT的氩（Ar）的。 </li></ol></li><li>旋涂bisbenzocyclobutene（BCB）在4,000rpm下的SOI晶片的铌涂覆的表面上30秒，并以另一硅晶片的一个表面上。与在200℃下3巴的压力粘结两种BCB涂层表面在一起。 </li><li>手动倒装晶片叠层颠倒开始处理SOI晶片的背面。 </li><li>通过使用的 Al 2 O 3浆料机械研磨，接着通过使用Bosch工艺深反应离子蚀刻蚀刻硅处理晶片16蚀刻埋入SiO 2层用H 2 O:HF（10:1）20分钟。 </li><li>存款氮化钼使用DC磁控管反应溅射在700 W和3.3公吨（莫2 N）（氩:N 2分压= 7:1）。以2,000rpm进行30秒:通过在2,000rpm进行30秒旋转，并在180℃下进行2分钟，随后由纺纱烘焙图案的谐振器变薄阳性光致抗蚀剂（1份正光刻胶2份稀释剂-P）。开发中的反应性离子蚀刻机四甲基铵基氢氧化物溶液和灰光致抗蚀剂。蚀刻钼2 N与磷酸类溶液。 </li><li>用于随后通过电子束DEP 2分钟通过以5,000rpm进行30秒的聚甲基丙烯酸甲酯纺纱机和在180℃烘烤制造剥离掩模由锗/ PMMA双层的戈osition。溅射沉积铌传输线和在丙酮剥离（参见步骤1.2，不同的是正性光刻胶被取代的聚甲基丙烯酸甲酯）。 </li><li>在一些实施例中，射频（RF）溅射沉积的 SiO 2，图案它通过用正光阻纺丝和在基于氢氟酸溶液蚀刻。然后，如在步骤1.2详述升空使用锗/正光致抗蚀剂剥离掩膜的溅镀沉积的铌薄膜。 </li></ol> 2.程序的测试包微波振动片的安装<ol><li>设计和机器的测试包，包括金（Au）涂覆的铜腔（用碱和盖），该匹配谐振器芯片尺寸，馈线的输入和输出的位置。注:在壳体的空腔尺寸应被指定来支持在感兴趣的频带最小寄生耦合的单模操作。 </li><li>设计和制造一个受控阻抗微波扇鸥T模块17路由芯片和超小型A版本（SMA）连接器之间的信号。 </li><li>将SMA连接到测试包的输入和输出，使得中心导体销比相应的扇出电路板接触垫对准。施加焊料掩模，以防止短路，并在中心导体销的区域应用焊料。放置在热板上，并加热到200℃〜5分钟的包以熔化焊料。放凉，然后取下阻焊膜。 </li><li>安装振动片进金包覆铜包空腔使得片上馈线输出和输入衬垫接近和对准相应的扇出电路板共面波导（CPW）线。确保与铜剪辑这使得在芯片的角部的边缘接触的芯片。 </li><li>将超导扇出板接触焊盘之间和片上铝丝债券。放置在这里介绍的情况下的最大数目（〜4 - 见<str翁&gt;的〜500-600微米长，〜250微米的高度线接合，图4），以提供SMA连接器输入和输出，芯片上的共面波导的馈线之间的阻抗的匹配。 </li><li>引线接合之后，用万用表检查输入和输出连接器的中心销之间的直流电阻，和一个中心销与地之间，以确认有跨越两个中心销的电连接和中心之间的开放连接线和接地。 </li></ol> 3.程序在低温氦-3微波试验台微波谐振器的安装<ol><li>组装测试平台如在图2中所示的配置，其中一个系列SMA电缆是从室温路由到0.3-K冷阶段，该装置将被安装。 </li><li>安装铜（Cu）和超导铌-钛（的NbTi）电缆， 如图2中所示，以提供低微波损耗，并在情况下的NbTi电缆，低热导率。使用的NbTi电缆作为2-K和0.3-K级之间的热断裂。 </li><li>在关于在谐振器装置的频带为低噪声放大输出线的2-K阶段安装的低温高电子迁移率晶体管（HEMT）放大器和安装的环行器。 </li><li>在输入到该放大器插入在输出线上的低温循环器。 </li><li>安装封装谐振器的设备上用螺栓固定在0.3-K冷阶段支架。 </li><li>连接微波衰减器上的包，以提供匹配的终止和适当的SMA电缆连接到该衰减器输入和包输出的输入侧。确保这些控制阻抗端接是良好匹配，并尽可能靠近被测器件尽可能-它们定义了"设备校准平面"（ 见图2）。 </li><li>特写低温恒温器。按照标准程序来冷却设备s到0.3 K. </li></ol> 4.程序微波谐振器测量<ol><li>设置VNA的扫描在宽的频带（10兆赫 - 8千兆赫，对于这里考虑的设备）的设备被测设计频率。调整对VNA的功率电平为器件适合水平测试（-30〜dBm的，对于这里考虑的设备）。 注:确保输入RF功率电平足够低，以便不超过该超导微波谐振器和超导馈线的临界电流。确保功率电平高到足以提供足够的信噪比。 </li><li>校准灵活的射频电缆下列标准短路负载开路流通（SOLT）过程，继在VNA手册中VNA软件的方向。插入短路，开路，终端和通标准在每个柔性电缆的输出，这将在稍后被连接到其输入路径从矢量网络分析仪和的低温恒温器进行测量。此校准定义了"仪器参考平面"（ 例如 ，参见图2）。 </li><li>以下这个SOLT校准，通过确认传输，S 21，与直通线连接与VNA测定验证校准的保真度，具有低的残留误差（ 即 ，响应于〜0 dB电平和S 11和S 22低， 例如 ≤-50分贝）。 </li><li>柔性电缆连接到低温恒温器的输入和输出线。 </li><li>通过作为微波放大器的公司提供的文档中指定施加所需的直流偏置电压接通低温微波放大器。 </li><li>首先，完成VNA的宽带扫描（10兆赫- 8 GHz的，对于这里考虑的设备），观察在S 21的基准结构，寻找任何尖锐的高Q &lt;/ em&gt;的指示微波谐振器的结构。 </li><li>然后，缩小的频率范围（至〜2 - 4千兆赫，对于这里考虑的设备），并调整数据点（这里考虑的设备〜30,000）的VNA的数目扫描整个谐振频带。使用的频带宽度足以购买配合提供足够的基线跨度此基准进行原位校准（见言讨论）。 注意:根据噪声电平，增加平均的次数，或者减少IF带宽来改善信号对噪声。 </li><li>保存复杂的传输数据，这些数据VNA扫描到文件用于测量后现场校准，以及分析和质量因素及共振频率提取11 </li></ol>

<ol><li>Monfardini, A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((The+N%C3%A9el+IRAM+KID+Arrays+%28NIKA%29%5BTitle%5D)+AND+%22J.+Low+Temp.+Phys%22%5BJournal%5D)">The Néel IRAM KID Arrays (NIKA).</a> J. Low Temp. Phys. 167 (5-6), 834-839 (2012).</li>
<li>Schlaerth, J. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((The+Status+of+Music%3A+A+Multicolor+Sub%2Fmillimeter+MKID+Instrument%5BTitle%5D)+AND+%22J.+Low+Temp.+Phys%22%5BJournal%5D)">The Status of Music: A Multicolor Sub/millimeter MKID Instrument.</a> J. Low Temp. Phys. 167 (3-4), 347-353 (2012).</li>
<li>Swenson, L. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((MAKO%3A+a+pathfinder+instrument+for+on-sky+demonstration+of+low-cost+350+micron+imaging+arrays%5BTitle%5D)+AND+%22Proc.+SPIE%22%5BJournal%5D)">MAKO: a pathfinder instrument for on-sky demonstration of low-cost 350 micron imaging arrays.</a> Proc. SPIE. 8452, 84520P(2012).</li>
<li>Mazin, B. A., Bumble, B., Meeker, S. R., O'Brien, K., McHugh, S., Langman, E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((A+superconducting+focal+plane+array+for+ultraviolet%2C+optical%2C+and+near-infrared+astrophysics%5BTitle%5D)+AND+%22Opt.+Express%22%5BJournal%5D)">A superconducting focal plane array for ultraviolet, optical, and near-infrared astrophysics.</a> Opt. Express. 20 (2), 1503-1511 (2012).</li>
<li>Mazin, B. A. <a target="_blank" href="http://scholar.google.com/scholar?hl=en&safe=off&q=%22Microwave+Kinetic+Inductance+Detectors%22">Microwave Kinetic Inductance Detectors</a>. , California Institute of Technology. Pasadena, California. (2005).</li>
<li>McHugh, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((A+readout+for+large+arrays+of+Microwave+Kinetic+Inductance+Detectors%5BTitle%5D)+AND+%22Rev.+Sci.+Instrum%22%5BJournal%5D)">A readout for large arrays of Microwave Kinetic Inductance Detectors.</a> Rev. Sci. Instrum. 83 (4), 044702(2012).</li>
<li>Mazin, B. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((ARCONS%3A+A+2024+Pixel+Optical+through+Near-IR+Cryogenic+Imaging+Spectrophotometer%5BTitle%5D)+AND+%22Publ.+Astron.+Soc.+Pac%22%5BJournal%5D)">ARCONS: A 2024 Pixel Optical through Near-IR Cryogenic Imaging Spectrophotometer.</a> Publ. Astron. Soc. Pac. 123 (933), 1348-1361 (2013).</li>
<li>Zmuidzinas, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Superconducting+Microresonators%3A+Physics+and+Applications%5BTitle%5D)+AND+%22Annu.+Rev.+Condens.+Matter+Phys%22%5BJournal%5D)">Superconducting Microresonators: Physics and Applications.</a> Annu. Rev. Condens. Matter Phys. 3, 169-214 (2012).</li>
<li>Vijay, R., Slichter, D. H., Siddiqi, I. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Observation+of+Quantum+Jumps+in+a+Superconducting%5BTitle%5D)+AND+%22Artificial+Atom.+Phys.+Rev.+Lett%22%5BJournal%5D)">Observation of Quantum Jumps in a Superconducting.</a> Artificial Atom. Phys. Rev. Lett. 106 (11), 110502(2011).</li>
<li>Krupka, J., Derzakowski, K., Tobar, M., Hartnett, J., Geyer, R. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Complex+permittivity+of+some+ultralow+loss+dielectric+crystals+at+cryogenic+temperatures%5BTitle%5D)+AND+%22Meas.+Sci.+Technology%22%5BJournal%5D)">Complex permittivity of some ultralow loss dielectric crystals at cryogenic temperatures.</a> Meas. Sci. Technology. 10 (5), 387-392 (1999).</li>
<li>Cataldo, G., Wollack, E. J., Barrentine, E. M., Brown, A. D., Moseley, S. H., U-Yen, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Analysis+and+calibration+techniques+for+superconducting+resonators%5BTitle%5D)+AND+%22Rev.+Sci.+Instrum%22%5BJournal%5D)">Analysis and calibration techniques for superconducting resonators.</a> Rev. Sci. Instrum. 86 (1), 013103(2015).</li>
<li>Russell, D., Cleary, K., Reeves, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Cryogenic+probe+station+for+on-wafer+characterization+of+electrical+devices%5BTitle%5D)+AND+%22Rev.+Sci.+Instrum%22%5BJournal%5D)">Cryogenic probe station for on-wafer characterization of electrical devices.</a> Rev. Sci. Instrum. 83 (4), 044703(2012).</li>
<li>Ranzani, L., Spietz, L., Popovic, Z., Aumentado, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Two-port+microwave+calibration+at+millikelvin+temperatures%5BTitle%5D)+AND+%22Rev.+Sci.+Instrum%22%5BJournal%5D)">Two-port microwave calibration at millikelvin temperatures.</a> Rev. Sci. Instrum. 84 (3), 034704(2013).</li>
<li>Patel, A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Fabrication+of+MKIDS+for+the+MicroSpec+Spectrometer%5BTitle%5D)+AND+%22IEEE+Trans.+Appl.+Supercond%22%5BJournal%5D)">Fabrication of MKIDS for the MicroSpec Spectrometer.</a> IEEE Trans. Appl. Supercond. 23 (3), 2400404(2013).</li>
<li>High-Precision Thin Film Metal Liftoff Technique. , 9076658 B1 (2015).</li>
<li>Method of anisotropically etching silicon. , U.S. Patent No. 5501893 (1996).</li>
<li>Chen, D., Wang, Q., Shen, Z. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((A+broadband+microstrip-to-CPW+transition%5BTitle%5D)+AND+%22APMC+2005.+Asian-Pac.+Conf.+Proc%22%5BJournal%5D)">A broadband microstrip-to-CPW transition.</a> APMC 2005. Asian-Pac. Conf. Proc. 2 (4), (2005).</li>
<li>Fano, U. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Sullo+spettro+di+assorbimento+dei+gas+nobili+presso+il+limite+dello+spettro+d%27arco%5BTitle%5D)+AND+%22Il+Nuovo+Cimento%22%5BJournal%5D)">Sullo spettro di assorbimento dei gas nobili presso il limite dello spettro d'arco.</a> Il Nuovo Cimento. 12 (3), 154-161 (1935).</li>
<li>Fano, U. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Effects+of+Configuration+Interaction+on+Intensities+and+Phase+Shifts%5BTitle%5D)+AND+%22Phys.+Rev%22%5BJournal%5D)">Effects of Configuration Interaction on Intensities and Phase Shifts.</a> Phys. Rev. 124 (6), 1866-1878 (1961).</li>
<li>Marquezini, M. V., Kner, P., Bar-Ad, S., Tignon, J., Chemla, D. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Density+dependence+of+the+spectral+dielectric+function+across+a+Fano+resonance%5BTitle%5D)+AND+%22Phys.+Rev.+B%22%5BJournal%5D)">Density dependence of the spectral dielectric function across a Fano resonance.</a> Phys. Rev. B. 57 (7), 3745-3748 (1998).</li>
<li>Singh, R., Al-Naib, I., Cao, W., Rockstuhl, C., Koch, M., Zhang, W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((The+Fano+Resonance+in+Symmetry+Broken+Terahertz+Metamaterials%5BTitle%5D)+AND+%22IEEE+Trans.+Terahertz+Sci.+Technol%22%5BJournal%5D)">The Fano Resonance in Symmetry Broken Terahertz Metamaterials.</a> IEEE Trans. Terahertz Sci. Technol. 3 (6), 820-826 (2013).</li>
<li>Giannini, V., Francescano, Y., Amrania, H., Phillips, C. C., Maier, S. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Fano+Resonances+in+Nanoscale+Plasmonic+Systems%3A+A+Parameter-Free+Modeling+Approach%5BTitle%5D)+AND+%22Nano+Lett%22%5BJournal%5D)">Fano Resonances in Nanoscale Plasmonic Systems: A Parameter-Free Modeling Approach.</a> Nano Lett. 11 (7), 2835-2840 (2011).</li>
<li>O'Connell, A. D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Microwave+Dielectric+Loss+at+Single+Photon+Energies+and+Millikelvin+Temperatures%5BTitle%5D)+AND+%22Appl.+Phys.+Lett%22%5BJournal%5D)">Microwave Dielectric Loss at Single Photon Energies and Millikelvin Temperatures.</a> Appl. Phys. Lett. 92 (11), 112903(2008).</li>
<li>Weber, S. J., Murch, K. W., Slichter, D. H., Vijay, R., Siddiqi, I. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Single+Crystal+Silicon+Capacitor+with+Low+Microwave+Loss+in+the+Single+Photon+Regime%5BTitle%5D)+AND+%22Appl.+Phys.+Lett%22%5BJournal%5D)">Single Crystal Silicon Capacitor with Low Microwave Loss in the Single Photon Regime.</a> Appl. Phys. Lett. 98 (17), 172510(2011).</li>
<li>Cataldo, G., Hsieh, W. T., Huang, W. C., Moseley, S. H., Stevenson, T. R., Wollack, E. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Micro-Spec%3A+an+ultracompact%2C+high-sensitivity+spectrometer+for+far-infrared+and+submillimeter+astronomy%5BTitle%5D)+AND+%22Appl.+Opt%22%5BJournal%5D)">Micro-Spec: an ultracompact, high-sensitivity spectrometer for far-infrared and submillimeter astronomy.</a> Appl. Opt. 53 (6), 1094-1102 (2014).</li>
</ol>

作者宣称，他们没有竞争的经济利益。

单翻盖制造方法提供了在薄0.45微米的单晶Si衬底的两侧实现超导谐振器的装置。一个可以被激励以使用单晶硅电介质，因为它具有比大小小于沉积电介质（例如Si 3 N 4）与4.0-6.5 GHz的范围&lt;1×10的损耗角正切低损失的顺序多- 5 23-24图案的能力，双方拥有的该基板允许一个采用微带谐振器的设计，它提供了优秀的抗杂散光和低谐振到谐振器的串扰。所述的剥离技术能?...

在天体物理学仪器的进步已经最近推出超导微波谐振器，用于检测红外光的1 - 4所述的超导谐振器将向能量E的红外辐射响应= HV&gt;2Δ（其中，h是普朗克常数，v是辐射频率和Δ为超导隙能量）。当谐振器冷却到远低于超导临界温度的温度，这一事件打破辐射在谐振器体积库柏对并生成准粒子激发。在准粒子激发的密度的增加改变了动能电感，并且因此超导体的复杂表面阻抗。该光学响应被观察为在谐振频率向低频的偏移和在谐振器的品质因数的降低。在用于微波显象管的规范读出方案抽动电感检测器（MKID），所述谐振器被耦合到微波馈线和一个监视通过该馈线在共振单个微波频率音调的复传输。这里，光反应被观察为在振幅和变速器5（ 图1）的相两者的变化。频域复用方案是能够读出成千上万的谐振器的阵列。6-7 成功地设计和实现基于超导谐振器仪表，需要准确而有效地进行表征这些共振结构的属性。例如，噪声特性的精确测量，质量因子Q，共振频率（包括其温度依赖性）和超导谐振器的光学响应特性期望在MKID器件物理，8量子计算，9的上下文中和低的测定TE温度的材料特性。10 在所有这些情况下，电路的复杂的传输散射参数的测量是需要的。这个工作集中在谐振器的复杂的传输系数的确定，S 21，其幅度和相位可以与矢量网络分析仪（VNA）测定。理想的是，VNA基准面（或测试端口）将直接连接到被测器件（DUT），但低温环境通常需要使用额外的传输线结构来实现RT之间（〜300K）的热断裂和寒冷的阶段（〜0.3 K的这项工作; 见图 URE 2）。可能需要额外的微波元件，如定向耦合器，循环器，隔离器，放大器，衰减器，和相关的相互连接的电缆，以适当地制备，激发，读出并偏压感兴趣的设备。该相速度和这些部件的尺寸从室温到低温的冷却时发生变化，因此，它们会影响在装置校准平面所观察到的响应。仪器和设备的校准平面影响复数增益和之间的这些中间组件需要适当地占所测量的响应的解释。11 在理论上，需要一种方案，设置测量参考平面中，相同的校准过程中所用的，在DUT。为了达到这个目标，我们可以测量在多个冷却起伏校准标准;然而，这造成对VNA的稳定性和低温仪器的重复性的限制，这是很难达到的。为了减轻这些问题，人们可以放置在冷却的测试环境的必要标准，并在它们之间切换。这是，例如，类似的是，在微波探针台发现，其中样品和校准标准是由一个连续的液体氦流量或封闭循环制冷系统冷却到4K的12这种方法是在子开尔文的温度证实，但需要在低功率，高性能的微波开关测试感兴趣的乐队。13 因此原位校准过程所需的占VNA的参考平面和设备校准平面（ 图 URE 2）和一种克服上述方法的局限性之间的器乐透射响应。这种低温校准方法，提出并在Cataldo的等 11中详细讨论的，允许一个宽比谐振线宽度和谐振器之间的间距为约1％的精度在一个频率范围的特征的多个谐振器。本文将重点放在样品制作和准备的细节aration流程，试验测试设置和测量程序用于与平面线的几何形状来表征超导微波谐振器。11

<table><tbody><tr><td colspan="4">&lt;strong&gt;Protocol Section 1&lt;/strong&gt;</td></tr><tr><td>Microposit S-1811 Photoresist</td><td>Shipley</td><td></td><td></td></tr><tr><td>BCB</td><td>Dow</td><td></td><td>3022-35</td></tr><tr><td>SOI wafers</td><td>SOITec</td><td></td><td>Fabricated with SmartCut&lt;sup&gt;TM&lt;/sup&gt; process</td></tr><tr><td>Mo</td><td>Kamis</td><td></td><td>99.99%</td></tr><tr><td>Nb</td><td>Kamis</td><td></td><td>99.95% (excludes Ta)</td></tr><tr><td>E-6 metal etch w/AES</td><td>Fujifilm</td><td></td><td>CPG Grade</td></tr><tr><td>Acetone</td><td>JT Baker</td><td>9005-05</td><td>CMOS Grade</td></tr><tr><td>HF dip (1:10)</td><td>JT Baker</td><td>5397-03</td><td></td></tr><tr><td>PMMA</td><td>Microchem</td><td></td><td>950 PMMA A2</td></tr><tr><td colspan="4">&lt;strong&gt;Protocol Section 2&lt;/strong&gt;</td></tr><tr><td>GE 7031</td><td>General Electric</td><td></td><td>Low-temperature adhesive</td></tr><tr><td colspan="4">&lt;strong&gt;Protocol Sections 3-4&lt;/strong&gt;</td></tr><tr><td>Cryogenic Microwave Amplifier</td><td>MITEQ</td><td>AF S3-02000400-08-CR-4</td><td>2-4 GHz, gain ~30&amp;nbsp;dB</td></tr><tr><td>NbTi Semi-rigid SMA cables</td><td>Coax. Co.</td><td>SC-086/50-NbTi-NbTi</td><td></td></tr><tr><td>Circulator</td><td>PamTech</td><td>CTD1229K</td><td>return loss &gt; -20 dB from 2-4 GHz</td></tr><tr><td>RF attenuator</td><td>Weinschel</td><td>Model-4M</td><td>7 dB attenuation</td></tr><tr><td>Flexible SMA cables</td><td>Teledyne-Storm</td><td>R94-240</td><td>ACCU-TEST</td></tr><tr><td>Vector Network Analyzer</td><td>Agilent</td><td>N5242A PNA-X</td><td></td></tr><tr><td>Liquid He-4 cryogen</td><td>Praxair</td><td></td><td></td></tr><tr><td>Liquid N&lt;sub&gt;2&lt;/sub&gt; cryogen</td><td>Praxair</td><td></td><td></td></tr></tbody></table>

fabrication and characterization of superconducting resonators

超导微波谐振器是感兴趣于广泛的应用，包括它们作为微波动力学电感检测器（MKIDs）检测微弱天体物理签名的使用，以及用于量子计算的应用和材料表征。在本文中，程序呈现为薄膜超导微波谐振器的制造和表征。的制造方法允许为实现超导传输线谐振器与一个原子级平滑的单晶硅电介质的两面特征的。这个工作描述了安装谐振器装置的送入低温微波测试平台和用于下面的超导转变温度降温的过程。低温微波测试平台的设定最多允许一个做这些谐振器装置的复杂微波传输的仔细的测量，使公关的提取超导线和电介质基板（ 例如 ，内部质量的因素，损失和动能电感分数），这对于装置的设计和性能的重要的operties。

在0.45微米的单晶硅电介质制成的半波的Mo 2 N谐振器（ 图5）的响应与这种方法进行了验证。在这种情况下，耦合到铌共面波导（CPW）的馈线用于读出经由电容耦合通过溅射沉积的 SiO 2电介质实现的，在为"H"形区域在共振器的敞开端部之一（见协议第1.6节）。在其他情况下，电容性耦合至馈线通过在铌接地平面除去区域来实现的。在<stro...

Watch this Scientific Journal Video about Fabrication and Characterization of Superconducting Resonators at JoVE.com

Fabrication and Characterization of Superconducting Resonators

超导微波谐振器是检测的光，量子计算的应用和材料表征的兴趣。这项工作提出了制造和超导微波谐振器散射参数特性的详细过程。

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

fabrication-and-characterization-of-superconducting-resonators

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11.2K 次观看.  NASA Goddard Space Flight Center. 超导微波谐振器是检测的光，量子计算的应用和材料表征的兴趣。这项工作提出了制造和超导微波谐振器散射参数特性的详细过程。 

视频: Fabrication and Characterization of Superconducting Resonators

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

硅胶超高品质因子微谐振器的制造

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

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工程学

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view and for its considerable potential for practical applications. Slow light photonic crystal waveguides, in particular, have played a major part and have been successfully employed for delaying optical signals1-4 and the enhancement of both linear5-7 and nonlinear devices.8-11
Photonic crystal cavities achieve similar effects to that of slow light waveguides, but over a reduced band-width. These cavities offer high Q-factor/volume ratio, for the realization of optically12 and electrically13 pumped ultra-low threshold lasers and the enhancement of nonlinear effects.14-16 Furthermore, passive filters17 and modulators18-19 have been demonstrated, exhibiting ultra-narrow line-width, high free-spectral range and record values of low energy consumption.
To attain these exciting results, a robust repeatable fabrication protocol must be developed. In this paper we take an in-depth look at our fabrication protocol which employs electron-beam lithography for the definition of photonic crystal patterns and uses wet and dry etching techniques. Our optimised fabrication recipe results in photonic crystals that do not suffer from vertical asymmetry and exhibit very good edge-wall roughness. We discuss the results of varying the etching parameters and the detrimental effects that they can have on a device, leading to a diagnostic route that can be taken to identify and eliminate similar issues.
The key to evaluating slow light waveguides is the passive characterization of transmission and group index spectra. Various methods have been reported, most notably resolving the Fabry-Perot fringes of the transmission spectrum20-21 and interferometric techniques.22-25 Here, we describe a direct, broadband measurement technique combining spectral interferometry with Fourier transform analysis.26 Our method stands out for its simplicity and power, as we can characterise a bare photonic crystal with access waveguides, without need for on-chip interference components, and the setup only consists of a Mach-Zehnder interferometer, with no need for moving parts and delay scans.
When characterising photonic crystal cavities, techniques involving internal sources21 or external waveguides directly coupled to the cavity27 impact on the performance of the cavity itself, thereby distorting the measurement. Here, we describe a novel and non-intrusive technique that makes use of a cross-polarised probe beam and is known as resonant scattering (RS), where the probe is coupled out-of plane into the cavity through an objective. The technique was first demonstrated by McCutcheon et al.28 and further developed by Galli et al.29

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

光子晶体慢光波导和腔体的制备与表征

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various areas of technology and applied science, such as aerospace and communication engineering, sensing, metrology, nonlinear photonics, and quantum optics. In this article, we present the principal techniques used in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators. First detailed in this article is the protocol for resonator polishing, which is based on a grind-and-polish technique close to the ones used to polish optical components such as lenses or telescope mirrors. Then, a white light interferometric profilometer measures surface roughness, which is a key parameter to characterize the quality of the polishing. In order to launch light in the resonator, a tapered silica fiber with diameter in the micrometer range is used. To reach such small diameters, we adopt the "flame-brushing" technique, using simultaneously computer-controlled motors to pull the fiber apart, and a blowtorch to heat the fiber area to be tapered. The resonator and the tapered fiber are later approached to one another to visualize the resonance signal of the whispering gallery modes using a wavelength-scanning laser. By increasing the optical power in the resonator, nonlinear phenomena are triggered until the formation of a Kerr optical frequency comb is observed with a spectrum made of equidistant spectral lines. These Kerr comb spectra have exceptional characteristics that are suitable for several applications in science and technology. We consider the application related to ultra-stable microwave frequency synthesis and demonstrate the generation of a Kerr comb with GHz intermodal frequency.

The customized techniques developed in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators are presented. The protocols to obtain and characterize these resonators are detailed, and an explanation of some of their applications in microwave photonics is given.

基于微波光子系统回音壁模式谐振器

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Stimulated Stokes and Antistokes Raman Scattering in Microspherical Whispering Gallery Mode Resonators

Dielectric microspheres can confine light and sound for a length of time through high quality factor whispering gallery modes (WGM). Glass microspheres can be thought as a store of energy with a huge variety of applications: compact laser sources, highly sensitive biochemical sensors and nonlinear phenomena. A protocol for the fabrication of both the microspheres and coupling system is given. The couplers described here are tapered fibers. Efficient generation of nonlinear phenomena related to third order optical non-linear susceptibility &#935;(3) interactions in triply resonant silica microspheres is presented in this paper. The interactions here reported are: Stimulated Raman Scattering (SRS), and four wave mixing processes comprising Stimulated Anti-stokes Raman Scattering (SARS). A proof of the cavity-enhanced phenomenon is given by the lack of correlation among the pump, signal and idler: a resonant mode has to exist in order to obtain the pair of signal and idler. In the case of hyperparametric oscillations (four wave mixing and stimulated anti-stokes Raman scattering), the modes must fulfill the energy and momentum conservation and, last but not least, have a good spatial overlap.

Efficient generation of nonlinear phenomena related to third order optical non-linear susceptibility &#935;(3) interactions in triply resonant silica microspheres is presented in this paper. The interactions here reported are: Stimulated Raman Scattering (SRS), and four wave mixing processes comprising Stimulated Anti-stokes Raman Scattering (SARS).

刺激斯托克斯和反斯托克斯拉曼散射在微球形回音壁模式谐振器

Dielectric microspheres can confine light and sound for a length of time through high quality factor whispering gallery modes (WGM). Glass microspheres ...

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR is not affected by environmental characteristics such as the temperature and pressure surrounding the resonator. Electromagnetic radiation in THz frequencies is biocompatible, which is a critical condition especially for the application of the biomolecular sensing. However, the quality factor (Q-factor) and frequency responses of traditional thin-film based split ring resonator (SRR) MMs are very low, which limits their sensitivities and selectivity as sensors. In this work, novel nanopillar-based SRR MMs, utilizing displacement current, are designed to enhance the Q-factor up to 450, which is around 45 times higher than that of traditional thin-film-based MMs. In addition to the enhanced Q-factor, the nanopillar-based MMs induce a larger frequency shifts (17 times compared to the shift obtained by the traditional thin-film based MMs). Because of the significantly enhanced Q-factors and frequency shifts as well as the property of biocompatible radiation, the THz nanopillar-based SRR are ideal MMs for the development of biomolecular sensors with high sensitivity and selectivity without inducing damage or distortion to biomaterials. A novel fabrication process has been demonstrated to build the nanopillar-based SRRs for displacement current mediated THz MMs. A two-step gold (Au) electroplating process and an atomic layer deposition (ALD) process are used to create sub-10 nm scale gaps between Au nanopillars. Since the ALD process is a conformal coating process, a uniform aluminum oxide (Al2O3) layer with nanometer-scale thickness can be achieved. By sequentially electroplating another Au thin film to fill the spaces between Al2O3 and Au, a close-packed Au-Al2O3-Au structure with nano-scale Al2O3 gaps can be fabricated. The size of the nano-gaps can be well defined by precisely controlling the deposition cycles of the ALD process, which has an accuracy of 0.1 nm.

A protocol for the design and fabrication of a novel nanopillar-based split ring resonator (SRR) is presented.

基于纳米柱裂环谐振器的研制为位移电流共振介导太赫兹超材料

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR ...

Fabrication of Polymer Microspheres for Optical Resonator and Laser Applications

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, interface precipitation, and mini-emulsion. In all methods, well-defined, micrometer-sized spheres are obtained from a self-assembling process in solution. The vapor diffusion method can result in spheres with the highest sphericity and surface smoothness, yet the types of the polymers able to form these spheres are limited. On the other hand, in the mini-emulsion method, microspheres can be made from various types of polymers, even from highly crystalline polymers with coplanar, &#960;-conjugated backbones. The photoluminescent (PL) properties from single isolated microspheres are unusual: the PL is confined inside the spheres, propagates at the circumference of the spheres via the total internal reflection at the polymer/air interface, and self-interferes to show sharp and periodic resonant PL lines. These resonating modes are so-called "whispering gallery modes" (WGMs). This work demonstrates how to measure WGM PL from single isolated spheres using the micro-photoluminescence (&#181;-PL) technique. In this technique, a focused laser beam irradiates a single microsphere, and the luminescence is detected by a spectrometer. A micromanipulation technique is then used to connect the microspheres one by one and to demonstrate the intersphere PL propagation and color conversion from coupled microspheres upon excitation at the perimeter of one sphere and detection of PL from the other microsphere. These techniques, &#181;-PL and micromanipulation, are useful for experiments on micro-optic application using polymer materials.

Protocols for the synthesis of microspheres from polymers, the manipulation of microspheres, and micro-photoluminescence measurements are presented.

用于光学谐振器和激光应用的聚合物微球的制造

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

高效宽量程可调谐 MEMS 滤波器的设计与表征方法

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

Rapid Repetition Rate Fluctuation Measurement of Soliton Crystals in a Microresonator

Temporal solitons have attracted great interest in the past decades for their behavior in a steady state, where the dispersion is balanced by the nonlinearity in a propagation Kerr medium. The development of dissipative Kerr solitons (DKSs) in high-Q microcavities drives a novel, compact, chip-scale soliton source. When DKSs serve as femtosecond pulses, the repetition rate fluctuation can be applied to ultrahigh precision metrology, high-speed optical sampling, and optical clocks, etc. In this paper, the rapid repetition rate fluctuation of soliton crystals (SCs), a special state of DKSs where particle-like solitons are tightly packed and fully occupy a resonator, is measured based on the well-known delayed self-heterodyne method. The SCs are generated using a thermal-controlled method. The pump is a frequency fixed laser with a linewidth of 100 Hz. The integral time in frequency fluctuation measurements is controlled by the length of the delay fiber. For a SC with a single vacancy, the repetition rate fluctuations are ~53.24 Hz within 10 &#181;s and ~509.32 Hz within 125 &#181;s, respectively.

Here, we present a protocol to generate soliton crystals in a butterfly-packaged micro-ring resonator using a thermal tuned method. Further, the repetition rate fluctuations of a soliton crystal with a single vacancy are measured using a delayed self-heterodyne method.

微谐振器中孤子晶体的快速重复率波动测量

Temporal solitons have attracted great interest in the past decades for their behavior in a steady state, where the dispersion is balanced by the ...

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order surface acoustic wave (SAW) devices generate enormous accelerations on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid handling at the microscale&#8212;and even at the nanoscale. In this paper we explicitly demonstrate two major fabrication methods of SAW devices on lithium niobate: the details of lift-off and wet etching techniques are described step-by-step. Representative results for the electrode pattern deposited on the substrate as well as the performance of SAW generated on the surface are displayed in detail. Fabrication tricks and troubleshooting are covered as well. This procedure offers a practical protocol for high frequency SAW device fabrication and integration for future microfluidics applications.

Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves.&#160;

锂氮化锂表面声波设备的制造

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order ...