Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

2.5K Views

07:20 min

April 21st, 2022

DOI :

10.3791/63739-v

April 21st, 2022


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Micro patterned Chip

Chapters in this video

0:04

Introduction

0:55

Pattern the Photoresist and Silicon Nitride‐Deposited Si Wafer (SixNy)

2:31

Etching the Si and Eliminating the KOH Etching Residues

3:21

Prepare the Micro‐Patterned SixNy and Eliminate the PR

4:25

Transfer Graphene Oxide (GO) by the Drop‐Casting Method

5:30

Results: Analysis of the Micro‐Patterned Chip with GO Windows

6:35

Conclusion

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