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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

DOI :

10.3791/54268-v

July 26th, 2016

July 26th, 2016

12,051 Views

1McKetta Department of Chemical Engineering, The University of Texas at Austin

This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.

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Epitaxial Growth

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