Focused Ion Beams

Source: Sina Shahbazmohamadi and Peiman Shahbeigi-Roodposhti-Roodposhti, School of Engineering, University of Connecticut, Storrs, CT

As electron microscopes become more complex and widely used in research labs, it becomes more of a necessity to introduce their capabilities. Focused ion beam (FIB) is an instrument that can be employed in order to fabricate, trim, analyze and characterize materials on mico- and nano-scales in a wide variety of fields from nano-electronics to medicine. FIB systems can be thought of as a beam of ions that can be used to mill (sputter), deposit, and image materials on micro- and nano-scales. The ion columns of FIBs are commonly integrated with the electron columns of scanning electron microscopes (SEMs).

The goal of this experiment is to introduce the state of the art in focused ion beam technologies and to show how these instruments can be used in order to fabricate structures that are as small as the smallest membranes that are found in the human body.

1. Fabrication of a perforated filter from a 300nm thick silicon oxide membrane comparable in scale to the kidneys' endothelial cytoplasm

Load the as-prepared membrane into the FIB chamber. The membranes are often prepared by professionals (when creating Wheatstone bridges) and can be acquired at semiconductor fabrication sites. To prepare one yourself, photolithography must be used. The details of this process can be seen in the photolithography video of the "Bioengineering Collection" on the JoV

This experiment demonstrated how using electron microscopes and focused ion beams enable researchers to manipulate and fabricate microscale structures. The molecular nature of the focused ion beam-material interaction provides FIB with a unique ability to manipulate materials on the micro- and nano-scales. By carefully considering how the beam interacts with the material, mitigating charging artifacts and setting the system for optimal milling quality, a researcher can produce unique patt

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