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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

14.1K Views

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10:18 min

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January 27th, 2017

DOI :

10.3791/55276-v

January 27th, 2017

•

14,132 Views

Kara Brower*¹^,²^,⁴, Adam K. White*¹^,², Polly M. Fordyce¹^,²^,³^,⁴

¹Department of Bioengineering, Stanford University, ²Microfluidic Foundry, Stanford University, ³Department of Genetics, Stanford University, ⁴Chem-H Institute, Stanford University

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要約

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Multi step Photolithography

Valved Microfluidic Devices

Multilayer Microfluidics

On chip Membrane Valves

Microfluidic Master Mold Fabrication

Photoresist Development

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