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Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

DOI :

10.3791/56259-v

10:58 min

March 7th, 2018

March 7th, 2018

9,700 Views

1Department of NanoEngineering, University of California San Diego, 2Materials Science and Engineering Program, University of California San Diego, 3Amrita Centre for Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham University

A protocol for the fabrication of electrochemically active LiPON-based solid-state lithium-ion nanobatteries using a focused ion beam is presented.

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Focused Ion Beam

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