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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

DOI :

10.3791/55649-v

June 17th, 2017

June 17th, 2017

11,890 Views

1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

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3D Carbon Structures

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