Name: fabrication of 3d carbon microelectromechanical systems (c-mems)
Uploaded: 2017-06-17T13:00:00.000+00:00
Duration: 8 min 1 s
Description: Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

この研究は、Technologico de Monterreyとカリフォルニア大学アーバイン校の支援を受けました。

1.三次元人毛由来炭素構造体の作製注記：個人用保護具を使用してください。機器を使用し、検査室の内部で作業するために、検査室の指示に従ってください。 <ol><li>採取した人毛を脱イオン水で洗浄し、N 2ガスで乾燥させて準備する。 </li><li>平行な撚り線、クロスオーバー、2本の髪の毛を巻きつけるなど、必要に応じて髪を整えます。 </li><li> SU8を使用してシリコン基板に毛を付けたり、セラミックボートに直接入れてください。 </li><li>髪に付着したシリコン基板またはボートを炉に入れる。 </li><li>炉の電源を入れ、不活性ガス（N 2 ）タンクのバルブを開きます。 注：最適なガス流量はファーネスチューブの容積に依存します。 6Lの管容積に対して6L /分の流速を適用した。炉管内に完全に不活性な環境を確立するために、最適ガスfの1.5倍のガス流量低速を最初の15分間適用した。 </li><li> 最大熱分解温度、温度上昇率、不活性ガス流量などのパラメータを設定し、炉を運転します。 <ol><li>たとえば、室温から300℃まで5℃/分の上昇率で温度を上げます。安定化のために300℃で1時間保持する。さらに温度を900℃に上げ、炭化のために1時間以上維持します。 </li><li>炉を300℃まで10℃/分の速度で冷却し、炉のヒーターを止めます。300℃後に冷却を制御する必要はありません。温度がN 2フローのみによって室温に達するまで、試料を炉内に放置する。 </li></ol></li><li>熱分解プロセスの完了時に炉とガスの流れを止めてください。 </li><li>サンプルを炉から取り出します。 </li></ol> 2. 3Dポリマー構造作製：フォトリソグラフィー<ol><li>デス適切なソフトウェアパッケージを使用して所望の3Dフォトレジスト構造の2Dレイアウトを無視し、印刷されたマスク（ すなわち、ポリエチレンフォトマスクマスク）を準備する。 注：商業サービスを使用してデザインを印刷しました。マスクのサイズは、一般に設計に依存する。 </li><li>清潔な実験施設では、2枚のホットプレートをオンにし、温度をそれぞれ65℃と95℃に設定します。 </li><li>スピンコーターと真空ポンプを入れます。真空ポンプがチューブを通してスピナーヘッドに接続されていることを確認します。 </li><li>回転スピード、ランプ、継続時間などの2ステップスピンのパラメータを設定します。最初のステップでは、スピンサイクルを開始するためにスピンスピードを500 rpmに、ランプを100 rpm / sに、スピンタイムを10秒に設定します。次のステップでは、回転速度を1000rpmに、ランプを100rpmに、回転時間を30sに設定して、フォトレジストを均一に広げます。 </li><li>基板（ すなわち、 4インチ×4インチおよび5501;厚さ1μmのSiO 2層を有する厚さm±25μmのSiウェハ）をホルダの中央に配置する。 </li><li>感光性ポリマー（すなわち、 SU8フォトレジスト）を基板の中心に直接堆積させる。表面を十分に覆うように使用してください。 </li><li>基板を保持するために「真空」ボタンを押します。 </li><li> 「実行」ボタンを押して基板をSU8でコーティングし、250μmの最終厚さを達成する。 </li><li>紡糸プロセスの完了後、再び「真空」ボタンを押して、被覆された基材をホルダーから解放する。 </li><li>ピンセットを使用してコーティングされた基材を注意深く保持し、表面を滑らかできれいに保つ。ホットプレート上に直接65℃の温度で6分間、その後ホットプレート上で95℃の温度で40分間（ソフトベーク）転写します。 注：65℃でのベーキングは、溶媒の蒸発を遅くするために必要であり、その結果、より良好なコーティングおよびより良好な接着性が得られる95℃で焼成しながらSU8をさらに緻密化する。 </li><li>その間に、スイッチを押してUV露光システムをオンにし、システムの設定ボタンを使用して露光時間を「12秒」に設定します。 注：厚さ250μmのSU8層の場合、露光エネルギーは360 mJ / cm 2でなければなりません。 </li><li>ベーキングステップ（ステップ2.10）が完了したら、基板をUV露光システムに入れ、フォトマスク（ステップ2.1からの）の印刷面をその上に置く。コーティングされた基板を覆うマスク領域全体を使用し、マスクと基板の間に隙間がないように静かに押してください。 </li><li>所定のUV設定を使用して、フォトマスクを介してSU8被覆基板をUV放射に暴露する。 </li><li>露光後ベーク（PEB）のためにホットプレート上にホットプレート上に直接65℃で5分間、95℃で14分間置くことにより、基板を再び加熱する。 注：PEBは、紫外線にさらされた領域の架橋度を高め、現像工程において、より耐溶剤性の高い塗膜を形成する。 </li><li>ビーカーに入れた専用の現像液に基質を20分間浸漬することにより未露光のフォトレジスト領域を除去する。露光されていないレジスト領域が完全に除去されるように、溶液を（慎重に）連続的に振とうする。 </li><li>基板を保持し、窒素または圧縮空気をその上に吹き付けることによって、現像された構造体を乾燥させる。 </li><li> 50倍の倍率で顕微鏡下でウェーハを検査して、フォトレジストに転写されたパターンを所望のパターンと比較する。 </li></ol> 3. 3Dカーボン構造作製：熱分解<ol><li>フォトリソグラフィー（ステップ2.1~2.17）を用いて調製した試料を、加圧された開放端の管状炉内に配置する。 </li><li>ステップ1で述べたように、炉の電源を入れ、熱分解のパラメータを設定します。ステップ1.6-1.8からのプロセスを繰り返します。 </li><li>ピンセットを使用してサンプルを注意深く取り扱い、characterizに進むation。 </li></ol>

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著者は何も開示することはない。

この論文では、天然前駆体材料または光パターニングされたポリマー構造体の熱分解に基づいて様々な炭素微細構造を製造する方法が報告されている。従来のC-MEMS / C-NEMSプロセスの両方から得られる炭素材料は、典型的にはガラス状炭素であることが判明している。ガラス状炭素は、電気化学および高温用途に広く使用される電極材料である。ガラス状炭素の微細構造は、結晶質領域と非晶?...

カーボンナノチューブ（CNT）、グラファイト、ダイヤモンド、アモルファスカーボン、ロンズデライト、バックミンスターフラーレン（C 60 ）、フルメライト（C 540 ）、フラーレン（C 540 ）、およびこれらの混合物からなる群から選択される、 C 70 ）、およびガラス状炭素1,2,3,4が含まれる 。ガラス状炭素は、高い等方性を含むその物理的性質のために最も広く使用される同素体の1つである。また、良好な導電性、低い熱膨張係数、およびガス不透過性の特性を有する。 炭素構造を得るために、炭素に富む前駆物質を連続的に探索してきた。これらの前駆体は、人工材料または特定の形状で利用可能であり、廃棄物を含む天然製品であってもよい。様々なmicr<html> o /ナノ構造は、自然界の生物学的または環境的プロセスによって形成され、従来の製造ツールを使用して作成することが極めて困難な独自の特徴をもたらす。この場合自然にパターニングが行われるので、天然および廃水炭化水素前駆体を用いたナノ材料の合成は、熱分解と呼ばれる不活性または真空雰囲気中での熱分解の簡単な一段階プロセスを用いて行うことができる。植物由来の前駆体および廃棄物（種子、繊維、および油、例えば、テレピン油、ゴマ油など）の熱分解または熱分解によって、高品質のグラフェン、単層CNT、多層CNTおよび炭素ドットが製造されている、ニーム油（ Azadirachta indica ）、ユーカリ油、パーム油、およびジャトロファ油が挙げられる。また、樟脳製品、茶樹抽出物、老廃物、昆虫、農作物、および食品が6,7 、最近、研究者たちは、多孔質カーボンマイクロファイバーを調製するための前駆体材料としてシルクコクーンを使用しています10 。人間の髪は、通常廃棄物とみなされ、このチームによって最近使用されました。これは、約50％の炭素を含む約91％のポリペプチドで構成されている。残りは酸素、水素、窒素、硫黄などの元素である11 。髪にはまた、非常に遅い劣化、高い引張強さ、高い断熱性、および高い弾性回復などのいくつかの興味深い特性がある。最近、スーパーキャパシタ12に使用されるカーボンフレークを調製し、電気化学的センシング13のための中空炭素マイクロファイバーを生成するために使用されている。 材料が非常に脆いので、三次元（3D）構造を製造するためのバルク炭素材料の機械加工は困難な作業である。フォーカスされたイオンam14,15または反応性イオンエッチング16は、この文脈において有用であり得るが、それらは高価で時間のかかるプロセスである。パターニングされたポリマー構造の熱分解に基づいたカーボンマイクロエレクトロメカニカルシステム（C-MEMS）技術は、多目的な代替法である。過去20年間で、C-MEMSおよびカーボンナノエレクトロメカニカルシステム（C-NEMS）は、簡単で安価な製造工程が必要とされたことから注目を集めている。従来のC-MEMS製造プロセスは、（i）フォトリソグラフィを用いてポリマー前駆体（ 例えばフォトレジスト）をパターニングし、（ii）パターニングされた構造の熱分解の2つのステップで実施される。 SU8フォトレジストのような紫外線（UV）硬化性ポリマー前駆体は、フォトリソグラフィーに基づいて構造をパターン形成するためにしばしば使用される。一般に、フォトリソグラフィプロセスは、スピンコーティング、ソフトベーク、UV露光、ポストベーク、およびデベロップlopment。 C-MEMSの場合、シリコン;二酸化ケイ素;窒化ケイ素;石英;最近では、サファイアが基板として使用されている。光パターニングされたポリマー構造体は、無酸素環境下で高温（800〜1100℃）で炭化される。真空または不活性雰囲気中のそれらの高温では、非炭素元素の全てが除去され、炭素のみが残る。この技術は、電気化学的検出17 、エネルギー貯蔵18 、摩擦電​​気ナノ発電19 、および動電学的粒子操作20を含む多くの用途に非常に有用な高品質のガラス状炭素構造の達成を可能にする。 C-MEMSを使用した高アスペクト比は比較的容易になり、幅広い種類の炭素電極用途18,21 、 </sup&gt; 22,23 、しばしば貴金属電極を置き換える。 この研究では、非従来のC-MEMS技術13を使用して人間の毛髪から中空カーボンマイクロファイバーを製造する簡単かつ費用効果の高い方法の最近の開発が紹介されている。従来のSU8ポリマーベースのC-MEMSプロセスについてもここで説明します。具体的には、高アスペクト比の固体および中空SU8構造の製造手順が記載されている24。

<table><tbody><tr><td>SU8-2100</td><td>Microchem</td><td>Product number-Y1110750500L</td><td></td></tr><tr><td>Spinner</td><td>Laurell Technologies Corporation</td><td>Model-WS650HZB-23NPP/UD3</td><td></td></tr><tr><td>Hotplate</td><td>Torrey Pines Scientific</td><td>HS61</td><td></td></tr><tr><td>UV-exposer</td><td>Mercury Lamp, SYLVANIA</td><td>H44GS-100M, P/N-34-0054-01</td><td></td></tr><tr><td>Photomask</td><td>CAD/Art</td><td></td><td>No number</td></tr><tr><td>Developer&amp;nbsp;</td><td>Microchem</td><td>Y020100 4000L&amp;nbsp;</td><td></td></tr><tr><td>DI water system</td><td>Milli Q</td><td>ZOOQOVOTO</td><td></td></tr><tr><td>IPA</td><td>CTR Sientific</td><td>CTR 01244</td><td></td></tr><tr><td>N&lt;sub&gt;2&lt;/sub&gt; gas</td><td>AOC Mexico</td><td></td><td>No number</td></tr><tr><td>Furnace</td><td>PEO 601, ATV Technologie GMBH</td><td>Model-PEO 601, Serial no.-195</td><td></td></tr><tr><td>Si/SiO&lt;sub&gt;2&lt;/sub&gt;</td><td>Noel Technologies</td><td></td><td></td></tr></tbody></table>

fabrication of 3d carbon microelectromechanical systems (c-mems)

様々なマイクロ/ナノ構造構成を有する広範囲の炭素源が本質的に利用可能である。ここでは、人の毛髪に由来する長く中空のガラス状炭素マイクロファイバーを製造するための新規な技術が導入されている。長い中空炭素構造は、N 2雰囲気中で900℃で人毛の熱分解によって作製された。熱分解に起因する物理的および化学的変化を推定するために、走査型電子顕微鏡（SEM）および電子分散型X線分光法（EDX）を用いて、天然および熱分解されたヒトの毛髪の形態および化学組成を調べた。ラマン分光法を用いて、炭素微細構造のガラス質性を確認した。熱分解した毛髪の炭素を導入してスクリーン印刷した炭素電極を改質した。修飾された電極を、ドーパミンおよびアスコルビン酸の電気化学的検出に適用した。変形されたセンサの感知性能は、fiedセンサー。所望の炭素構造設計を得るために、カーボンマイクロ/ナノ電気機械システム（C-MEMS / C-NEMS）技術が開発された。最も一般的なC-MEMS / C-NEMS製造プロセスは、（i）フォトリソグラフィを用いて感光性ポリマーのような炭素に富むベース材料のパターニング; （ii）無酸素環境下でのパターン化ポリマーの熱分解による炭化。 C-MEMS / NEMSプロセスは、マイクロバッテリ、スーパーキャパシタ、グルコースセンサ、ガスセンサ、燃料電池、および摩擦電気ナノ発電機を含む様々な用途のためのマイクロ電子デバイスを開発するために広く使用されてきた。ここでは、SU8フォトレジストを用いた高アスペクト比の中実カーボンおよび中空炭素微細構造の最近の発展が議論されている。共焦点顕微鏡法およびSEMを用いて、熱分解中の構造収縮を調べた。ラマン分光法を用いて構造の結晶化度を確認し、元素の原子百分率熱分解前後の物質中のntをEDXを用いて測定した。

人毛由来中空炭素マイクロファイバーの製造プロセスの概略を図1に示す 。炭化されたヒトの毛髪を、SEMを用いて収縮を評価するために特徴付けた。毛の直径は、熱分解により82.88±0.003μmから31.42±0.003μmに縮小した。毛髪由来カーボンマイクロファイバーを用いて作製された様々なパターンの走査電子顕微鏡（SEM）画像を図2</stron...

Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

天然の生成物であるヒトの毛髪の熱分解に基づいて、長くて中空のガラス状炭素マイクロファイバーが製造された。カーボンマイクロエレクトロメカニカルおよびカーボンナノエレクトロメカニカルシステム、またはC-MEMSおよびC-NEMSの2つの製造工程は、（i）炭素リッチなポリマー前駆体のフォトリソグラフィおよび（ii）パターン化ポリマー前駆体の熱分解である。

3Dカーボンマイクロエレクトロメカニカルシステム（C-MEMS）の製作

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

fabrication-of-3d-carbon-microelectromechanical-systems-c-mems

Research

JoVE Journal

Engineering

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

12.0K ビュー.  Tecnologico de Monterrey. 天然の生成物であるヒトの毛髪の熱分解に基づいて、長くて中空のガラス状炭素マイクロファイバーが製造された。カーボンマイクロエレクトロメカニカルおよびカーボンナノエレクトロメカニカルシステム、またはC-MEMSおよびC-NEMSの2つの製造工程は、（i）炭素リッチなポリマー前駆体のフォトリソグラフィおよび（ii）パターン化ポリマー前駆体の熱?...

ビデオ: Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip devices, and their applications. In particular, capabilities for cost-effective fabrication of polymer microstructures were transformed by the advent of soft lithography and other micromolding techniques 1, 2, and this led a revolution in applications of microfabrication to biomedical engineering and biology. Nevertheless, it remains challenging to fabricate microstructures with well-defined nanoscale surface textures, and to fabricate arbitrary 3D shapes at the micro-scale. Robustness of master molds and maintenance of shape integrity is especially important to achieve high fidelity replication of complex structures and preserving their nanoscale surface texture. The combination of hierarchical textures, and heterogeneous shapes, is a profound challenge to existing microfabrication methods that largely rely upon top-down etching using fixed mask templates. On the other hand, the bottom-up synthesis of nanostructures such as nanotubes and nanowires can offer new capabilities to microfabrication, in particular by taking advantage of the collective self-organization of nanostructures, and local control of their growth behavior with respect to microfabricated patterns. 
Our goal is to introduce vertically aligned carbon nanotubes (CNTs), which we refer to as CNT "forests", as a new microfabrication material. We present details of a suite of related methods recently developed by our group: fabrication of CNT forest microstructures by thermal CVD from lithographically patterned catalyst thin films; self-directed elastocapillary densification of CNT microstructures; and replica molding of polymer microstructures using CNT composite master molds. In particular, our work shows that self-directed capillary densification ("capillary forming"), which is performed by condensation of a solvent onto the substrate with CNT microstructures, significantly increases the packing density of CNTs. This process enables directed transformation of vertical CNT microstructures into straight, inclined, and twisted shapes, which have robust mechanical properties exceeding those of typical microfabrication polymers. This in turn enables formation of nanocomposite CNT master molds by capillary-driven infiltration of polymers. The replica structures exhibit the anisotropic nanoscale texture of the aligned CNTs, and can have walls with sub-micron thickness and aspect ratios exceeding 50:1. Integration of CNT microstructures in fabrication offers further opportunity to exploit the electrical and thermal properties of CNTs, and diverse capabilities for chemical and biochemical functionalization 3.

We present methods for fabrication of patterned microstructures of vertically aligned carbon nanotubes (CNTs), and their use as master molds for production of polymer microstructures with organized nanoscale surface texture. The CNT forests are densified by condensation of solvent onto the substrate, which significantly increases their packing density and enables self-directed formation of 3D shapes.

製造、ち密化、および3Dカーボンナノチューブの微細構造のレプリカ成形

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip ...

工学

Microfabricated Platforms for Mechanically Dynamic Cell Culture

The ability to systematically probe in vitro cellular response to combinations of mechanobiological stimuli for tissue engineering, drug discovery or fundamental cell biology studies is limited by current bioreactor technologies, which cannot simultaneously apply a variety of mechanical stimuli to cultured cells. In order to address this issue, we have developed a series of microfabricated platforms designed to screen for the effects of mechanical stimuli in a high-throughput format. In this protocol, we demonstrate the fabrication of a microactuator array of vertically displaced posts on which the technology is based, and further demonstrate how this base technology can be modified to conduct high-throughput mechanically dynamic cell culture in both two-dimensional and three-dimensional culture paradigms.

In this protocol, we demonstrate the fabrication of a microactuator array of vertically displaced posts on which the technology is based, and how this base technology can be modified to conduct high-throughput mechanically dynamic cell culture in both two-dimensional and three-dimensional culture paradigms.

機械的にダイナミックな細胞培養のための微細加工プラットフォーム

The ability to systematically probe in vitro cellular response to combinations of mechanobiological stimuli for tissue engineering, drug discovery or ...

生物工学

Micro-masonry for 3D Additive Micromanufacturing

Transfer printing is a method to transfer solid micro/nanoscale materials (herein called &#8216;inks&#8217;) from a substrate where they are generated to a different substrate by utilizing elastomeric stamps. Transfer printing enables the integration of heterogeneous materials to fabricate unexampled structures or functional systems that are found in recent advanced devices such as flexible and stretchable solar cells and LED arrays. While transfer printing exhibits unique features in material assembly capability, the use of adhesive layers or the surface modification such as deposition of self-assembled monolayer (SAM) on substrates for enhancing printing processes hinders its wide adaptation in microassembly of microelectromechanical system (MEMS) structures and devices. To overcome this shortcoming, we developed an advanced mode of transfer printing which deterministically assembles individual microscale objects solely through controlling surface contact area without any surface alteration. The absence of an adhesive layer or other modification and the subsequent material bonding processes ensure not only mechanical bonding, but also thermal and electrical connection between assembled materials, which further opens various applications in adaptation in building unusual MEMS devices.

This paper introduces a 3D additive micromanufacturing strategy (termed &#8216;micro-masonry&#8217;) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.

3D添加Micromanufacturing用マイクロ石積み

Transfer printing is a method to transfer solid micro/nanoscale materials (herein called &#8216;inks&#8217;) from a substrate where they are generated to ...

Using Micro-Electro-Mechanical Systems (MEMS) to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

I'm U De Mercy, I'm the principal investigator of Bio Stick MAMs in Medicine Labs. I did my PhD at Stanford University in electrical engineering. I did a postdoc at Harvard Medical School at MGH working on bio acoustic MAMs or mostly bio MAs.And now I'm continuing as a faculty at Harvard Medical School at Harvard MIT Health Sciences and Technology. And continuing with my research that I enjoy very much. The work that I did during my PhD was very much related to droplets and using acoustics to generate precise size droplets and control their location and position to deposit very sensitive polymers.Now we apply similar technologies to encapsulate cells in droplets and then position them on the surfaces for various applications in tissue engineering to print cells on the surfaces to pattern cells. Also, there are applications where you want to see that you can encapsulate few cells or a single cell or from the same population and to see the differences between the same population from one cell to another there being able to encapsulate cells in droplets at high throughput rates like 10, 000 cells per second kind of rates becomes very important and very useful to understand biological problems. So my research currently has two legs, I would say.One is this cell encapsulation work that I just talked about. How do we pack a cell in a droplet that's, and how can we do this repeatedly and reliably and without harming the cells? So after the cell is ejected or encapsulated in the droplet, we should be able to precisely located on a surface the cell should be functional and alive and viable.It shouldn't be harmed by the effects of ejection and so forth. So currently we have a system where we use acoustic drop focused waves to generate these droplets from open pools where we can encapsulate down to single cells in these really small droplets that are comparable to the cell size. That's very exciting in terms of applying this to cell printing and tissue engineering.The other side of my research is again using these MAMs micro electromechanical system technologies to develop low cost diagnostic tools. Mostly this research uses microfluidic approaches where we can introduce whole blood, very small volumes such as blood from a prick finger prick, less than 10 microliters that you can introduce to a chip. And from that blood we can encapsulate or you can capture certain sub-cellular populations from whole blood.Why is this important? Why should this be cheap for global health applications On top of the mountain in Africa, you want to be able to tell for a HIV patient, for instance, how many CD four T lymphocytes this patient has. Because World Health Organization says that below 200 CD four cells per microliter, you have to start treating the patients In the developed world, you use hundreds of thousands dollars of vert flow cytometers to be able to get this data.And it takes of course time to use and skill of course to be able to use these like huge table size machines. Our small chip can be introduced this small finger brick 10 microliters of whole blood and it'll capture the CD four cells using the surface protein affinities. And then you can rapidly count these cells that are captured because you know that there are CD four cells which are attached to CD four proteins antibodies on the surface of the chip.By controlling the flow rates and shear, you can make sure that the specificity and efficiency for these cell types are optimized. And there's of course always non specific binding, but by our sheer approaches we minimize these effects and make sure that between plus minus 10%errors, which is sufficient to make a diagnostic or prognostic decision on top mountain in Africa. So this has interesting applications for global health as well as these low cost techniques that are disposable can impact the developed world because now these fast blood tests which are really low cost can impact the tests that we use in the developed world.If they're optimized to higher levels of efficiency and specificity, which our initial data shows that they can be, then it'll definitely impact our lives. When I first finished my PhD, I knew more about microfluidics and that in MAMs more than anything else I could see, especially with the droplet application, I could see that if I could print cells and encapsulate cells or manipulate the few cells, single cells, that it'll have great applications in biotechnology area. And I was very interested in working on things that will actually impact people's lives.I used to apply these technologies to semiconductor industry, but then I wanted to to be useful directly to people. So I, that's what directed me towards problems in healthcare. And then that's why I made a big shift and came to a hospital, mass general hospital to the postdoc.And there, you know, I got exposed more and more to problems and it seems, and it's all clear that one of the biggest problems of the world today is global health and there comes illnesses like tuberculosis, HIV that kills thousands of people per day. And these people die not because the drugs are not there, but because there aren't enough diagnostic tools which is much more expensive than the existing drugs. So I know the technology side of the things very well.I get, I got exposed to the biological problems and the more I learned about them, the more I could see that I could make an impact. And that's how it all grew from there. And it's still continuing now.Like I seen biotechnology and in medicine there are like so many problems that actually directly cause our result into loss of people's lives and the technologies, the technology aspect of it and being able to apply it to real world medical problems is a great, I think path to follow. This is like how this whole biotechnology area I think is kind of growing and it's becoming very impactful. If you think about it, HIV cancer, those are big killers in the world.And current micro technologies, current approaches could maybe benefit from early detection of cancer by capturing these cells from blood or making it really cheap, which will make it available to masses. So all these things coming together, I think this whole microtechnology applications in healthcare in medicine could impact the future of human beings. So that's how all these things kind of come together I guess.And being in the Harvard MIT health sciences and technology where on one end you have the technology and on the other end you direct aspect, direct access to patients, direct access to doctors in Brigham and Women's Hospital where I work is a great environment. cause every person that you talk to have their problems and you could maybe it's coming from a different background, provide interesting solutions to those existing real world problems. So this is, I think how I see the whole perspective of how these medical problems meet the technology side.And we try to impact people's lives in a positive way. In single cell cap encapsulation or in cell encapsulation, the major challenge is to be able to encapsulate reliably and repeatably single cells. So you're ejecting 10, 000 hundred thousand cells per second.And how do you make sure that each droplet that you eject has a single cell? This statistics where you are changing the droplet size and minimizing the, optimizing the cell size over the droplet size, which goes into the old problem of packing spheres in a volume and what is the most efficient way to do it. So that's the biggest challenge in the cell printing area for from the technological side.The other aspect of it is now you can say print and precisely locate these cells. How can you generate these three dimensional tissues and how can you keep them alive and how can you transplant them? There comes in the biological end of the problems where you want to now exactly mimic the tissue.We have current approaches to be able to print an eyelet, a pancreas eyelet, and to be able to print using smooth muscle cells, a bladder tissue, directly mimicking what is in human or red bladder so that then we can make this tissue and test how well it performs compared to the real world existing native tissues. So that's the major challenge I guess by taking these novel technologies, how can you make this the ideal tissue that can be replaced, that can be transplanted, that's the, you know, biggest problem from the beginning because the control on single cell gives you the capability to precisely locate them. And then how do you kind of grow it from there?So it's something transplantable there where the impact of human life comes. So that's on that end, what the challenges are in the tissue engineering side of the things in southern encapsulation and in diagnostics using microfluidics, the challenge is to be able to capture a cell out of billions of cells. It's like you have a sugar particle in a salt can and you're trying to pull out that sugar particle and that's like one in a billion.So you, you're processing microliters to milliliters of whole blood and you want to be able to specifically and efficiently without any technological problems like clogging or any biological problems like non-specific binding, you want to be able to isolate at one cell out of billion cells in one microliter of whole blood, you have a few millions of cells. And for the CD four T lymphocyte case in that one microliter, we are after about thousand cells per microliter. So it's like one cell in a thousand kind of a problem where we have shown that it's doable.But when you want to go after circulating tumor cells for cancer, then the challenge becomes one in a billion. So to some summarize it, the challenge is how do we capture this one cell out of billions of other cells around it? And what is the technological aspects?What are the flow rates? What is the device design? What, what are the flow rates?What, what are the volumes of blood that has to be processed and how do you make sure that the cells you capture are the ones that you actually wanted to capture? All these aspects kind formed the whole challenge that can be summarized in one sentence, which is how do you capture this one rare cell out of billion others? So it's really a needle in a haystack kind of problem, which is exciting.And I think this is moving the technologies forward to address these problems is the current technological challenge. Being able to bring them to a level where they do the job that they're supposed to do is one thing. And then taking it to the clinic and making it a product has all different expertise such as being able to start a company, being able to patent these things and all those other aspects come into the picture.And I think we as scientists primarily don't have all of those skills that takes the products from desktop to products. So there comes in again, the importance of collaborations with people who have different backgrounds. And there are many technologies out there that I think could be very impactful and useful.They sometimes don't make it to the clinic or to the use of humankind either because it just didn't happen, wasn't the right time or other effects came into the picture that I just talked about. Or sometimes there isn't a direct link that you couldn't see that the technology could actually solve that problem. And the person who deals with the problem, or let's say the biologists or people in medicine are used to doing it one way for many years.And the people on the technology side mostly if you're not having a biotechnology focus, are not aware of the problems in medicine. So bringing these two sides together is a serious interdisciplinary research. And I think in the past years, the whole emphasis both at NIH level and that we see in research labs and universities is to generate interdisciplinary research.So people end up getting PhDs where they have to know multiple fields. For instance, for my PhD, I had to know acoustics, I had to know mems, I had to know microfluidics and I had to apply this for polymers. So now you see kinda very depth of knowledge in one field where you had to know actually three other fields quite well to be able to solve that problem.So I think the answer is in interdisciplinary research combined with people with business skills to make it available to use of the people, it's a whole big process and some inefficiencies that come in at certain locations. Cause that low percent of tech transfer.

診断ツールを開発するマイクロエレクト​​ロメカニカルシステム（MEMS）の使用

生物学

Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell cultivation. These technologies offer a wide spectrum of advantages not only for manufacturing but also for different applications. The size and shape of formed cell clusters can be influenced by the exact and reproducible architecture of the microfabricated scaffold and, therefore, the diffusion path length of nutrients and gases can be controlled.1 This is unquestionably a useful tool to prevent apoptosis and necrosis of cells due to an insufficient nutrient and gas supply or removal of cellular metabolites.
Our polymer chip, called CellChip, has the outer dimensions of 2 x 2 cm with a central microstructured area. This area is subdivided into an array of up to 1156 microcontainers with a typical dimension of 300 m edge length for the cubic design (cp- or cf-chip) or of 300 m diameter and depth for the round design (r-chip).2
So far, hot embossing or micro injection moulding (in combination with subsequent laborious machining of the parts) was used for the fabrication of the microstructured chips. Basically, micro injection moulding is one of the only polymer based replication techniques that, up to now, is capable for mass production of polymer microstructures.3 However, both techniques have certain unwanted limitations due to the processing of a viscous polymer melt with the generation of very thin walls or integrated through holes. In case of the CellChip, thin bottom layers are necessary to perforate the polymer and provide small pores of defined size to supply cells with culture medium e.g. by microfluidic perfusion of the containers.
In order to overcome these limitations and to reduce the manufacturing costs we have developed a new microtechnical approach on the basis of a down-scaled thermoforming process. For the manufacturing of highly porous and thin walled polymer chips, we use a combination of heavy ion irradiation, microthermoforming and track etching. In this so called "SMART" process (Substrate Modification And Replication by Thermoforming) thin polymer films are irradiated with energetic heavy projectiles of several hundred MeV introducing so-called "latent tracks" Subsequently, the film in a rubber elastic state is formed into three dimensional parts without modifying or annealing the tracks. After the forming process, selective chemical etching finally converts the tracks into cylindrical pores of adjustable diameter.

We present two processes for the microfabrication of porous polymer chips for three-dimensional cell cultivation. The first one is hot embossing combined with a solvent vapour welding process. The second one uses a recently developed microthermoforming process combined with ion track technology leading to a significant simplification of manufacture.

三次元細胞培養用チップサイズの足場の微細加工

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell ...

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

MEMS検査および特性評価のためのコンパクトなレンズレスデジタルホログラフィック顕微鏡

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

炭素系イオン電気機械式活性式式式式式式式アクチュエータの製造

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

A major limitation for the efficient and high-throughput structure analysis of biomolecules using cryogenic electron microscopy (cryo-EM) is the difficulty of preparing cryo-EM samples with controlled ice thickness at the nanoscale. The silicon (Si)-based chip, which has a regular array of micro-holes with graphene oxide (GO) window patterned on a thickness-controlled silicon nitride (SixNy) film, has been developed by applying microelectromechanical system (MEMS) techniques. UV photolithography, chemical vapor deposition, wet and dry etching of the thin film, and drop-casting of 2D nanosheet materials were used for mass-production of the micro-patterned chips with GO windows. The depth of the micro-holes is regulated to control the ice thickness on-demand, depending on the size of the specimen for cryo-EM analysis. The favorable affinity of GO toward biomolecules concentrates the biomolecules of interest within the micro-hole during cryo-EM sample preparation. The micro-patterned chip with GO windows enables high-throughput cryo-EM imaging of various biological molecules, as well as inorganic nanomaterials.

A newly developed micro-patterned chip with graphene oxide windows is fabricated by applying microelectromechanical system techniques, enabling efficient and high-throughput cryogenic electron microscopy imaging of various biomolecules and nanomaterials.

ハイスループット極低温電子顕微鏡のための厚さ制御されたマイクロパターンチップの作製

A major limitation for the efficient and high-throughput structure analysis of biomolecules using cryogenic electron microscopy (cryo-EM) is the ...

An Additive Manufacturing Technique for the Facile and Rapid Fabrication of Hydrogel-based Micromachines with Magnetically Responsive Components

Polyethylene glycol (PEG)-based hydrogels are biocompatible hydrogels that have been approved for use in humans by the FDA. Typical PEG-based hydrogels have simple monolithic architectures and often function as scaffolding materials for tissue engineering applications. More sophisticated structures typically take a long time to fabricate and do not contain moving components. This protocol describes a photolithography method that allows for facile and rapid microfabrication of PEG structures and devices. This strategy involves an in-house developed fabrication stage that allows for the rapid fabrication of 3D structures by building upwards in a layer-by-layer fashion. Independent moving components can also be aligned and assembled onto support structures to form integrated devices. These independent components are doped with superparamagnetic iron oxide nanoparticles that are sensitive to magnetic actuation. In this manner, the fabricated devices can be actuated using external magnets to yield movement of the components within. Hence, this technique allows for the fabrication of sophisticated MEMS-like devices (micromachines) that are composed entirely out of a biocompatible hydrogel, able to function without an onboard power source, and respond to a contact-less method of actuation. This manuscript describes the fabrication of both the fabrication set-up as well as the step-by-step method for the microfabrication of these hydrogels-based MEMS-like devices.

An additive manufacturing strategy for processing UV-crosslinkable hydrogels has been developed. This strategy allows for the layer-by-layer assembly of microfabricated hydrogel structures as well as the assembly of independent components, yielding integrated devices containing moving components that are responsive to magnetic actuation.

ハイドロゲルを用いたマイクロ磁気応答性の高いコンポーネントとの容易な迅速な製造のための製造技術の添加剤

Polyethylene glycol (PEG)-based hydrogels are biocompatible hydrogels that have been approved for use in humans by the FDA. Typical PEG-based hydrogels ...

Fabrication of a Multiplexed Artificial Cellular MicroEnvironment Array

Cellular microenvironments consist of a variety of cues, such as growth factors, extracellular matrices, and intercellular interactions. These cues are well orchestrated and are crucial in regulating cell functions in a living system. Although a number of researchers have attempted to investigate the correlation between environmental factors and desired cellular functions, much remains unknown. This is largely due to the lack of a proper methodology to mimic such environmental cues in vitro, and simultaneously test different environmental cues on cells. Here, we report an integrated platform of microfluidic channels and a nanofiber array, followed by high-content single-cell analysis, to examine stem cell phenotypes altered by distinct environmental factors. To demonstrate the application of this platform, this study focuses on the phenotypes of self-renewing human pluripotent stem cells (hPSCs). Here, we present the preparation procedures for a nanofiber array and the microfluidic structure in the fabrication of a Multiplexed Artificial Cellular MicroEnvironment (MACME) array. Moreover, overall steps of the single-cell profiling, cell staining with multiple fluorescent markers, multiple fluorescence imaging, and statistical analyses, are described.

This article describes the detailed methodology to prepare a Multiplexed Artificial Cellular MicroEnvironment (MACME) array for high-throughput manipulation of physical and chemical cues mimicking in vivo cellular microenvironments and to identify the optimal cellular environment for human pluripotent stem cells (hPSCs) with single-cell profiling.

多重の人工細胞の微小環境配列の作製

Cellular microenvironments consist of a variety of cues, such as growth factors, extracellular matrices, and intercellular interactions. These cues are ...

3Dカーボンマイクロエレクトロメカニカルシステム（C-MEMS）の製作

要約

さらに動画を探す

この動画の章

製造、ち密化、および3Dカーボンナノチューブの微細構造のレプリカ成形

機械的にダイナミックな細胞培養のための微細加工プラットフォーム

3D添加Micromanufacturing用マイクロ石積み

診断ツールを開発するマイクロエレクトロメカニカルシステム（MEMS）の使用

三次元細胞培養用チップサイズの足場の微細加工

MEMS検査および特性評価のためのコンパクトなレンズレスデジタルホログラフィック顕微鏡

炭素系イオン電気機械式活性式式式式式式式アクチュエータの製造

ハイスループット極低温電子顕微鏡のための厚さ制御されたマイクロパターンチップの作製

ハイドロゲルを用いたマイクロ磁気応答性の高いコンポーネントとの容易な迅速な製造のための製造技術の添加剤

多重の人工細胞の微小環境配列の作製

3Dカーボンマイクロエレクトロメカニカルシステム（C-MEMS）の製作

要約

さらに動画を探す

この動画の章

製造、ち密化、および3Dカーボンナノチューブの微細構造のレプリカ成形

機械的にダイナミックな細胞培養のための微細加工プラットフォーム

3D添加Micromanufacturing用マイクロ石積み

診断ツールを開発するマイクロエレクト​​ロメカニカルシステム（MEMS）の使用

三次元細胞培養用チップサイズの足場の微細加工

MEMS検査および特性評価のためのコンパクトなレンズレスデジタルホログラフィック顕微鏡

炭素系イオン電気機械式活性式式式式式式式アクチュエータの製造

ハイスループット極低温電子顕微鏡のための厚さ制御されたマイクロパターンチップの作製

ハイドロゲルを用いたマイクロ磁気応答性の高いコンポーネントとの容易な迅速な製造のための製造技術の添加剤

多重の人工細胞の微小環境配列の作製

診断ツールを開発するマイクロエレクトロメカニカルシステム（MEMS）の使用