这项研究是由国家科学基金会（CMMI模型-0927634）纳米制造程序支持。达沃尔Copic拉克姆优异，在密歇根大学的奖学金计划中的一部分支持。萨迈赫T​​awfick承认拉克姆博士前奖学金的部分支持。迈克尔·的德Volder支持比利时科学研究基金 - 富兰德（FWO）。 Lurie加工设施的（LNF），这是一个国家纳米技术基础设施网络的成员进行微细加工和电子显微镜在密歇根州的电子束分析实验室（EMAL）的执行。

1。催化剂图案<ol><li>获得一个3000A厚的二氧化硅层（100）硅片，抛光边至少有一个。另外，你可能获得一个裸硅片和晶圆上成长3000A二氧化硅。下面描述所有加工完成的晶圆抛光。 </li><li>对于4S 500RPM Spincoat一层HMDS的，然后在30秒3000RPM。 HMDS的提升晶圆与光阻之间的粘连。 </li><li>对于4S 500RPM Spincoat SPR-220-3层，然后在30秒3000RPM。 </li><li> 115°C时为90烤盘上烤的晶圆。 </li><li>所需的口罩，使用催化剂图案的晶圆暴露于紫外线辐射6S硬接触mode.1.6的20毫瓦/平方厘米在405 nm）烘烤晶圆上烤盘，再次在115°为90℃（后曝光烘烤）。 </li><li>使用AZ-300的MIF开发60年代的发展暴露光阻。 </li><li>冲洗纯水60年代的晶圆。 </li><li>其次为1nm铁矿床10nm的AL 2 O 3电子束蒸发或溅射。 </li><li>手工抄写和休息晶圆片约20×20毫米或更小。 </li><li>执行晶圆片浸泡在1L含有丙酮100毫升烧杯光刻胶剥离，烧杯放置在8分钟的超声波浴（翠园超声波1100D）在功率6。 </li><li>处置和替代丙酮和超声再次使用相同的设置。 </li><li>晶圆片传送到与异丙醇（IPA）的烧杯中，然后浸泡2分钟。 </li><li>从“近期行动计划”中删除的晶圆片单独使用镊子。每一块用温和的氮使用手持喷嘴流干燥。 </li></ol> 2。碳纳米管的生长<ol><li>收购裸硅片（或氧化物涂层）和手动划线，并打破了一块尺寸约22×75毫米。这种“船”将用于支持和催化剂涂层的晶圆片，装入管式炉。船装卸过程中的晶圆片是非常有用的，但在成长过程中没有发挥作用。船在原则上可能的任何材料，碳纳米管的生长条件下的化学和热稳定性。 </li><li>将所需数量的催化剂涂层的晶圆片（增长基板）上的船，从​​前沿30毫米。 </li><li>装入增长基板管船。船管等前沿位于下游30mm的炉热电偶，使用不锈钢或石英推杆推入。这30毫米的立场是“甜点”，这给我们的炉碳纳米管的最高增长率。这将是必要的，以确定这个位置上，为用户的设备，根据用户的设备和目标（例如，碳纳米管的增长速度或密度的最大化）。 </li><li>连端盖，密封管。应小心不打扰船或图案的硅块的位置。注：CNT的增长是高度敏感，管内的位置。 </li><li>冲洗与氦1000sccm为5分钟在室温下的石英管。 </li><li>而流动的氢和氦100sccm 400sccm，坡道温度至775°C，10分钟，然后举行的流量和温度为10分钟。这一步会导致化学薄膜，以减少从三氧化二铁铁，到纳米dewet。 </li><li>改变氢气流量100sccm和400sccm氦流率，同时加入100sccm乙烯和保持炉在775°C至成长奈米碳管。这一步的时间控制碳纳米管的高度。 </li><li>停止碳纳米管生长和冷却样品，手动滑动石英管下游，直到催化剂芯片都位于炉中保温约1cm的下游。请小心维持在上一步相同的流量和炉设定温度，15分钟。 </li><li>氦1000sccm冲洗管，5分钟，前提取样品，并关闭炉。 </li></ol> 3。碳纳米管致密化<ol><li>一块双面胶带，适用于厚铝网0.8毫米，与6.25毫米直径孔。确保网格是大于一个1L烧杯中的开放和磁带约网中心。 </li><li>使碳纳米管的微观朝上装入碳纳米管在磁带上的硅晶圆片。 </li><li> 100毫升丙酮倒入1L的烧杯，烧杯放置在通风橱内的热点板块。设置热板表面温度达到110°C等到丙酮开始沸腾。我们注意到，我们的烤盘上，设置了150°C的表面上要求达到110℃。丙酮的沸点低得多（约56℃），但我们傅聪第二，高温丙酮熬更迅速，加热烧杯侧壁，防止烧杯内的凝结。 </li><li>将烧杯等，安装样品朝下铝网。 </li><li>注意：在蒸气方面的任何急剧波动上升烧杯侧面和调整通风柜窗扇稳定蒸气前的水平。 </li><li>一旦蒸汽前面接近烧杯上方，观察在硅衬底表面上明显的颜色变化。彩虹般的模式将会出现，并席卷整个表面。这标志着一个溶剂的薄膜表面上形成时的蒸气接触到冰冷的表面。 </li><li>一旦已存入足够的溶剂，拿起网和样品的方向不改变，举行了从沸点溶剂，直到沉积溶剂蒸发掉。确定的时间量empirically基于碳纳米管结构的大小和间距。这是进一步讨论解决。 </li><li>网格从烧杯中取出，小心剥离的双面胶带样品，用刀片。在这一步，因为它很容易打破拆除过程中的样品，应采取极为谨慎。 </li></ol> 4。碳纳米管硕士模具制造<ol><li>池苏2002年8密度板碳纳米管微观。旋转10秒500RPM样品，然后在30秒3000RPM。 </li><li>在65°C烤2分钟，然后在95℃4分钟Ç样品。 </li><li> 20 75mW/cm 2辐照的样品暴露在紫外线照射下。 </li><li>为2分钟，然后在95°C加热4分钟再烤样品在65°C。 </li></ol> 5。副本成型<ol><li>如果复制脆弱的结构，放置在干燥器随着玻璃的100μL（tridecafluoro-1，1,2,2，tetrahydtoocyl卑鄙的主），三氯在400mTorr 12小时。 </li><li>混合共1G的PDMS（Sylgard 184），与比10:1单体，交联剂。为几微米的基地规模和10个或更多的使用比例为8:1的宽高比与微观结构。 </li><li> CNT的主机放置在一个铝箔菜，倒入菜的PDMS，直到样品被淹没。 </li><li>样品放置在真空和德加在400mTorr 15分钟。一旦泡沫开始形成，在PDMS（通常约3分钟后），定期增加的压力迅速爆大气泡。 </li><li>在120°C固化20分钟负。如果样品中含有的HAR结构，在85°C，治愈时间为5h。 </li><li>一旦固化，剥离背面的铝箔和分离主从柔软的PDMS负手。 </li><li>如果复制脆弱的结构，随着玻璃卑鄙（tridecafluoro-1，1,2,2，tetrahydtoocyl），三氯100μL在干燥器中放置负400mTorr为12H。 </li><li>倒入的PDMS消极和德加在400mTorr 10分钟SU-8 2002年。 </li><li>烘烤样品（SU-8充满负）在65℃为4分钟，然后在95℃反应6h C至溶剂蒸发一层厚厚的SU-8。 </li><li>样品暴露到紫外光辐照20s和烘烤75mW/cm 2再次为4分钟，然后在95°C间为8分钟，在65°C。 </li><li>最后，手动脱模的SU-8负从PDMS副本。 </li></ol> 6。代表结果代表作为土生土长的碳纳米管柱阵列随着致密形状，如图4所示（从德Volder 等修改后的图像。4）。厚度为10μm或更​​小的HAR支柱已逐步减少的直线，这是在致密进一步减少。致密的半圆形柱子已被证明导致大片（图4c），均匀弯曲的支柱。 SU-8我入渗发生之间和内部碳纳米管微观结构，间距为30μm或以下的SU-8可能保持结构之间的薄膜结构。在复制过程中的关键步骤的照片如图5所示，同时比较不同尺度及其复制品复制微观SEM照片如图6所示（Copic 等修改后的图像。5）。电流限制，在结构的形成，包括双绞线结构（修改后的图像从德Volder 等。4），高宽高比墙，和重入结构如图7所示（从Copic 等修改后的图像。5）。 <img src="/files/ftp_upload/3980/3980fig1.jpg" alt="图1" /> 图1。生长碳纳米管的生长炉管安装。 （一）系统原理图。 （二）炉管（热费舍尔Minimite的），盖打开显示硅密封石英管内的船。 （三）硅b燕麦样品，增长之前和之后显示。 <a href="http://www.jove.com/files/ftp_upload/3980/3980fig1large.jpg" target="_blank">点击这里查看大图</a> 。 <img src="/files/ftp_upload/3980/3980fig2.jpg" alt="图2" /> 图2。（一）为控制溶剂蒸汽凝结烧杯设置到碳纳米管的微观结构（从德Volder 等修改后的图像。6）示意图。 （二）CNT样品基板连接到沸腾的丙酮铝网。 <img src="/files/ftp_upload/3980/3980fig3.jpg" alt="图3" /> 图3。副本的碳纳米管微结构的成型，工艺流程和形象代表复制微观阵列相比，美国的四分之一元硬币。 <img src="/files/ftp_upload/3980/3980fig4.jpg" alt="图4" /> 图4。模范碳纳米管微观毛细血管前后Ÿ成形。圆柱形的碳纳米管支柱（a）在毛细血管的形成，和（b）在毛细血管形成（图像修改从德Volder 等。6）阵列的原理和扫描电镜图像。插图显示对齐和密度的碳纳米管。 （三）Semicylindrical CNT的支柱致密成型，形成斜梁（赵等7修改后的图像），在毛细管倾斜。 <a href="http://www.jove.com/files/ftp_upload/3980/3980fig4large.jpg" target="_blank">点击这里查看大图</a> 。 <img src="/files/ftp_upload/3980/3980fig5.jpg" alt="图5" /> 图5。碳纳米管负模具制造和副本铸造的关键步骤。 （一）PDMS负模铸造。 （二）脱气的负面模具。 （三）手动脱模负，和铸造的SU-8的副本。 <img src="/files/ftp_upload/3980/3980fig6.jpg" alt="图6" /> （一）比较图6。<html> CNT/SU-8大师和（二）的副本micropillar结构高保真复制微观尺度的形状和纳米结构（即，侧壁和顶面），显示了大面积（从Copic 等修改后的图像。5）。 <a href="http://www.jove.com/files/ftp_upload/3980/3980fig6large.jpg" target="_blank">单击这里以查看更大的数字</a> 。 <img src="/files/ftp_upload/3980/3980fig7.jpg" alt="图7" /> 图7。高宽比（HAR）的重入碳纳米管微观结构及其聚合物的副本。 （一）：密度板CNT的蜂窝与相应的烘烤固化CNT主站和烘烤固化副本。 （二）硕士和倾斜碳纳米管微孔副本（图片修改从Copic 等。5）。 （三）致密扭曲碳纳米管micropillars主站和个体结构的副本，（修改后的图像从德Volder 等。4）。在蜂窝（一）有墙为400纳米的宽度和高度为20微米。=“http://www.jove.com/files/ftp_upload/3980/3980fig7large.jpg”目标=“_blank”&gt;点击这里查看大图。

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没有利益冲突的声明。

平版印刷图案和CNT催化剂基板的准备很简单，重复性好;然而，实现一致的碳纳米管增长需要认真注意的高度和密度的碳纳米管森林环境湿度和增长管条件的影响。在我们的经验，比1000微米模式较大的2不敏感，在加工条件下的小波动。此外，密度的模式了，影响生长密度和高度8。增长的密度和高度较大的填充分数（总面积除以基板面积总量的催化剂）大于约20％的模式。此外，重...

<table border="1"><tbody><tr><td> 试剂名称 </td><td> 公司 </td><td> 目录编号 </td><td> 评论 </td></tr><tr><td> 4“直径&lt;100&gt;硅SiO 2的 （300海里）涂晶圆</td><td>硅任务</td><td>习俗</td><td></td></tr><tr><td>正光阻</td><td> MicroChem </td><td>战略石油储备220-3.0 </td><td></td></tr><tr><td> hexamethyldisilizane （HMDS） </td><td> MicroChem </td><td></td><td></td></tr><tr><td>开发人员</td><td> AZ电子材料美国公司</td><td>排列300的MIF </td><td></td></tr><tr><td>溅射系统</td><td>科特•莱思科</td><td>实验室18 </td><td>催化剂沉积溅射系统</td></tr><tr><td>热费舍尔Minimite的</td><td&gt;尔科技</td><td> TF55030A </td><td>碳纳米管生长炉管</td></tr><tr><td>石英管</td><td>技术玻璃制品</td><td>习俗</td><td> 22毫米内径×25毫米外径30“的长度</td></tr><tr><td>氦气</td><td> PurityPlus </td><td>他（PrePurified 300） </td><td></td></tr><tr><td>氢气</td><td> PurityPlus </td><td> H2（PrePurified 300） </td><td>超高压</td></tr><tr><td>乙烯气体</td><td> PurityPlus </td><td> C 2 4（PrePurified 300） </td><td>超高压</td></tr><tr><td>穿孔铝板</td><td>麦克马斯特，卡尔</td><td> 9232T221 </td><td>举行样品致密烧杯以上</td></tr><tr><td>紫外线泛光灯</td><td> DYMAX </td><td> 2000型</td><td></td></tr><tr><td>苏-8 2002年</td><td> MicroChem </td><td>苏-8 2002年</td><td></td></tr><tr><td>聚二甲基硅氧烷 （PDMS）中</td><td>道康宁</td><td> sylgard 184硅橡胶套件</td><td></td></tr></tbody></table>

fabrication, densification, and replica molding of 3d carbon nanotube microstructures

微细新材料和新工艺的引进，很大一部分在微系统，实验室的单芯片器件及其应用，使许多重要的进展。软光刻技术和其他技术micromolding 1，2的到来，特别是聚合物微观结构具有成本效益的制造能力转化，这导致在微细生物医学工程和生物应用的革命。尽管如此，它仍然是挑战，以编造的微观结构，具有定义良好的纳米级表面纹理和制作，在微观尺度的任意三维形状。主模具和形状的完整性维护的鲁棒性，尤其重要的是实现复杂结构的高保真复制和维护他们的纳米表面纹理。现有的微细加工方法结合分层纹理，异构的形状，是一场深刻的挑战，LARgely依靠自上而下使用固定不变的面具模板蚀刻后。另一方面，自下而上的纳米管和纳米线等纳米结构的合成，可以提供新的功能，微细加工，尤其是通过利用纳米结构的自组织的集体，局部控制其生长行为的微模式。 我们的目标是引入垂直排列的碳纳米管（CNTs），我们是指作为一种新的微细加工材料，碳纳米管的“森林”。我们提出了一套最近由本集团开发的相关方法的详细资料：热化学气相沉积法制备碳纳米管森林显微光刻图案催化剂薄膜;自我导向的碳纳米管微结构的elastocapillary致密;和副本成型聚合物的微观结构，使用碳纳米管复合主模具。特别是，我们的工作表明，自我导向的毛细血管致密化（“毛细形成”），这是射孔碳纳米管微结构的衬底上rmed溶剂冷凝，显着提高了碳纳米管的堆积密度。此过程可分为直，斜，扭曲的形状，有强大的超过典型微细聚合物的机械属性的垂直碳纳米管微结构的转型。这反过来又使毛细血管渗透驱动的聚合物形成碳纳米管纳米复合材料主模具。副本结构表现出的奈米碳管的各向异性纳米质地，并能与亚微米厚的墙和纵横比超过50:1。在制造碳纳米管微结构的整合提供了更多的机会，利用碳纳米管的导电性和导热性能，多样的功能，化学和生化官能3。

Watch this Scientific Journal Video about Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures at JoVE.com

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

我们提出的垂直排列的碳纳米管（CNTs），并利用其作为主模具生产聚合物微观结构与有组织的纳米表面纹理图案的微观结构的制造方法。基板上凝结的溶剂，这大大增加了他们的堆积密度，使自我导向形成三维形状的碳纳米管森林致密。

制备，致密，副本三维碳纳米管微结构成型

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip ...

fabrication-densification-replica-molding-3d-carbon-nanotube

Research

JoVE Journal

Engineering

20.0K 次观看.  University of Michigan. 我们提出的垂直排列的碳纳米管（CNTs），并利用其作为主模具生产聚合物微观结构与有组织的纳米表面纹理图案的微观结构的制造方法。基板上凝结的溶剂，这大大增加了他们的堆积密度，使自我导向形成三维形状的碳纳米管森林致密。

视频: Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays

In this article, we describe a simple method to reversibly tune the wetting properties of vertically aligned carbon nanotube (CNT) arrays. Here, CNT arrays are defined as densely packed multi-walled carbon nanotubes oriented perpendicular to the growth substrate as a result of a growth process by the standard thermal chemical vapor deposition (CVD) technique.1,2 These CNT arrays are then exposed to vacuum annealing treatment to make them more hydrophobic or to dry oxidation treatment to render them more hydrophilic. The hydrophobic CNT arrays can be turned hydrophilic by exposing them to dry oxidation treatment, while the hydrophilic CNT arrays can be turned hydrophobic by exposing them to vacuum annealing treatment. Using a combination of both treatments, CNT arrays can be repeatedly switched between hydrophilic and hydrophobic.2 Therefore, such combination show a very high potential in many industrial and consumer applications, including drug delivery system and high power density supercapacitors.3-5
The key to vary the wettability of CNT arrays is to control the surface concentration of oxygen adsorbates. Basically oxygen adsorbates can be introduced by exposing the CNT arrays to any oxidation treatment. Here we use dry oxidation treatments, such as oxygen plasma and UV/ozone, to functionalize the surface of CNT with oxygenated functional groups. These oxygenated functional groups allow hydrogen bond between the surface of CNT and water molecules to form, rendering the CNT hydrophilic. To turn them hydrophobic, adsorbed oxygen must be removed from the surface of CNT. Here we employ vacuum annealing treatment to induce oxygen desorption process. CNT arrays with extremely low surface concentration of oxygen adsorbates exhibit a superhydrophobic behavior.

This article describes a simple method to fabricate vertically aligned carbon nanotube arrays by CVD and to subsequently tune their wetting properties by exposing them to vacuum annealing or dry oxidation treatment.

干式氧化及真空退火处理调整的润湿性能的碳纳米管阵列

In this article, we describe a simple method to reversibly  tune the wetting properties of vertically aligned carbon nanotube (CNT) arrays.  Here, CNT ...

科研

工程学

Synthesis and Functionalization of Nitrogen-doped Carbon Nanotube Cups with Gold Nanoparticles as Cork Stoppers

Nitrogen-doped carbon nanotubes consist of many cup-shaped graphitic compartments termed as nitrogen-doped carbon nanotube cups (NCNCs). These as-synthesized graphitic nanocups from chemical vapor deposition (CVD) method were stacked in a head-to-tail fashion held only through noncovalent interactions. Individual NCNCs can be isolated out of their stacking structure through a series of chemical and physical separation processes. First, as-synthesized NCNCs were oxidized in a mixture of strong acids to introduce oxygen-containing defects on the graphitic walls. The oxidized NCNCs were then processed using high-intensity probe-tip sonication which effectively separated the stacked NCNCs into individual graphitic nanocups. Owing to their abundant oxygen and nitrogen surface functionalities, the resulted individual NCNCs are highly hydrophilic and can be effectively functionalized with gold nanoparticles (GNPs), which preferentially fit in the opening of the cups as cork stoppers. These graphitic nanocups corked with GNPs may find promising applications as nanoscale containers and drug carriers.

We discussed the synthesis of individual graphitic nanocups using a series of techniques including chemical vapor deposition, acid oxidation and probe-tip sonication. By citrate reduction of HAuCl4, the graphitic nanocups were effectively corked with gold nanoparticles due to the chemically reactive edges of the cups.

黄金纳米粒子作为软木塞氮掺杂碳纳米管杯的合成与功能构造

Nitrogen-doped carbon  nanotubes consist of many cup-shaped graphitic compartments termed as  nitrogen-doped carbon nanotube cups (NCNCs).  These ...

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component

Vascular structures in natural systems are able to provide high mass transport through high surface areas and optimized structure. Few synthetic material fabrication techniques are able to mimic the complexity of these structures while maintaining scalability. The Vaporization of a Sacrificial Component (VaSC) process is able to do so. This process uses sacrificial fibers as a template to form hollow, cylindrical microchannels embedded within a matrix. Tin (II) oxalate (SnOx) is embedded within poly(lactic) acid (PLA) fibers which facilitates the use of this process. The SnOx catalyzes the depolymerization of the PLA fibers at lower temperatures. The lactic acid monomers are gaseous at these temperatures and can be removed from the embedded matrix at temperatures that do not damage the matrix. Here we show a method for aligning these fibers using micromachined plates and a tensioning device to create complex patterns of three-dimensionally arrayed microchannels. The process allows the exploration of virtually any arrangement of fiber topologies and structures.

The Vaporization of a Sacrificial Component (VaSC) process is used to fabricate microvascular structures. This procedure uses sacrificial poly(lactic) acid fibers to form hollow microchannels with precise 3D geometric positioning provided by laser micromachined guide plates.

制作三维微结构，用牺牲部分汽化过程

Vascular structures in natural systems are able to provide high mass transport through high surface areas and optimized structure. Few synthetic material ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Ambient Method for the Production of an Ionically Gated Carbon Nanotube Common Cathode in Tandem Organic Solar Cells

A method of fabricating organic photovoltaic (OPV) tandems that requires no vacuum processing is presented. These devices are comprised of two solution-processed polymeric cells connected in parallel by a transparent carbon nanotubes (CNT) interlayer. This structure includes improvements in fabrication techniques for tandem OPV devices. First the need for ambient-processed cathodes is considered. The CNT anode in the tandem device is tuned via ionic gating to become a common cathode. Ionic gating employs electric double layer charging to lower the work function of the CNT electrode. Secondly, the difficulty of sequentially stacking tandem layers by solution-processing is addressed. The devices are fabricated via solution and dry-lamination in ambient conditions with parallel processing steps. The method of fabricating the individual polymeric cells, the steps needed to laminate them together with a common CNT cathode, and then provide some representative results are described. These results demonstrate ionic gating of the CNT electrode to create a common cathode and addition of current and efficiency as a result of the lamination procedure.

A method of fabricating, in ambient conditions, organic photovoltaic tandem devices in a parallel configuration is presented. These devices feature an air-processed, semi-transparent, carbon nanotube common cathode.

对于一个以离子门控碳纳米管共阴极的串联有机太阳能电池的生产环境法

A method of fabricating organic photovoltaic (OPV) tandems that requires no vacuum processing is presented. These devices are comprised of two ...

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive thin-films. Due to the low growth temperature, the process allows integration with modern low-&#954; dielectrics and some flexible substrates. The process is compatible with standard semiconductor fabrication, and a method for the fabrication of electrical 4-point probe test structures for vertical interconnect test structures is presented. Using scanning electron microscopy the morphology of the CNT bundles is investigated, which demonstrates vertical alignment of the CNT and can be used to tune the CNT growth time. With Raman spectroscopy the crystallinity of the CNT is investigated. It was found that the CNT have many defects, due to the low growth temperature. The electrical current-voltage measurements of the test vertical interconnects displays a linear response, indicating good ohmic contact was achieved between the CNT bundle and the top and bottom metal electrodes. The obtained resistivities of the CNT bundle are among the average values in the literature, while a record-low CNT growth temperature was used.

A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.

低温碳纳米管垂直互连的制作兼容半导体技术

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Two-way Valorization of Blast Furnace Slag: Synthesis of Precipitated Calcium Carbonate and Zeolitic Heavy Metal Adsorbent

The aim of this work is to present a zero-waste process for storing CO2 in a stable and benign mineral form while producing zeolitic minerals with sufficient heavy metal adsorption capacity. To this end, blast furnace slag, a residue from iron-making, is utilized as the starting material. Calcium is selectively extracted from the slag by leaching with acetic acid (2 M CH3COOH) as the extraction agent. The filtered leachate is subsequently physico-chemically purified and then carbonated to form precipitated calcium carbonate (PCC) of high purity (&lt;2 wt% non-calcium impurities, according to ICP-MS analysis). Sodium hydroxide is added to neutralize the regenerated acetate. The morphological properties of the resulting calcitic PCC are tuned for its potential application as a filler in papermaking. In parallel, the residual solids from the extraction stage are subjected to hydrothermal conversion in a caustic solution (2 M NaOH) that leads to the predominant formation of a particular zeolitic mineral phase (detected by XRD), namely analcime (NaAlSi2O6&#8729;H2O). Based on its ability to adsorb Ni2+, as reported from batch adsorption experiments and ICP-OES analysis, this product can potentially be used in wastewater treatment or for environmental remediation applications.

A protocol for the parallel production of precipitated calcium carbonate and zeolitic material from blast furnace slag via mineral carbonation and alkaline hydrothermal conversion, respectively, is presented. The performance of the zeolitic material towards nickel adsorption is tested.

高炉矿渣的双向稳定物价：沉淀碳酸钙和沸石重金属吸附剂的合成

The aim of this work is to present a zero-waste process for storing CO2 in a stable and benign mineral form while producing zeolitic minerals with ...

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

A nanoscale fabrication technique appropriate for milling carbon nanotube (CNT) forests is described. The technique utilizes an environmental scanning electron microscope (ESEM) operating with a low pressure water vapor ambient. In this technique, a portion of the electron beam interacts with the water vapor in the vicinity of the CNT sample, dissociating the water molecules into hydroxyl radicals and other species by radiolysis. The remainder of the electron beam interacts with the CNT forest sample, making it susceptible to oxidation from the chemical products of radiolysis. This technique may be used to trim a selected region of an individual CNT, or it may be used to remove hundreds of cubic microns of material by adjusting ESEM parameters. The machining resolution is similar to the imaging resolution of the ESEM itself. The technique produces only small quantities of carbon residue along the boundaries of the cutting zone, with minimal effect on the native structural morphology of the CNT forest.

Low pressure scanning electron microscopy in a water vapor ambient is used to machine nanoscale to microscale features in carbon nanotube forests.

碳纳米管森林精密铣床使用低压扫描电子显微镜

A nanoscale fabrication technique appropriate for milling carbon nanotube (CNT) forests is described. The technique utilizes an environmental scanning ...

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia (YSZ) Scaffolds by In Situ Carbon Templating Xerogels

We demonstrate a method for the high temperature fabrication of porous, nanostructured yttria-stabilized-zirconia (YSZ, 8 mol% yttria - 92 mol% zirconia) scaffolds with tunable specific surface areas up to 80 m2&#183;g-1. An aqueous solution of a zirconium salt, yttrium salt, and glucose is mixed with propylene oxide (PO) to form a gel. The gel is dried under ambient conditions to form a xerogel. The xerogel is pressed into pellets and then sintered in an argon atmosphere. During sintering, a YSZ ceramic phase forms and the organic components decompose, leaving behind amorphous carbon. The carbon formed in situ serves as a hard template, preserving a high surface area YSZ nanomorphology at sintering temperature. The carbon is subsequently removed by oxidation in air at low temperature, resulting in a porous, nanostructured YSZ scaffold. The concentration of the carbon template and the final scaffold surface area can be systematically tuned by varying the glucose concentration in the gel synthesis. The carbon template concentration was quantified using thermogravimetric analysis (TGA), the surface area and pore size distribution was determined by physical adsorption measurements, and the morphology was characterized using scanning electron microscopy (SEM). Phase purity and crystallite size was determined using X-ray diffraction (XRD). This fabrication approach provides a novel, flexible platform for realizing unprecedented scaffold surface areas and nanomorphologies for ceramic-based electrochemical energy conversion applications, e.g. solid oxide fuel cell (SOFC) electrodes.

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia YSZ Scaffolds by In Situ Carbon Templating Xerogels

A protocol for fabricating porous, nanostructured yttria-stabilized-zirconia (YSZ) scaffolds at temperatures between 1,000 &#176;C and 1,400 &#176;C is presented.

通过纳米氧化钇稳定的二氧化锆（YSZ）的支架的高温加工<em&gt;原位</em&gt;碳模板干凝胶

We demonstrate a method for the high temperature fabrication of porous, nanostructured yttria-stabilized-zirconia (YSZ, 8 mol% yttria - 92 mol% zirconia) ...