This work was supported by the National Natural Science Foundation of China (No. 51502168; No.11504227) and the Shanghai Municipal Natural Science Foundation (No.16ZR1413600).The authors gratefully thank the Instrumental Analysis Center of Shanghai Jiao Tong University and Ma-tek analytical lab for competent technical assistance.

1. Substrate and Target Preparation
NOTE: This section describes the preparation of the sputter deposition chamber and the single crystal SrTiO3 (STO) substrates.
<ol>
	<li>Use 10 mm x 10 mm SrTiO3 (STO) single-crystal substrates during the RF magnetron sputtering process.</li>
	<li>Sequentially clean the substrates in isopropanol and deionized water for 10 min each at room temperature in ultrasonic bath. Then dry the substrates with nitrogen, which is for uniform cover...

<ol>
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H., Chen, Z. -. M., Cheng, K. -. B., He, J. -. 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The authors have nothing to disclose.

Here we have demonstrated that this method can be used to prepare LSMO ferromagnetic nanoparticles of uniform distribution on SrTiO3 (STO) single-crystal substrates. The (Gd) BCO films also can be deposited on both bare and LSMO decorated STO substrate. With an appropriate adjustment of deposited parameters, such as growth temperatures and target-substrate distance, this method ought to be useful for deposited different kinds of magnetic and non-magnetic particles or layers, for example, CeO2, YSZ (...

The hole-doped manganite La0.67Sr0.33MnO3 (LSMO) have unique properties such as wide-band gaps, half-metallic ferromagnetism, and entangled electronic states, which provide extraordinary opportunities for potential spintronic applications1,2,3,4. Currently, many researchers are endeavoring to take advantage of the unique properties of LSMO to inhabit the vortex movement for high temperature superconducting (HTS) films, such as (RE) Ba2Cu3O7&#8722;&#948; films (REBCO, RE= rare-earth element)5,6,7,8,9,10,11,12. Nanoscale decoration of the substrate surfaces with ferromagnetic nanoparticles will provide well-defined sites for inducing magnetic pinning centers of expected density13,14. However, the ability to control the density and geometry of the nanoparticles on highly textured surfaces, such as on single-crystal substrates and highly textured metal substrates is very difficult. Most commonly, nanoparticles are synthesized and coated on surfaces using metal organic decomposition methods15, and pulsed laser deposition methods16,17. Although pulse laser deposition methods can provide nanoparticles coated on various substrates, it is difficult to realize large area homogeneous nanoparticles deposition. As for metal organic decomposition methods, they are proper for large area deposition of nanoparticles. However, the nanoparticles are often non-uniform and easily damaged by small physical stresses.
Among these techniques, RF-magnetron sputtering has many advantages. Sputtering has a high deposition rate, low cost, and a lack of toxic gas emission. Also, it is easy to expand to large scale area substrates18,19. This method provides single-step formation of La0.67Sr0.33MnO3 (LSMO) nanoparticles, and the nanoparticles are easy to be deposited on single-crystal substrates. RF magnetron sputtering can create large area nanoparticles uniformly on a diverse range of substrates, irrespective of surface texture, and surface roughness20.The particle control can be achieved by adjust sputtering time. Homogeneity can be achieved by adjust target-substrate distance. The disadvantage of RF-magnetron sputtering is its lower growth rate for some oxides21. In this approach, target atoms (or molecules) are sputtered out of the target by argon ion, and then nanoparticles are deposited on substrates in the vapor phase22. Nanoparticles formation occurs on the substrate in a single step23. This method is theoretically applicable to any materials including superconducting thin film, resistance film, semiconductor film, ferromagnetic thin film etc. However, to date, reports about protocols for depositing ferromagnetic nanoparticles are very scarce.
Here, we demonstrate the deposition of GdBa2Cu3O7&#8722;&#948;/La0.67Sr0.33MnO3 quasi-bilayer films on SrTiO3 (STO) single-crystal substrates by RF magnetron sputtering method. Two kinds of target materials, GdBa2Cu3O7&#8722;&#948; and La0.67Sr0.33MnO3 target are used in the process. SrTiO3 (STO) single-crystal substrates were coated with GdBa2Cu3O7&#8722;&#948;films and GdBa2Cu3O7&#8722;&#948;/La0.67Sr0.33MnO3 quasi-bilayer films.
In this protocol, GdBa2Cu3O7&#8722;&#948;/La0.67Sr0.33MnO3 Quasi-bilayer films are deposited with RF magnetron sputtering on STO (001) substrates. The target diameter is 60 mm and the distance between the target and substrates is about 10 cm. The heaters are bulbs positioned 1 cm above the substrates. The maximum temperature is 850&#176;C in this system. There are 5 different substrates in this system. RF magnetron sputtering GdBa2Cu3O7&#8722;&#948;/La0.67Sr0.33MnO3 quasi-bilayer films consists of two steps, which are the preparation of substrates and the RF magnetron sputtering process. A picture of the sputtering system is shown in Figure&#160;S1.

<table>
	<tbody>
		<tr>
			<td>Sputter Deposition System</td>
			<td>Shenyang scientific instruments Limited by Share Ltd</td>
			<td>Bespoke</td>
			<td></td>
		</tr>
		<tr>
			<td>SrTiO3 Single Crystal Substrate</td>
			<td>Hefei Ke crystal material technology Co., Ltd</td>
			<td>Single-sided epi-polished</td>
			<td>(001) orientation</td>
		</tr>
		<tr>
			<td>La0.67Sr0.33MnO3 sputtering target</td>
			<td>Hefei Ke crystal material technology Co., Ltd</td>
			<td>Bespoke</td>
			<td>60 mm diameter</td>
		</tr>
		<tr>
			<td>GdBa2Cu3O7&#8722;&#948; sputtering target</td>
			<td>Hefei Ke crystal material technology Co., Ltd</td>
			<td>Bespoke</td>
			<td>60 mm diameter</td>
		</tr>
		<tr>
			<td>Atomic Force Microscope</td>
			<td>Br&#252;ker</td>
			<td>Dimension Icon</td>
			<td></td>
		</tr>
		<tr>
			<td>X-ray Diffractometer</td>
			<td>Br&#252;ker</td>
			<td>D8 Discover</td>
			<td></td>
		</tr>
		<tr>
			<td>Physical Property Measurement System</td>
			<td>Quantum Design</td>
			<td>PPMS 9</td>
			<td></td>
		</tr>
	</tbody>
</table>

radio frequency magnetron sputtering of gdba2cu3o7&#8722;&#948;/ la0.67sr0.33mno3 quasi-bilayer films on srtio3 (sto) single-crystal substrates

Here, we demonstrate a method of coating ferromagnetic La0.67Sr0.33MnO3 (LSMO) nanoparticles on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF) magnetron sputtering. LSMO nanoparticles were deposited with diameters from 10 to 20 nm and heights between 20 and 50 nm. At the same time, (Gd) Ba2Cu3O7&#8722;&#948; ((Gd) BCO) films were fabricated on both undecorated and LSMO nanoparticle decorated STO substrates using RF magnetron sputtering. This report also describes the properties of GdBa2Cu3O7&#8722;&#948;/ La0.67Sr0.33MnO3 quasi-bilayer films structures (e.g., crystalline phase, morphology, chemical composition); magnetization, magneto-transport, and superconducting transport properties were also evaluated.

The thickness of (Gd) BCO films on both bare and LSMO decorated STO substrate was 500nm, which was measured by a surface profilometer. The film thickness was controlled by sputtering time. Figure 1a,b shows the AFM image of LSMO nanoparticle (sputtering time of 10 s) on 1.0 cm x 1.0 cm single-crystal STO substrates to prove that the LSMO nanoparticles grown on STO substrates uniformly. The surface and to measure the roughness of the films was...

Watch this Scientific Journal Video about Radio Frequency Magnetron Sputtering of GdBa2Cu3O7âˆ'Î´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates at JoVE.com

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7ÃƒÂ¢Ã‹â€ &#039;ÃƒÅ½ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates

Here, we present a protocol to grow LSMO nanoparticles and (Gd) BCO films on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF)-sputtering.

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7&#8722;&#948;/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

Here, we demonstrate a method of coating ferromagnetic La0.67Sr0.33MnO3 (LSMO) nanoparticles on (001) SrTiO3 (STO) single-crystal substrates by radio ...

This method can create the LSMO nanoparticles uniformly on a STO single-crystal substrate. Also, the GBCO film can be obtained through the same method in the same vacuum chamber. The main advantage of this technology is that LSMO nanoparticles with uniform size and high-quality superconducting GBCO film can be deposited in the same vacuum chamber.This method can provide insight into film deposition area, nanoparticle growth area, et cetera. It can also be applied to metal film deposition, metal nanoparticle deposition, et cetera. This method will allow researchers to become familiar with vacuum equipment and learn more about film growth technology.First, sequentially clean strontium titanium oxide single-crystal substrates in isopropanol and deionized water for 10 minutes each at room temperature in an ultrasonic bath. Then, dry the substrates with nitrogen. This promotes uniform covering of the substrate and good film adherence.Mount the 001-oriented STO substrates in substrate holders with silver powder conductive glue. Load the holders into a vacuum chamber. Mount an LSMO target in a magnetron injection gun, and then reassemble the gun.Test the resistance with an ohmmeter to avoid a short circuit between the magnetron and the surrounding shield. Then, close the vacuum chamber, and pump down. Once the vacuum is lower than one times 10 to the minus four pascals, heat the substrate to 850 degrees Celsius using a heating rate of 15 degrees Celsius per minute.Set the target substrate distance to eight centimeters. Next, set the mass flow controller to 10 standard cubic centimeters per minute of oxygen and five standard cubic centimeters per minute of argon as the working gas flow. Before deposition, pre-sputter the LSMO target for 20 minutes at 30 watts.To obtain a chamber pressure of 25 pascals, adjust the molecular pump splint valve. If the instant value becomes larger than 25 pascals, rotate it counterclockwise. If it becomes smaller than 25 pascals, rotate it clockwise.Following this, check that the substrate temperature remains at 850 degrees Celsius and is stable. Increase the power of the magnetron from 30 to 80 watts. After the plasma is stabilized, open the shutter and deposit LSMO on the heated substrate.Once the deposition is complete, close the shutter and shut off power to the magnetron. Then, close the gas valve, and shut off the heater power. After cooling the samples to room temperature, vent the chamber with dry nitrogen.Then, open the chamber, and remove the samples. Mount the gadolinium barium copper oxygen target in the magnetron injection gun, and then reassemble the gun. Deposit the gadolinium barium copper oxygen films as previously described, using similar conditions except for the sputtering time, which should be 30 minutes.Next, decrease the sample temperature to 500 degrees Celsius. Then, open the gas valve for oxygen to give a chamber pressure of 75, 000 pascals, and hold the samples at this temperature for one hour. After cooling the samples to room temperature, vent the chamber with dry nitrogen.Then, open the chamber, and remove the samples. The AFM image of an LSMO nanoparticle on STO substrates shows uniform growth. The XRD patterns of gadolinium barium copper oxygen films fabricated on undecorated and LSMO nanoparticle-decorated STO substrates are shown here.The superconducting transition temperature was close to 90.5 kelvin for the gadolinium barium copper oxygen film and 90.3 kelvin for the LSMO films, which indicates that the nanoparticles don't harm the superconducting property for the films. By comparison, the magnetization hysteresis loop area is much bigger, from zero to six tesla, at 30, 50, and 77 kelvin for films fabricated on LSMO-decorated substrates. The gadolinium barium copper oxygen film deposited on an LSMO-decorated substrate possesses a higher critical current density from 1.3 to six tesla at 30 kelvin and from zero to six tesla at 77 kelvin.At 30 kelvin, the decorated sample has a larger pinning force density above 1.3 tesla. At 77 kelvin, the density moved to a higher H value for the decorated sample. The angular dependence of the critical current density at 3 tesla and 77 kelvin for the LSMO-decorated film shows an increase along the c-axis, suggesting that it is more effective at a magnetic field orientation parallel to the c-axis direction.This method involves many steps and details, so visual demonstration is critical for understanding and mastering this method. After its development, this method makes it possible to deposit oxide films and nanoparticles, as well as metal films and nanoparticles. After its development, this method makes it possible to deposit oxide films and nanoparticles, as well as metal films and nanoparticles.

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7.5K Görüntüleme.  Shanghai University of Electric Power. Bu yöntem, LSMO nano taneciklerini bir STO tek kristal substrat üzerinde eşit olarak oluşturabilir. Ayrıca, GBCO film aynı vakum odasında aynı yöntem le elde edilebilir. Bu teknolojinin en büyük avantajı, tek tip boyutu ve yüksek kaliteli süper iletken GBCO film ile LSMO nano tanecikleri aynı vakum odasında birikebilir olmasıdır.Bu yöntem film biriktirme alanı, nanopartikül büyüme alanı, vesaire hakkında bilgi sağlayabilir. Ayrıca metal film birikimi, metal n...

Video: Radio Frequency Magnetron Sputtering of GdBa2Cu3O7ÃƒÂ¢Ã‹â€ 'ÃƒÅ½ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates