A subscription to JoVE is required to view this content. Sign in or start your free trial.

In This Article

  • Summary
  • Abstract
  • Introduction
  • Protocol
  • Results
  • Discussion
  • Disclosures
  • Acknowledgements
  • Materials
  • References
  • Reprints and Permissions

Summary

High-precision micro-displacement measurement is significant in the field of aerospace engineering, ultra-precision machining, and micro-assembly. The present protocol describes measuring micro displacements based on the shadow technique.

Abstract

The precision measurement of micro displacement is important in scientific and industrial fields. However, it is a tough challenge due to the complex design and the high cost of measuring instruments. Inspired by the shadow formed from water striders walking on a water surface under sunlight, a micro-displacement measurement method was proposed. Water strider legs with superhydrophobic properties bend the water surface. The curved surface of the water refracts sunlight, creating a shadow with a bright edge at the bottom of the pond. The shadow size is generally larger than the indentation depth of the legs from the water surface. In the micro-displacement measurement system, the applied displacement is proportional to the change in the diameter of the shadow. The presented study proposes a micro-displacement measurement procedure based on this shadow technique. The displacement sensitivity can reach 10.0 nm/pixel in the range of 5 µm. This system is simple to construct, low cost, and has high precision with good linear performance. The method provides a convenient additional option to measure micro-displacement.

Introduction

Precise displacement measurements play a vital role in the fields of aerospace engineering1, ultra-precision machining2, and micro-assembly3. Structural deformation must be measured precisely for structural health monitoring4. However, micro-displacement measurements with high precision remain a tough challenge due to the complex design and high cost of the measuring instruments5.

The micro-displacement measurement technique can be divided into conventional and non-conventional methods. Conventional methods, such as magnetic, capacitive, inductive, and electric sensors, are susceptible to electromagnetic interference6. Non-conventional methods are mainly optical methods, such as the optical fiber-based method and the laser method.

Ke Tian et al. designed a balloon-shaped bent multimode fiber structure to measure micro displacement, whose displacement sensitivity could achieve 0.51 dB/µm with a measuring range of 0-100 µm experimentally7. However, the size and the cost of the fiber optic demodulator must be considered first; and it was not easy to eliminate the thermal effect. Qianbo Lu et al. proposed a sub-nanometer resolution displacement sensor based on a grating interferometric cavity, whose sensitivity could reach 44.75 mV/nm by the intensity compensation and phase modulation8. The laser interferometer is one of the commonly used micro-displacement instruments with nanoscale resolution. However, the reflector requires complicated signal processing, and the fringe resolution of the interferometry limits its applications9. Therefore, an alternative simply-constructed, low-cost, high-precision measurement system is needed.

This article proposes a micro-displacement measurement procedure based on the shadow technique10,11,12,13 that is simple, low cost, and highly precise with good linear performance. This method was inspired by water striders walking on the water surface. Water strider legs with superhydrophobic properties bend the water surface. The curved surface of the water refracts sunlight, creating a shadow with a bright edge at the bottom of the pond. The shadow size is generally much larger than the indentation depth of legs from the water surface14,15,16. In the system, the applied displacement and the change in the diameter of the shadow were proportional, which was verified by the calibration experiment. The research indicates that this method provides an alternative for measuring micro displacement precisely.

Protocol

1. Preparation of the PDMS piece

  1. Prepare polydimethylsiloxane (PDMS, see Table of Materials) polymer by weighing the base and the curing agent (using a weighing balance) at a ratio of 30:1 in a cuboid polycarbonate (PC) container.
    NOTE: The container size is 60 mm × 45 mm × 15 mm. The height of the mixture is about 10 mm.
  2. Mix the PDMS mixture in a blender for about 20 min until it is filled with bubbles.
  3. Use a vacuum pump to remove bubbles from the mixture for about 30 min (see Table of Materials).
  4. Cure the PDMS at a 65 °C oven for 4 h.
  5. Use the PDMS piece formed in the PC container as the displacement-sensitive element (step 2.1).
    ​NOTE: The PDMS piece size is 60 mm × 45 mm × 10 mm.

2. Experimental preparation for measuring micro-displacement

  1. Gather all the modules/components of the measurement system, including a parallel light source, an aperture diaphragm having a 0.7 mm diameter, a piece of PDMS (the displacement-sensitive element), a workbench with three rigid cylindrical legs, a camera, a vertical precision positioner, motorized stages, and other components (see Table of Materials), as shown in Figure 1 and Figure 2.
  2. Place the commercially obtained workbench (see Table of Materials) on the PDMS.
    NOTE: The surface of the PDMS is bent by the legs of the workbench. The workbench is obtained by machining aluminum. The diameter of the rigid cylindrical legs is 0.5 mm, which needs to be as small as possible.
  3. Connect the parallel light source with the aperture diaphragm to emit a parallel light beam with a certain diameter vertically to one of the rigid cylindrical legs.
    NOTE: The diameter of the parallel light beam is 0.7 mm, which must be as small as possible.
  4. Place the parallel light source about 50 mm above the PDMS surface by adjusting the motorized stages of the workbench.
    NOTE: The bent surface refracts the parallel light creating a shadow with a bright edge, which is shown in Figure 3.
  5. Place the camera directly at 260 mm under the PDMS to capture the image of the shadow. Adjust the magnification of the camera lens so that the shadow fills the entire image.
    ​NOTE: The camera's pixel size and resolution are about 3.72 µm and 4,000 × 6,000, respectively.
  6. Fix the vertical precision positioner with a resolution of 0.2 nm above the workbench to calibrate the displacement sensitivity (step 4).

3. Image processing

  1. Convert the color photograph of the shadow to a grayscale image using a machine vision software (see Table of Materials).
    1. Click on the start button of the software to process the shadow image and obtain the shadow diameter directly.
      NOTE: The code of image processing steps is integrated into the software.
  2. Perform the preprocessing of the image, including Gaussian filtering to remove the noise and image enhancement to enhance image contrast12.
  3. Use the Canny operator to calculate each pixel's gradient and obtain sub-pixel edge contour sets. Exclude non-edge pixels based on the non-maximum suppression12.
  4. Eliminate the edge contours that are not part of shadow edges by setting a certain length threshold.
  5. Fit the shadow diameter by the least-squares fitting of circles17.

4. Displacement calibration

  1. Adjust the vertical precision positioner (see Table of Materials) to contact the load button of the workbench.
  2. Capture the current shadow image as a reference image.
  3. Drive the workbench to move down in 1 µm steps until the distance between the workbench and the vertical precision positioner is 5 µm.
  4. Capture the photographs of the shadow with the camera at each step.
  5. Repeat the experiment five times.
  6. Fit the results to obtain the relationship between the displacement output of the vertical precision positioner and the change in the diameter of the shadow according to Equation 4 (see Representative Results).
    ​NOTE: From here, the displacement sensitivity k is obtained.

5. Measuring micro displacement

  1. Disconnect the contact between the vertical precision positioner and the load button of the workbench.
  2. Capture the current shadow image as a reference image.
  3. Adjust the motorized linear stage (resolution, 0.625 µm) to contact the load button.
    NOTE: In the present study, a commercially available motorized linear stage (see Table of Materials) was used to demonstrate the micro displacement measurement. However, the users can measure for many common samples that require micro displacement measurement.
  4. Capture the current image of the shadow due to micro displacement.
    NOTE: Once the test sample comes in contact with the load button, the workbench moves. The shadow diameter changes due to micro displacement. Then the shadow image is captured, and the shadow diameter is determined.
  5. Determine the change in the shadow diameter by image processing (step 3) and calculate the micro displacement according to the calibrated displacement sensitivity k and Equation 4.
    NOTE: The Z in Equation 4 is the micro-displacement.

Results

Following the protocol, the sensitivity of the micro-displacement measurement system can be calibrated, and the micro displacement can be measured. The shadow method in the micro-displacement measurement is presented as follows. Figure 3 shows the travel path of parallel light through the PDMS deformed surface due to the applied displacement. The refraction of parallel light forms a shadow having a bright edge. The explicit solution of displacements z(x) of the PDMS surface...

Discussion

This protocol proposed a micro-displacement measurement system based on the shadow technique. The displacement calibration is the critical step within the protocol to obtain the displacement sensitivity and the measuring range. The displacement sensitivity can be improved by reducing the diameters of the cylindrical legs and that of the parallel light beam and increasing the working distance based on Equation 4. Furthermore, the pixel size and the resolution of the camera, as well as the accuracy of image processing, are...

Disclosures

The authors have nothing to disclose.

Acknowledgements

We thank the National Key Research and Development Program of China (No 2021YFC2202702) for funding this work.

Materials

NameCompanyCatalog NumberComments
Aperture diaphragmProcessed by high precision grindingThe diameter of the aperture is 0.7 mm.
CameraCanon EOS80DThe pixel size and the resolution of the camera are about 3.72 μm and 4000 × 6000, respectively.
HALCONMVTec Software GmbH18.11MVTec HALCON is the comprehensive standard software for machine vision with an integrated development environment (HDevelop) that is used worldwide.
Motorized linear stageZolixTSA50-CResolution 0.625 μm
Parallel light sourceOriental Technology (Shanghai) Co, Ltd.BTPL-50GThe peak wavelength is 523 nm.
Polydimethylsiloxane (PDMS)Dow CorningSylgard 184PDMS is a transparent silicon-based crosslinked polymer.
Vacuum pumpSHANGHAI LICHEN-BX INSTRUMENT TECHONOLOGY CO.,Ltd2XZ-6BThe pumping rate is 6 L/s.The ultimate vacuum is ≤1 Pa 
Vertical precision positionerPIP-620.ZCDThe resolution is 0.2 nm in the range of 50 μm.
Workbench with three rigid cylindrical legsProcessed by high precision grindingThe diameter of legs is 0.5 mm. The legs are distributed on the trisection points of a circle with a radius of 14 mm

References

  1. Zhang, H., Li, D. T., Li, H. Development of a cantilever beam thrust stand for electric propulsion thrusters. Review of Scientific Instruments. 91 (11), 115104 (2020).
  2. Huang, Y., et al. An optical glass plane angle measuring system with photoelectric autocollimator. Nanotechnology and Precision Engineering. 2 (2), 71-76 (2019).
  3. Bettahar, H., Clevy, C., Courjal, N., Lutz, P. Force-Position photo-robotic approach for the high-accurate micro-assembly of photonic devices. IEEE Robotics and Automation Letters. 5 (4), 6396-6402 (2020).
  4. Ngeljaratan, L., Moustafa, M. A. Structural health monitoring and seismic response assessment of bridge structures using target-tracking digital image correlation. Engineering Structures. 213, 110551 (2020).
  5. Berkovic, G., Shafir, E. Optical methods for distance and displacement measurements. Advances in Optics and Photonics. 4 (4), 441-471 (2012).
  6. Ghaffar, A., et al. A simple and high-resolution POF displacement sensor based on face-coupling method. Measurement. 187, 110285 (2022).
  7. Tian, K., Farrell, G., Wang, X., Lewis, E., Wang, P. Highly sensitive displacement sensor based on composite interference established within a balloon-shaped bent multimode fiber structure. Applied Optics. 57 (32), 9662-9668 (2018).
  8. Lu, Q. B., et al. Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation. Applied Optics. 54 (13), 4188-4196 (2015).
  9. Hu, Y., et al. An axial displacement measurement relying on the double-helix light beam. Optics & Laser Technology. 59, 1-6 (2014).
  10. Zheng, Y., et al. Elegant shadow making tiny force visible for water-walking arthropods and updated Archimedes' principle. Langmuir. 32 (41), 10522-10528 (2016).
  11. Lu, H., et al. A shadow-based nano scale precision force sensor. IEEE Sensors Journal. 19 (6), 2072-2078 (2019).
  12. Yang, Y., et al. Development of a nanoscale displacement sensor based on the shadow method. Applied Optics. 61 (22), 9-14 (2022).
  13. Li, Y., et al. Imaging dynamic three-dimensional traction stresses. Science Advances. 8 (11), (2022).
  14. Zheng, Y., Yin, W., Lu, H., Tian, Y. Revealing stepping forces in sub-mg tiny insect walking. Chinese Physics B. 29 (12), 124703 (2020).
  15. Zheng, Y., et al. Walking of spider on water surface studied from its leg shadows. Chinese Physics B. 27 (8), 084702 (2018).
  16. Yin, W., Zheng, Y. L., Lu, H. Y., Zhang, X. J., Tian, Y. Three-dimensional topographies of water surface dimples formed by superhydrophobic water strider legs. Applied Physics Letters. 109 (16), 163701 (2016).
  17. Yang, Y., et al. A disturbance suppression micro-Newton force sensor based on shadow method. ISA Transactions. , (2022).
  18. Popov, V. L., Heß, M., Willert, E. . Handbook of contact mechanics: exact solutions of axisymmetric contact problems. , (2019).
  19. Sun, B., Zheng, G., Zhang, X. Application of contact laser interferometry in precise displacement measurement. Measurement. 174, 108959 (2021).
  20. Huang, Y. G., Yang, Y., Zhang, X. M., Zhao, M. R. A novel torque sensor based on the angle of magnetization vector. EURASIP Journal on Wireless Communications and Networking. 2018 (1), 230 (2018).

Reprints and Permissions

Request permission to reuse the text or figures of this JoVE article

Request Permission

Explore More Articles

Micro displacement MeasurementShadow TechniquePrecision MeasurementWater StriderSuperhydrophobic PropertiesCurvature RefractionShadow SizeMeasurement SystemDisplacement SensitivityLow CostHigh PrecisionLinear Performance

This article has been published

Video Coming Soon

JoVE Logo

Privacy

Terms of Use

Policies

Research

Education

ABOUT JoVE

Copyright © 2025 MyJoVE Corporation. All rights reserved