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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model

DOI :

10.3791/57103-v

11:10 min

May 23rd, 2018

May 23rd, 2018

11,372 Views

1Naval Research Laboratory

Thin films (100-1000 Å) of vanadium dioxide (VO2) were created by atomic-layer deposition (ALD) on sapphire substrates. Following this, the optical properties were characterized through the metal-insulator transition of VO2. From the measured optical properties, a model was created to describe the tunable refractive index of VO2.

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Atomic Layer Deposition

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