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Fabrication and Characterization of Superconducting Resonators

DOI :

10.3791/53868-v

May 21st, 2016

May 21st, 2016

10,015 Views

1Astrophysics Science Division, NASA Goddard Space Flight Center, 2Instrument Systems and Technology Division, NASA Goddard Space Flight Center

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

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Fabrication

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