Name: fabrication of soft pneumatic network actuators with oblique chambers
Uploaded: 2018-08-17T14:30:00.000+00:00
Duration: 7 min 9 s
Description: Watch this Scientific Journal Video about Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers at JoVE.com

이 작품은 중국의 국가 자연과학 기초 그랜트 51622506 및 과학 및 기술 위원회의 상하이 시 그랜트 16JC1401000 아래에 의해 지원 되었다.

참고: 프로토콜 부드러운 공기 네트워크 액추에이터의 제작 절차를 제공합니다. 제작 절차, 금형의 세트 및 여러 액츄에이터 튜브 커넥터, 하기 전에 컴퓨터 지원 설계 (CAD) 소프트웨어 되어야 합니다 3 차원 인쇄 미리와 함께 설계 되었습니다. 금형은 그림 1B에 나와 있습니다.
1. 실리콘 탄성 중합체 준비
<ol><li>실리콘 엘라 스토 머 부품 B의 5 g와 45 g A 부분의 [무게에 의해 9:1 (A:B) 부품] 같은 혼합 컨테이너 (그림 2A)에 무게. 주사기를 사용 하 여 각 부분의 비율 정확한 지 확인 하. 참고: 다른 실리콘 탄성 체에 대 한 혼합 비율에 따라 다릅니다. 다른 실리콘 엘라 스토 머가 채택 될 때 각 부분의 비율을 조정 한다.</li>
	<li>실리콘 엘라 스토 머 행성 원심 믹서로 잘 섞어. 참고: 실리콘 탄성 중합체 그것의 처리 시간을 연장 하는 낮은 온도에 저장 될 수 있었다.</li>
</ol>2. 챔버 부품 제조
<ol><li>스프레이 형 부품 A와 파트 b.의 표면에 균일 하 게 실리콘 고무 제품에 대 한 금형 릴리스 에이전트</li>
	<li>파트 A와 파트 B 챔버의 제조에 대 한 금형의 조립. 형 실리콘 탄성 중합체의 누설을 방지 하기 위해 클립의 양쪽 끝을 잡으십시오.</li>
	<li>주사기와 실리콘 엘라 스토 머의 5 mL을 연결 끝 (튜브를 연결 하기 위한 액추에이터의 한쪽 끝에 원통형 구조) 날조를 위한 금형의 구멍에 천천히 주입. 그런 다음 전체 금형 채울 실리콘 엘라 스토 머 (그림 2B). 참고: 낮은 유량을 유지 하 고 천천히 앞뒤로, 실리콘 탄성 중합체 형의 작은 구조를 입력 하도록.</li>
	<li>아니 더 많은 거품 표시 (그림 2C) 될 때까지 바늘의 팁으로 표면에 형성 하는 거품 피어스.</li>
	<li>금형의 상단 표면 따라 블레이드와 어떤 초과 실리콘 탄성 중합체 떨어져 다쳤어요.</li>
	<li>70 ° C에서 오븐에서 두고 형 실리콘 탄성 중합체 치료 때까지.</li>
	<li>주사기를 사용 하 여 거품과는 액추에이터의 표면에 나타나는 구멍에 실리콘 탄성 중합체 삽입 하.</li>
	<li>어떤 과잉 실리콘 탄성 중합체 표면에 떨어져 다쳤어요.</li>
	<li>70 ° C에서 오븐에서 두고 형 실리콘 탄성 중합체 치료 때까지.</li>
</ol>3. 베이스 부품 제조
<ol><li>C. 금형 부품의 표면에 실리콘 탄성 중합체 제품 몰드 릴리스 에이전트를 균일 하 게 스프레이</li>
	<li>금형의 C 부분에 실리콘 고무를 붓는 다.</li>
	<li>볼 수 없는 더 많은 거품 있다 때까지 바늘의 팁으로 표면에 형성 하는 거품 피어스.</li>
	<li>금형의 상단 표면 따라 블레이드와 어떤 초과 실리콘 탄성 중합체 떨어져 다쳤어요.</li>
	<li>70 ° C에서 오븐에서 두고 형 실리콘 탄성 중합체 치료 때까지.</li>
</ol>4. 액츄에이터 어셈블리
<ol><li>기본 부품의 한 면에 균등 하 게 실리콘 탄성 중합체, 1 m m 두께의 레이어를 붓는 다.</li>
	<li>기본 부분에 챔버 부분을 놓습니다. 주사기를 사용 하 여 챔버 부분과 기본 부분 (그림 2D) 사이의 공간에 주입 실리콘 탄성 중합체.</li>
	<li>실리콘 엘라 스토 머 완 치 될 때까지 70 ° C에서 오븐에 액추에이터를 놓습니다.</li>
</ol>5. 배관 연결
<ol><li>3 차원 인쇄 액츄에이터 튜브 커넥터의 남성 스 터 드 푸시에 나사에 맞는 공 압 피팅 수락을 누릅니다.</li>
	<li>바늘을 사용 하 여 실린더의 중심선을 따라 액츄에이터의 연결 끝 피어스. 약 2 m m 강철 막대와 구멍의 직경을 증가.</li>
	<li>(그림 2E) 액추에이터로 액츄에이터 튜브 커넥터 스크류.</li>
	<li>맞는 공 압 피팅 남성 스 터 드 푸시에 튜브의 섹션을 밀어.</li>
</ol>6. 누설 검사 및 수리
<ol><li>공기 소스에 액추에이터를 연결 합니다.</li>
	<li>물에서 전체 액추에이터를 배치 하 고 (그림 2F) 액추에이터 기 압. 거품은 누출 형성 여부를 관찰 합니다.</li>
	<li>주사기를 사용 하 여 누출 포인트 실리콘 엘라 스토 머를 주입. 실리콘 엘라 스토 머 완 치 될 때까지 70 ° C에서 오븐에 액추에이터를 놓습니다.</li>
	<li>필요한 경우 단계 6.1-6.3를 반복 합니다.</li>
</ol>

<ol>
	<li>Rus, D., Tolley, M. T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Design,+fabrication+and+control+of+soft+robots.">Design, fabrication and control of soft robots.</a> Nature. 521 (7553), 467-475 (2015).</li><li>Ilievski, F., Mazzeo, A. D., Shepherd, R. F., Chen, X., Whitesides, G. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Soft+robotics+for+chemists.">Soft robotics for chemists.</a> Angewandte Chemie International Edition. 50 (8), 1890-1895 (2011).</li><li>Shepherd, R. F., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Multigait+soft+robot.">Multigait soft robot.</a> Proceedings of the National Academy of Sciences of the United States of America. 108 (51), 20400-20403 (2011).</li><li>Yap, H. K., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+fully+fabric-based+bidirectional+soft+robotic+glove+for+assistance+and+rehabilitation+of+hand+impaired+patients.">A fully fabric-based bidirectional soft robotic glove for assistance and rehabilitation of hand impaired patients.</a> IEEE Robotics and Automation Letters. 2 (3), 1383-1390 (2017).</li><li>Yang, Y., Chen, Y., Li, Y., Chen, M. Z. Q., Wei, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Bioinspired+Robotic+Fingers+Based+on+Pneumatic+Actuator+and+3D+Printing+of+Smart+Material.">Bioinspired Robotic Fingers Based on Pneumatic Actuator and 3D Printing of Smart Material.</a> Soft Robotics. 4 (2), 147-162 (2017).</li><li>Gu, G. Y., Zhu, J., Zhu, L. M., Zhu, X. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+survey+on+dielectric+elastomer+actuators+for+soft+robots.">A survey on dielectric elastomer actuators for soft robots.</a> Bioinspiration &amp; Biomimetics. 12 (1), 011003 (2017).</li><li>Holland, D. P., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+soft+robotics+toolkit:+Strategies+for+overcoming+obstacles+to+the+wide+dissemination+of+soft-robotic+hardware.">The soft robotics toolkit: Strategies for overcoming obstacles to the wide dissemination of soft-robotic hardware.</a> IEEE Robotics &amp; Automation Magazine. 24 (1), 57-64 (2017).</li><li>Galloway, K. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Soft+Robotic+Grippers+for+Biological+Sampling+on+Deep+Reefs.">Soft Robotic Grippers for Biological Sampling on Deep Reefs.</a> Soft Robotics. 3 (1), 23-33 (2016).</li><li>Polygerinos, P., Wang, Z., Galloway, K. C., Wood, R. J., Walsh, C. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Soft+robotic+glove+for+combined+assistance+and+at-home+rehabilitation.">Soft robotic glove for combined assistance and at-home rehabilitation.</a> Robotics and Autonomous Systems. 73, 135-143 (2015).</li><li>Tolley, M. T., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Resilient,+Untethered+Soft+Robot.">A Resilient, Untethered Soft Robot.</a> Soft Robotics. 1 (3), 213-223 (2014).</li><li>Ainla, A., Verma, M. S., Yang, D., Whitesides, G. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Soft,+Rotating+Pneumatic+Actuator.">Soft, Rotating Pneumatic Actuator.</a> Soft Robotics. 4 (3), 297-304 (2017).</li><li>Koizumi, Y., Shibata, M., Hirai, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Rolling+tensegrity+driven+by+pneumatic+soft+actuators.">Rolling tensegrity driven by pneumatic soft actuators.</a> 2012 IEEE International Conference on Robotics and Automation (ICRA). , (2012).</li><li>Connolly, F., Polygerinos, P., Walsh, C. J., Bertoldi, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Mechanical+Programming+of+Soft+Actuators+by+Varying+Fiber+Angle.">Mechanical Programming of Soft Actuators by Varying Fiber Angle.</a> Soft Robotics. 2 (1), 26-32 (2015).</li><li>Connolly, F., Walsh, C. J., Bertoldi, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Automatic+design+of+fiber-reinforced+soft+actuators+for+trajectory+matching.">Automatic design of fiber-reinforced soft actuators for trajectory matching.</a> Proceedings of the National Academy of Sciences of the United States of America. 114 (1), 51-56 (2017).</li><li>Martinez, R. V., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Robotic+tentacles+with+three-dimensional+mobility+based+on+flexible+elastomers.">Robotic tentacles with three-dimensional mobility based on flexible elastomers.</a> Advanced Materials. 25 (2), 205-212 (2013).</li><li>Polygerinos, P., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Modeling+of+Soft+Fiber-Reinforced+Bending+Actuators.">Modeling of Soft Fiber-Reinforced Bending Actuators.</a> IEEE Transactions on Robotics. 31 (3), 778-789 (2015).</li><li>Mosadegh, B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Pneumatic+Networks+for+Soft+Robotics+that+Actuate+Rapidly.">Pneumatic Networks for Soft Robotics that Actuate Rapidly.</a> Advanced Functional Materials. 24 (15), 2163-2170 (2014).</li><li>Wang, T., Ge, L., Gu, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Programmable+design+of+soft+pneu-net+actuators+with+oblique+chambers+can+generate+coupled+bending+and+twisting+motions.">Programmable design of soft pneu-net actuators with oblique chambers can generate coupled bending and twisting motions.</a> Sensors and Actuators A: Physical. 271, 131-138 (2018).</li><li>Marchese, A. D., Katzschmann, R. K., Rus, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Recipe+for+Soft+Fluidic+Elastomer+Robots.">A Recipe for Soft Fluidic Elastomer Robots.</a> Soft Robotics. 2 (1), 7-25 (2015).</li></ol>

저자는 공개 없다.

종이 오블리크 챔버와 함께 부드러운 공기 네트워크 액츄에이터의 제작 가이드 방법 프로토콜을 제공 합니다. 프로토콜을 따라 한 액추에이터 3 h 이내 독립적으로 날조 될 수 있다. 프로토콜의 주요 단계는 다음과 같이 요약할 수 있습니다. (i)는 실리콘 탄성 중합체는 비율에서 준비 하 고 잘 혼합. (ii)는 실리콘 탄성 중합체 챔버 부품과 기본 부품의 제조에 대 한 금형에 부 어 있다. (iii) 노출된 ?...

부드러운 공 압 액츄에이터 (스파)는 부드러운 공기 압력1,2의 간단한 입력으로 작동 될 수 있는. 그들은 실리콘 탄성 체3, 직물4, 형상 기억 고분자5, 유 전체 탄성 체6등 다양 한 재료로 날조 될 수 있다. 스파 소프트 로봇 응용 프로그램8,9에 대 한 가장 유망한 장치 중 하나 되는 연구원의 준수, 교묘한 움직임, 및 간단한 제조 방법7, 그들의 성격에서 혜택을 했습니다. 스파10, 회전11, 들어온다 및12 의 변형, 확장, 확대, 절곡, 왜곡 하 고13, 를 포함 하 여 다양 한 종류에 따라 압 연 하 여 다양 한 정교한 동작을 실현할 수 있습니다. 14. 동작의 종류를 만들 수, 스파는 병렬 채널15,16, 섬유 보강재 단일 챔버와 선형 시체 같은 다른 구조에 설계 되었습니다 및 네트워크의 반복 하위 챔버17. 그 중 반복된 하위 챔버, 부드러운 공기 네트워크 액츄에이터의 네트워크와 스파 그들은 상대적으로 낮은 입력된 압력 하에서 큰 개를 생성할 수 있기 때문에 널리 채택 된다. 그러나, 이전 디자인의 대부분에서는, 액추에이터의이 종류 벤딩 동작 크게 그들의 응용 프로그램을 제한 하는 2 차원 공간에서 생성할 수 있습니다.
부드러운 공기 네트워크 액추에이터 챔버 내부 채널에 의해 연결 된 선형 배열된 그룹으로 구성 됩니다. 각 입방 챔버 다른 쌍 보다는 반대 벽의 쌍을 포함 하 고 얇은 벽에 수직인 방향으로 2 면 인플레이션을 생성 합니다. 원래, 챔버의 얇은 벽 액추에이터 본문의 긴 축에 수직이 고 긴 축 함께 급증. 이 일 직선상 inflations 챔버와 확장 가능한 비 기지에는 완전 한 순수 굽 힘 액추에이터의 이어질. 3 차원 공간에서 액추에이터의 움직임을 탐구 하는 챔버의 방향 조정 되도록 얇은 쪽 벽은 더 이상 각 챔버의 인플레이션 방향을 수 없습니다 (그림 1A), 액추에이터의 긴 축에 수직인 축에서 오프셋 하려면 선적 된다. 모든 병렬 하지만 아니라 선적 inflations 결합 절곡 및 3 차원 공간18에서 모션을 왜곡으로 액추에이터의 동작을 변경 합니다. 이 결합 된 모션 더 많은 유연성과 손 재주는 액추에이터를 사용 하며는 액추에이터 유연한 조작자, 생물학으로 고무 된 로봇, 의료 기기 등 더 실용적인 응용 프로그램에 대 한 적합 한 후보.
이 프로토콜 오블리크 챔버와 함께 부드러운 공기 네트워크 액추에이터의이 종류의 제조 방법을 보여줍니다. 그것은 실리콘 탄성 중합체, 챔버 및 기본 부품, 액추에이터를 조립, 연결 튜브, 누수, 검사 및, 필요한 경우 복구 액추에이터 조작 준비 포함 한다. 그것은 또한 정상적인 부드러운 공기 네트워크 드라이브 및 성형 방법에 대 한 몇 가지 간단한 수정으로 생산 될 수 있는 다른 소프트 액츄에이터를 조작 하 사용할 수 있습니다. 우리는 30 ° 경사 챔버와 함께 부드러운 공 압 액츄에이터를 조작 하는 자세한 단계를 제공 합니다. 다른 응용 프로그램에 대 한 다른 챔버 각도와 액츄에이터 같은 프로토콜에 따라 날조 될 수 있다. 그 외에, 다양 한 요구에 대 한 멀티 액츄에이터 시스템을 형성 하는 액추에이터를 결합할 수 있습니다.

<table><tbody><tr><td>Silicone elastomer</td><td>Wacker</td><td>ELASTOSIL M4601 A/B</td><td>Material of the actuators</td></tr><tr><td>Syringe&amp;nbsp;</td><td>Shanghai Kindly Medical Instruments&amp;nbsp;</td><td>10 ml</td><td>Used to inject silicone rubber into the hole of the mold for fabricating the connection end</td></tr><tr><td>Precision scale</td><td>Shanghai Hochoice</td><td>UTP-313</td><td>Used to weigh the silicone rubber</td></tr><tr><td>Planetary centrifugal vacuum mixer</td><td>THINKY</td><td>ARE-310</td><td>Used to mix the silicone rubber and defoam after mixing process</td></tr><tr><td>Release agent</td><td>Smooth-on</td><td>Release 200</td><td>Used for ease of demolding&amp;nbsp;</td></tr><tr><td>Needle</td><td>Shanghai Kindly Medical Instruments&amp;nbsp;</td><td></td><td>Used for Piercing the bubbles form on the surface</td></tr><tr><td>Utility blade</td><td>M&amp;amp;G Chenguang Stationery</td><td>ASS91325</td><td>Used for Scraping off excess silicone rubber along the upper surface of the mold&amp;nbsp;</td></tr><tr><td>Vacuum oven</td><td>Ningbo SI Instrument</td><td>DZF-6050</td><td>Used to reduce the cure time of the silicone rubber</td></tr><tr><td>Male stud push in fit pneumatic fitting</td><td>Zhe Jiang BLCH Pneumatic Science &amp;amp; Technology</td><td>PC4-01</td><td>Used to connect the tubing and the 3D-printed actuator tubing connector</td></tr><tr><td>Tubing</td><td>SMC</td><td>TU0425</td><td>Used for actuating the actuators</td></tr><tr><td>Vacuum pump</td><td>Zhe Jiang BLCH Pneumatic Science &amp;amp; Technology</td><td></td><td>Used as the air source</td></tr><tr><td>Pressure valve</td><td>Zhe Jiang BLCH Pneumatic Science &amp;amp; Technology</td><td>IR1000-01BG</td><td>Used for adjusting the input air pressure</td></tr></tbody></table>

fabrication of soft pneumatic network actuators with oblique chambers

부드러운 공기 네트워크 액추에이터 소프트 로봇에 가장 유망한 개폐 장치 중 하나는 혜택을에서 그들의 큰 굴곡 변형 및 낮은 입력 되고있다. 그러나, 2 차원 (2 차원) 공간에서 그들의 단조로운 벤딩 모션 형태는 다양 한 응용 프로그램에서 그들을 유지합니다. 이 종이를 3 차원 (3 차원) 공간에서 자신의 움직임을 탐험 오블리크 챔버와 함께 부드러운 공기 네트워크 액츄에이터의 상세한 제조 메서드를 제공 합니다. 오블리크 챔버의 디자인 결합 벤딩 기능, 왜곡 하 고 그들에 게 dexterously 유연한 조작자, 생물학으로 고무 된 로봇 및 의료 기기 이동 가능성을 주는 가변으로 작동 수 있습니다. 제조 공정 실리콘 탄성 중합체 준비, 챔버 및 기본 부품 제조, 액츄에이터 어셈블리, 배관 연결, 누수, 액추에이터 복구에 대 한 검사를 포함 하 여 성형 방법을 기반으로 합니다. 제조 방법은 금형에만 몇 가지 수정 액츄에이터의 일련의 급속 한 제조를 보장합니다. 테스트 결과 액추에이터 저명한 굽 힘 및 능력을 왜곡의 높은 품질을 보여 줍니다. 그리퍼의 실험에는 다른 직경을 가진 개체에 적응 하 고 충분 한 마찰을 제공 하는 개발의 장점을 보여 줍니다.

단일 액추에이터: 제조 방법을 확인 하 고 액추에이터, 30 °, 45 °, 60 °의 기능을 설명 하 액추에이터 조작 하 고 테스트 했다. 실험 설정에 대 한 공기 펌프 밸브를 활성화 하기 위해 고용 되었다. 밸브는 내부 압력을 제어 하는 액추에이터를 연결 되었다. 단일 액추에이터의 연결 끝에 고정 하 고 수직으로 배치 했다. 액추에이터는 가압 되 고, 하는 동안 두 ?...

Watch this Scientific Journal Video about Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers at JoVE.com

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

여기 선물이 오블리크 챔버와 함께 부드러운 공기 네트워크 액츄에이터의 제조 방법. 액추에이터는 부드러운 로봇에 응용 프로그램을 확장 결합 된 굽 힘과 움직임, 왜곡을 생성 할 수 있다.

오블리크 챔버와 함께 부드러운 공기 네트워크 액츄에이터의 제작

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending ...

fabrication-of-soft-pneumatic-network-actuators-with-oblique-chambers

Research

JoVE Journal

Engineering

9.0K 조회수.  Shanghai Jiao Tong University. 여기 선물이 오블리크 챔버와 함께 부드러운 공기 네트워크 액츄에이터의 제조 방법. 액추에이터는 부드러운 로봇에 응용 프로그램을 확장 결합 된 굽 힘과 움직임, 왜곡을 생성 할 수 있다.

비디오: Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive thin-films. Due to the low growth temperature, the process allows integration with modern low-&#954; dielectrics and some flexible substrates. The process is compatible with standard semiconductor fabrication, and a method for the fabrication of electrical 4-point probe test structures for vertical interconnect test structures is presented. Using scanning electron microscopy the morphology of the CNT bundles is investigated, which demonstrates vertical alignment of the CNT and can be used to tune the CNT growth time. With Raman spectroscopy the crystallinity of the CNT is investigated. It was found that the CNT have many defects, due to the low growth temperature. The electrical current-voltage measurements of the test vertical interconnects displays a linear response, indicating good ohmic contact was achieved between the CNT bundle and the top and bottom metal electrodes. The obtained resistivities of the CNT bundle are among the average values in the literature, while a record-low CNT growth temperature was used.

A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.

반도체 기술과 호환 저온 탄소 나노 튜브 수직 상호 연결의 제작

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive ...

연구

공학

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an elastomeric dielectric membrane sandwiched between two compliant electrodes. The large actuation strains of these transducers when used as actuators (over 300% area strain) and their soft and compliant nature has been exploited for a wide range of applications, including electrically tunable optics, haptic feedback devices, wave-energy harvesting, deformable cell-culture devices, compliant grippers, and propulsion of a bio-inspired fish-like airship. In most cases, DETs are made with a commercial proprietary acrylic elastomer and with hand-applied electrodes of carbon powder or carbon grease. This combination leads to non-reproducible and slow actuators exhibiting viscoelastic creep and a short lifetime. We present here a complete process flow for the reproducible fabrication of DETs based on thin elastomeric silicone films, including casting of thin silicone membranes, membrane release and prestretching, patterning of robust compliant electrodes, assembly and testing. The membranes are cast on flexible polyethylene terephthalate (PET) substrates coated with a water-soluble sacrificial layer for ease of release. The electrodes consist of carbon black particles dispersed into a silicone matrix and patterned using a stamping technique, which leads to precisely-defined compliant electrodes that present a high adhesion to the dielectric membrane on which they are applied.

This manuscript shows the fabrication process for the manufacture of dielectric elastomer soft actuators based on silicone membranes. The three key stages of production are presented in detail: blade casting of thin silicone membranes; pad printing of compliant electrodes; and the assembly of all the components.

실리콘 엘라스토머 계 유전 액츄에이터 제조 공정

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

Indirect Fabrication of Lattice Metals with Thin Sections Using Centrifugal Casting

One of the typical methods to manufacture 3D lattice metals is the direct-metal additive manufacturing (AM) process such as Selective Laser Melting (SLM) and Electron Beam Melting (EBM). In spite of its potential processing capability, the direct AM method has several disadvantages such as high cost, poor surface finish of final products, limitation in material selection, high thermal stress, and anisotropic properties of parts. We propose a cost-effective method to manufacture 3D lattice metals. The objective of this study is to provide a detailed protocol on fabrication of 3D lattice metals having a complex shape and a thin wall thickness; e.g., octet truss made of Al and Cu alloys having a unit cell length of 5 mm and a cell wall thickness of 0.5 mm. An overall experimental procedure is divided into eight sections: (a) 3D printing of sacrificial patterns (b) melt-out of support materials (c) removal of residue of support materials (d) pattern assembly (e) investment (f) burn-out of sacrificial patterns (g) centrifugal casting (h) post-processing for final products. The suggested indirect AM technique provides the potential to manufacture ultra-lightweight lattice metals; e.g., lattice structures with Al alloys. It appears that the process parameters should be properly controlled depending on materials and lattice geometry, observing the final products of octet truss metals by the indirect AM technique.

An indirect additive manufacturing method combining a 3D printing of polymers with a centrifugal casting is outlined for manufacturing 3D octet truss metals (Al and Cu alloys) having a unit cell length of 5 mm with a wall thickness of 0.5 mm.

One of the typical methods to manufacture 3D lattice metals is the direct-metal additive manufacturing (AM) process such as Selective Laser Melting (SLM) ...

A Fabrication Method for Highly Stretchable Conductors with Silver Nanowires

Stretchable electronics are identified as a key technology for electronic applications in the next generation. One of the challenges in fabrication of stretchable electronic devices is the preparation of stretchable conductors with great mechanical stability. In this study, we developed a simple fabrication method to chemically solder the contact points between silver nanowire (AgNW) networks. AgNW nanomesh was first deposited on a glass slide via spray coating method. A reactive ink composed of silver nanoparticle (AgNPs) precursors was applied over the spray coated AgNW thin films. After heating for 40 min, AgNPs were preferentially generated over the nanowire junctions to solder the AgNW nanomesh, and reinforced the conducting network. The chemically modified AgNW thin film was then transferred to polyurethane (PU) substrates by casting method. The soldered AgNW thin films on PU exhibited no obvious change in electrical conductivity under stretching or rolling process with elongation strains up to 120%.

A simple synthesis method is used to chemically solder silver nanowire thin film to fabricate highly stretchable and conductive metal conductors.

Stretchable electronics are identified as a key technology for electronic applications in the next generation. One of the challenges in fabrication of ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

자유 형식 등 엑츄에이터 - 현미경 규모의 제조 및 개폐 제어

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Design and Fabrication of an Elastomeric Unit for Soft Modular Robots in Minimally Invasive Surgery

In recent years, soft robotics technologies have aroused increasing interest in the medical field due to their intrinsically safe interaction in unstructured environments. At the same time, new procedures and techniques have been developed to reduce the invasiveness of surgical operations. Minimally Invasive Surgery (MIS) has been successfully employed for abdominal interventions, however standard MIS procedures are mainly based on rigid or semi-rigid tools that limit the dexterity of the clinician. This paper presents a soft and high dexterous manipulator for MIS. The manipulator was inspired by the biological capabilities of the octopus arm, and is designed with a modular approach. Each module presents the same functional characteristics, thus achieving high dexterity and versatility when more modules are integrated. The paper details the design, fabrication process and the materials necessary for the development of a single unit, which is fabricated by casting silicone inside specific molds. The result consists in an elastomeric cylinder including three flexible pneumatic actuators that enable elongation and omni-directional bending of the unit. An external braided sheath improves the motion of the module. In the center of each module a granular jamming-based mechanism varies the stiffness of the structure during the tasks. Tests demonstrate that the module is able to bend up to 120&#176; and to elongate up to 66% of the initial length. The module generates a maximum force of 47 N, and its stiffness can increase up to 36%.

This paper describes the design and fabrication of a soft unit for surgical manipulators. The base module includes three flexible fluidic actuators to achieve omnidirectional bending and elongation, and a granular jamming-based mechanism to enable stiffness control. A complete mechanical characterization is also reported.

디자인과 소프트 모듈 형 로봇의 탄성 장치의 제작 최소 침습 수술

In recent years, soft robotics technologies have aroused increasing interest in the medical field due to their intrinsically safe interaction in ...

생체공학

Rapid Manufacturing of Thin Soft Pneumatic Actuators and Robots

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a laser cutter machine. The method starts with the lamination of thermoplastic polyurethane (TPU) sheets using a heat press for 10 min at the temperature of ~93 &#176;C. Next, the parameters of the laser cutter machine are optimized to produce a rectangular balloon with maximum burst pressure. Using the optimized parameters, the soft actuators are laser cut/welded three times sequentially. Next, a dispensing needle is attached to the actuator, allowing it to be inflated. The effect of geometrical parameters on the deflection of the actuator are studied systematically by varying the channel width and length. Finally, the performance of the actuator is characterized using an optical camera and a fluid dispenser. Conventional fabrication methods of soft pneumatic actuators based on silicone molding are time consuming (several hours). They also result in strong but bulky actuators, which limits the actuator&#8217;s applications. Moreover, microfabrication of thin pneumatic actuators is both time-consuming and expensive. The proposed manufacturing method in the current work resolves these issues by introducing a fast, simple, and cost-effective fabrication method of ultrathin pneumatic actuators.

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with a thin form factor. The fabrication method starts with lamination of thermoplastic polyurethane (TPU) sheets followed by laser cutting/welding of a two-dimensional pattern to form actuators and robots.

얇은 연공압 액추에이터 및 로봇의 신속한 제조

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a ...

Rod-based Fabrication of Customizable Soft Robotic Pneumatic Gripper Devices for Delicate Tissue Manipulation

Soft compliant gripping is essential in delicate surgical manipulation for minimizing the risk of tissue grip damage caused by high stress concentrations at the point of contact. It can be achieved by complementing traditional rigid grippers with soft robotic pneumatic gripper devices. This manuscript describes a rod-based approach that combined both 3D-printing and a modified soft lithography technique to fabricate the soft pneumatic gripper. In brief, the pneumatic featureless mold with chamber component is 3D-printed and the rods were used to create the pneumatic channels that connect to the chamber. This protocol eliminates the risk of channels occluding during the sealing process and the need for external air source or related control circuit. The soft gripper consists of a chamber filled with air, and one or more gripper arms with a pneumatic channel in each arm connected to the chamber. The pneumatic channel is positioned close to the outer wall to create different stiffness in the gripper arm. Upon compression of the chamber which generates pressure on the pneumatic channel, the gripper arm will bend inward to form a close grip posture because the outer wall area is more compliant. The soft gripper can be inserted into a 3D-printed handling tool with two different control modes for chamber compression: manual gripper mode with a movable piston, and robotic gripper mode with a linear actuator. The double-arm gripper with two actuatable arms was able to pick up objects of sizes up to 2 mm and yet generate lower compressive forces as compared to elastomer-coated and non-coated rigid grippers. The feasibility of having other designs, such as single-arm or hook gripper, was also demonstrated, which further highlighted the customizability of the soft gripper device, and it's potential to be used in delicate surgical manipulation to reduce the risk of tissue grip damage.

This protocol describes a rod-based approach, combining 3D-printing and soft lithography techniques for fabricating the soft gripper devices. This approach eliminates the need for an external air source by incorporating a chamber component and reduces the chance of occlusion during the sealing process, particularly for miniaturized pneumatic channels.

섬세한 조직 조작을위한 사용자 정의 소프트 로봇 공압 그리퍼 장치의로드 기반의 제조

Soft compliant gripping is essential in delicate surgical manipulation for minimizing the risk of tissue grip damage caused by high stress concentrations ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

탄소 기반 이온 전기 기계적 활성 연액추에이터 제작

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...

Manufacturing, Control, and Performance Evaluation of a Gecko-Inspired Soft Robot

This protocol presents a method for manufacturing, control, and evaluation of the performance of a soft robot that can climb inclined flat surfaces with slopes of up to 84&#176;. The manufacturing method is valid for the fast pneunet bending actuators in general and might, therefore, be interesting for newcomers to the field of actuator manufacturing. The control of the robot is achieved by means of a pneumatic control box that can provide arbitrary pressures and can be built by only using purchased components, a laser cutter, and a soldering iron. For the walking performance of the robot, the pressure-angle calibration plays a crucial role. Therefore, a semi-automated method for the pressure-angle calibration is presented. At high inclines (&#62; 70&#176;), the robot can no longer reliably fix itself to the walking plane. Therefore, the gait pattern is modified to ensure that the feet can be fixed on the walking plane.

This protocol provides a detailed list of steps to be performed for the manufacturing, control and evaluation of the climbing performance of a gecko-inspired soft robot.

Gecko에서 영감을 받은 소프트 로봇의 제조, 제어 및 성능 평가

This protocol presents a method for manufacturing, control, and evaluation of the performance of a soft robot that can climb inclined flat surfaces with ...