פוטו-ליתוגרפיה גובה רב שלבי משתנה עבור Valved רב שכבתי מכשירים microfluidic

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.