This work was supported by the Japan Science and Technology Agency (JST) through the Strategic Innovation Program. KPN acknowledges support from a grant-in-aid for scientific research (Grant no. 15H05462) from the Japan Society for the Promotion of Science (JSPS).

注意:戴上防护眼镜，并严格避免直接暴露于紫外线灯管和所有的激光器，包括飞秒激光。穿无尘室西装，手套，以避免污染。妥善处理任何纤维垃圾在指定的垃圾箱。 1.纳米纤维制备方法<ol><li>使用纤维涂层剥离剥离单模光纤的聚合物护套在由200毫米分离的两个地方一个5毫米的长度。使用清洁的洁净室两个机械剥离部分蘸抹在甲醇。浸在丙酮中这两个剥离部分之间的光纤。等待10 - 15分钟，直到纤维的外套土崩瓦解。取出丙酮纤维和洁净室用蘸抹在甲醇清洁整个剥离一部分。 </li><li>上设置光学纳米纤维制造设备（ONME）的两个阶段的剥离的纤维来制造纳米纤维。 <ol><li>发射探头激光到光纤和监测transmissioN使用光电二极管和使用ADC卡记录在计算机中的传输数据。开始使用ONME软件气流和点燃火焰。装载在ONME软件的预先优化参数为锥形纤维的具有500纳米的束腰直径的制造，并开始制造过程。 注:ONME是市售装置，设计用来制造使用标准热量和拉技术锥形光纤。它使用氢氧焰加热纤维和两个电动平台拉纤。气流和阶段的动作是由计算机程序控制。预优化的参数可以从供应商处获得，根据特殊要求。 </li></ol></li><li>在制造之后，赶上锥形光纤到使用UV可固化环氧树脂的纳米纤维支架。涵盖使用具有玻璃板顶盖（在图1a示出）的纳米纤维支架。把样品清洁箱内并传送到飞秒拉SER制造单位。 </li></ol> 2.飞秒激光制作<ol><li>制造安装的对齐<ol><li>把制造长凳上的玻璃板在15毫米的高度。 1兆焦耳的脉冲能量照射5秒的飞秒激光。识别飞秒激光从白色光产生致烧蚀和烧蚀图案的外观上的玻璃板损伤线。 </li><li>通过改变使用的制造工作台的X台的玻璃板的高度重复此过程。对于每一个制造，1毫米的翻译是在制造工作台的Y台使制造中的新位置。 </li><li>查找最强的消融线的高度。在这个位置上，微调折转镜中的一个的倾斜角度和位置以最大化消融。此外，微调制造工作台的X台的倾斜，以最大限度地消融。 注:在折叠式反射镜的倾斜角度被调谐USI纳克运动反射镜支架调谐旋钮和反射镜的位置是由翻译在其上被安装在Z阶段调整。 </li><li>优化后，标记的CCD照相机软件的消融线的位置，并移除玻璃板。 注:CCD摄像机的控制软件使图像捕捉和图纸标记所拍摄的图像上。它还使保存所捕获的图像和所述记号的数据。由于制造工作台的X台不具有绝对位置的参考，在CCD图像被用作在X轴的位置的参考。 CCD图象的分辨率为每像素10微米。 </li><li>使用铂（Pt）-coater，涂层60秒的玻璃板在玻璃板沉积Pt形成的25nm的层。图像使用扫描电子显微镜（SEM）在玻璃板的烧蚀图案。如果消融图案示出了具有周期为350nm（预期的干涉条纹图案），则人的周期性结构ignment优化。否则重复该过程（从步骤2.1.1 - 2.1.4）较低的脉冲能量（低至300μJ），直到周期性烧蚀图案能够被看见。 </li></ol></li><li>变迹腔光子晶体的制备<ol><li>放置制造长凳大致平行于标记在CCD相机上的消融线在锥形纤维。 </li><li>通过锥形光纤发送的探针激光（功率= 1毫瓦），并从CCD相机上的锥形光纤观察散射。最强的散射部分相对应的纳米纤维区域，由于其亚波长直径。 </li><li>翻译的制造长凳的Z阶段到纳米纤维中心到标在CCD相机上的消融线的位置。 </li><li>关闭探测激光照射，并以最小的脉冲能量（&lt;10μJ）飞秒激光。翻译是Y台重叠与飞秒激光束的纳米纤维。该重叠是由纳米纤维，观测的照度确定的erved CCD摄像机上。 注:纳米纤维是现在相对于沿Y上的飞秒激光束和Z轴对准。 </li><li>为了对准沿X轴的纳米纤维，翻译的X阶段重叠纳米纤维位置到消融线位置标记的CCD照相机上。 </li><li>翻译Y台最大化纳米纤维的重叠与飞秒激光。从纳米纤维观察两个第一订单的反射（出现在顶盖的玻璃板两大亮点）。观察这些反射点的运动，而平移Y台来回。 注:如果这些斑点朝向一侧移动，然后纳米纤维是不平行于消融线。在这种情况下，旋转旋转台以使平行于消融线的纳米纤维。当它们是平行的，所述反射斑出现作为闪光灯。 </li><li>使平行的纳米纤维到消融线之后，翻译Y台以最大化飞秒激光束和纳米纤维之间重叠，通过测量飞秒激光散成使用光电二极管在锥形光纤的端部的纳米纤维引导模式的功率。最大化重叠后，旋转旋转台来制造θ= 0.5度的角度。 注:对于飞秒激光和纳米纤维之间的最大重叠，人们会期望零落成纳米纤维导模飞秒激光的功率最大化。 </li><li>封锁功率计飞秒激光和脉冲能量设置为0.27兆焦耳。改变飞秒激光设置以单次照射模式。 注意:在此模式下，当按下火开关只产生一个单一的脉冲，否则没有激光输出。 <ol><li>除去从激光束路径中的功率计和火单个飞秒激光脉冲。这样就完成了制造工艺。 </li></ol></li></ol></li><li> Fabricati上缺陷引起的光子晶体腔<ol><li>通过如第2.1节所述观察在玻璃板上消融检查设置的对齐方式。发现为最强消融线的高度之后，就在相掩模之前插入在激光束的中心0.5mm的铜线。铜线应沿Y轴（垂直于消融线）。 </li><li>检查烧蚀图案在玻璃板上，同时改变沿Z轴的铜线的位置。固定铜线的位置时，烧蚀图案示出在消融线的中心的单个缺口。 </li><li>在对准之后，对下列中的第2.2节详细说明的方法的纳米纤维进行飞秒激光加工。对于该制造，设置制造的角度θ= 0度。 </li></ol></li></ol> 3.制作的试样的表征<ol><li>光学特性的测定<ol><li>准备SE和设定为如图1b所示的光学测量。发射宽带光源到锥形光纤之前和使用频谱分析仪的制造之后测量透射和反射光谱。制造之后，透射光谱将显示对应于所制造的样品的布拉格共振的阻带。 </li><li>旋转光纤在线偏振器的拨片来选择极化，并采取光谱两个正交偏振的x-pol和Y-POL。 注:对于X-POL（极化沿着纳米环形山）阻带将是蓝移21（朝较短波长）和纳米纤维的散射会更强。所以，通过观察光谱和CCD摄像机选择偏振。 </li><li>对于偏振之一，通过拉伸使用PZT（ 图1b所示）的锥形光纤采取透射光谱。采取由s谱tretching在2微米的步骤锥形纤维直到20微米的最大拉伸长度（由PZT扫描范围的限制）。观察到布拉格共振会红移通过拉伸锥形纤维（朝向较长波长）。从这些光谱，计算的布拉格共振的拉伸长度的移位，每单位。 </li><li>为解决腔模式并测量绝对空腔传输，使用可调谐CW激光器源。发射激光到锥形光纤和使用光电二极管监测传输。 </li><li>设置激光波长的阻带为Y型聚合酶的红色侧缘，并使用纤维内联偏振器，以尽量减少传输。以这种方式，在X-POL分量被抑制，只选择在Y-POL。设置激光波长进一步出红色侧带边的，并记录传输，同时从0伸展锥形纤维 - 20微米。 <ol><li>通过改变激光沃维勒重复测量ength蓝侧中的0.3纳米的步骤，直到整个阻带覆盖。从这些数据，重建使用数据在步骤3.1.3测定每单位拉伸长度的谐振移位的整个频谱。 注:对于与空腔的模式转变由2纳米通过20微米，典型的自由光谱范围的腔模式之间0.05拉伸锥形光纤沿一个典型样品，阻带（布拉格共振） - 纳米0.5。对于输入激光的一个给定的波长可以测量至少3 - 通过拉伸锥形光纤4的腔模式。模式之间的频率间隔是从在步骤3.1.3测定每单位拉伸长度的谐振移位数据推断。通过改变在0.3纳米步激光波长，至少2重复测量 - 连续3个腔模式在连续测量重新测量。可以通过叠加在传输数据的同时垫上的连续测量重建整个频谱重新测量腔模的清地位。 </li></ol></li><li>现在测量使用类似的操作，在步骤3.1.5和3.1.5.1中提到的其他偏振的频谱。 </li></ol></li><li>成像样品制备<ol><li>把在2厘米长的金属板的制造样品和使用UV可固化环氧树脂的锥形光纤的两端固定于金属板。确保样品的照射侧面的金属板，使得阴影侧能够被成像。 </li><li>使用铂涂布机涂覆样品30秒，并用厚度10nm左右的沉积铂的层。将样品放入SEM表示。取样品的SEM图像在每个0.1毫米在整个制作区域。 </li></ol></li></ol>

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The authors have nothing to disclose.

纳米纤维的透镜效应起着在制造技术中起重要作用，从而产生纳米纤维的阴影表面上的纳米环形山（ 图2中示出）。纳米纤维的透镜效应也使制造工艺健壮在横向方向（Y轴）的任何机械不稳定性。而且，由于单发照射，沿着其它轴的不稳定性不作为照射时间仅为120飞秒（ 即脉冲宽度）影响的制造。其结果是，具有良好定义的周期性的周期性纳米结构被制造在几千周期的，不采?...

在纳米光子器件的光强约束光学科学开辟了新的领域。现代纳米加工技术已经在激射1，传感2和光学开关应用3启用1-D和2-D光子晶体（PHC）空腔为新的前景的制造。此外，在这些光子晶体腔强大的光与物质相互作用的量子信息科学4开辟了新的途径。除了光子晶体腔，等离子nanocavities也表现出广阔的发展前景5，6，7。然而，接口这种空腔基于光纤的通信网络仍然是一个挑战。 近年来，锥形单模光纤用亚波长直径，称为光学纳米纤维，已成为一个有前途的纳米光子器件。由于强纳米纤维引导字段，并与周围介质相互作用的能力的横向限制，纳米纤维被广泛地适于并研究了各种纳米光子应用8。除此之外，它也坚决查处和光量子调控实施和物质9。从量子发射器等，单个/少量激光冷却原子和单一量子点，进入纳米纤维引导模式发射的有效耦合已经研究并证实10，11，12，13，14，15。上的纳米纤维的光-物质相互作用可通过在纳米纤维16，17实施光子晶体腔结构可显著改善。 对于s的关键优势UCH的系统是纤维在线技术，可容易地集成到通信网络。通过锥形纳米纤维的99.95％的透光率已经证实18。然而，纳米纤维传输是非常容易受到灰尘和污染。因此，光子晶体结构上采用传统的纳米加工技术，纳米纤维制造是不是卓有成效。虽然使用聚焦离子束（FIB）铣削的纳米纤维空腔制造已证实19，20，该光学质量和再现性不高。 在这个视频协议，我们提出了一个最近展示了21，22的技术来制造使用飞秒激光烧蚀纳米光子晶体腔。捏造是通过在纳米纤维和辐照的创建飞秒激光器的双光束干涉图案进行iating单一飞秒激光脉冲。纳米纤维的透镜效应起着这种技术的可行性的重要作用，纳米纤维的阴影表面上创建烧蚀弹坑。对于一个典型的样品，用了一段350纳米和直径为50逐渐变化的周期性纳米弹坑 - 250纳米以上1mm的长度上制造纳米纤维具有约450直径 - 550纳米。上的纳米纤维这样的周期性纳米火山口，作为一维光子晶体。我们还提出，以控制纳米阵列火山口的轮廓制作的纳米纤维变迹和缺陷引起的光子晶体腔的方法。 这种纳米加工的一个关键方面是所有光学加工，以使高光学质量可以维持。此外，在制造由只是一个单一的飞秒激光脉冲的照射完成，使得技术不受机械不稳定性和其它制造缺陷。这也使得内部生产光子晶体纳米纤维空腔使污染的可能性最小化。该协议旨在帮助他人实施并适应这种新型纳米加工技术。 图1a示出了制造安装的示意图。的制造安装和对准过程的细节将在21 所讨论的，22。飞秒激光具有400nm的中心波长和120飞秒脉冲宽度为入射在相位掩模。相位掩模分割飞秒激光束在0和±1的订单。光束块用于阻断0阶光束。折叠反射镜对称地重组的±1订单在纳米纤维的位置，以创建一个干涉图案。相位掩模的间距为700纳米，因此干涉图案具有350nm的间距（ΛG）。圆柱透镜聚焦沿纳米纤维的飞秒激光束。穿过光束尺寸（Y轴）和沿（Z轴）的纳米纤维为60微米和5.6毫米。锥形光纤被安装在用于拉伸纤维装有压电致动器（PZT）的保持器。与玻璃板的顶盖用于保护从灰尘纳米纤维。与锥形纤维支架固定配备了翻译（XYZ）和旋转（θ）级的制造板凳上。的θ-阶段允许在YZ面内的纳米纤维样品的旋转。 X台还可以控制沿XY-和XZ平面的倾斜角。 CCD照相机放置在距离纳米纤维20厘米的距离，并在45°在XY平面内以监测纳米纤维位置的角度。所有的实验都配备有HEPA（高效率微粒式止）过滤器，以实现无尘条件干净亭内部进行。无尘条件是维持纳米纤维的传输是必不可少的。 图1B显示了光学测量的原理图。光纤耦合光源到锥形光纤和测量使用高分辨率频谱分析仪的透射和反射的光的光谱 - :在制造过程中，光学性质简要通过启动一个宽带（900纳米700波长范围）监测。可调谐连续激光源来妥善解决腔模式和测量绝对腔传输。 我们提出的协议制造和表征。该协议部分在三个小节，纳米纤维的制备，飞秒激光制备与表征所制作的样品分。

<table><tbody><tr><td>Femtosecond Laser</td><td>Coherent Inc.</td><td>Libra HE</td><td></td></tr><tr><td>Phase Mask</td><td>Ibsen Photonics</td><td>Custom Made</td><td></td></tr><tr><td>Optial Nanofiber Manufacturing Equipment&amp;nbsp;&amp;nbsp;</td><td>Ishihara Sangyo</td><td>ONME</td><td></td></tr><tr><td>ADC Card</td><td>PicoTech</td><td>ADC-24</td><td></td></tr><tr><td>Single mode fiber</td><td>Fujikura</td><td>FutureGuide-SM</td><td></td></tr><tr><td>Broadband source</td><td>NKT Photonics</td><td>SuperK EXTREME</td><td></td></tr><tr><td>CW Tunable Laser</td><td>Coherent Inc.</td><td>MBR-110</td><td></td></tr><tr><td>Spectrum analyser (Transmission spectrum)</td><td>Thermo Fisher Scientific</td><td>Nicolet 8700</td><td></td></tr><tr><td>Spectrum analyser (Reflection spectrum)</td><td>Ocean Optics</td><td>QE65000</td><td></td></tr><tr><td>CCD Camera</td><td>Thorlabs</td><td>DCC1545M</td><td></td></tr><tr><td>Power Meter</td><td>Thorlabs</td><td>D3MM</td><td></td></tr><tr><td>Pt-Coater</td><td>Vacuum Device Inc.</td><td>MSP-1S</td><td></td></tr><tr><td>Scanning Electron Microscope</td><td>Keyence</td><td>VE-9800</td><td></td></tr><tr><td>UV Curable Epoxy</td><td>NTT-AT</td><td>AT8105</td><td></td></tr><tr><td>Photodiode</td><td>ThorLabs</td><td>PDA 36A-EC</td><td></td></tr><tr><td>Clean room wipe</td><td>TExWipe</td><td>TX-404</td><td></td></tr><tr><td>Fiber coating stripper</td><td>NTT-AT</td><td>Fiber nippers 250 &amp;mu;m&amp;nbsp;</td><td></td></tr><tr><td>Cover glass</td><td>Matsunami Glass IND,LTD</td><td>NEO micro cover glass 0.12-0.17 mm&amp;nbsp;</td><td></td></tr><tr><td>PZT</td><td>NOLIAC</td><td>NAC 2011-H20</td><td></td></tr><tr><td>Cylindrical lens stage</td><td>NewPort</td><td>M-481-A&amp;nbsp;</td><td></td></tr><tr><td>Y,Z stages</td><td>Chuo Precision Industrial Co., LTD.</td><td>LD-149-C7</td><td></td></tr><tr><td>Rotation stage</td><td>SIGMA KOKI</td><td>KSPB-1026MH</td><td></td></tr><tr><td>Z-stage(1), Z-stage(2)</td><td>NewPort</td><td>M-460P&amp;nbsp;</td><td></td></tr></tbody></table>

fabrication of 1-d photonic crystal cavity on a nanofiber using femtosecond laser-induced ablation

我们提出的亚波长直径锥形光纤，光学纳米纤维，采用飞秒激光诱导消融制造1-D光子晶体（PHC）腔的协议。我们发现，成千上万的周期性纳米陨石坑是由只有一个单一的飞秒激光脉冲照射在光学纳米纤维制造。对于一个典型的样品，用了一段350纳米和直径为50逐渐变化的周期性纳米弹坑 - 250纳米以上1mm的长度上制造纳米纤维具有约450直径 - 550纳米。这样的纳米加工的一个关键方面是，纳米纤维本身作为一个柱面透镜和集中在它的影子表面飞秒激光束。此外，单杆制造使其不受机械不稳定性和其他制造缺陷。上的纳米纤维这样的周期性纳米火山口，作为一维光子晶体和使强和宽带反射，同时保持了阻带的高传输。我们还提出，以控制纳米阵列火山口的轮廓制作的纳米纤维变迹和缺陷引起的光子晶体腔的方法。该字段的强约束，横向和纵向，在基于纳米纤维，光子晶体空穴和高效整合的光纤网络，可以打开纳米光子应用和量子信息科学的新的可能性。

图2示出了所制造的纳米纤维样品的典型部分的SEM图像。它表明上形成的纳米纤维的阴影侧周期性纳米环形山是，具有相应孔的干涉图案350nm的周期性。插图示出了样品的放大图。纳米弹坑的形状几乎是圆形的，并且一个典型的纳米火山口的直径大约为210纳米。 图3a示出了变迹光子晶体腔的制造的效果...

Watch this Scientific Journal Video about Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation at JoVE.com

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

我们提出了关于使用飞秒激光诱导亚波长消融直径石英光纤（光学纳米）制造1-D光子晶体腔的协议。

1-D光子晶体空穴对纳米纤维使用飞秒激光诱导消融制造

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...

fabrication-1-d-photonic-crystal-cavity-on-nanofiber-using

Research

JoVE Journal

Engineering

9.7K 次观看.  University of Electro-Communications. 我们提出了关于使用飞秒激光诱导亚波长消融直径石英光纤（光学纳米）制造1-D光子晶体腔的协议。 

视频: Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

硅胶超高品质因子微谐振器的制造

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

科研

工程学

A Method to Fabricate Disconnected Silver Nanostructures in 3D

The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multiple times. The complexity and difficulty of stacking and aligning multiple layers limits practical implementations of 3D metal structuring using standard nanofabrication tools. Femtosecond-laser direct-writing has emerged as a pre-eminent technique for 3D nanofabrication.1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses.3-7 However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm. The method enables the fabrication of patterns not feasible using other techniques, such as 3D arrays of disconnected silver voxels.8 Disconnected 3D metal patterns are useful for metamaterials where unit cells are not in contact with each other,9 such as coupled metal dot10,11or coupled metal rod12,13 resonators. Potential applications include negative index metamaterials, invisibility cloaks, and perfect lenses.
In femtosecond-laser direct-writing, the laser wavelength is chosen such that photons are not linearly absorbed in the target medium. When the laser pulse duration is compressed to the femtosecond time scale and the radiation is tightly focused inside the target, the extremely high intensity induces nonlinear absorption. Multiple photons are absorbed simultaneously to cause electronic transitions that lead to material modification within the focused region. Using this approach, one can form structures in the bulk of a material rather than on its surface.
Most work on 3D direct metal writing has focused on creating self-supported metal structures.14-16 The method described here yields sub-micrometer silver structures that do not need to be self-supported because they are embedded inside a matrix. A doped polymer matrix is prepared using a mixture of silver nitrate (AgNO3), polyvinylpyrrolidone (PVP) and water (H2O). Samples are then patterned by irradiation with an 11-MHz femtosecond laser producing 50-fs pulses. During irradiation, photoreduction of silver ions is induced through nonlinear absorption, creating an aggregate of silver nanoparticles in the focal region. Using this approach we create silver patterns embedded in a doped PVP matrix. Adding 3D translation of the sample extends the patterning to three dimensions.

Femtosecond-laser direct-writing is frequently used to create three-dimensional (3D) patterns in polymers and glasses. However, patterning metals in 3D remains a challenge. We describe a method for fabricating silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm.

一个断开连接的银纳米结构的方法来制作的3D

The standard nanofabrication toolkit includes  techniques primarily aimed at creating 2D patterns in dielectric media. Creating  metal patterns on a ...

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view and for its considerable potential for practical applications. Slow light photonic crystal waveguides, in particular, have played a major part and have been successfully employed for delaying optical signals1-4 and the enhancement of both linear5-7 and nonlinear devices.8-11
Photonic crystal cavities achieve similar effects to that of slow light waveguides, but over a reduced band-width. These cavities offer high Q-factor/volume ratio, for the realization of optically12 and electrically13 pumped ultra-low threshold lasers and the enhancement of nonlinear effects.14-16 Furthermore, passive filters17 and modulators18-19 have been demonstrated, exhibiting ultra-narrow line-width, high free-spectral range and record values of low energy consumption.
To attain these exciting results, a robust repeatable fabrication protocol must be developed. In this paper we take an in-depth look at our fabrication protocol which employs electron-beam lithography for the definition of photonic crystal patterns and uses wet and dry etching techniques. Our optimised fabrication recipe results in photonic crystals that do not suffer from vertical asymmetry and exhibit very good edge-wall roughness. We discuss the results of varying the etching parameters and the detrimental effects that they can have on a device, leading to a diagnostic route that can be taken to identify and eliminate similar issues.
The key to evaluating slow light waveguides is the passive characterization of transmission and group index spectra. Various methods have been reported, most notably resolving the Fabry-Perot fringes of the transmission spectrum20-21 and interferometric techniques.22-25 Here, we describe a direct, broadband measurement technique combining spectral interferometry with Fourier transform analysis.26 Our method stands out for its simplicity and power, as we can characterise a bare photonic crystal with access waveguides, without need for on-chip interference components, and the setup only consists of a Mach-Zehnder interferometer, with no need for moving parts and delay scans.
When characterising photonic crystal cavities, techniques involving internal sources21 or external waveguides directly coupled to the cavity27 impact on the performance of the cavity itself, thereby distorting the measurement. Here, we describe a novel and non-intrusive technique that makes use of a cross-polarised probe beam and is known as resonant scattering (RS), where the probe is coupled out-of plane into the cavity through an objective. The technique was first demonstrated by McCutcheon et al.28 and further developed by Galli et al.29

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

光子晶体慢光波导和腔体的制备与表征

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas allows the deposition of metal oxides with tunable morphology, structure, density and stoichiometry by a proper control of the plasma plume expansion dynamics. Such versatility can be exploited to produce nanostructured films from compact and dense to nanoporous characterized by a hierarchical assembly of nano-sized clusters. In particular we describe the detailed methodology to fabricate two types of Al-doped ZnO (AZO) films as transparent electrodes in photovoltaic devices: 1) at low O2 pressure, compact films with electrical conductivity and optical transparency close to the state of the art transparent conducting oxides (TCO) can be deposited at room temperature, to be compatible with thermally sensitive materials such as polymers used in organic photovoltaics (OPVs); 2) highly light scattering hierarchical structures resembling a forest of nano-trees are produced at higher pressures. Such structures show high Haze factor (&gt;80%) and may be exploited to enhance the light trapping capability. The method here described for AZO films can be applied to other metal oxides relevant for technological applications such as TiO2, Al2O3, WO3 and Ag4O4.

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Fabrication of Polymer Microspheres for Optical Resonator and Laser Applications

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, interface precipitation, and mini-emulsion. In all methods, well-defined, micrometer-sized spheres are obtained from a self-assembling process in solution. The vapor diffusion method can result in spheres with the highest sphericity and surface smoothness, yet the types of the polymers able to form these spheres are limited. On the other hand, in the mini-emulsion method, microspheres can be made from various types of polymers, even from highly crystalline polymers with coplanar, &#960;-conjugated backbones. The photoluminescent (PL) properties from single isolated microspheres are unusual: the PL is confined inside the spheres, propagates at the circumference of the spheres via the total internal reflection at the polymer/air interface, and self-interferes to show sharp and periodic resonant PL lines. These resonating modes are so-called "whispering gallery modes" (WGMs). This work demonstrates how to measure WGM PL from single isolated spheres using the micro-photoluminescence (&#181;-PL) technique. In this technique, a focused laser beam irradiates a single microsphere, and the luminescence is detected by a spectrometer. A micromanipulation technique is then used to connect the microspheres one by one and to demonstrate the intersphere PL propagation and color conversion from coupled microspheres upon excitation at the perimeter of one sphere and detection of PL from the other microsphere. These techniques, &#181;-PL and micromanipulation, are useful for experiments on micro-optic application using polymer materials.

Protocols for the synthesis of microspheres from polymers, the manipulation of microspheres, and micro-photoluminescence measurements are presented.

用于光学谐振器和激光应用的聚合物微球的制造

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, ...

Femtosecond Laser Filaments for Use in Sub-Diffraction-Limited Imaging and Remote Sensing

Probing remote matter with laser light is a ubiquitous technique used in circumstances as diverse as laser-induced breakdown spectroscopy and barcode scanners. In classical optics, the intensity that can be brought to bear on a remote target is limited by the spot size of the laser at the distance of the target. This spot size has a lower bound determined by the diffraction limit of classical optics. However, amplified femtosecond laser pulses generate intensity sufficient to modify the refractive index of the ambient air and undergo self-focusing. This self-focusing effect leads to the generation of highly intense laser filaments which maintain their intensity and small sub-millimeter diameter size at distances well beyond the classical Rayleigh length. Such intensity provides the capability of remote scanning, imaging, sensing, and spectroscopy with enhanced spatial resolution. We describe a technique for generating filaments with a femtosecond regenerative chirped-pulse amplifier, and for using the resulting filament to conduct imaging and spectroscopic measurements at remote distances of at least several meters.

High-intensity femtosecond pulses of laser light can undergo cycles of Kerr self-focusing and plasma defocusing, propagating an intense sub-millimeter-diameter beam over long distances. We describe a technique for generating and using these filaments to perform remote imaging and sensing beyond the classical diffraction limits of linear optics.

飞秒激光丝在亚衍射有限成像和遥感中的应用

Probing remote matter with laser light is a ubiquitous technique used in circumstances as diverse as laser-induced breakdown spectroscopy and barcode ...

Low-cost Custom Fabrication and Mode-locked Operation of an All-normal-dispersion Femtosecond Fiber Laser for Multiphoton Microscopy

A protocol is presented to build a custom low-cost yet high-performance femtosecond (fs) fiber laser. This all-normal-dispersion (ANDi) ytterbium-doped fiber laser is built completely using commercially available parts, including $8,000 in fiber optic and pump laser components, plus $4,800 in standard optical components and extra-cavity accessories. Researchers new to fiber optic device fabrication may also consider investing in basic fiber splicing and laser pulse characterization equipment (~$63,000). Important for optimal laser operation, methods to verify true versus apparent (partial or noise-like) mode-locked performance are presented. This system achieves 70 fs pulse duration with a center wavelength of approximately 1,070 nm and a pulse repetition rate of 31 MHz. This fiber laser exhibits the peak performance that may be obtained for an easily assembled fiber laser system, which makes this design ideal for research laboratories aiming to develop compact and portable fs laser technologies that enable new implementations of clinical multiphoton microscopy and fs surgery.

A method is presented to build a custom low-cost, mode-locked femtosecond fiber laser for potential applications in multiphoton microscopy, endoscopy, and photomedicine. This laser is built using commercially available parts and basic splicing techniques.

用于多光子显微镜的全正常分散飞秒光纤激光器的低成本定制制造和模式锁定操作

A protocol is presented to build a custom low-cost yet high-performance femtosecond (fs) fiber laser. This all-normal-dispersion (ANDi) ytterbium-doped ...

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order surface acoustic wave (SAW) devices generate tremendous acceleration on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid manipulation at the microscale, although more recently SAW has been used to produce similar phenomena at the nanoscale through an entirely different set of mechanisms. Controllable nanoscale fluid manipulation offers a broad range of opportunities in ultrafast fluid pumping and biomacromolecule dynamics useful for physical and biological applications. Here, we demonstrate nanoscale-height channel fabrication via room-temperature lithium niobate (LN) bonding integrated with a SAW device. We describe the entire experimental process including nano-height channel fabrication via dry etching, plasma-activated bonding on lithium niobate, the appropriate optical setup for subsequent imaging, and SAW actuation. We show representative results for fluid capillary filling and fluid draining in a nanoscale channel induced by SAW. This procedure offers a practical protocol for nanoscale channel fabrication and integration with SAW devices useful to build upon for future nanofluidics applications.

We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order ...

法布里-珀罗标准具的制备在痕量气体光谱中的应用

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-P&#233;rot Etalon

Fabry-P&#233;rot etalons (FPE) have found their way into many applications. In fields such as spectroscopy, telecommunications, and astronomy, FPEs are used for their high sensitivity as well as their exceptional filtering capability. However, air-spaced etalons with high finesse are usually built by specialized facilities. Their production requires a clean room, special glass handling, and coating machinery, meaning commercially available FPEs are sold for a high price. In this article, a new and cost-effective method to fabricate fiber-coupled FPEs with standard photonic laboratory equipment is presented. The protocol should serve as a step-by-step guide for the construction and characterization of these FPEs. We hope this&#160;will enable researchers to conduct fast and cost-effective prototyping of FPEs for various fields of application. The FPE, as presented here, is used for spectroscopic applications. As shown in the representative results section via proof of principle measurements of water vapor in ambient air, this FPE has a finesse of 15, which is sufficient for the photothermal detection of trace concentrations of gases.

作者聚焦：低成本、光纤耦合和空气间隔法布里-佩罗标准具的制造  

This protocol describes the construction of a low-cost, discrete, fiber-coupled, and air-spaced Fabry-Perot etalon with various applications, such as in trace-gas spectroscopy. The fabrication is possible in any facility with standard optical laboratory equipment available.

制造低成本、光纤耦合和空气间隔的法布里-佩罗标准具

Fabry-P&#233;rot etalons (FPE) have found their way into many applications. In fields such as spectroscopy, telecommunications, and astronomy, FPEs are ...

1-D光子晶体空穴对纳米纤维使用飞秒激光诱导消融制造

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