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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

DOI :

10.3791/61015-v

August 5th, 2020

August 5th, 2020

6,510 Views

1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, University of California San Diego, 2Department of Surgery, School of Medicine, University of California San Diego

Fabrication of piezoelectric thickness mode transducers via direct current sputtering of plate electrodes on lithium niobate is described. Additionally, reliable operation is achieved with a transducer holder and fluid supply system and characterization is demonstrated via impedance analysis, laser doppler vibrometry, high-speed imaging, and droplet size distribution using laser scattering.

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Fabrication

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