This work was funded in part by National Science Foundation grant No. DMR-0420785 (XPS). We thank the University of Michigan&#39;s Michigan Center for Materials Characterization, (MC)2, for its assistance with XPS, and the University of Michigan Van Vlack laboratory for XRD. We would also like to thank Thomas Kratofil for his assistance with bulk materials preparation.

Caution: Wear necessary personal protective equipment (PPE) including close-toed shoes, full length pants, safety glasses, particulate filtration mask, lab coat, and gloves as oxide powders pose a risk for skin contact irritation and eye contact irritation. Consult all relevant material safety data sheets before beginning for additional PPE requirements. Synthesis should be done with the use of engineering controls such as a fume hood.
1. Bulk Synthesis of Entropy-stabilized Oxides
<ol>
	<li...

<ol>
	<li>Tsai, M. H., Yeh, J. W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Entropy+Alloys:+A+Critical+Review.">High-Entropy Alloys: A Critical Review.</a> Mater Res Lett. 2 (3), 107-123 (2014).</li><li>Yeh, J. W., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanostructured+high-entropy+alloys+with+multiple+principal+elements:+Novel+alloy+design+concepts+and+outcomes.">Nanostructured high-entropy alloys with multiple principal elements: Novel alloy design concepts and outcomes.</a> Adv Eng Mater. 6 (5), 299-303 (2004).</li><li>Gao, M. C., Carney, C. S., Dogan, N., Jablonksi, P. D., Hawk, J. A., Alman, D. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Design+of+Refractory+High-Entropy+Alloys.">Design of Refractory High-Entropy Alloys.</a> Jom. 67 (11), 2653-2669 (2015).</li><li>Gludovatz, B., Hohenwarter, A., Catoor, D., Chang, E. H., George, E. P., Ritchie, R. O. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+fracture-resistant+high-entropy+alloy+for+cryogenic+applications.">A fracture-resistant high-entropy alloy for cryogenic applications.</a> Science. 345 (6201), 1153-1158 (2014).</li><li>Zou, Y., Ma, H., Spolenak, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultrastrong+ductile+and+stable+high-entropy+alloys+at+small+scales.">Ultrastrong ductile and stable high-entropy alloys at small scales.</a> Nat Commun. 6, 7748 (2015).</li><li>Poulia, A., Georgatis, E., Lekatou, A., Karantzalis, A. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Microstructure+and+wear+behavior+of+a+refractory+high+entropy+alloy.">Microstructure and wear behavior of a refractory high entropy alloy.</a> Int J Refract Met Hard Mater. 57, 50-63 (2016).</li><li>Rost, C. M., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Entropy-stabilized+oxides.">Entropy-stabilized oxides.</a> Nat Commun. 6, 8485 (2015).</li><li>Jiang, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+new+class+of+high-entropy+perovskite+oxides.">A new class of high-entropy perovskite oxides.</a> Scripta Mater. 142, 116-120 (2018).</li><li>Gild, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Entropy+Metal+Diborides:+A+New+Class+of+High-Entropy+Materials+and+a+New+Type+of+Ultrahigh+Temperature+Ceramics.">High-Entropy Metal Diborides: A New Class of High-Entropy Materials and a New Type of Ultrahigh Temperature Ceramics.</a> Sci Rep. 6 (October), 37946 (2016).</li><li>Schlom, D. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=others+Strain+Tuning+of+Ferroelectric+Thin+Films.">others Strain Tuning of Ferroelectric Thin Films.</a> Annu Rev Mater Res. 37, 589-626 (2007).</li><li>Zhao, T., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrical+control+of+antiferromagnetic+domains+in+multiferroic+BiFeO3+films+at+room+temperature.">Electrical control of antiferromagnetic domains in multiferroic BiFeO3 films at room temperature.</a> Nat Mater. 5 (10), 823-829 (2006).</li><li>Borisov, P., Hochstrat, A., Chen, X., Kleemann, W., Binek, C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Magnetoelectric+Switching+of+Exchange+Bias.">Magnetoelectric Switching of Exchange Bias.</a> Phys Rev Lett. 94 (11), 117203 (2005).</li><li>Weidenkaff, A., Robert, R., Aguirre, M., Bocher, L., Lippert, T., Canulescu, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Development+of+thermoelectric+oxides+for+renewable+energy+conversion+technologies.">Development of thermoelectric oxides for renewable energy conversion technologies.</a> Renew Energy. 33 (2), 342-347 (2008).</li><li>Pickett, W. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electronic+structure+of+the+high-temperature+oxide+superconductors.">Electronic structure of the high-temperature oxide superconductors.</a> Rev Mod Phys. 61 (2), 433-512 (1989).</li><li>Berardan, D., Franger, S., Dragoe, D., Meena, A. K., Dragoe, N. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Colossal+dielectric+constant+in+high+entropy+oxides.">Colossal dielectric constant in high entropy oxides.</a> Phys Status Solidi - Rapid Res Lett. 10 (4), 328-333 (2016).</li><li>Meisenheimer, P. B., Kratofil, T. J., Heron, J. T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Giant+Enhancement+of+Exchange+Coupling+in+Entropy-Stabilized+Oxide+Heterostructures.">Giant Enhancement of Exchange Coupling in Entropy-Stabilized Oxide Heterostructures.</a> Sci Rep. 7 (1), 13344 (2017).</li><li>Miracle, D. B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-Entropy+Alloys:+A+Current+Evaluation+of+Founding+Ideas+and+Core+Effects+and+Exploring+&amp;#34;Nonlinear+Alloys.&amp;#34;.">High-Entropy Alloys: A Current Evaluation of Founding Ideas and Core Effects and Exploring &amp;#34;Nonlinear Alloys.&amp;#34;.</a> Jom. , 1-7 (2017).</li><li>Mannhart, J., Schlom, D. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Oxide+Interfaces-An+Opportunity+for+Electronics.">Oxide Interfaces-An Opportunity for Electronics.</a> Science. 327 (5973), 1607-1611 (2010).</li><li>Mundy, J. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Atomically+engineered+ferroic+layers+yield+a+room-temperature+magnetoelectric+multiferroic.">Atomically engineered ferroic layers yield a room-temperature magnetoelectric multiferroic.</a> Nature. 537 (7621), 523-527 (2016).</li><li>Martin, L. W., Chu, Y. H., Ramesh, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Advances+in+the+growth+and+characterization+of+magnetic,+ferroelectric,+and+multiferroic+oxide+thin+films.">Advances in the growth and characterization of magnetic, ferroelectric, and multiferroic oxide thin films.</a> Mater Sci Eng R Rep. 68 (4), 89-133 (2010).</li><li>Saremi, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Enhanced+Electrical+Resistivity+and+Properties+via+Ion+Bombardment+of+Ferroelectric+Thin+Films.">Enhanced Electrical Resistivity and Properties via Ion Bombardment of Ferroelectric Thin Films.</a> Adv Mater. 28 (48), 10750-10756 (2016).</li><li>Cullity, B. D., Weymouth, J. W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Elements+of+X-ray+Diffraction.">Elements of X-ray Diffraction.</a> Am J Phys. 25 (6), 394-395 (1957).</li><li>Rijnders, G. J. H. M., Koster, G., Blank, D. H. A., Rogalla, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=In+situ+monitoring+during+pulsed+laser+deposition+of+complex+oxides+using+reflection+high+energy+electron+diffraction+under+high+oxygen+pressure.">In situ monitoring during pulsed laser deposition of complex oxides using reflection high energy electron diffraction under high oxygen pressure.</a> Appl Phys Lett. 70 (14), 1888-1890 (1997).</li><li>Sullivan, M. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Complex+oxide+growth+using+simultaneous+in+situ+reflection+high-energy+electron+diffraction+and+x-ray+reflectivity:+When+is+one+layer+complete?.">Complex oxide growth using simultaneous in situ reflection high-energy electron diffraction and x-ray reflectivity: When is one layer complete?.</a> Appl Phys Lett. 106 (3), 031604 (2015).</li><li>Eres, G., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Time-resolved+study+of+SrTiO3+homoepitaxial+pulsed-laser+deposition+using+surface+x-ray+diffraction.">Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction.</a> Appl Phys Lett. 80 (18), 3379-3381 (2002).</li><li>Fleet, A., Dale, D., Suzuki, Y., Brock, J. D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Observed+Effects+of+a+Changing+Step-Edge+Density+on+Thin-Film+Growth+Dynamics.">Observed Effects of a Changing Step-Edge Density on Thin-Film Growth Dynamics.</a> Phys Rev Lett. 94 (3), 036102 (2005).</li><li>Luca, G. D., Strkalj, N., Manz, S., Bouillet, C., Fiebig, M., Trassin, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoscale+design+of+polarization+in+ultrathin+ferroelectric+heterostructures.">Nanoscale design of polarization in ultrathin ferroelectric heterostructures.</a> Nat Commun. 8 (1), 1419 (2017).</li><li>De Luca, G., Rossell, M. D., Schaab, J., Viart, N., Fiebig, M., Trassin, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Domain+Wall+Architecture+in+Tetragonal+Ferroelectric+Thin+Films.">Domain Wall Architecture in Tetragonal Ferroelectric Thin Films.</a> Adv Mater. 29 (7), (2017).</li><li>Gruenewald, J. H., Nichols, J., Seo, S. S. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Pulsed+laser+deposition+with+simultaneous+in+situ+real-time+monitoring+of+optical+spectroscopic+ellipsometry+and+reflection+high-energy+electron+diffraction.">Pulsed laser deposition with simultaneous in situ real-time monitoring of optical spectroscopic ellipsometry and reflection high-energy electron diffraction.</a> Rev Sci Instrum. 84 (4), 043902 (2013).</li><li>. MDC Vacuum Products | Vacuum Components, Chambers, Valves, Flanges &amp; Fittings Available from: <a target="_blank" href="https://mdcvacuum.com/DisplayContentPageFull.aspx?cc=b8ca254a-cdc0-4b71-8603-af10ce18bbcb">https://mdcvacuum.com/DisplayContentPageFull.aspx?cc=b8ca254a-cdc0-4b71-8603-af10ce18bbcb</a> (2018)</li><li>Dijkkamp, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Preparation+of+Y-Ba-Cu+oxide+superconductor+thin+films+using+pulsed+laser+evaporation+from+high+Tc+bulk+material.">Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material.</a> Appl Phys Lett. 51 (8), 619-621 (1987).</li><li>Biegalski, M. D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Relaxor+ferroelectricity+in+strained+epitaxial+SrTiO3+thin+films+on+DyScO3+substrates.">Relaxor ferroelectricity in strained epitaxial SrTiO3 thin films on DyScO3 substrates.</a> Appl Phys Lett. 88 (19), 192907 (2006).</li><li>Schlom, D. G., Chen, L. Q., Pan, X., Schmehl, A., Zurbuchen, M. A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Thin+Film+Approach+to+Engineering+Functionality+into+Oxides.">A Thin Film Approach to Engineering Functionality into Oxides.</a> J Am Ceram Soc. 91 (8), 2429-2454 (2008).</li><li>Damodaran, A. R., Breckenfeld, E., Chen, Z., Lee, S., Martin, L. W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Enhancement+of+Ferroelectric+Curie+Temperature+in+BaTiO3+Films+via+Strain-Induced+Defect+Dipole+Alignment.">Enhancement of Ferroelectric Curie Temperature in BaTiO3 Films via Strain-Induced Defect Dipole Alignment.</a> Adv Mater. 26 (36), 6341-6347 (2014).</li></ol>

We have nothing to disclose.

We have described and shown a protocol for the synthesis of bulk and high-quality, single crystalline films of (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) entropy-stabilized oxides. We expect these synthesis techniques to be applicable to a wide range of entropy-stabilized oxide compositions as more are discovere...

Since the discovery of high-entropy metal alloys in 2004, high-entropy materials have attracted significant interest due to the properties such as increased hardness1,2,3, toughness4,5, and corrosion resistance3,6. Recently, high-entropy oxides7,8 and borides9 have been discovered, opening up a large playground for material enthusiasts. Oxides, in particular, can demonstrate useful and dynamic functional properties such as ferroelectricity10, magnetoelectricity11,12, thermoelectricity13, and superconductivity14. Entropy-stabilized oxides (ESOs) have recently been shown to possess interesting, compositionally-dependent functional properties15,16, despite the significant disorder, making this new class of materials particularly exciting.
Entropy-stabilized materials are chemically homogeneous, multicomponent (typically having five or more constituents), single-phase materials where the configurational entropic contribution (<img alt="Equation 1" src="/files/ftp_upload/57746/57746eq1.jpg" />) to the Gibbs free energy (<img alt="Equation 2" src="/files/ftp_upload/57746/57746eq2.jpg" />) is significant enough to drive the formation of a single phase solid solution17. The synthesis of multicomponent ESOs, where cationic configurational disorder is observed across the cation sites, requires precise control over the composition, temperature, deposition rate, quench rate, and quench temperature7,16. This method seeks to enable the practitioner the ability to synthesize phase pure and chemically homogeneous entropy-stabilized oxide ceramic pellets and phase pure, single crystalline, flat thin films of the desired stoichiometry. Bulk materials can be synthesized with greater than 90% theoretical density enabling the study of the electronic, magnetic, and structural properties or use as sources for thin film physical vapor deposition (PVD) techniques. As the entropy-stabilized oxides considered here have five cations, thin film PVD techniques that employ five sources, such as molecular beam epitaxy (MBE) or co-sputtering, will be presented with the challenge of depositing chemically homogenous thin films due to flux drift. This protocol results in chemically homogenous, single crystalline, flat (root-mean-square (RMS) roughness of ~0.15 nm) entropy-stabilized oxide thin films from a single material source, which are shown to possess the nominal chemical composition. This thin film synthesis protocol may be enhanced by the inclusion of in situ electron or optical characterization techniques for real-time monitoring of the synthesis and refined quality control. Expected limitations of this method stem from laser energy drift which may limit the thickness of high quality films to be below 1 &#956;m.
Despite the significant advances in the growth and characterization of thin film oxide materials10,18,19,20,21, the correlation between stereochemistry and electronic structure in oxides can lead to significant differences in the final material stemming from seemingly insignificant methodological differences. Furthermore, the field of multicomponent entropy-stabilized oxides is rather nascent, with only two current reports of thin film synthesis in the literature7,16. ESOs lend themselves particularly well to this process, circumventing challenges that would be presented by chemical vapor deposition and molecular beam epitaxy. Here, we provide a detailed synthesis protocol of bulk and thin films ESOs (Figure 1), in order to minimize materials processing difficulties, unintended property variations, and improve the acceleration of discovery in the field.

<table border="0" cellpadding="0" cellspacing="0" width="754">
	<tbody>
		<tr height="20">
			<td height="20" style="height:20px;width:379px;">MAGNESIUM OXIDE 99.95%</td>
			<td style="width:180px;">Fisher</td>
			<td style="width:131px;">AA1468422</td>
			<td style="width:64px;"></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">COBALT(II) OXIDE, 99.995%</td>
			<td>Fisher</td>
			<td>AA4435414</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">NICKEL(II) OXIDE 99.998%</td>
			<td>Fisher</td>
			<td>AA1081914</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">COPPER(II) OXIDE 99.995%</td>
			<td>Fisher</td>
			<td>AA1070014</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">ZINC OXIDE 99.99%</td>
			<td>Fisher</td>
			<td>AA8781230</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">TRICHLROETHLENE SEMICNDTR 9</td>
			<td>Fisher</td>
			<td>AA39744K7</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">ACETONE SEMICNDTR GRD 99.5%</td>
			<td>Fisher</td>
			<td>AA19392K7</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">2-PROPANOL ACS 99.5%</td>
			<td>Fisher</td>
			<td>A416S4</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Mineral oil, pure</td>
			<td>Acros Organics</td>
			<td>AC415080010</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">alumina crucible</td>
			<td>MTI Corporation</td>
			<td>eq-ca-l50w40h20</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">ZIRCONIA (YSZ) GRINDING MEDIA</td>
			<td>Inframat Advanced Materials</td>
			<td>4039GM-S010</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">SiC paper 320/600/800/1200</td>
			<td>South Bay Technology</td>
			<td>SDA08032-25</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">MgO (100) substrate, 5x5x0.5 mm, 1SP</td>
			<td>MTI Corporation</td>
			<td>MGa050505S1</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">OXYGEN COMPRESSED ULTRA HIGH PURITY GRADE, 99.999%</td>
			<td>Cryogenic Gases</td>
			<td>OXYUHP</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">NITROGEN COMPRESSED EXTRA DRY GRADE</td>
			<td>Cryogenic Gases</td>
			<td>NITEX</td>
			<td></td>
		</tr>
	</tbody>
</table>

bulk and thin film synthesis of compositionally variant entropy-stabilized oxides

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (Cu variant) entropy-stabilized oxides. Phase pure and chemically homogeneous (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) ceramic pellets are synthesized and used in the deposition of ultra-high quality, phase pure, single crystalline thin films of the target stoichiometry. A detailed methodology for the deposition of smooth, chemically homogeneous, entropy-stabilized oxide thin films by pulsed laser deposition on (001)-oriented MgO substrates is described. The phase and crystallinity of bulk and thin film materials are confirmed using X-ray diffraction. Composition and chemical homogeneity are confirmed by X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy. The surface topography of thin films is measured with scanning probe microscopy. The synthesis of high quality, single crystalline, entropy-stabilized oxide thin films enables the study of interface, size, strain, and disorder effects on the properties in this new class of highly disordered oxide materials.

X-ray diffraction (XRD) spectra were taken of both the prepared (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) bulk ceramics (Figure 4a) and deposited thin films (Figure 4b). These data show that the samples are single phase...

Watch this Scientific Journal Video about Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides at JoVE.com

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

The synthesis of high quality bulk and thin film (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O entropy-stabilized oxides is presented.

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and ...

This procedure can help answer key questions in the functional oxide community, such as how chemical and physical disorder directly affect long-range magnetism. The main advantage of this technique is that allows for a large degree of tunability in the material chemistry and can be applied to a variety of ESO compositions. Demonstrating the procedure is Peter Meisenheimer, a graduate student in my lab.First, grind the required oxide powders and use a die press to compress the powder into a pellet to form the target. Sinter the target in air at 1, 100 degrees Celsius for 24 hours. Then, while still at 1, 100 degrees Celsius, remove the crucible containing the target from the furnace.Use tongs to place the target on the same heat-tolerant surface. Wait for the target to stop glowing and quickly quench the target in room-temperature water. When the target is no longer sputtering, remove the target from the water and set it aside to air-dry.Once the target is cool and dry, calculate the target density and the percent theoretical density. If the measured density is insufficient for pulsed-laser deposition, regrind and resinter the target. Prepare additional targets in this way as desired.Polish each target in a circular motion using progressively finer grits of silicon-carbide paper until the surface is reflective and uniform. Store the polished targets in a desiccator until ready to begin the pulsed-laser deposition procedure. Ensure that a 248-nanometer krypton-fluoride pulsed excimer laser with a pulsed width of about 20 nanoseconds is ready to use.Place the polished targets on the rotating carousel in the deposition chamber. Place a two by two-centimeter piece of burn paper on the final target in the beam path. Pulse the laser once and measure the resulting burn mark across both axes.Adjust the focusing lens until the beam pulse produces a 0.27 by 0.24-centimeter ellipse. Then remove the burn paper and close the chamber door. Evacuate the chamber to 0.5 torr or 67 pascals with a dry-scroll roughing pump.Then spin up the turbo pump to 1, 000 hertz and pump down the deposition chamber to a base pressure of at least 10 to the negative seventh torr or 1.3 times 10 to the negative fifth pascal, as measured by an ionization gauge. Once that pressure is achieved, reduce the turbo pump to 200 hertz. Next, sonicate a single crystalline one-side-polished magnesium oxide substrate for two minutes each in semiconductor-grade trichloroethylene, semiconductor-grade acetone, and high purity isopropyl alcohol.Dry the substrate with ultra-dry compressed nitrogen gas. Use a small amount of thermally-conductive silver paint to fix the substrate on a substrate platen. Heat the substrate and platen on a hot plate for 100 degrees Celsius for 10 minutes to cure the paint.Use the external transfer tool to place the substrate platen on the transfer arm in the load lock of the PLD. Close and pump down the load lock to at least 10 to the seventh torr or 1.3 times 10 to the negative fifth pascal. Then open the gate valve between the load lock and the deposition chamber and use the transfer arm to mount the platen on the heater assembly.Retract the transfer arm into the load lock and close the gate valve. Lower the heater to achieve a substrate target distance of seven centimeters. Next place an energy meter in the beam path just before the chamber.Irradiate the photodiode on the meter with 50 laser pulses at a rate of two hertz and determine the mean energy. Adjust the laser excitation voltage to attain an average pulse energy of 310 millijoules, with a stability of plus or minus 10 millijoules. Remove the energy meter when finished.Heat the substrate at 1, 000 degrees Celsius at 30 degrees Celsius per minute under vacuum. Hold the substrate at that temperature for 30 minutes to dehydroxylate the magnesium oxide crystal's surface. Afterwards, cool the substrate to 300 degrees Celsius at 30 degrees Celsius per minute and allow the substrate to equilibrate at that temperature for 10 minutes.Once the oxygen partial pressure is stable, set the desired target to raster and rotate and ensure that the substrate shutter is closed. Ablate the target for 2, 000 pulses at a rate of five hertz. Then open the substrate shutter, pulse the laser 10, 000 times at six hertz to deposit an approximately 80-nanometer thick entropy-stabilized oxide film on the substrate.After deposition has finished, increase the oxygen partial pressure in the chamber to one torr or 133 pascals to inhibit the formation of oxygen vacancies. Cool the sample to 40 degrees Celsius at 10 degrees Celsius per minute. Then close the flow of oxygen gas and allow the chamber pressure to stabilize.Open the gate valve, raise the heater, and use the transfer arm to move the substrate platen into the load lock. Close the gate valve and vent the load lock to atmospheric pressure. Remove the substrate platen using the external transfer tool.Use a razor blade to separate the sample and the platen. Polish the platen to remove silver paint and deposited material when finished. Two theta-omega X-ray diffraction of cobalt variant and copper variant entropy-stabilized oxides as bulk ceramics showed that the synthesized samples were the rock salt structure with no secondary phases.The deposited films were single crystalline and epitaxial to the zero-zero-one oriented magnesium oxide substrate as shown by only the zero-zero-two and zero-zero-four film peaks being observed. Laue fringes were observed around these peaks, indicating that the films were of high crystalline quality with smooth interfaces. The oscillation period was consistent with a film thickness of approximately 80 nanometers.X-ray photoelectron spectroscopy showed that their constituent cations were in the two plus oxidation state and, if applicable, were high spin. The compositions calculated from these spectra matched the nominal compositions with less than 1%error. Energy dispersive X-ray spectroscopy maps were consistent with the nominal compositions and indicated that the films were chemically homogenous.Atomic force microscopy showed that the thin films were flat across a five micrometer by five micrometer scan range with subunit cell root mean square roughness values. Low-angle two-theta omega XRD data agreed with these roughness numbers. The peak-to-peak roughness was approximately 3.3 angstroms for all films.Entropy-stabilized oxides are a nascent field of study with many desirable properties. After watching this video, you should have a good understanding of how to synthesize bulk and thin film entropy-stabilized oxide materials. PLD is an ideal method for the deposition of high-quality single crystalline thin films to investigate exotic functionalities and thus is the best technique to facilitate the study of thin film entropy-stabilized oxides.

bulk-thin-film-synthesis-compositionally-variant-entropy-stabilized

Research

Education

JoVE Core

JoVE Journal

Physics

Engineering

Unit 1

The Second Law of Thermodynamics

SCIENTISTS IN ACTION

9.4K vistas.  University of Michigan. This procedure can help answer key questions in the functional oxide community, such as how chemical and physical disorder directly affect long-range magnetism. The main advantage of this technique is that allows for a large degree of tunability in the material chemistry and can be applied to a variety of ESO compositions. Demonstrating the procedure is Peter Meisenheimer, a graduate student in my lab.First, grind the required oxide powders and use a die press to compress the powder in...