7.3K Views
•
09:39 min
•
March 1st, 2020
DOI :
March 1st, 2020
•0:05
Introduction
1:04
Wafer Cleaning, Hexamethyldisilane (HMDS) Deposition, and Lithography
3:28
Sputter, Photoresist Lift-off and Processing, Manual back Alignment, and Lithography on the Backside of the Wafer
4:46
Etching and Final Cleaning
7:41
Results: Immersing Silica-GEMs in Water
9:02
Conclusion
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