Results: The Effects of Oxygen Flow Rates on Reactive Sputtering
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Conclusion
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In the reactive sputter technique it's possible to have a fine control of the parameters which allows to deposit niobium oxide fume with different stochiometer and preference. The main advantage of this technique is the deposition of homogenous fu
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Here, we present a protocol for niobium oxide films deposition by reactive sputtering with different oxygen flow rates for use as an electron transport layer in perovskite solar cells.