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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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13:05 min

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May 11th, 2019

DOI :

10.3791/59415-v

May 11th, 2019

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7,393 Views

Peng Wu¹, Thomas Tiedje¹

¹Department of Electrical and Computer Engineering, University of Victoria

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Keywords Plasma assisted Molecular Beam Epitaxy

II V Compound Semiconductors

Anti bixbyite Crystal Structure

High temperature Annealing

Quartz Crystal Microbalance

Sample Degassing

Sample Transfer

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