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Federal University of São Carlos (UFSCAR)

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Chemistry

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Silvia L. Fernandes 1, Lucas J. Affonço 2, Roberto A. R. Junior 2, José H. D. da Silva 2, Elson Longo 1, Carlos F. de O. Graeff 2
1Chemistry Department, Federal University of São Carlos (UFSCAR), 2Physics Department, School of Sciences, São Paulo State University (UNESP)

Here, we present a protocol for niobium oxide films deposition by reactive sputtering with different oxygen flow rates for use as an electron transport layer in perovskite solar cells.

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