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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

DOI :

10.3791/56127-v

6:39 min

September 14th, 2017

September 14th, 2017

12,677 Views

1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

Columnar zinc oxide structures in the form of rods are synthesized via aerosol-assisted chemical vapor deposition without the use of pre-deposited catalyst-seed particles. This method is scalable and compatible with various substrates based on either silicon, quartz or polymers.

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Aerosol assisted Chemical Vapor Deposition

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