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Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate

7.2K Views

08:23 min

September 28th, 2019

DOI :

10.3791/59929-v

September 28th, 2019

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Reactive Sputtering
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Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate

7.2K Views

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