Name: laser-induced forward transfer for flip-chip packaging of single dies
Uploaded: 2015-03-20T14:00:00.000+00:00
Duration: 8 min 21 s
Description: Watch this Scientific Journal Video about Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies at JoVE.com

This work was carried out in the framework of the project &#8220;MIRAGE,&#8221; funded by the European Commission within the FP7 program.

1. LIFT辅助倒装芯片粘接注意:有参与实现升降辅助倒装芯片组件中，即微凸点利用提技术的基板，使用热压倒装芯片接合方法将所述光电芯片的凸点基板三个阶段，并最后封装保税组件。每一个阶段将在以下部分中讨论: <ol><li>使用LIFT微碰撞: <ol><li>为供体的制备，沉积的施主材料的薄膜上的激光透明载体衬底。对于本实验，蒸发铟金属的200nm厚的薄膜上的尺寸为玻璃载体基片顶部:直径为2英寸×0.05厘米厚度。 注:供体的制备方法依赖于供体材料的相， 例如，可以使用蒸发和溅射用于固相施主材料和旋涂和刮涂用于液相施主秒。 </li><li>对于接收机制备，使用的玻璃基板为5×5×0.07厘米3作为接收机的尺寸。图案这些基板与金属接触垫用于粘结在OE芯片和扇出探测使用光刻结构。对于本实验，图案4微米厚的镍金结合垫和扇出探测轨道到玻璃基板接收机。 </li><li>接下来，将与接收器的接触捐赠并安装捐助接收器组装到一个计算机控制XY翻译阶段。 注意:根据供体材料（ 例如，固体（铟）或液体（墨/膏））和它的厚度，供体和接收器衬底的相位被设置在可容易地控制（ 例如，通过一个最佳分离使用金​​属垫片）。 </li><li>聚焦入射激光束在所述载体给予体界面采用160毫米焦距的物镜和扫描横跨施主substrat梁（20微米光斑尺寸）Ë传输捐助微颠簸到接收器焊点。使用的355纳米波长和12微秒的脉冲持续时间的皮秒激光源解除铟凸点到接收机焊点在270毫焦耳/ cm 2的注量。 注:激光性能如能量，没有。脉冲，物镜的高度，坐标印刷施主微凸点接收基板和待转移准确通过计算机程序来控制所希望的图形上的精确位置的。关键实验参数（ 例如，传输的注量）需要的情况下使用其他激光源进行优化。 </li><li>对于较厚的颠簸将捐赠到一个新的区域，并重复步骤1.1.4几次。例如，重复步骤1.1.4六次以获得一摞印​​刷在彼此的顶部上对这个实验6铟凸点。最后解除凸块具有〜1.5微米的平均高度和直径为20微米（ 图2）。 注:对于这些experim需求测试凸点的表面轮廓和厚度，使用光学轮廓仪进行测定。据检查，该凸块具有一个凸/圆顶的形态为1.5微米的平均厚度，平均凸起直径（如标记为黄色的图3）。这样做的原因是由于这样的事实，所述施主熔化在激光照射区域和转移沉淀后再固化在到达接收器的表面（氧化铟具有低的熔点）。这样做的好处是，它会导致在印刷凸点给VCSEL接触垫的良好的附着力。 </li></ol></li><li>芯片到基片热压粘合（ 图4-6）: <ol><li>使用半自动倒装芯片键合机用于粘结光电芯片到碰着衬底。 </li><li>加载撞到接收机和芯片被粘合到粘结剂各自的真空板。将芯片在翻转位置， 即，其活动区域FAC荷兰国际集团下跌。 </li><li>使用一个合适的拾取工具和对准它在芯片的中心。使用的针形工具， 如图5接下来，挑使用该拾取工具的芯片。 </li><li>对齐的芯片键合焊盘与使用照相机对准系统接收基板上的相应接触垫。 </li><li>一旦对准位置在基板上的芯片上。 </li><li>施加热（〜200℃）和压力（12.5克力/凸点）同时实现芯片到衬底的电气和机械互连。 </li></ol></li><li>封装保税组件（ 图4-6）的: <ol><li>分配围绕接合组件的使用注射器针的边缘的光学透明粘合剂。封装增加了粘合组件的机械可靠性。使用单组分型紫外线硬化粘合剂，如NOA 86，用于封装所述接合的芯片。 </li><li>固化用UV灯为〜30秒的粘合剂。 </li></ol></li></ol>保税垂直腔面发射激光器的2表征（VCSEL的） 注:制造后的下一个步骤是评价粘合组件的电光性能。器件的光 - 电流 - 电压（LIV）的曲线被记录使用探针台后的粘接。涉及的测试步骤如下: <ol><li>放置倒装接合装置上定制的透明阶段。舞台上有钻孔的中心，方便访问由VCSEL器件发出的光孔。 </li><li>放置一个光检测器（PD）的下方的透明阶段，并与使用显微镜的接合芯片调整其活性区域。 </li><li>精确定位的镍金的探测针用显微镜探测垫。 </li><li>注入高达10mA的电流，并测量整个VCSEL的电压降并使用一个电流/电压源米单元通过它发射的光和功率计水库pectively。 </li></ol>

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The authors have nothing to disclose.

在本文中，我们已经证明了使用称为LIFT激光的直接写入技术单个VCSEL芯片热压倒装接合。所涉及的微凸点铟的印刷到利用提技术在基片接触焊点的组件的制造步骤。其次的VCSEL芯片热压倒装接合到撞底物和最终的封装。 电梯辅助接合芯片的电学，光学和机械可靠性是通过测量它们的LIV曲线和执行标准8585老化试验来评价。光学特性，机械稳定性所获得的成功，和耐用性明显突?...

激光诱导的正向转移（LIFT）是用于单步模式定义及与微米和亚微米分辨率材料转移一个多功能直写添加剂的制造方法。在本文中，我们报告一个芯片级利用LIFT作为凸点技术的垂直腔表面发射激光器（VCSEL）倒装芯片封装。倒装芯片在系统封装和集成的电子和光电（OE）组件的关键技术。为了实现致密的集成组件的精细间距焊接是必不可少的。虽然细间距粘接已经证明通过一些标准技术，但有在组合在一起的其他重要特性，如柔软性，成本效益，速度，精度和低加工温度方面的空隙。为了满足这些要求，我们证明LIFT辅助热压粘合方法，OE组件的精细间距焊接。 以LIFT，要被打印的材料（称为供体 ）的薄膜沉积到一个表面上的激光的透明支撑基板（简称为载体 ）的， 图1示出了这种技术的基本原理。足够的强度的入射激光脉冲然后聚焦在载波施主接口，提供转发来自照射区中的供体像素转移到另一衬底上所需地放于靠近所述推进力（称为接收器 ）。 LIFT最早在1986报道Bohandy作为一种技术来打印微米大小的铜线用于修复受损的光掩模3。因为它的第一示范这一技术已获得显著兴趣作为微纳米制造技术的受控图案化和打印的各种材料，如陶瓷4，碳纳米管5，量子点6，活细胞7，图烯8，对于不同的应用，例如生物传感器9中，有机发光二极管10，光电元件11，电浆传感器12，有机电子器件13和倒装芯片键合14,15。 升降机相比具有若干优点，例如简单性，速度，灵活性，成本效益，高分辨率和准确性的OE组件的倒装芯片封装的现有倒装芯片凸点和粘结技术。

<table><tbody><tr><td>Laser source</td><td>3D MicroMac (3DMM)</td><td>2912-295</td><td></td></tr><tr><td>Photodetector</td><td>Newport&amp;nbsp;</td><td>818 series</td><td></td></tr><tr><td>Source measurement unit</td><td>Keithley&amp;nbsp;</td><td>2401</td><td></td></tr><tr><td>Power meter</td><td>Newport&amp;nbsp;</td><td>1930</td><td></td></tr><tr><td>Underfill</td><td>Norlands</td><td>NOA 86</td><td></td></tr><tr><td>UV lamp</td><td>Omnicure</td><td>Series 1000 UV</td><td></td></tr><tr><td>Probe station</td><td>Cascade Microtech</td><td>model 42</td><td></td></tr><tr><td>Flip-chip bonder</td><td>Dr. Tresky</td><td>T-320 X</td><td></td></tr></tbody></table>

laser-induced forward transfer for flip-chip packaging of single dies

倒装芯片（FC）封装是一个关键的技术用于实现在微电子工业的高性能，超小型化和高密度电路。在该技术中，芯片和/或所述衬底撞着和两个通过这些导电性凸点接合。许多凸点技术已被开发，并自1960年1诸如模版印刷，螺柱凸点，蒸发和电解/电镀2引入FC技术的深入研究。尽管进展，这些方法都取得了它们都从一个遭受或需要解决诸如成本，复杂的处理步骤，加工温度高，制造时间，最重要的是，缺乏灵活性多个缺点。在本文中，我们展示了被称为激光诱导转发转移（LIFT）的简单和具有成本效益的基于激光的凸点形成技术3。使用LIFT技术广泛凹凸材料可以BË打印在单步具有很大的灵活性，高的速度和准确性在RT。另外，升降机使凸起和接合向下芯片级，它是用于制造超微型电路是至关重要的。

图7示出了从许多倒装接合的VCSEL芯片之一被记录，一个典型的LIV曲线。测量光功率给供应商之间的良好匹配引用值所指示的绑定设备后粘接的成功运作。该曲线也被记录优先和后封装和比较后可知，得到密封剂已经没有对芯片的功能影响（ 见图7）。另外，记录的倒装接合的VCSEL和那些从裸片记录的IV曲线之间的比较产生了很好的匹配，从而，这表明由于发生向解除凸块?...

Watch this Scientific Journal Video about Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies at JoVE.com

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

我们演示了如何使用激光诱导转发转移（LIFT）技术光电元器件的倒装芯片组装的。这种方法提供了一种简单，经济有效的，低的温度下，细间距凸点和粘结片上大规模用于光电应用实现高密度电路快速且灵活的解决方案。

激光诱导转发转移单人死于倒装芯片封装

Flip-chip (FC) packaging is a key technology for realizing high performance, ultra-miniaturized and high-density circuits in the micro-electronics ...

laser-induced-forward-transfer-for-flip-chip-packaging-of-single-dies

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Engineering

12.3K 次观看.  Ghent University-imec. 我们演示了如何使用激光诱导转发转移（LIFT）技术光电元器件的倒装芯片组装的。这种方法提供了一种简单，经济有效的，低的温度下，细间距凸点和粘结片上大规模用于光电应用实现高密度电路快速且灵活的解决方案。 

视频: Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

Lensless Fluorescent Microscopy on a Chip

On-chip lensless imaging in general aims to replace bulky lens-based optical microscopes with simpler and more compact designs, especially for high-throughput screening applications. This emerging technology platform has the potential to eliminate the need for bulky and/or costly optical components through the help of novel theories and digital reconstruction algorithms. Along the same lines, here we demonstrate an on-chip fluorescent microscopy modality that can achieve e.g., &lt;4&mu;m spatial resolution over an ultra-wide field-of-view (FOV) of &gt;0.6-8 cm2 without the use of any lenses, mechanical-scanning or thin-film based interference filters. In this technique, fluorescent excitation is achieved through a prism or hemispherical-glass interface illuminated by an incoherent source. After interacting with the entire object volume, this excitation light is rejected by total-internal-reflection (TIR) process that is occurring at the bottom of the sample micro-fluidic chip. The fluorescent emission from the excited objects is then collected by a fiber-optic faceplate or a taper and is delivered to an optoelectronic sensor array such as a charge-coupled-device (CCD). By using a compressive-sampling based decoding algorithm, the acquired lensfree raw fluorescent images of the sample can be rapidly processed to yield e.g., &lt;4&mu;m resolution over an FOV of &gt;0.6-8 cm2. Moreover, vertically stacked micro-channels that are separated by e.g., 50-100 &mu;m can also be successfully imaged using the same lensfree on-chip microscopy platform, which further increases the overall throughput of this modality. This compact on-chip fluorescent imaging platform, with a rapid compressive decoder behind it, could be rather valuable for high-throughput cytometry, rare-cell research and microarray-analysis.

A lensless on-chip fluorescent microscopy platform is demonstrated that can image fluorescent objects over an ultra-wide field-of-view of e.g., &#62;0.6-8 cm2 with &#60;4&#956;m resolution using a compressive sampling based decoding algorithm. Such a compact and wide-field fluorescent on-chip imaging modality could be valuable for high-throughput cytometry, rare-cell research and microarray-analysis.

片上的无透镜荧光显微镜

On-chip lensless imaging in general aims to replace bulky lens-based optical microscopes with simpler and more compact designs, especially for ...

科研

生物工程

Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping

As mass-produced silicon transistors have reached the nano-scale, their behavior and performances are increasingly affected, and often deteriorated, by quantum mechanical effects such as tunneling through single dopants, scattering via interface defects, and discrete trap charge states. However, progress in silicon technology has shown that these phenomena can be harnessed and exploited for a new class of quantum-based electronics. Among others, multi-layer-gated silicon metal-oxide-semiconductor (MOS) technology can be used to control single charge or spin confined in electrostatically-defined quantum dots (QD). These QD-based devices are an excellent platform for quantum computing applications and, recently, it has been demonstrated that they can also be used as single-electron pumps, which are accurate sources of quantized current for metrological purposes. Here, we discuss in detail the fabrication protocol for silicon MOS QDs which is relevant to both quantum computing and quantum metrology applications. Moreover, we describe characterization methods to test the integrity of the devices after fabrication. Finally, we give a brief description of the measurement set-up used for charge pumping experiments and show representative results of electric current quantization.

The fabrication process and experimental characterization techniques relevant to single-electron pumps based on silicon metal-oxide-semiconductor quantum dots are discussed.

硅金属 - 氧化物 - 半导体量子点单电子泵

As mass-produced silicon transistors have reached the nano-scale, their behavior and performances are increasingly affected, and often deteriorated, by ...

工程学

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Synchrotron radiation micro-tomography (SR&#181;T) is a non-destructive three-dimensional (3D) imaging technique that offers high flux for fast data acquisition times with high spatial resolution. In the electronics industry there is serious interest in performing failure analysis on 3D microelectronic packages, many which contain multiple levels of high-density interconnections. Often in tomography there is a trade-off between image resolution and the volume of a sample that can be imaged. This inverse relationship limits the usefulness of conventional computed tomography (CT) systems since a microelectronic package is often large in cross sectional area 100-3,600 mm2, but has important features on the micron scale. The micro-tomography beamline at the Advanced Light Source (ALS), in Berkeley, CA USA, has a setup which is adaptable and can be tailored to a sample&#39;s properties, i.e., density, thickness, etc., with a maximum allowable cross-section of 36 x 36 mm. This setup also has the option of being either monochromatic in the energy range ~7-43 keV or operating with maximum flux in white light mode using a polychromatic beam. Presented here are details of the experimental steps taken to image an entire 16 x 16 mm system within a package, in order to obtain 3D images of the system with a spatial resolution of 8.7 &#181;m all within a scan time of less than 3 min. Also shown are results from packages scanned in different orientations and a sectioned package for higher resolution imaging. In contrast a conventional CT system would take hours to record data with potentially poorer resolution. Indeed, the ratio of field-of-view to throughput time is much higher when using the synchrotron radiation tomography setup. The description below of the experimental setup can be implemented and adapted for use with many other multi-materials.

For this study synchrotron radiation micro-tomography, a non-destructive three-dimensional imaging technique, is employed to investigate an entire microelectronic package with a cross-sectional area of 16 x 16 mm. Due to the synchrotron&#39;s high flux and brightness the sample was imaged in just 3 min&#160;with an 8.7 &#181;m spatial resolution.

利用同步辐射微断层调查的多尺度三维微电子封装

Synchrotron radiation micro-tomography (SR&#181;T) is a non-destructive three-dimensional (3D) imaging technique that offers high flux for fast data ...

Laser-induced Forward Transfer of Ag Nanopaste

Over the past decade, there has been much development of non-lithographic methods1-3 for printing metallic inks or other functional materials. Many of these processes such as inkjet3 and laser-induced forward transfer (LIFT)4 have become increasingly popular as interest in printable electronics and maskless patterning has grown. These additive manufacturing processes are inexpensive, environmentally friendly, and well suited for rapid prototyping, when compared to more traditional semiconductor processing techniques. While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), LIFT can transcend both constraints if performed properly. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT)5-9, has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. In this paper, we demonstrate a simple yet versatile process for fabricating a variety of micro- and macroscale Ag structures. Structures include simple shapes for patterning electrical contacts, bridging and cantilever structures, high-aspect-ratio structures, and single-shot, large area transfers using a commercial digital micromirror device (DMD) chip.

We demonstrate the use of the Laser-induced forward transfer technique (LIFT) for the printing of high-viscosity Ag paste. This technique offers a simple, low temperature, robust process for non-lithographically printing microscale 2D and 3D structures.

银纳米糊膏的激光诱导正向传输

Over the past decade, there has been much development of non-lithographic methods1-3 for printing metallic inks or other functional materials. Many of ...

Plasmonic Trapping and Release of Nanoparticles in a Monitoring Environment

Plasmonic tweezers use surface plasmon polaritons to confine polarizable nanoscale objects. Among the various designs of plasmonic tweezers, only a few can observe immobilized particles. Moreover, a limited number of studies have experimentally measured the exertable forces on the particles. The designs can be classified as the protruding nanodisk type or the suppressed nanohole type. For the latter, microscopic observation is extremely challenging. In this paper, a new plasmonic tweezer system is introduced to monitor particles, both in directions parallel and orthogonal to the symmetric axis of a plasmonic nanohole structure. This feature enables us to observe the movement of each particle near the rim of the nanohole. Furthermore, we can quantitatively estimate the maximal trapping forces using a new fluidic channel.

A microchip fabrication process that incorporates plasmonic tweezers is presented here. The microchip enables the imaging of a trapped particle to measure maximal trapping forces.

电浆捕获和纳米粒子的释放在监控环境

Plasmonic tweezers use surface plasmon polaritons to confine polarizable nanoscale objects. Among the various designs of plasmonic tweezers, only a few ...

Multicolor Fluorescence Detection for Droplet Microfluidics Using Optical Fibers

Fluorescence assays are the most common readouts used in droplet microfluidics due to their bright signals and fast time response. Applications such as multiplex assays, enzyme evolution, and molecular biology enhanced cell sorting require the detection of two or more colors of fluorescence. Standard multicolor detection systems that couple free space lasers to epifluorescence microscopes are bulky, expensive, and difficult to maintain. In this paper, we describe a scheme to perform multicolor detection by exciting discrete regions of a microfluidic channel with lasers coupled to optical fibers. Emitted light is collected by an optical fiber coupled to a single photodetector. Because the excitation occurs at different spatial locations, the identity of emitted light can be encoded as a temporal shift, eliminating the need for more complicated light filtering schemes. The system has been used to detect droplet populations containing four unique combinations of dyes and to detect sub-nanomolar concentrations of fluorescein.

Multicolor fluorescence detection in droplet microfluidics typically involves bulky and complex epifluorescence microscope-based detection systems. Here we describe a compact and modular multicolor detection scheme that utilizes an array of optical fibers to temporally encode multicolor data collected by a single photodetector.

使用多色荧光检测液滴微流控光纤

Fluorescence assays are the most common readouts used in droplet microfluidics due to their bright signals and fast time response. Applications such as ...

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

Described is an experimental procedure that enables high-power laser irradiation of microfabricated targets. Targets are brought to the laser focus by a closed feedback loop that operates between the target manipulator and a ranging sensor. The target fabrication process is explained in detail. Representative results of MeV-level proton beams generated by irradiation of 600 nm thick gold foils at a rate of 0.2 Hz are given. The method is compared with other replenishable target systems and the prospects of increasing the shot rates to above 10 Hz are discussed.

A protocol is presented for automated irradiation of thin gold foils with high intensity laser pulses. The protocol includes a step-by-step description of the micromachining target fabrication process and a detailed guide for how targets are brought to the laser&#39;s focus at a rate of 0.2 Hz.

用于密集激光辐照实验的微制造目标的自动交付

Described is an experimental procedure that enables high-power laser irradiation of microfabricated targets. Targets are brought to the laser focus by a ...

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to entry for non-specialists who would benefit greatly from the ability to develop their own microfluidic devices to address research questions. Particularly lacking has been the open dissemination of protocols related to photolithography, a key step in the development of a replica mold for the manufacture of polydimethylsiloxane (PDMS) devices. While the fabrication of single height silicon masters has been explored extensively in literature, fabrication steps for more complicated photolithography features necessary for many interesting device functionalities (such as feature rounding to make valve structures, multi-height single-mold patterning, or high aspect ratio definition) are often not explicitly outlined. 
Here, we provide a complete protocol for making multilayer microfluidic devices with valves and complex multi-height geometries, tunable for any application. These fabrication procedures are presented in the context of a microfluidic hydrogel bead synthesizer and demonstrate the production of droplets containing polyethylene glycol (PEG diacrylate) and a photoinitiator that can be polymerized into solid beads. This protocol and accompanying discussion provide a foundation of design principles and fabrication methods that enables development of a wide variety of microfluidic devices. The details included here should allow non-specialists to design and fabricate novel devices, thereby bringing a host of recently developed technologies to their most exciting applications in biological laboratories.

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

多级可变高度的光刻多层带瓣微流体装置

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to ...

High-resolution Volume Imaging of Neurons by the Use of Fluorescence eXclusion Method and Dedicated Microfluidic Devices

Volume is an important parameter regarding physiological and pathological characteristics of neurons at different time scales. Neurons are quite unique cells regarding their extended ramified morphologies and consequently raise several methodological challenges for volume measurement. In the particular case of in vitro neuronal growth, the chosen methodology should include sub-micrometric axial resolution combined with full-field observation on time scales from minutes to hours or days. Unlike other methods like cell shape reconstruction using confocal imaging, electrically-based measurements or Atomic Force Microscopy, the recently developed Fluorescence eXclusion method (FXm) has the potential to fulfill these challenges. However, although being simple in its principle, implementation of a high-resolution FXm for neurons requires multiple adjustments and a dedicated methodology. We present here a method based on the combination of fluorescence exclusion, low-roughness multi-compartments microfluidic devices, and finally micropatterning to achieve in vitro measurements of local neuronal volume. The high resolution provided by the device allowed us to measure the local volume of neuronal processes (neurites) and the volume of some specific structures involved in neuronal growth, such as growth cones (GCs).

Volume is an important parameter regarding physiological and pathological characteristics of cells. We describe a fluorescent exclusion method allowing full-field measurement of in vitro neuronal volume with sub-micrometric axial resolution required for the analysis of neurites and dynamic structures implied in neuronal growth.

利用荧光排斥法和专用微流控器件对神经元进行高分辨率体积成像

Volume is an important parameter regarding physiological and pathological characteristics of neurons at different time scales. Neurons are quite unique ...

神经科学

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

In the context of biomaterials and drug testing in animal models, this study presents a streamlined protocol for fabricating a novel implantable integrated imaging window. The micro-device comprises a sophisticated system of microlenses coupled with micro-scaffolds specifically designed for in vivo quantification of the immune response using advanced non-linear excitation microscopy. The protocol is based on two-photon polymerization (2PP) of the biocompatible photoresist SZ2080, which enables the fabrication of micro-scaffolds and micro-lenses in a continuous sequence to enhance manufacturing efficiency and precision. To further improve speed, accuracy, and structural integrity, a hybrid optics fabrication approach was implemented, involving the 2PP of the microlens outer shell followed by UV bulk crosslinking of the inner core. This innovative technique optimizes the optical properties of the microlenses while streamlining the production process. The resulting micro-device demonstrates high reproducibility and mechanical stability, making it an effective method for prototyping microscale optical systems for a range of biomedical applications.

This protocol describes the fabrication of an implantable integrated imaging window using 3D laser printing. The window consists of a system of microlenses coupled with micro-scaffolds. The method involves two-photon polymerization (2PP) of the biocompatible photoresist SZ2080 in a continuous sequence, optimizing manufacturing efficiency and alignment between the different components.

激光诱导转发转移单人死于倒装芯片封装

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片上的无透镜荧光显微镜

硅金属 - 氧化物 - 半导体量子点单电子泵

利用同步辐射微断层调查的多尺度三维微电子封装

银纳米糊膏的激光诱导正向传输

电浆捕获和纳米粒子的释放在监控环境

使用多色荧光检测液滴微流控光纤

用于密集激光辐照实验的微制造目标的自动交付

多级可变高度的光刻多层带瓣微流体装置

利用荧光排斥法和专用微流控器件对神经元进行高分辨率体积成像

集成在微结构成像窗口中的植入式光学元件的微纳加工，用于先进的体内成像

激光诱导转发转移单人死于倒装芯片封装

摘要

探索更多视频

此视频中的章节

片上的无透镜荧光显微镜

硅金属 - 氧化物 - 半导体量子点单电子泵

利用同步辐射微断层调查的多尺度三维微电子封装

银纳米糊膏的激光诱导正向传输

电浆捕获和纳米粒子的释放在监控环境

使用多色荧光检测液滴微流控光纤

用于密集激光辐照实验的微制造目标的自动交付

多级可变高度的光刻多层带瓣微流体装置

利用荧光排斥法和专用微流控器件对神经元进行高分辨率体积成像

集成在微结构成像窗口中的植入式光学元件的微纳加工，用于先进的 体内 成像

集成在微结构成像窗口中的植入式光学元件的微纳加工，用于先进的体内成像