Name: multi-step variable height photolithography for valved multilayer microfluidic devices
Uploaded: 2017-01-27T15:00:00.000+00:00
Duration: 10 min 18 s
Description: Watch this Scientific Journal Video about Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices at JoVE.com

The authors thank Scott Longwell for helpful comments and edits to the manuscript and Robert Puccinelli for device photography. The authors acknowledge generous support from a Beckman Institute Technology Development Grant. K.B. is supported by a NSF GFRP fellowship and the TLI component of the Stanford Clinical and Translational Science Award to Spectrum (NIH TL1 TR 001084); P.F. acknowledges a McCormick and Gabilan Faculty Fellowship.

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The authors declare that they have no competing financial interests.

이 작품은 우리의 온라인 도구 (26)와 제조업체 지침 25을 기반으로 제작 매개 변수에 대한 간단한 수정을 모든 응용 프로그램에 맞게 조정 할 수 있습니다 밸브 및 가변 높이 구조와 다층 미세 유체 소자를위한 완벽한 여러 단계의 포토 리소그래피 프로토콜을 보여줍니다. 이 프로토콜은 단순한 수동적 하나의 계층 형 이상 미세 유체 장치를 구성하고자하는 연?...

<html> 지난 15 년 동안, 필드와 같은 마이크로 유체는 마이크로 미터 규모 1 유체의 조작을 가능하게 새로운 기술의 폭발과 함께, 빠른 성장을 겪고있다. 처리량을 급격히 증가 및 스케일 (2, 3)의 경제를 활용하여 비용을 절감하는 동시에 작은 양 증가 속도 및 감도를 실현할 수있는 가능성이 있기 때문에 미세 유체 시스템은 습식 실험실 기능을위한 매력적인 플랫폼이다. 적층 마이크로 유체 시스템들은 단일 세포 분석 4, 5, 6, 단일 분자 분석 (예를 들어, 디지털 PCR 7) 단백질 결정학 8 전사 인자 결합 분석 높은 처리량 생화학 분석 분야에서 특히 중요한 영향을 만들었다F &quot;&gt; 9, 10, 11 및 세포 선별. 마이크로 유체의 중심 목표 총 생화학 분석 (12)는 단일 장치 내에 유체 복잡한 조작을 수행 할 수있는 장치 &quot;칩의 실험실 &#39;을 개발하고있다. 다층 소프트 리소그래피 기술의 발달은 온 - 칩 밸브 믹서의 생성을 가능하게함으로써 이러한 목표를 실현하는 데 도움 적극적 소량 13, 14, (15) 내의 유체를 제어하기위한 펌프 하였다. 자신의 장점과 증명 응용 프로그램에도 불구하고, 이러한 미세 유체 기술의 대부분은 비 전문가 사용자가 크게 unharnessed 남아있다. 광범위한 채택으로 인해 미세 시설에 제한된 액세스 부분에 도전하고 있지만 인해 제조 기술의 부적절한 통신에있다. 이 FO 특히 그러하다연구 밸브 또는 복잡한 형상에 대한 구조를 갖춘 다층 미세 유체 장치 : 중요한 설계 매개 변수 및 제조 기술에 대한 자세한, 실용적인 정보의 소수가 종종 이러한 장치의 설계 및 제작을 포함하는 프로젝트에 착수하기위한 새로운 연구를 방지 할 수 있습니다. 이 문서에서는, 밸브 및 가변 높이 기능 다층 미세 유체 장치를 만드는 설계 매개 변수에서 시작하여 모든 제조 단계를 통해 이동을위한 완벽한 프로토콜을 제시하여이 지식 격차를 해결하는 것을 목표로하고있다. 제조의 초기 포토 리소그래피 단계에 초점을 맞춤으로써,이 프로토콜은 금형에서 장치를 주조 및 특정 실험을 실행하는 다운 스트림 단계를 설명하는 다른 미세 유체 프로토콜 16을 보완한다. 모 놀리 식 온 - 칩 밸브와 마이크로 유체 장치는 두 개의 층으로 구성되어 있습니다 : 관심의 유체가 마이크로에서 조작하는 &quot;흐름&quot;층을,채널, 공기 또는 물을 포함하는 마이크로 채널을 선택적으로 유동 층 (14)의 유체 흐름을 조절할 수있는 &quot;권한&quot;층. 이 두 층은 각각의 후속 호출 과정에서 폴리 디메틸 실록산 (PDMS) 복제 성형에 사용되는 별도의 실리콘 몰딩 마스터 상에 제조되는 &quot;소프트 리소그래피 (17).&quot; 적층 장치를 형성하기 위해 PDMS 층 각각은 각각의 성형 마스터에서 주조 한 다음함으로써 각 층의 채널을 시청할 수있는 복합 PDMS 소자를 형성하고, 서로 정렬. 밸브는 유동 제어 채널이 서로 교차 만 얇은 막에 의해 분리 된 위치에 형성된다; 제어 채널의 가압이 유로를 폐색이 막 편향 로컬 유체 (도 1)를 대체. 액티브 온 - 칩 밸브를 원하는 최종 용도에 따라 여러 가지 방법으로 제조 될 수있다. 밸브제어 층 (도 1) (15) 위 또는 유동 층 아래에 있는지에 따라 &quot;밀어&quot;, &quot;아래로 밀어&quot;또는 구조 중 하나로 구성 될 수있다. 유동 채널 접합 기판과 직접 접촉 할 수 있도록 형상이 허용하는 &quot;푸시 다운&quot;상태에서 기판 표면을 선택적으로 기능화 또는 패터닝의 이점을 부여하는, 기하학 하부 폐쇄 압력과 박리에 대해 더 높은 장치의 안정성을 허용 &quot;밀어&quot; 나중에 기능 18, 19. 밸브는 유로의 단면 형상에 따라 의도적 누설 &quot;시브&quot;밸브 또는 완전히 밀봉 될 수있다. 체 밸브 구슬, 세포 또는 다른 macroanalytes 1을 포착하는 데 유용하며, 전형적인 네거티브 포토 레지스트 (즉, SU-8 시리즈), 하의 사용을 통해 제작된다직사각형 프로필을했습니다. 제어 채널은 이들 밸브 영역 위에 가압시, 제어 흐름 층의 PDMS 막 (그림 1)의 모서리를 밀봉 유체 흐름을 허용하지만, 거시적 입자들을 트래핑하지 않고 밸브의 직사각형 프로파일로 등방성으로 편향시킨다. 반대로, 완전 밀봉 미세 유체 밸브는 밸브 위치에서 둥근 포토 레지스트의 작은 패치를 포함하여 제조된다. 이 구조에 의해, 제어 채널의 완전 가압 유체 흐름을 정지, 채널을 밀봉하기 위하여 둥근 유동 층에 대해 막 편향. 흐름 층에서 둥근 프로파일은 일반적인 포토 리소그래피 단계 후 용융 및 긍정적 인 포토 레지스트 (예를 들어, AZ50의 XT 또는 SPR 220)의 리플 로우를 통해 생성된다. 우리는 이전에 밸브 지역의 후 리플 로우 높이가 선택한 기능 치수 (21)에 달려 있음을 증명하고있다. 이 프로토콜은 두 밸브 형상의 제작과를 보여줍니다비드 합성 장치이다. <img alt="그림 1" src="/files/ftp_upload/55276/55276fig1.jpg" /> 그림 1 : 다층 미세 유체 밸브 기하학. 체에 대한 일반적인 &quot;밀어&quot;장치 아키텍처와 (위)과 후 (아래) 가압 전에 완전히 밀봉 밸브. <a href="http://ecsource.jove.com/files/ftp_upload/55276/55276fig1large.jpg" target="_blank">이 그림의 더 큰 버전을 보려면 여기를 클릭하십시오.</a> 장치는 또한 하나의 흐름 층 내에서 여러 다른 높이의 기능을 필요로 저항 (20) 혼란 믹서 (13)와 온 - 칩 복잡한 수동 기능을 포함 할 수있다. 가변 높이 흐름 층을 달성하기 위해, 다른 그룹은 인쇄 회로 기판 에칭 (22), 다층 PDMS 릴리프 배향 (23) 또는 다단계 (P)을 포함한 여러 방법을 채용 한hotolithography 24. 우리 그룹은 효과적이고 재현 가능한 방법으로 단일 성형 마스터 다단계 포토 리소그래피를 발견했다. 이를 위해, 각 층의 도포 사이에서 발달하지 층에 네가티브 포토 레지스트 (예를 들면, SU-8 포토 레지스트 계)의 두께 채널 구축의 간단한 포토 리소그래피 기술이 이용된다. 각 층은 실리콘 마스터에 두께 사용하여 제조 지침 (25)에 따라 네가티브 포토 레지스트에 방사된다. 이 높이의 특징은 특정 투명 마스크 (도 2) 유리 마스크 판에 부착하고 노광 전의 이전 방사 층 정렬을 사용하여 층상에 패터닝된다. 다단계 포토 리소그래피에있어서, 층간 정밀한 정렬은 전체 높이가 가변 유동 채널을 형성하는데 중요하다. 정렬 후에, 각 층의 두께 의존성 노광 후 베이킹을 실시한다. 현상없이, 다음 층은 SIM이고ilarly 패턴. 이러한 방식으로, 키의 기능은 다수의 마스크의 사용을 통해 단일 유동 웨이퍼 층별을 구축 할 수있다. 각 단계 사이에 개발을 스킵함으로써, 기존의 포토 레지스트 층 (24) (즉, 두 개의 25 ㎛의 층이 50㎛의 기능을 할 수있다) 복합 높이는 기능을 생성하기 위해 사용될 수있다. 또한, 이러한 혼란 믹서 헤링본 홈 (13)의 채널 층의 기능은 이전에 노출 된 기능을 가진 층을 사용하여 제조 될 수있다. 최종 개발 단계는 변수 높이 (그림 3)의 기능을 하나의 흐름 웨이퍼를 만드는 과정을 완료합니다. 여기에서, 온 - 칩 밸브를 복수의 높이와 유체 채널을 제조하는 데 필요한 모든 절차의 예를 포함하는 다단계 포토 리소그래피를위한 완전한 프로토콜이 제공된다. 이 제조 프로토콜 밸브 variab을 필요로하는 다중 층 미세 비드 합성의 문맥에서 제공된다르 높이의 기능을 제공합니다. 이 장치는 Poiseuille 저항 액적 성분을 균질화 혼돈 혼합기 제어를 통해 유량을 조절하기 위해, 오일 시스 내에 온 - 칩 저항기 물방울을 생성하기위한 T-접합부를 포함하며, 모두 완전히 밀봉하고 자체 밸브는 다수의 시약을 포함하는 자동화 된 작업 흐름을 활성화 입력. 다단계 포토 리소그래피를 사용하여, 이러한 기능은 각각의 높이와 포토 레지스트에있어서 상이한 층 상에 제조되며 다음 층이 프로토콜로 구성된다 : (1) 흐름 라운드 밸브 층 (55 μm의, AZ50 XT) (2) 흐름 낮은 층 (55 μm의, SU-8 2,050) (3) 흐름 높은 층 (85 μm의, SU- 8 2025 30 μm의 첨가제 고도), 및 (4) 헤링본 그루브 (125 μm의 2025 SU-8, 40 μm의 첨가제 높이) (도 3). 하이드로 겔 비드 선택적 하류 분석 용 표면 기능화 약물 캡슐화, 라디에이터를 포함한 다양한 용도에 사용될 수있는otracing 및 이미지 분석, 세포 결합; 우리는 이전에 란탄 nanophosphors (20)를 포함하는 분광 엔코딩 PEG 하이드로 겔 비드를 제조하기 위해 이러한 장치의보다 복잡한 버전을 사용했다. 원하는 경우 어떤 실험실 연구 활동에 사용할 수 있도록 여기서 설명하는 디자인은 추가 자료에 포함되어 있습니다. 우리는이 프로토콜은 전문가와 마이크로 유체의 진입 장벽을 낮추고 제조 성공의 기회를 증가하는 밸브 또는 복잡한 형상과 다층 미세 유체 소자 제작에 모두 관심이 비전문가를위한 개방형 자원을 제공 할 것으로 예상된다.

<table><tbody><tr><td>&lt;strong&gt;Materials&lt;/strong&gt;</td><td></td><td></td><td></td></tr><tr><td>Mylar Transparency Masks, 5&quot;</td><td>FineLine Plotting</td><td></td><td></td></tr><tr><td>5&quot; Quartz Plates</td><td>United Silica&amp;nbsp;</td><td>Custom</td><td></td></tr><tr><td>4&quot; Silicon Wafers, Test Grade</td><td>University Wafer</td><td>452</td><td></td></tr><tr><td>SU8 2005, 2025, 2050 photoresist</td><td>Microchem</td><td>Y111045, Y111069, Y111072</td><td></td></tr><tr><td>Az50XT&amp;nbsp;</td><td>Integrated Micromaterials</td><td>AZ50XT-Q</td><td></td></tr><tr><td>SU8 Developer</td><td>Microchem</td><td>Y020100</td><td></td></tr><tr><td>AZ400K 1:3 Developer</td><td>Integrated Micromaterials</td><td>AZ400K1:3-CS</td><td></td></tr><tr><td>Pyrex 150 mm glass dish</td><td>Sigma-Aldrich</td><td>CLS3140150-1EA</td><td></td></tr><tr><td>Wafer Petri Dishes, 150 mm</td><td>VWR</td><td>25384-326</td><td></td></tr><tr><td>Wafer Tweezers&amp;nbsp;</td><td>Electron Microscopy Sciences (EMS)</td><td>78410-2W</td><td></td></tr><tr><td>Trichloro(1H,1H,2H,2H-perfluorooctyl)silane (PFOTS)</td><td>Sigma-Aldrich</td><td>448931-10G</td><td></td></tr><tr><td>2&quot; x 3&quot; glass slides</td><td>Thomas Scientific&amp;nbsp;</td><td>6686K20</td><td></td></tr><tr><td>RTV 615 elastomeric base and curing agent PDMS set</td><td>Momentive&amp;nbsp;</td><td>RTV615-1P</td><td></td></tr><tr><td>Tygon Tubing, 0.02&quot; O.D.&amp;nbsp;</td><td>Fischer Scientific&amp;nbsp;</td><td>14-171-284</td><td></td></tr><tr><td>Capillary PEEK tubing, 510 &amp;#956;m OD, 125 &amp;#956;m ID</td><td>Zeus</td><td>Custom</td><td>360 &amp;#956;m PEEK is readily available by Idex (catalog number: 1571)</td></tr><tr><td>Cyro 4 ml tube</td><td>Greiner Bio-One</td><td>127279</td><td></td></tr><tr><td>Epoxy, 30 min</td><td>Permatex</td><td>84107</td><td></td></tr><tr><td>Metal Pins, 0.025&quot; OD, .013&quot; ID</td><td>New England Small Tube</td><td>NE-1310-02</td><td></td></tr><tr><td>Poly(ethylene glycol) diacrylate, Mn 700</td><td>Sigma-Aldrich</td><td>455008-100ML</td><td></td></tr><tr><td>Lithium Phenyl(2,4,6-trimethylbenzoyl)phosphinate photoinitator&amp;nbsp;</td><td>Tokyo Chemical Industry Co.</td><td>L0290</td><td>We typically synthesize LAP in-house.&amp;nbsp;</td></tr><tr><td>HEPES</td><td>Sigma-Aldrich</td><td>H4034-25G</td><td></td></tr><tr><td>Light mineral oil</td><td>Sigma-Aldrich</td><td>330779-1L</td><td></td></tr><tr><td>Span-80</td><td>Sigma-Aldrich</td><td>85548</td><td></td></tr><tr><td>ABIL EM 90</td><td>UPI Chem</td><td>420095</td><td>&amp;nbsp;&lt;br /&gt;&amp;nbsp;</td></tr><tr><td>&lt;strong&gt;Name&lt;/strong&gt;&amp;nbsp;</td><td>&lt;strong&gt;Company&lt;/strong&gt;</td><td>&lt;strong&gt;Catalog Number&lt;/strong&gt;</td><td>&lt;strong&gt;Comments&lt;/strong&gt;</td></tr><tr><td>&lt;strong&gt;Equipment&lt;/strong&gt;</td><td>Equivalent equiptment or homebuilt setups will work equally as well</td><td></td><td></td></tr><tr><td>Mask Aligner</td><td>Karl Suss</td><td>MA6</td><td></td></tr><tr><td>Profilometer</td><td>KLA-Tencor</td><td>Alpha-Step D500</td><td></td></tr><tr><td>Spin Coater</td><td>Laurell Technologies</td><td>WS-650-23</td><td>Any spincoater can be used that accepts 100 mm wafers</td></tr><tr><td>Vacuum Dessicator, Bell-Jar Style</td><td>Bel-Art</td><td>420100000</td><td></td></tr><tr><td>Oven</td><td>Cole-Palmer</td><td>WU-52120-02</td><td></td></tr><tr><td>UV Spot Curing System with 3 mm LLG option</td><td>Dymax</td><td>41015</td><td>UV LEDs, Xenon Arc Lamps, or other UV sources of the same intensity work equally as well</td></tr><tr><td>MFCS Microfluidic Fluid Control System</td><td>Fluidgent</td><td>MFCS-EZ</td><td>Syringe pumps, custom pneumatics or other control systems can also be used</td></tr><tr><td>Automated control scripting</td><td>MATLAB</td><td></td><td></td></tr><tr><td>Hotplate</td><td>Tory Pines Scientific</td><td>HP30</td><td>Any hotplate with uniform heating (&lt;em&gt;i.e.&lt;/em&gt;, aluminum or ceramic plates) will suffice.</td></tr></tbody></table>

multi-step variable height photolithography for valved multilayer microfluidic devices

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to entry for non-specialists who would benefit greatly from the ability to develop their own microfluidic devices to address research questions. Particularly lacking has been the open dissemination of protocols related to photolithography, a key step in the development of a replica mold for the manufacture of polydimethylsiloxane (PDMS) devices. While the fabrication of single height silicon masters has been explored extensively in literature, fabrication steps for more complicated photolithography features necessary for many interesting device functionalities (such as feature rounding to make valve structures, multi-height single-mold patterning, or high aspect ratio definition) are often not explicitly outlined. 
Here, we provide a complete protocol for making multilayer microfluidic devices with valves and complex multi-height geometries, tunable for any application. These fabrication procedures are presented in the context of a microfluidic hydrogel bead synthesizer and demonstrate the production of droplets containing polyethylene glycol (PEG diacrylate) and a photoinitiator that can be polymerized into solid beads. This protocol and accompanying discussion provide a foundation of design principles and fabrication methods that enables development of a wide variety of microfluidic devices. The details included here should allow non-specialists to design and fabricate novel devices, thereby bringing a host of recently developed technologies to their most exciting applications in biological laboratories.

여기서는 액적으로부터 폴리 에틸렌 글리콜 (PEG) 하이드로 겔 비드를 생성 할 수있는 장치를 만들어 판막 가변 높이 미세 다층 형의 제조를 증명 (그림 2). 전체 제조 공정의 개요는도 전작으로부터 설계 요소를 이용하여 (3)에 포함되는 비드의 합성 (1) 층류 변조 (55 μm의) (2) 유동 AZ50의 XT 밸브 둥근 포함한 흐름 층 (4)의 ?...

Watch this Scientific Journal Video about Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices at JoVE.com

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

판막 다층 미세 유체 장치에 대한 여러 단계의 변수 높이 포토 리소그래피

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to ...

multi-step-variable-height-photolithography-for-valved-multilayer

Research

JoVE Journal

Bioengineering

14.3K 조회수.  Stanford University. Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads. 

비디오: Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Microfluidic Chips Controlled with Elastomeric Microvalve Arrays

Miniaturized microfluidic systems provide simple and effective solutions for low-cost point-of-care diagnostics and high-throughput biomedical assays. Robust flow control and precise fluidic volumes are two critical requirements for these applications. We have developed microfluidic chips featuring elastomeric polydimethylsiloxane (PDMS) microvalve arrays that: 1) need no extra energy source to close the fluidic path, hence the loaded device is highly portable; and 2) allow for microfabricating deep (up to 1 mm) channels with vertical sidewalls and resulting in very precise features.

The PDMS microvalves-based devices consist of three layers: a fluidic layer containing fluidic paths and microchambers of various sizes, a control layer containing the microchannels necessary to actuate the fluidic path with microvalves, and a middle thin PDMS membrane that is bound to the control layer. Fluidic layer and control layers are made by replica molding of PDMS from SU-8 photoresist masters, and the thin PDMS membrane is made by spinning PDMS at specified heights. The control layer is bonded to the thin PDMS membrane after oxygen activation of both, and then assembled with the fluidic layer. The microvalves are closed at rest and can be opened by applying negative pressure (e.g., house vacuum). Microvalve closure and opening are automated via solenoid valves controlled by computer software.

Here, we demonstrate two microvalve-based microfluidic chips for two different applications. The first chip allows for storing and mixing precise sub-nanoliter volumes of aqueous solutions at various mixing ratios. The second chip allows for computer-controlled perfusion of microfluidic cell cultures.

The devices are easy to fabricate and simple to control. Due to the biocompatibility of PDMS, these microchips could have broad applications in miniaturized diagnostic assays as well as basic cell biology studies.

We demonstrate protocols for manufacturing and automating elastomeric polydimethylsiloxane (PDMS)-based microvalve arrays that need no extra energy to close and feature photolithographically defined precise volumes. A parallel subnanoliter-volume mixer and an integrated microfluidic perfusion system are presented.

Microfluidic 칩은 탄성 Microvalve의 배열을 제어

Miniaturized microfluidic systems provide simple and effective solutions for low-cost point-of-care diagnostics and high-throughput biomedical assays.  ...

연구

생물학

Procedure for the Development of Multi-depth Circular Cross-sectional Endothelialized Microchannels-on-a-chip

Efforts have been focused on developing in vitro assays for the study of microvessels because in vivo animal studies are more time-consuming, expensive, and observation and quantification are very challenging. However, conventional in vitro microvessel assays have limitations when representing in vivo microvessels with respect to three-dimensional (3D) geometry and providing continuous fluid flow. Using a combination of photolithographic reflowable photoresist technique, soft lithography, and microfluidics, we have developed a multi-depth circular cross-sectional endothelialized microchannels-on-a-chip, which mimics the 3D geometry of in vivo microvessels and runs under controlled continuous perfusion flow. A positive reflowable photoresist was used to fabricate a master mold with a semicircular cross-sectional microchannel network. By the alignment and bonding of the two polydimethylsiloxane (PDMS) microchannels replicated from the master mold, a cylindrical microchannel network was created. The diameters of the microchannels can be well controlled. In addition, primary human umbilical vein endothelial cells (HUVECs) seeded inside the chip showed that the cells lined the inner surface of the microchannels under controlled perfusion lasting for a time period between 4 days to 2 weeks.

A microchannels-on-a-chip platform was developed by the combination of photolithographic reflowable photoresist technique, soft lithography, and microfluidics. The endothelialized microchannels platform mimics the three-dimensional (3D) geometry of in vivo microvessels, runs under controlled continuous perfusion flow, allows for high-quality and real-time imaging&#160;and can be applied for microvascular research.

멀티 깊이 원형 단면 Endothelialized 마이크로 채널 - 온 - 칩의 개발을위한 절차

Efforts have been focused on developing in vitro assays for the study of microvessels because in vivo animal studies are more time-consuming, expensive, ...

생체공학

One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes

Polydimethylsiloxane (PDMS) materials are substantially exploited to fabricate microfluidic devices by using soft lithography replica molding techniques. Customized channel layout designs are necessary for specific functions and integrated performance of microfluidic devices in numerous biomedical and chemical applications (e.g., cell culture, biosensing, chemical synthesis, and liquid handling). Owing to the nature of molding approaches using silicon wafers with photoresist layers patterned by photolithography as master molds, the microfluidic channels commonly have regular cross sections of rectangular shapes with identical heights. Typically, channels with multiple heights or different geometric sections are designed to possess particular functions and to perform in various microfluidic applications (e.g., hydrophoresis is used for sorting particles and in continuous flows for separating blood cells6,7,8,9). Therefore, a great deal of effort has been made in constructing channels with various sections through multiple-step approaches like photolithography using several photoresist layers and assembly of different PDMS thin sheets. Nevertheless, such multiple-step approaches usually involve tedious procedures and extensive instrumentation. Furthermore, the fabricated devices may not perform consistently and the resulted experimental data may be unpredictable. Here, a one-step approach is developed for the straightforward fabrication of microfluidic channels with different geometric cross sections through PDMS sequential wet etching processes, that introduces etchant into channels of planned single-layer layouts embedded in PDMS materials. Compared to the existing methods for manufacturing PDMS microfluidic channels with different geometries, the developed one-step approach can significantly simplify the process to fabricate channels with non-rectangular sections or various heights. Consequently, the technique is a way of constructing complex microfluidic channels, which provides a fabrication solution for the advancement of innovative microfluidic systems.

Several methods are available for the fabrication of channels of non-rectangular sections embedded in polydimethylsiloxane microfluidic devices. Most of them involve multistep manufacturing and extensive alignment. In this paper, a one-step approach is reported for fabricating microfluidic channels of different geometric cross sections by polydimethylsiloxane sequential wet etching.

1 단계 접근입니다 미세 채널 순차적 습식된 에칭 프로세스에 의해 다른 형상 섹션의 조작

Polydimethylsiloxane (PDMS) materials are substantially exploited to fabricate microfluidic devices by using soft lithography replica molding techniques. ...

공학

A Microfluidic Platform for High-throughput Single-cell Isolation and Culture

Studying the heterogeneity of single cells is crucial for many biological questions, but is technically difficult. Thus, there is a need for a simple, yet high-throughput, method to perform single-cell culture experiments. Here, we report a microfluidic chip-based strategy for high-efficiency single-cell isolation (~77%) and demonstrate its capability of performing long-term single-cell culture (up to 7 d) and cellular heterogeneity analysis using clonogenic assay. These applications were demonstrated with KT98 mouse neural stem cells, and A549 and MDA-MB-435 human cancer cells. High single-cell isolation efficiency and long-term culture capability are achieved by using different sizes of microwells on the top and bottom of the microfluidic channel. The small microwell array is designed for precisely isolating single-cells, and the large microwell array is used for single-cell clonal culture in the microfluidic chip. This microfluidic platform constitutes an attractive approach for single-cell culture applications, due to its flexibility of adjustable cell culture spaces for different culture strategies, without decreasing isolation efficiency.

Here, we present a protocol for isolating and culturing single cells with a microfluidic platform, which utilizes a new microwell design concept to allow for high-efficiency single cell isolation and long-term clonal culture.

높은 처리량 단일 세포의 분리 및 문화를위한 미세 유체 플랫폼

Studying the heterogeneity of single cells is crucial for many biological questions, but is technically difficult. Thus, there is a need for a simple, yet ...

Design and Development of a Three-Dimensionally Printed Microscope Mask Alignment Adapter for the Fabrication of Multilayer Microfluidic Devices

This project aims to develop an easy-to-use and cost-effective platform for the fabrication of precise, multilayer microfluidic devices, which typically can only be achieved using costly equipment in a clean room setting. The key part of the platform is a three dimensionally (3D) printed microscope mask alignment adapter (MMAA) compatible with regular optical microscopes and ultraviolet (UV) light exposure systems. The overall process of creating the device has been vastly simplified because of the work done to optimize the device design. The process entails finding the proper dimensions for the equipment available in the laboratory and 3D-printing the MMAA with the optimized specifications. Experimental results show that the optimized MMAA designed and manufactured by 3D printing performs well with a common microscope and light exposure system. Using a master mold prepared by the 3D-printed MMAA, the resulting microfluidic devices with multilayered structures contain alignment errors of &lt;10 &#181;m, which is sufficient for common microchips. Although human error through transportation of the device to the UV light exposure system can cause larger fabrication errors, the minimal errors achieved in this study are attainable with practice and care. Furthermore, the MMAA can be customized to fit any microscope and UV exposure system by making changes to the modeling file in the 3D printing system. This project provides smaller laboratories with a useful research tool as it only requires the use of equipment that is typically already available to laboratories that produce and use microfluidic devices. The following detailed protocol outlines the design and 3D printing process for the MMAA. In addition, the steps for procuring a multilayer master mold using the MMAA and producing poly(dimethylsiloxane) (PDMS) microfluidic chips is also described herein.

This project allows small laboratories to develop an easy-to-use platform for the fabrication of precise multilayer microfluidic devices. The platform consists of a three-dimensionally printed microscope mask alignment adapter using which multilayer microfluidic devices with alignment errors of &lt;10 &#181;m were achieved.

다층 미세 유체 장치의 제조를 위한 입체 인쇄 현미경 마스크 정렬 어댑터의 설계 및 개발

This project aims to develop an easy-to-use and cost-effective platform for the fabrication of precise, multilayer microfluidic devices, which typically ...

Soft Lithographic Procedure for Producing Plastic Microfluidic Devices with View-ports Transparent to Visible and Infrared Light

Infrared (IR) spectro-microscopy of living biological samples is hampered by the absorption of water in the mid-IR range and by the lack of suitable microfluidic devices. Here, a protocol for the fabrication of plastic microfluidic devices is demonstrated, where soft lithographic techniques are used to embed transparent Calcium Fluoride (CaF2) view-ports in connection with observation chamber(s). The method is based on a replica casting approach, where a polydimethylsiloxane (PDMS) mold is produced through standard lithographic procedures and then used as the template to produce a plastic device. The plastic device features ultraviolet/visible/infrared (UV/Vis/IR) -transparent windows made of CaF2 to allow for direct observation with visible and IR light. The advantages of the proposed method include: a reduced need for accessing a clean room micro-fabrication facility, multiple view-ports, an easy and versatile connection to an external pumping system through the plastic body, flexibility of the design, e.g., open/closed channels configuration, and the possibility to add sophisticated features such as nanoporous membranes.

A protocol for the fabrication of plastic microfluidic devices with transparent view-ports for visible and infrared light imaging is described.

뷰-포트 표시 하 고 적외선 빛에 투명 한 플라스틱 미세 소자를 제작 하기 위한 소프트 리소 절차

Infrared (IR) spectro-microscopy of living biological samples is hampered by the absorption of water in the mid-IR range and by the lack of suitable ...

A Multilayer Microfluidic Platform for the Conduction of Prolonged Cell-Free Gene Expression

The limitations of cell-based synthetic biology are becoming increasingly apparent as researchers aim to develop larger and more complex synthetic genetic regulatory circuits. The analysis of synthetic genetic regulatory networks in vivo is time consuming and suffers from a lack of environmental control, with exogenous synthetic components interacting with host processes resulting in undesired behavior. To overcome these issues, cell-free characterization of novel circuitry is becoming more prevalent. In vitro transcription and translation (IVTT) mixtures allow the regulation of the experimental environment and can be optimized for each unique system. The protocols presented here detail the fabrication of a multilayer microfluidic device that can be utilized to sustain IVTT reactions for prolonged durations. In contrast to batch reactions, where resources are depleted over time and (by-) products accumulate, the use of microfluidic devices allows the replenishment of resources as well as the removal of reaction products. In this manner, the cellular environment is emulated by maintaining an out-of-equilibrium environment in which the dynamic behavior of gene circuits can be investigated over extended periods of time. To fully exploit the multilayer microfluidic device, hardware and software have been integrated to automate the IVTT reactions. By combining IVTT reactions with the microfluidic platform presented here, it becomes possible to comprehensively analyze complex network behaviors, furthering our understanding of the mechanisms that regulate cellular processes.

The fabrication process of a PDMS-based, multilayer, microfluidic device that allows in vitro transcription and translation (IVTT) reactions to be performed over prolonged periods is described. Furthermore, a comprehensive overview of the hardware and software required to automate and maintain these reactions for prolonged durations is provided.

장기간 무세포 유전자 발현의 전도를 위한 다층 미세유체 플랫폼

The limitations of cell-based synthetic biology are becoming increasingly apparent as researchers aim to develop larger and more complex synthetic genetic ...

Generation of Dynamical Environmental Conditions using a High-Throughput Microfluidic Device

Mimicking in vivo environmental conditions is crucial for in vitro studies on complex life machinery. However, current techniques targeting live cells and organs are either highly expensive, like robotics, or lack nanoliter volume and millisecond time accuracy in liquid manipulation. We herein present the design and fabrication of a microfluidic system, which consists of 1,500 culture units, an array of enhanced peristaltic pumps and an on-site mixing modulus. To demonstrate the capacities of the microfluidic device, neural stem cell (NSC) spheres are maintained in the proposed system. We observed that when the NSC sphere is exposed to CXCL in day 1 and EGF in day 2, the round-shaped conformation is well maintained. Variation in the input order of 6 drugs causes morphological changes to the NSC sphere and the expression level representative marker for NSC stemness (i.e., Hes5 and Dcx). These results indicate that dynamic and complex environmental conditions have great effects on NSC differentiation and self-renewal, and the proposed microfluidic device is a suitable platform for high throughput studies on the complex life machinery.

We present a microfluidic system for high throughput studies on complex life machinery, which consists of 1500 culture units, an array of enhanced peristaltic pumps and an on-site mixing modulus. The microfluidic chip allows for the analysis of the highly complex and dynamic micro-environmental conditions in vivo.

고처리량 미세 유체 장치를 사용하여 동적 환경 조건의 생성

Mimicking in vivo environmental conditions is crucial for in vitro studies on complex life machinery. However, current techniques targeting live cells and ...

Mechanostimulation of Multicellular Organisms Through a High-Throughput Microfluidic Compression System

During embryogenesis, coordinated cell movement generates mechanical forces that regulate gene expression and activity. To study this process, tools such as aspiration or coverslip compression have been used to mechanically stimulate whole embryos. These approaches limit experimental design as they are imprecise, require manual handling, and can process only a couple of embryos simultaneously. Microfluidic systems have great potential for automating such experimental tasks while increasing throughput and precision. This article describes a microfluidic system developed to precisely compress whole Drosophila melanogaster (fruit fly) embryos. This system features microchannels with pneumatically actuated deformable sidewalls and enables embryo alignment, immobilization, compression, and post-stimulation collection. By parallelizing these microchannels into seven lanes, steady or dynamic compression patterns can be applied to hundreds of Drosophila embryos simultaneously. Fabricating this system on a glass coverslip facilitates the simultaneous mechanical stimulation and imaging of samples with high-resolution microscopes. Moreover, the utilization of biocompatible materials, like PDMS, and the ability to flow fluid through the system make this device capable of long-term experiments with media-dependent samples. This approach also eliminates the requirement for manual mounting which mechanically stresses samples. Furthermore, the ability to quickly collect samples from the microchannels enables post-stimulation analyses, including -omics assays which require large sample numbers unattainable using traditional mechanical stimulation approaches. The geometry of this system is readily scalable to different biological systems, enabling numerous fields to benefit from the functional features described herein including high sample throughput, mechanical stimulation or immobilization, and automated alignment.

The present protocol describes the design, fabrication, and characterization of a microfluidic system capable of aligning, immobilizing, and precisely compressing hundreds of Drosophila melanogaster embryos with minimal user intervention. This system enables high-resolution imaging and recovery of samples for post-stimulation analysis and can be scaled to accommodate other multicellular biological systems.

고처리량 미세유체 압축 시스템을 통한 다세포 유기체의 기계자극

During embryogenesis, coordinated cell movement generates mechanical forces that regulate gene expression and activity. To study this process, tools such ...

조합 플러그 생산을 위한 미세유체 장치 설정

Bilayer Microfluidic Device for Combinatorial Plug Production

Droplet microfluidics is a versatile tool that allows the execution of a large number of reactions in chemically distinct nanoliter compartments. Such systems have been used to encapsulate a variety of biochemical reactions - from incubation of single cells to implementation of PCR reactions, from genomics to chemical synthesis. Coupling the microfluidic channels with regulatory valves allows control over their opening and closing, thereby enabling the rapid production of large-scale combinatorial libraries consisting of a population of droplets with unique compositions. In this paper, protocols for the fabrication and operation of a pressure-driven, PDMS-based bilayer microfluidic device that can be utilized to generate combinatorial libraries of water-in-oil emulsions called plugs are presented. By incorporating software programs and microfluidic hardware, the flow of desired fluids in the device can be controlled and manipulated to generate combinatorial plug libraries and to control the composition and quantity of constituent plug populations. These protocols will expedite the process of generating combinatorial screens, particularly to study drug response in cells from cancer patient biopsies.

저자 스포트라이트: Integrating Computational and Experimental Approaches in Precision Oncology

The fabrication of a polydimethylsiloxane (PDMS)-based bilayer device for the production of combinatorial libraries in water-in-oil emulsions (plugs) is presented here. The necessary hardware and software required to automate plug production are detailed in the protocol, and the production of a quantitative library of fluorescent plugs is also demonstrated.

조합 플러그 생산을 위한 이중층 미세유체 장치

Droplet microfluidics is a versatile tool that allows the execution of a large number of reactions in chemically distinct nanoliter compartments. Such ...