Ein. Untergrundvorbereitung <ol><li> Cut 1 cm x 1 cm aus Siliziumsubstraten einem Si-Wafer, ist Silicon gut für SEM Charakterisierung (Draufsicht und Querschnitt). </li><li> Cut 1 cm x 1 cm Glas (Kalk-Natron-, 1 mm dick), ist Glas optimal für optische und elektrische Charakterisierung. </li><li> Wenn Kontakte auf Glassubstraten benötigt werden, können Au Kontakten im Vakuum unter Verwendung einer Maske verdampft werden. Kaution 10 nm Cr als Zwischenschicht zur Haftung von Au, Kaution 50 nm Au verbessern. </li><li> Cut 1 cm x 1 cm Polymerprobe (zB Ethylentetrafluorethylen, ETFE). </li><li> Reinigen Sie die Substrate durch Ultraschallbehandlung in Isopropanol für 5-10 min und spülen in Isopropanol, trocken mit einem N 2-Strom. </li></ol> 2. Laser Alignment und Auswahl der Laser-Parameter <ol><li> Warm-up der Nd: YAG-Laser und wählen IV harmonische Emission (266 nm Wellenlänge) mit einem vierten harmonischen Generator (FHG), bestehend aus zwei second harmonische Generatoren (SHG) in Kaskade. </li><li> Montieren Sie eine 2 Gew.%. Al 2 O 3:. ZnO kreisförmigen Target (2 &quot;Durchmesser) auf dem Ziel-Manipulator Richten Sie den Laserpunkt in der Mitte des Ziels, starten Target Rotation und Translation und die maximale vertikale Bereich Prüfen, ob der Laserpunkt nie berührt die externe. Stahlring verwendet werden, um das Ziel zu fixieren. Das Ziel mit einer Rotations-Translationsbewegung zu gleichmäßigen Abtrag der gesamten Zielfläche bewegt haben. </li><li> Wählen Repetitionsrate (z. B. 10 Hz) und Pulsenergie (zB 75 mJ). Passen Pulsenergie und Monitor-Laser Stabilität durch einen Leistungsmesser. </li><li> Bewegen der Fokussierlinse zu einer ausgewählten Position und mit einem Stück empfindlichen Papier an dem Ziel, um die Punktgröße zu messen. Für jede Position der Fokussierlinse Feuer 1-5 Laserschüsse auf dem Papier. Wähle einen Linsenpositionssensor, ein Laserfluenz von etwa 1 J / cm 2 aufweisen. </li></ol> 3. Einrichten PLD eind Auswahl der Deposition Parameter <ol><li> Ausrichtung der Substratposition <ol><li> Einbinden einer kreisförmigen Papierblatt etwa 2 &quot;Durchmesser als Substrat zur Ausrichtung Tests. </li><li> Bewegen des Substrathalters zu einem Ziel-zu-Substrat-Abstand d TS = 50 mm. </li><li> Starten Abpumpen der Kammer mit Primär-und Turbomolekularpumpen, bis das Vakuum Niveau erreicht 10 -2 Pa </li><li> Wählen Sie einen Gasart (dh Sauerstoff) und stellen Saugvermögen und Gasfluss, um die richtige Gasdruck (siehe Abschnitte 4 und 5). Passen xy-Position des Substrats Manipulator außeraxialen bezüglich des Plume Mitte zu gleichmäßige Filmdicke über eine kreisförmige Korona erhalten. </li><li> Starten Ablation durch Entfernen der Strahl-Stopper / Leistungsmesser. Wenn das Ziel neu ist oder wenn es längere Zeit nicht verwendet wird, ist dieser Pre-Ablation notwendig, um das Ziel zu reinigen. </li><li> Stoppen Ablation, wenn eine Anzahlung auf den pape gesehen werden kannr Blick von einem Ansichtsfenster. </li></ol></li><li> Bestimmung der Plasmawolke Länge <ol><li> Folgen Sie den Schritten 3.1.1. bis 3.1.5, während der Ablation Aufnahmen mit einer Digitalkamera mit 0,5 - 1 sec. Akkumulationszeit die Mittelung über verschiedene Plasma Federn. </li><li> Messen Sie den sichtbaren Plasmawolke Länge von den Bildern unter d TS als Referenz (siehe Abbildung 3). </li></ol></li><li> Kalibrierung der Filmdicke <ol><li> Bewegen Sie das Substrat weit vom Ziel (dh 100 mm und mehr) und bewegen Sie den Quartz Micro-Balance (QCM) in einem Abstand gleich d TS aus dem Ziel. </li><li> Kaution 1000 Laserschüsse (dh 1 &#39;40&#39;&#39;) und messen die aufgebrachte Masse Wert, dann bewegen Sie den QCM entfernt. </li><li> Montieren Sie ein Si-Substrat, wie in 1.1. </li><li> Abscheiden einer Testprobe (zB 18.000 Laserschüsse, dh 30 &#39;) und verwenden Querschnittsansicht SEM-Bilder zu calibrate die Abscheidungsgeschwindigkeit (nm / Impuls). </li></ol></li></ol> 4. Ablagerung von Nanoengineered AZO Films <ol><li> Montieren Sie die Substrate, wie in Abschnitt 1 auf dem Probenhalter Manipulator mit Klebeband vorbereitet. </li><li> Befolgen Sie die Schritte 3.1.2 - 3.1.3. </li><li> Starten Substratrotation. </li><li> Abscheidung von kompakten Folien AZO <ol><li> Einschalten der Ionenkanone und Set-Ionen Energie bei 100 eV, RF-Leistung bei 75 bis 100 W und Ar-Gas auf 20 sccm Fluss (der Druck im Bereich von 10 -2 Pa-Bereich). Saubere Substrate mit Ar + Ionenkanone für 5-10 min. Nach der Reinigungsbehandlung schließen Gaseinlaß und Abpumpen der Kammer auf Argon entfernen. </li><li> Legen Sauerstoff und stellen Saugvermögen und Gasfluss bis 2 Pa Sauerstoff. </li><li> starten Ablation und Kaution für 18.000 Aufnahmen (30 &#39;). Während der Ablation prüfen, ob die Fahne Länge ist die gleiche wie in Schritt 3,2 ermittelt. </li><li> Stop-Ablation, in der Nähe gals Einlass, Abpumpen der Kammer. </li></ol></li><li> Deposition von hierarchisch strukturierten AZO Filmen <ol><li> Legen Sauerstoff und stellen Saugvermögen und Gasfluss zu 160 Pa Sauerstoff. </li><li> starten Ablation und Kaution für 18.000 Aufnahmen (30 &#39;). Während der Ablation prüfen, ob die Fahne Länge ist die gleiche wie in Schritt 3,2 ermittelt. </li><li> Stop-Ablation, in der Nähe Gaseinlass, Abpumpen der Kammer. </li></ol></li><li> Entlüften Sie die Kammer und entfernen Proben </li></ol> 5. Elektrische und Optische Charakterisierung <ol><li> Messung der In-Plane-Transporteigenschaften Verwendung Vier-Sonden-Techniken (dh Van der Pauw Methode). Siehe Abbildung 4 für eine Regelung der Kontakte. Typische Werte der Sonde Strom sind in der 1 uA bis 10 mA-Bereich. Die Messungen über einen Abtastbereich verringert bis 0,7 cm x 0,7 cm, um eine bessere Dickengleichmäßigkeit (ca. 5%) zu gewährleisten, durchgeführt wird. </li><li> Messen Sie die optical Durchlässigkeit der Probe und von den blanken Untergrund. Korrigieren der Spektren für das Substrat Beitrag durch Setzen auf 1 die Intensität an der Glas / Folie-Schnittstelle. Für eine präzise Korrektur Verfahren sicherstellen, dass die Probe mit dem Glassubstrat gegenüber der einfallenden Strahls angeordnet ist. Ermitteln der für sichtbares Licht transparent durch Berechnen der durchschnittlichen Durchlässigkeit im 400-700 nm-Bereich. Verwenden eines 150 mm Durchmesser Ulbrichtkugel, um die gestreute Bruchteil des Lichts zu messen, das Haze Faktor durch Teilen des gestreuten Anteil des insgesamt durchgelassenen Lichtes (dh gestreut und nach vorne übertragen) berechnet werden kann, siehe 5. </li></ol>

<ol>
	<li>Chrisey, D. B., Hubler, G. K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Pulsed Laser Deposition of Thin Films. , (1994).</li><li>Lowndes, D. H., Geohegan, D. B., Puretzky, A. A., Norton, D. P., Rouleau, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Synthesis+of+novel+thin-film+materials+by+pulsed+laser+deposition.">Synthesis of novel thin-film materials by pulsed laser deposition.</a> Science. 273, 898 (1996).</li><li>Di Fonzo, F., Bailini, A., Russo, V., Baserga, A., Cattaneo, D., Beghi, M. G., Ossi, P. M., Casari, C. S., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Synthesis+and+characterization+of+nanostructured+tungsten+and+tungsten+oxide+films.">Synthesis and characterization of nanostructured tungsten and tungsten oxide films.</a> Catalysis Today. 116, 69-73 (2006).</li><li>Casari, C. S., Foglio, S., Passoni, M., Siviero, F., Bottani, C. E., Li Bassi, A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Energetic+regimes+and+growth+mechanisms+of+pulsed+laser+deposited+Pd+clusters+on+Au(111)+investigated+by+in+situ+Scanning+Tunneling+Microscopy.">Energetic regimes and growth mechanisms of pulsed laser deposited Pd clusters on Au(111) investigated by in situ Scanning Tunneling Microscopy.</a> Physical Review B. 84 (111), 155441 (2011).</li><li>Cattaneo, D., Foglio, S., Casari, C. S., Li Bassi, A., Passoni, M., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Different+W+cluster+deposition+regimes+in+pulsed+laser+ablation+observed+by+in+situ+Scanning+Tunneling+Microscopy.">Different W cluster deposition regimes in pulsed laser ablation observed by in situ Scanning Tunneling Microscopy.</a> Surface Science. 601, 1892-1897 (2007).</li><li>Bailini, A., Di Fonzo, F., Fusi, M., Casari, C. S., Li Bassi, A., Russo, V., Baserga, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Pulsed+laser+deposition+of+tungsten+and+tungsten+oxide+thin+films+with+tailored+structure+at+the+nano-+and+mesoscale.">Pulsed laser deposition of tungsten and tungsten oxide thin films with tailored structure at the nano- and mesoscale.</a> Applied Surface Science. 253, 8130-8135 (2007).</li><li>Fusi, M., Russo, V., Casari, C. S., Li Bassi, A., A, C. E., Bottani, <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Titanium+oxide+nanostructured+films+by+reactive+pulsed+laser+deposition.">Titanium oxide nanostructured films by reactive pulsed laser deposition.</a> Applied Surface Science. 255 (10), 5334-5337 (2009).</li><li>Dellasega, D., Facibeni, A., Fonzo, F. D. i., Russo, V., Conti, C., Ducati, C., Casari, C. S., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructured+High+Valence+Silver+Oxide+Produced+by+Pulsed+laser+Deposition.">Nanostructured High Valence Silver Oxide Produced by Pulsed laser Deposition.</a> Applied Surface Science. 255 (10), 5248-5251 (2009).</li><li>Di Fonzo, F., Tonini, D., Li Bassi, A., Casari, C. S., Beghi, M. G., Bottani, C. E., Gastaldi, D., Vena, P., Contro, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Growth+regimes+in+pulsed+laser+deposition+of+alumina+films.">Growth regimes in pulsed laser deposition of alumina films.</a> Applied Physics A. 93, 765-769 (2008).</li><li>Bailini, A., Donati, F., Zamboni, M., Russo, V., Passoni, M., Casari, C. S., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Pulsed+Laser+Deposition+of+Bi2Te3+Thermoelectric+Films.">Pulsed Laser Deposition of Bi2Te3 Thermoelectric Films.</a> Applied Surface Science. 254, 1249-1254 (2007).</li><li>Baserga, A., Russo, V., Fonzo, F. D. i., Bailini, A., Cattaneo, D., Casari, C. S., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructured+Tungsten+Oxide+With+Controlled+Properties:+Synthesis+And+Raman+Characterization.">Nanostructured Tungsten Oxide With Controlled Properties: Synthesis And Raman Characterization.</a> Thin Solid Films. 515, 6465-6469 (2007).</li><li>Dellasega, D., Facibeni, A., Di Fonzo, F., Bogana, M., Polissi, A., Conti, C., Ducati, C., Casari, C. S., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructured+Ag4O4+films+with+enhanced+antibacterial+activity.">Nanostructured Ag4O4 films with enhanced antibacterial activity.</a> Nanotechnology. 19, 475602 (2008).</li><li>Fonzo, F. D. i., Casari, C. S., Russo, V., Brunella, M. F., Li Bassi, A., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Hierarchically+organized+nanostructured+TiO2+for+photocatalysis+applications.">Hierarchically organized nanostructured TiO2 for photocatalysis applications.</a> Nanotechnology. 20, 015604 (2009).</li><li>Torta, F., Fusi, M., Casari, C. S., Bottani, C. E., Bachi, A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Titanium+Dioxide+Coated+MALDI+plate+for+on+target+Analysis+of+Phosphopeptides.">Titanium Dioxide Coated MALDI plate for on target Analysis of Phosphopeptides.</a> Journal of Proteome Research. 8, 1932-1942 (2009).</li><li>Ponzoni, A., Russo, V., Bailini, A., Casari, C. S., Ferroni, M., Li Bassi, A., Migliori, A., Morandi, V., Ortolani, L., Sberveglieri, G., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Structural And Gas-Sensing Characterization Of Tungsten Oxide Nanorods And Nanoparticles. Sensors &amp; Actuators: B. Chemical B. 153, 340-346 (2011).</li><li>Li Bassi, A., Bailini, A., Donati, F., Russo, V., Passoni, M., Mantegazza, A., Casari, C. S., Bottani, C. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Thermoelectric+properties+of+Bi-Te+Films+with+controlled+structure+and+morphology.">Thermoelectric properties of Bi-Te Films with controlled structure and morphology.</a> Journal of Applied Physics. 105, 124307 (2009).</li><li>Sauvage, F., Di Fonzo, F., Li Bassi, A., Casari, C. S., Russo, V., Divitini, G., Ducati, C., Bottani, C. E., Comte, P., Graetzel, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bio-inspired+hierarchical+TiO2+photo-anode+for+dye-sensitized+solar+cells.">Bio-inspired hierarchical TiO2 photo-anode for dye-sensitized solar cells.</a> Nano Letters. 10, 2562-2567 (2010).</li><li>Grankvist, C. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transparent+conductors+as+solar+energy+materials:+A+panoramic+review.">Transparent conductors as solar energy materials: A panoramic review.</a> Solar Energy Materials &amp; Solar Cells. 91, 1529 (2007).</li><li>Minami, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transparent+conducting+oxide+semiconductors+for+transparent+electrodes.">Transparent conducting oxide semiconductors for transparent electrodes.</a> Semicond. Sci. Technol. 20, S35 (2005).</li><li>Fortunato, E., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transparent+Conducting+Oxides+for+Photovoltaics.">Transparent Conducting Oxides for Photovoltaics.</a> MRS Bulletin. 32, 242 (2007).</li><li>Exarhos, G. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Discovery-based+design+of+transparent+conducting+oxide+films.">Discovery-based design of transparent conducting oxide films.</a> Thin Solid Films. 515, 7025 (2007).</li><li>Gondoni, P., Ghidelli, M., Fonzo, F. D. i., Russo, V., Bruno, P., Mart-Rujas, J., Bottani, C. E., Li Bassi, A., Casari, C. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Structural+and+functional+properties+of+Al:ZnO+thin+films+grown+by+Pulsed+Laser+Deposition+at+room+temperature.">Structural and functional properties of Al:ZnO thin films grown by Pulsed Laser Deposition at room temperature.</a> Thin Solid Films. 520, 4707-4711 (2012).</li><li>Gondoni, P., Ghidelli, M., Fonzo, F. D. i., Carminati, M., Russo, V., Li Bassi, A., Casari, C. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Structure-dependent+optical+and+electrical+transport+properties+of+nanostructured+Al-doped+ZnO.">Structure-dependent optical and electrical transport properties of nanostructured Al-doped ZnO.</a> Nanotechnology. 23, 365706 (2012).</li><li>Casari, C. S., Li Bassi, A., Arkin, W. T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Pulsed+Laser+Deposition+of+Nanostructured+Oxides:+from+Clusters+to+Functional+Films.">Pulsed Laser Deposition of Nanostructured Oxides: from Clusters to Functional Films.</a> Advances in Laser and Optics Research. 7, 65-100 (2012).</li><li>Amoruso, S., Sambri, A., Vitiello, M., Wang, X. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plume+expansion+dynamics+during+laser+ablation+of+manganates+in+oxygen+atmosphere.">Plume expansion dynamics during laser ablation of manganates in oxygen atmosphere.</a> Applied Surface Science. 252, 4712-4716 (2006).</li><li>Uccello, A., Dellasega, D., Perissinotto, S., Lecis, N., Passoni, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructured+Rhodium+Films+for+Advanced+Mirrors+Produced+by+Pulsed+Laser+Deposition.">Nanostructured Rhodium Films for Advanced Mirrors Produced by Pulsed Laser Deposition.</a> Journal of Nuclear Materials. , (2013).</li><li>Gondoni, P., Ghidelli, M., Fonzo, F. D. i., Russo, V., Bruno, P., Mart&#237;-Rujas, J., Bottani, C. E., Li Bassi, A., Casari, C. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+Performing+Al:ZnO+Thin+Films+grown+by+Pulsed+Laser+Deposition+at+Room+Temperature.">Highly Performing Al:ZnO Thin Films grown by Pulsed Laser Deposition at Room Temperature.</a> Nanoscience and Nanotechnology. , (2013).</li></ol>

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Die Plasma-Plume Form ist eng mit der Ablations-Verfahren verbunden, insbesondere in Gegenwart eines Gases, Überwachung der Plasmasäule durch visuelle Inspektion ist wichtig, um die Abscheidung zu steuern. Beim Aufbringen einer Metalloxidschicht durch Abtragen eines Oxid Target wird Sauerstoff benötigt, um Sauerstoff Verluste während der Ablation zu unterstützen. Bei niedrigeren Sauerstoff-Hintergrund Gasdruck, kann das abgeschiedene Material haben Sauerstoffleerstellen. Dieser Effekt wird durch Erhöhen der Gasdru...

Pulsed Laser Deposition (PLD) beschäftigt Laserablation eines festen Target, das in der Bildung eines Plasmas des abgetragenen Spezies, die auf einem Substrat, um einen Film (siehe Abbildung 1) 1 wachsen abgeschieden werden kann resultiert. Interaktion mit dem Hintergrund Atmosphäre (inert oder reaktiv) kann verwendet werden, um eine homogene Cluster Keimbildung in der Gasphase (siehe Abbildung 2) 2,3 induzieren. Unsere Strategie für Material-Synthese durch PLD auf die Abstimmung der Materialeigenschaften in einem Bottom-up-Ansatz durch sorgfältige Kontrolle der Plasma-Dynamik in der PLD-Verfahren erzeugt werden. Cluster-Größe, die kinetische Energie und die Zusammensetzung kann durch eine geeignete Einstellung der Ablagerung Parameter, die Film-Wachstum und Ergebnis in morphologischen und strukturellen Veränderungen 4,5 auswirken variiert werden. Durch die Ausnutzung der hier beschriebenen Methode haben wir gezeigt, für eine Reihe von Oxiden (z. B. WO 3, Ag 4 O 4, Al 2 O 3 einnd TiO 2), die Fähigkeit, Morphologie abzustimmen, Dichte, Porosität, Grad der strukturellen Ordnung, Stöchiometrie und Phase durch Modifizieren des Materials nanoskalige Struktur 6-11. Dies erlaubt die Konstruktion von Materialien für bestimmte Anwendungen 12-16. Mit Bezug auf Photovoltaik-Anwendungen, wir nanostrukturierte TiO 2 hierarchisch nach der Montage Nanopartikel (&lt;10 nm) in einem Nano-und Mesostruktur, die ein &quot;Wald von Bäumen &#39;13 zeigt interessante Ergebnisse, wenn sie als Photoanoden in Farbstoff Solarzellen eingesetzt ähnelt (DSSC organisiert synthetisiert ) 17. Basierend auf diesen früheren Ergebnisse, die wir beschreiben das Protokoll für die Abscheidung von Al-dotierte ZnO (AZO)-Folien als transparentes leitfähiges Oxid. Transparente leitfähige Oxide (TCO) sind hoch Bandlücke (&gt; 3 eV) Materialien in Leitern durch starke Dotierung umgewandelt, Anzeigen Widerstand &lt;10 -3 Ohm-cm und mehr als 80% optische Abschaltung derttance im sichtbaren Bereich. Sie sind ein wesentlicher Bestandteil für viele Anwendungen wie Touchscreens und Solarzellen 18-21 und sie werden typischerweise durch verschiedene Techniken, wie Sputtern, Pulsed Laser Deposition, chemische Dampfabscheidung, Sprühpyrolyse und mit Lösungs-chemischen Methoden gezüchtet. Unter TCOs hat Indium-Zinn-Oxid (ITO) weithin für seine niedrige spezifische Widerstand untersucht, aber hat den Nachteil der hohen Kosten und der geringen Verfügbarkeit von Indium. Forschung bewegt sich nun in Richtung Indium-freie Systeme wie F-dotiertem SnO 2 (FTO), ZnO-Al-dotierten (AZO) und F-dotierten ZnO (FZO). Elektroden fähig ist, eine intelligente Verwaltung des einfallenden Lichts (Lichteinfang) sind besonders interessant für die Photovoltaik. Um die Möglichkeit zu streuen sichtbares Licht über Strukturen und Morphologien moduliert einer Skala vergleichbar mit der Wellenlänge des Lichts (zB 300-1000 nm), eine gute Kontrolle über die nutzenFilmmorphologie und auf Cluster-Montage Architekturen benötigt wird. Insbesondere werden wir beschreiben, wie Morphologie und Struktur von AZO Filmen einzustellen. Kompakte AZO hinterlegt bei Niederdruck (2 Pa Sauerstoff) und bei Raumtemperatur wird von niedrigem spezifischen Widerstand (4,5 x 10 -4 Ohm-cm) und sichtbarem Licht transparent (&gt; 90%), die im Wettbewerb mit AZO hinterlegt bei hohen Temperaturen ist aus, während AZO hierarchischen Strukturen werden durch Abtragen bei O 2 Drücken über 100 Pa Diese Strukturen zeigen eine starke Lichtstreuvermögen mit Dunst Faktor bis zu 80% und mehr 22,23 erhalten.

<table border="1"><tbody><tr><td> Name des Reagenz / Material </td><td> Firma </td><td> Catalog Number </td></tr><tr><td> Pulsed Laser </td><td> Continuum-Quantronix </td><td> Powerlite 8010 </td></tr><tr><td> Leistungsmesser </td><td> Kohärent </td><td> FieldMaxII-TO </td></tr><tr><td> Ion Gun </td><td> Mantis Dep </td><td> RFMax60 </td></tr><tr><td> Mass Flow Controller </td><td> Mks </td><td> 2179 ° </td></tr><tr><td> Quarzmikrowaage </td><td> Infcon </td><td> XTC / 2 </td></tr><tr><td> Hintergrund Gas </td><td> Rivoira-Praxair </td><td> 5,0 Sauerstoff </td></tr><tr><td> Ziel </td><td> Kurt Lesker </td><td> (Made auf Anfrage) </td></tr><tr><td> Isopropanol </td><td> Sigma Aldrich </td><td> 190.764-2L </td></tr><tr><td> Quelle Meter </td><td> Keithley </td><td> K2400 </td></tr><tr><td> Magnet Kit </td><td> Ecopia </td><td> 0.55T-Kit </td></tr><tr><td> Spektrophotometer </td><td> PerkinElmer </td><td> Lambda 1050 </td></tr></tbody></table>

fabrication of nano-engineered transparent conducting oxides by pulsed laser deposition

Nanosekunde Pulsed Laser Deposition (PLD), in Gegenwart eines Hintergrundes Gas ermöglicht die Abscheidung von Metalloxiden mit abstimmbare Morphologie, Struktur, Dichte und die Stöchiometrie durch eine geeignete Steuerung der Plasmawolke Expansionsdynamik. Diese Vielseitigkeit kann ausgenutzt werden, um Filme aus nanostrukturierten kompakt und dicht ist, um durch eine nanoporöse hierarchische Anordnung von Nanogröße Clustern dadurch herzustellen. Insbesondere beschreiben wir die detaillierte Methode zwei Typen von Al-dotierte ZnO (AZO)-Folien als transparente Elektroden in Solarzellen herzustellen: 1) bei niedrigen O 2-Druck, kompakte Folien mit elektrischer Leitfähigkeit und optische Transparenz nahe dem Stand der Technik transparente leitfähige Oxide (TCO) kann bei Raumtemperatur aufgebracht werden, um die Kompatibilität mit thermisch empfindliche Materialien wie Polymere in der organischen Photovoltaik (OPV) verwendet; 2) hoch Lichtstreuung hierarchischen Strukturen ähnlich einem Wald von nano-Bäume sind Produkteuced bei höheren Drücken. Solche Strukturen weisen eine hohe Haze-Faktor (&gt; 80%) und kann genutzt werden, um das Licht Fähigkeit zum Einfangen zu verbessern. Das Verfahren hier für AZO beschriebenen Folien können an anderen Metalloxiden, die für technische Anwendungen, wie TiO 2, Al 2 O 3, WO 3 und Ag 4 O 4 eingesetzt werden.

Die Abscheidung von AZO PLD in Sauerstoffatmosphäre produziert kompakte transparente leitfähige Filme bei niedrigen Gasdruck Hintergrund (dh 2 Pa) und mesoporösen Wald-ähnliche Strukturen, die aus hierarchisch montiert Clustern bei hohen Drücken (dh 160 Pa). Das Material wird durch nanokristalline Domänen, deren maximale Größe ist (30 nm) bei 22 2 Pa gebildet. Aufgrund von Kollisionen zwischen den abgetragenen Spezies und dem Hintergrundgas, variiert die ...

Watch this Scientific Journal Video about Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition at JoVE.com

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Wir beschreiben die experimentelle Methode nanostrukturierte Oxid Dünnschichten durch Nanosekunde Pulsed Laser Deposition (PLD) abzuscheiden in Gegenwart von einem Hintergrund Gas. Mit dieser Methode Al-dotiertem ZnO (AZO) Filmen, von kompakt bis hierarchisch nano-Baum Wälder strukturiert werden können hinterlegt.

Herstellung von transparenten leitenden Oxide durch Pulsed Laser Deposition Nano-engineered

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

fabrication-nano-engineered-transparent-conducting-oxides-pulsed

Research

JoVE Journal

Engineering

15.4K Aufrufe.  Politecnico di Milano. Wir beschreiben die experimentelle Methode nanostrukturierte Oxid Dünnschichten durch Nanosekunde Pulsed Laser Deposition (PLD) abzuscheiden in Gegenwart von einem Hintergrund Gas. Mit dieser Methode Al-dotiertem ZnO (AZO) Filmen, von kompakt bis hierarchisch nano-Baum Wälder strukturiert werden können hinterlegt.

Serie: Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Investigation of Early Plasma Evolution Induced by Ultrashort Laser Pulses

Early plasma is generated owing to high intensity laser irradiation of target and the subsequent target material ionization. Its dynamics plays a significant role in laser-material interaction, especially in the air environment1-11.
Early plasma evolution has been captured through pump-probe shadowgraphy1-3 and interferometry1,4-7. However, the studied time frames and applied laser parameter ranges are limited. For example, direct examinations of plasma front locations and electron number densities within a delay time of 100 picosecond (ps) with respect to the laser pulse peak are still very few, especially for the ultrashort pulse of a duration around 100 femtosecond (fs) and a low power density around 1014 W/cm2. Early plasma generated under these conditions has only been captured recently with high temporal and spatial resolutions12. The detailed setup strategy and procedures of this high precision measurement will be illustrated in this paper. The rationale of the measurement is optical pump-probe shadowgraphy: one ultrashort laser pulse is split to a pump pulse and a probe pulse, while the delay time between them can be adjusted by changing their beam path lengths. The pump pulse ablates the target and generates the early plasma, and the probe pulse propagates through the plasma region and detects the non-uniformity of electron number density. In addition, animations are generated using the calculated results from the simulation model of Ref. 12 to illustrate the plasma formation and evolution with a very high resolution (0.04 ~ 1 ps).
Both the experimental method and the simulation method can be applied to a broad range of time frames and laser parameters. These methods can be used to examine the early plasma generated not only from metals, but also from semiconductors and insulators.

An experimental method to examine the early plasma evolution induced by ultrashort laser pulses is described. Using this method, high quality images of early plasma are obtained with high temporal and spatial resolutions. A novel integrated atomistic model is used to simulate and explain the mechanisms of early plasma.

Untersuchung der frühen Evolution von Plasma ultrakurzer Laserpulse

Early plasma is generated owing to high intensity laser irradiation of target and the subsequent target material ionization. Its dynamics plays a ...

Forschung

Ingenieurwesen

Fabrication of Spatially Confined Complex Oxides

Complex materials such as high Tc superconductors, multiferroics, and colossal magnetoresistors have electronic and magnetic properties that arise from the inherent strong electron correlations that reside within them. These materials can also possess electronic phase separation in which regions of vastly different resistive and magnetic behavior can coexist within a single crystal alloy material. By reducing the scale of these materials to length scales at and below the inherent size of the electronic domains, novel behaviors can be exposed. Because of this and the fact that spin-charge-lattice-orbital order parameters each involve correlation lengths, spatially reducing these materials for transport measurements is a critical step in understanding the fundamental physics that drives complex behaviors. These materials also offer great potential to become the next generation of electronic devices 1-3. Thus, the fabrication of low dimensional nano- or micro-structures is extremely important to achieve new functionality. This involves multiple controllable processes from high quality thin film growth to accurate electronic property characterization. Here, we present fabrication protocols of high quality microstructures for complex oxide manganite devices. Detailed descriptions and required equipment of thin film growth, photo-lithography, and wire-bonding are presented.

We describe the use of pulsed laser deposition (PLD), photolithography and wire-bonding techniques to create micrometer scale complex oxides devices. The PLD is utilized to grow epitaxial thin films. Photolithography and wire-bonding techniques are introduced to create practical devices for measurement purposes.

Herstellung von räumlich getrennter komplexe Oxide

Complex materials such as high Tc superconductors, multiferroics, and colossal magnetoresistors have electronic and magnetic properties that arise from ...

Making Record-efficiency SnS Solar Cells by Thermal Evaporation and Atomic Layer Deposition

Tin sulfide (SnS) is a candidate absorber material for Earth-abundant, non-toxic solar cells. SnS offers easy phase control and rapid growth by congruent thermal evaporation, and it absorbs visible light strongly. However, for a long time the record power conversion efficiency of SnS solar cells remained below 2%. Recently we demonstrated new certified record efficiencies of 4.36% using SnS deposited by atomic layer deposition, and 3.88% using thermal evaporation. Here the fabrication procedure for these record solar cells is described, and the statistical distribution of the fabrication process is reported. The standard deviation of efficiency measured on a single substrate is typically over 0.5%. All steps including substrate selection and cleaning, Mo sputtering for the rear contact (cathode), SnS deposition, annealing, surface passivation, Zn(O,S) buffer layer selection and deposition, transparent conductor (anode) deposition, and metallization are described. On each substrate we fabricate 11 individual devices, each with active area 0.25 cm2. Further, a system for high throughput measurements of current-voltage curves under simulated solar light, and external quantum efficiency measurement with variable light bias is described. With this system we are able to measure full data sets on all 11 devices in an automated manner and in minimal time. These results illustrate the value of studying large sample sets, rather than focusing narrowly on the highest performing devices. Large data sets help us to distinguish and remedy individual loss mechanisms affecting our devices.

Tin sulfide (SnS) is a candidate material for Earth-abundant, non-toxic solar cells. Here, we demonstrate the fabrication procedure of the SnS solar cells employing atomic layer deposition, which yields 4.36% certified power conversion efficiency, and thermal evaporation which yields 3.88%.

Erstellen Rekordeffizienz SnS Solarzellen durch thermische Verdampfung und Atomic Layer Deposition

Tin sulfide (SnS) is a candidate absorber material for Earth-abundant, non-toxic solar cells. SnS offers easy phase control and rapid growth by congruent ...

Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment

The wettability of silicon (Si) is one of the important parameters in the technology of surface functionalization of this material and fabrication of biosensing devices. We report on a protocol of using KrF and ArF lasers irradiating Si (001) samples immersed in a liquid environment with low number of pulses and operating at moderately low pulse fluences to induce Si wettability modification. Wafers immersed for up to 4 hr in a 0.01% H2O2/H2O solution did not show measurable change in their initial contact angle (CA) ~75&#176;. However, the 500-pulse KrF and ArF lasers irradiation of such wafers in a microchamber filled with 0.01% H2O2/H2O solution at 250 and 65 mJ/cm2, respectively, has decreased the CA to near 15&#176;, indicating the formation of a superhydrophilic surface. The formation of OH-terminated Si (001), with no measurable change of the wafer&#8217;s surface morphology, has been confirmed by X-ray photoelectron spectroscopy and atomic force microscopy measurements. The selective area irradiated samples were then immersed in a biotin-conjugated fluorescein-stained nanospheres solution for 2 hr, resulting in a successful immobilization of the nanospheres in the non-irradiated area. This illustrates the potential of&#160;the method for selective area biofunctionalization and fabrication of advanced Si-based biosensing architectures. We also describe a similar protocol of irradiation of wafers immersed in methanol (CH3OH) using ArF laser operating at pulse fluence of 65 mJ/cm2 and in situ formation of a strongly hydrophobic surface of Si (001) with the CA of 103&#176;. The XPS results indicate ArF laser induced formation of Si&#8211;(OCH3)x compounds responsible for the observed hydrophobicity. However, no such compounds were found by XPS on the Si surface irradiated by KrF laser in methanol, demonstrating the inability of the KrF laser to photodissociate methanol and create -OCH3 radicals.

We report on a process of in situ alteration of HF treated Si (001) surface into a hydrophilic or hydrophobic state by irradiating samples in microfluidic chambers filled with&#160;H2O2/H2O solution (0.01%-0.5%) or methanol solutions using pulsed UV laser of a relative low pulse fluence.

Selektive Bereichsänderung des Siliziumoberfläche Benetzbarkeit durch gepulste UV-Laser-Bestrahlung in flüssigen Umgebung

The wettability of silicon (Si) is one of the important parameters in the technology of surface functionalization of this material and fabrication of ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using femtosecond laser-induced ablation. We show that thousands of periodic nano-craters are fabricated on an optical nanofiber by irradiating with just a single femtosecond laser pulse. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 - 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 - 550 nm. A key aspect of such a nanofabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. Moreover, the single-shot fabrication makes it immune to mechanical instabilities and other fabrication imperfections. Such periodic nano-craters on nanofiber, act as a 1-D PhC and enable strong and broadband reflection while maintaining the high transmission out of the stopband. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber. The strong confinement of the field, both transverse and longitudinal, in the nanofiber-based PhC cavities and the efficient integration to the fiber networks, may open new possibilities for nanophotonic applications and quantum information science.

We present a protocol for fabricating 1-D photonic crystal cavities on subwavelength diameter silica fibers (optical nanofibers) using femtosecond laser-induced ablation.

Die Herstellung von 1-D Photonic Kristallhöhle auf einer Nanofaser Mit Femtosekunden-Laser-induzierte Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...

Fabrication of Polymer Microspheres for Optical Resonator and Laser Applications

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, interface precipitation, and mini-emulsion. In all methods, well-defined, micrometer-sized spheres are obtained from a self-assembling process in solution. The vapor diffusion method can result in spheres with the highest sphericity and surface smoothness, yet the types of the polymers able to form these spheres are limited. On the other hand, in the mini-emulsion method, microspheres can be made from various types of polymers, even from highly crystalline polymers with coplanar, &#960;-conjugated backbones. The photoluminescent (PL) properties from single isolated microspheres are unusual: the PL is confined inside the spheres, propagates at the circumference of the spheres via the total internal reflection at the polymer/air interface, and self-interferes to show sharp and periodic resonant PL lines. These resonating modes are so-called "whispering gallery modes" (WGMs). This work demonstrates how to measure WGM PL from single isolated spheres using the micro-photoluminescence (&#181;-PL) technique. In this technique, a focused laser beam irradiates a single microsphere, and the luminescence is detected by a spectrometer. A micromanipulation technique is then used to connect the microspheres one by one and to demonstrate the intersphere PL propagation and color conversion from coupled microspheres upon excitation at the perimeter of one sphere and detection of PL from the other microsphere. These techniques, &#181;-PL and micromanipulation, are useful for experiments on micro-optic application using polymer materials.

Protocols for the synthesis of microspheres from polymers, the manipulation of microspheres, and micro-photoluminescence measurements are presented.

Herstellung von Polymer-Mikrosphären für optische Resonator- und Laseranwendungen

This paper describes three methods of preparing fluorescent microspheres comprising &#960;-conjugated or non-conjugated polymers: vapor diffusion, ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a polymer film. This paper also presents a low-cost, vacuum-free fabrication method for this novel TE; the approach combines lithography, electroplating, and imprint transfer (LEIT) processing. The embedded nature of the EMTEs offers many advantages, such as high surface smoothness, which is essential for organic electronic device production; superior mechanical stability during bending; favorable resistance to chemicals and moisture; and strong adhesion with plastic film. LEIT fabrication features an electroplating process for vacuum-free metal deposition and is favorable for industrial mass production. Furthermore, LEIT allows for the fabrication of metal mesh with a high aspect ratio (i.e., thickness to linewidth), significantly enhancing its electrical conductance without adversely losing optical transmittance. We demonstrate several prototypes of flexible EMTEs, with sheet resistances lower than 1 &#937;/sq and transmittances greater than 90%, resulting in very high figures of merit (FoM) &#8211; up to 1.5 x 104 &#8211; which are amongst the best values in the published literature.

This protocol describes a solution-based fabrication strategy for high-performance, flexible, transparent electrodes with fully-embedded, thick metal mesh. Flexible transparent electrodes fabricated by this process demonstrate among the highest reported performances, including ultra-low sheet resistance, high optical transmittance, mechanical stability under bending, strong substrate adhesion, surface smoothness, and environmental stability.

Skalierbare, lösungsverarbeitete Fertigungsstrategie für leistungsstarke, flexible, transparente Elektroden mit eingebettetem Metallgewebe

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present an advanced method for fabricating ultra-thin color films with improved characteristics. The proposed process addresses several fabrication issues, including large area processing. Specifically, the protocol describes a process for fabricating ultra-thin color films using an electron beam evaporator for oblique angle deposition of germanium (Ge) and gold (Au) on silicon (Si) substrates.&#160; Film porosity produced by the oblique angle deposition induces color changes in the ultra-thin film. The degree of color change depends on factors such as deposition angle and film thickness. Fabricated samples of the ultra-thin color films showed improved color tunability and color purity. In addition, the measured reflectance of the fabricated samples was converted into chromatic values and analyzed in terms of color. Our ultra-thin film fabricating method is expected to be used for various ultra-thin film applications such as flexible color electrodes, thin film solar cells, and optical filters. Also, the process developed here for analyzing the color of the fabricated samples is broadly useful for studying various color structures.

We present a detailed method for fabricating ultra-thin color films with improved characteristics for optical coatings. The oblique angle deposition technique using an electron beam evaporator allows improved color tunability and purity. Fabricated films of Ge and Au on Si substrates were analyzed by reflectance measurements and color information conversion.

Herstellung von ultra-dünnen Farbfilm mit stark absorbierenden Medien mit schrägen Winkel Deposition

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Production of Single Tracks of Ti-6Al-4V by Directed Energy Deposition to Determine the Layer Thickness for Multilayer Deposition

Directed Energy Deposition (DED), which is an additive manufacturing technique, involves the creation of a molten pool with a laser beam where metal powder is injected as particles. In general, this technique is employed to either fabricate or repair different components. In this technique, the final characteristics are affected by many factors. Indeed, one of the main tasks in building components by DED is the optimization of process parameters (such as laser power, laser speed, focus, etc.) which is usually carried out through an extensive experimental investigation. However, this sort of experiment is extremely lengthy and costly. Thus, in order to accelerate the optimization process, an investigation was conducted to develop a method based on the melt pool characterizations. In fact, in these experiments, single tracks of Ti-6Al-4V were deposited by a DED process with multiple combinations of laser power and laser speed. Surface morphology and dimensions of single tracks were analyzed, and geometrical characteristics of melt pools were evaluated after polishing and etching the cross-sections. Helpful information regarding the selection of optimal process parameters can be achieved by examining the melt pool features. These experiments are being extended to characterize the larger blocks with multiple layers. Indeed, this manuscript describes how it would be possible to quickly determine the layer thickness for the massive deposition, and avoid over or under-deposition according to the calculated energy density of the optimum parameters. Apart from the over or under-deposition, time and materials saving are the other great advantages of this approach in which the deposition of multilayer components can be started without any parameter optimization in terms of layer thickness.

In this research, a rapid method based on melt pool characterization is developed to estimate the layer thickness of Ti-6Al-4V components produced by directed energy deposition.

Produktion von Singletrails von Ti-6Al-4V durch gerichtete Energie Ablagerung zur Ermittlung der Schichtdicke für mehrschichtige Deposition

Directed Energy Deposition (DED), which is an additive manufacturing technique, involves the creation of a molten pool with a laser beam where metal ...

Generation and Coherent Control of Pulsed Quantum Frequency Combs

We present a method for the generation and coherent manipulation of pulsed quantum frequency combs. Until now, methods of preparing high-dimensional states on-chip in a practical way have remained elusive due to the increasing complexity of the quantum circuitry needed to prepare and process such states. Here, we outline how high-dimensional, frequency-bin entangled, two-photon states can be generated at a stable, high generation rate by using a nested-cavity, actively mode-locked excitation of a nonlinear micro-cavity. This technique is used to produce pulsed quantum frequency combs. Moreover, we present how the quantum states can be coherently manipulated using standard telecommunications components such as programmable filters and electro-optic modulators. In particular, we show in detail how to accomplish state characterization measurements such as density matrix reconstruction, coincidence detection, and single photon spectrum determination. The presented methods form an accessible, reconfigurable, and scalable foundation for complex high-dimensional state preparation and manipulation protocols in the frequency domain.

A protocol is presented for the practical generation and coherent manipulation of high-dimensional frequency-bin entangled photon states using integrated micro-cavities and standard telecommunications components, respectively.

Generation und kohärente Steuerung der gepulsten Quantum Frequenzkämmen

We present a method for the generation and coherent manipulation of pulsed quantum frequency combs. Until now, methods of preparing high-dimensional ...