Este trabalho teve o apoio financeiro de pelo Ministério da Ciência e Tecnologia e do Conselho Nacional de Ciência da República da China (nos contratos. NSC 101-2221-E-027-042 e NSC-101-2622 E-027-003-CC2). DH Wei graças a Universidade Nacional de Taipei of Technology (TAIPEI TECH) para o Prêmio Dr. Shechtman Award.

1. Preparação do Substrato e Limpeza <ol><li> Cortar 10 mm substratos de silício x 10 mm a partir de Si (100) wafer. </li><li> Cortar 10 mm x 10 mm substratos de vidro. </li><li> Use limpeza ultra-sónica para limpar os substratos de silício e vidro com acetona durante 10 min, o álcool durante 10 min, e em seguida, isopropanol, durante 15 min. </li><li> Lavar os substratos com água deionizada (DI) de água três vezes. </li><li> Seque os substratos com uma arma de azoto. </li></ol> 2. DEZn preparação e conservação Nota: dietilzinco (C 2 H 5) 2 Zn, também chamado DEZn, é um composto de organo zinco altamente pirofórico com um centro de zinco ligado a dois grupos etilo. Nunca trabalhe sozinho quando usar DEZn. DEZn é muito tóxico e sensíveis ao oxigênio e água, não se esqueça de colocar o DEZn perto da água. Sempre use máscaras e óculos de protecção; todos os procedimentos devem ser efectuados na capa. Mais importante ainda, DEZn não utilizada deve be armazenada num ambiente 5 ° C. Nota: Para o primeiro uso de DEZn, siga o passo 2. Caso contrário, iniciar a experiência da etapa 3. <ol><li> Use seringa para extrair 30 ml DEZn da garrafa e, em seguida, injectar numa proveta colocada num cilindro de aço. </li><li> Utilizar um tubo de ferro galvanizado para ligar o cilindro de aço com a câmara de reacção. </li><li> Use bomba mecânica e válvula de esfera para bombear o cilindro de aço em ambiente de vácuo (para 6 Torr). Nota: DEZn será severamente reagir com o oxigénio, esta deve ser mantida no ambiente de vácuo. </li><li> Guarde o DEZn não utilizado em um ambiente de 5 ° C. </li></ol> 3. PECVD Câmara Preparação e Síntese de ZnO Filmes Finos Nota: O diagrama esquemático da deposição de vapor químico de plasma aumentada é ilustrada na Figura 1. <ol><li> Defina a distância de trabalho entre o eletrodo ducha e estágio da amostra em 30 mm. </li> &lt;li&gt; Colocar os substratos na fase de amostra de câmara de reacção no local apropriado onde há uma distância de 3 cm da entrada DEZn. </li><li> Abra a bomba rotativa e, gradualmente, abrir as válvulas de gaveta e válvulas borboleta. </li><li> Aguardar até que a pressão da câmara do reactor de fundo é inferior a 30 mTorr. </li><li> Feche a válvulas de gaveta e válvulas de borboleta, que se conecta à bomba rotativa. </li><li> Em seguida, abra a bomba turbo e válvulas de gaveta relativos a atingir alto vácuo de 3 x 10 -6 Torr. </li><li> Depois de atingir a condição de vácuo necessária, abrir o controlador de calor e aquecer a fase de amostra para a temperatura de síntese (200, 300, 400, 500, e 600 ° C durante diferentes parâmetros da experiência). </li><li> Quando a temperatura ea pressão de atingir a condição necessária, feche a bomba turbo e, em seguida, abra o portão válvulas e válvula de borboleta que se conecta à bomba rotativa simultaneamente. </li><li> Em seguida, abra as válvulas de entrada de gás e ligue o argônio gcomo controlador de fluxo simultaneamente. </li><li> O fluxo de gás argônio (0.167 ml / seg) para a câmara. </li><li> Definir a pressão da câmara a 500 mTorr. </li><li> Ligue a rede RF (13,56 MHz) e gerador de correspondência, em seguida, defina a potência RF em 100 W para purgar as amostras de superfície por 15 min. </li><li> Depois de terminar o expurgo de amostras, ligar a energia RF até 70 W. </li><li> Em seguida, ligue a válvula controlador de gás dióxido de carbono e de entrada de gás. </li><li> O fluxo de dióxido de carbono (0,5 ml / seg) para a câmara. </li><li> Ajuste a pressão de trabalhar em 6 Torr. </li><li> Depois a pressão da câmara atinge 6 Torr, o fluxo de alta árgon puro como gás portador (0.167 ml / seg) para a realização de dietilzinco (DEZn) para a câmara de válvula de esfera aberta e conectada à DEZn simultaneamente. Ao mesmo tempo, iniciar a síntese de filmes de ZnO. </li><li> Continuar a síntese de plasma de filmes de ZnO durante 5 min. </li><li> Depois que os filmes de ZnO foram sintetizados, seriatim desligar o gerador de RF, válvula de esfera, calor controller e todos os controladores de fluxo de gás, juntamente com válvulas de admissão de gás. </li><li> Retire a amostra quando a temperatura estágio da amostra esfria a RT. Nota: A taxa de arrefecimento é de cerca de 1,8 ° C / min. </li></ol> 4. Preparação de interdigitada-como padrão em As-sintetizado ZnO Thin Film Nota: O esquema de processo de litografia está representado na Figura 3. <ol><li> Utilize uma placa quente para cozer a amostra ZnO tal como sintetizada a 150 ° C durante 10 min. </li><li> Colocar a amostra no dispositivo de revestimento de centrifugação, e em seguida administrar a solução líquida de material fotosensitivo (S1813) com 100 ul de ZnO sobre a amostra. </li><li> Executar o revestidor de centrifugação a 800 rpm durante 10 segundos e, em seguida, acelerar a 3.000 rpm durante 30 segundos para produzir uma camada fina uniforme. </li><li> Coza macio amostra ZnO revestidos por photoresist a 105 ° C durante 90 segundos. </li><li> Após o cozimento-macio, usar a luz UV para expor a amostra trou-revestido photoresistgh um photomask por alinhador de máscara. O tempo de exposição é 2 segundos ea potência é de 400 W. Nota:. O padrão de fotomáscara é concebido como interdigitadas tipo, que é de 0,03 mm de largura e 4 mm de comprimento (14 pares) e tem um espaçamento entre eléctrodos de 0,15 mm, conforme ilustrado na Figura 2 É interessante notar que o fotossensível dadas área é 84.32 mm 2 para o detector. </li><li> Após o procedimento de exposição, use uma pinça para cortar a amostra, e em seguida, mergulhar em o desenvolvedor diluída (misturar 50 ml de desenvolvedor e 150 ml de água deionizada), através de acções de balançando de um lado para outro por 35 s para obter a amostra desenvolvido. </li><li> Lavar o exemplo desenvolvida com água DI e seca com azoto gasoso. </li><li> Use o microscópio óptico de verificar o modelo intacto. Se não, use acetona para remover o fotorresiste e repita os passos 4.2 a 4.7 até que o padrão perfeito foi obtida. </li><li> Disco cozer a amostra a 120 ° C durante 20 min. </li></ol><ol><li> Usar o sistema de descarga eléctrica do magnetrão RF para depositar uma camada condutora fina de Pt (100 nm) sobre a parte superior da amostra desenvolvidos antes de prosseguir para procedimento de levantamento química. </li><li> Defina a distância entre o alvo e o substrato em 13 mm. </li><li> Use a bomba mecânica para alcançar um vácuo aproximada de 5 mTorr. </li><li> Em seguida, utilizar a bomba turbocompressora para se obter um alto vácuo, de 7 x 10 -7 Torr. </li><li> Aguarde até que a câmara atinge a alto vácuo, feche a bomba turbo e abrir a bomba mecânica posteriormente. </li><li> O fluxo de gás árgon a 0,3 ml / seg para dentro da câmara pelo controlador de fluxo mas até que a pressão da câmara atingir a pressão de trabalho de 100 mTorr. </li><li> Ligue a corrente contínua (DC) descarregar fonte de alimentação e ajustar a potência DC a 15 W por pulverização catódica o eletrodo de filme fino Pt sobre a amostra durante 25 min. </li><li> Após a camada de eletrodo Pt tenha sido depositado por magnetron sputtmétodo rando, tirar a amostra da câmara. </li><li> Mergulhar a amostra no líquido acetona para o processo de levantamento química por limpador ultra-sônico para remover o fotorresiste. </li><li> Defina o tempo de limpeza em 1 min para remover completamente photoresist, e, em seguida, obter o eletrodo Pt interdigitada-like para o filme fino ZnO. </li></ol> 6. processo RTA <ol><li> Colocar a amostra Pt / ZnO como-fabricadas no sistema RTA. </li><li> Use a bomba mecânica e válvula de gaveta para bombear para baixo a pressão da câmara RTA para 20 mTorr. </li><li> Aguarde até que a pressão da câmara atinge 20 mTorr, o fluxo de gás árgon a 0,3 ml / seg para a câmara e defina a pressão de trabalho de 5 Torr. </li><li> Em seguida, defina a taxa de aquecimento como 100 o C / min. </li><li> Em seguida, recozer a amostra a 450 ° C durante 10 min. </li><li> Uma vez recozido, espere até que a amostra resfria à temperatura ambiente, em seguida, retire a amostra. </li></ol>

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The authors declare that they have no competing financial interests.

As etapas críticas e modificações Na etapa 1, os substratos devem ser completamente limpas e os passos 1.3 a 1.5 seguido para se certificar de que não há nenhuma gordura ou contaminações orgânicos e inorgânicos sobre os substratos. Qualquer gordura ou contaminações orgânicos e inorgânicos na superfície do substrato irão reduzir significativamente a adesão da película. Passo 2 é o procedimento mais importante antes de o processo de preparação f...

ZnO é um material semicondutor funcional wide-band-gap promissor, devido às suas propriedades únicas, como alta estabilidade química, baixo custo, não-toxicidade, baixo limiar de energia para o bombeamento óptico, gap direto largo (3,37 eV) a TA e grande éxciton energia de ~ 60 meV 1-2 vinculativo. Recentemente, ZnO filmes finos têm sido utilizados em muitos campos de aplicação, incluindo óxido condutor (TCO) películas transparentes, dispositivo emissor de luz azul, transistores de efeito de campo, e sensores de gás 3-6. Por outro lado, ZnO é um material candidato a substituir o óxido de índio e estanho (ITO), devido à índio e estanho sendo rara e cara. Além disso, ZnO possui alta transmitância óptica na região de comprimento de onda visível e baixa resistividade em comparação com ITO filmes 7-8. Consequentemente, a fabricação, caracterização e aplicação de ZnO tem sido amplamente relatados. O presente estudo centra-se na síntese c -axis (0002) filmes finos de ZnO elevados por um simples umd eficaz método e sua aplicação prática no sentido de um fotodetector UV. Os resultados recentes indicam que o relatório de pesquisa a alta qualidade do filme fino de ZnO pode ser sintetizado por várias técnicas, tais como método sol-gel, de frequência de rádio pulverização catódica, deposição química de vapor de metal orgânico (MOCVD), e assim por diante 9-14. Cada técnica tem as suas vantagens e desvantagens. Por exemplo, a principal vantagem da deposição da pulverização catódica é que os materiais de destino com muito alto ponto de fusão são facilmente estalou sobre o substrato. Em contraste, o processo de pulverização catódica é difícil de combinar com um elevador-off para estruturar o filme. Em nosso estudo, o sistema de deposição de vapor químico de plasma reforçada (PECVD) foi utilizado para sintetizar alta qualidade c -axis ZnO filmes finos. Bombardeamento de plasma é um factor chave no processo de síntese que pode aumentar a densidade do filme fino e melhorar a taxa de reacção de decomposição de iões 15. DentroAdicionalmente, a taxa de crescimento elevada e uniforme a deposição de grande área são outras vantagens distintas para técnica de PECVD. Exceto para a técnica de síntese, a boa adesão no substrato é outra questão considerada. Em diversos estudos, a safira C -Plane tem sido amplamente utilizado como o substrato para sintetizar alta C -axis ZnO filmes finos, pois o ZnO e safira tem a mesma estrutura hexagonal. No entanto, o ZnO foi sintetizado no substrato de safira exibindo morfologia de superfície áspera e altas concentrações residuais (defeito) relacionada com a portadora, devido às grandes desajustes entre a treliça ZnO e safira -Plane C (18%) orientadas na direcção no plano 16. Comparado com o substrato de safira, uma bolacha de Si é um outro substrato amplamente utilizados para a síntese de ZnO. Wafers Si têm sido amplamente utilizados na indústria de semicondutores; e, assim, o crescimento de alta qualidade ZnO filmes finos sobre substratos de Si é muito importante e necessário. Infelizmente, a estrutura cristalina e coeficiente de expansão térmica entre o ZnO e Si são, obviamente, que pode levar à deterioração da qualidade do cristal. Ao longo última década, foram feitos grandes esforços para melhorar a qualidade de ZnO filmes finos sobre substratos de Si usando vários métodos, incluindo camadas de ZnO tampão 17, recozimento em vários atmosfera de gás 18, e passivação da superfície do substrato Si 19. O presente estudo oferece com sucesso um método simples e eficaz para sintetizar alta C -axis ZnO filme fino sobre substratos de Si sem qualquer camada ou tampão de pré-tratamento. Os resultados experimentais indicaram que os filmes finos de ZnO sintetizados sob a temperatura de crescimento óptima mostrou boa cristal e qualidades ópticas. A estrutura cristalina, composição de plasma de RF, morfologia da superfície, e as propriedades ópticas dos filmes finos de ZnO foram investigados por difracção de raios-X (XRD), espectroscopia de emissão óptica (OES), Field Emission SCmicroscopia eletrônica de Anning (FE-SEM), e RT fotoluminescência (PL) espectros, respectivamente. Além disso, a transmitância de filmes finos de ZnO também foi confirmada e relatados. A fina película de ZnO como sintetizada serviu como uma camada de detecção para a aplicação fotodetector UV também foi investigada neste estudo. O fotodetector UV tem grandes potenciais aplicações em monitoramento UV, interruptor óptico, alarme chama e sistema de aquecimento de mísseis 20-21. Há muitos tipos de fotodetectores que têm sido levadas a cabo, tais como modo negativo intrínseco positivo (pinos) e de metal-metal-semicondutor (MSM), incluindo estruturas Conexão condutora e contato Schottky. Cada tipo tem suas próprias vantagens e desvantagens. Atualmente, as estruturas de fotodetectores MSM têm atraído interesse intensiva devido ao seu excelente desempenho em responsividade, confiabilidade e tempo de resposta e recuperação 22-24. Os resultados aqui apresentados demonstram que o modo de contacto foi utilizado MSM óhmicapara fabricar fotodetector UV baseado ZnO filme fino. Tal tipo de fotodetector normalmente revela uma boa responsividade e fiabilidade, o que indica que a elevada c -axis ZnO película fina é uma camada de detecção adequado para o fotodetector UV.

<table border="0" cellpadding="0" cellspacing="0">
	<tbody>
		<tr>
			<td>RF power supply</td>
			<td>ADVANCED ENERGY</td>
			<td>RFX-600</td>
			<td></td>
		</tr>
		<tr>
			<td>Butterfly valve</td>
			<td>MKS</td>
			<td>253B-1-40-1</td>
			<td></td>
		</tr>
		<tr>
			<td>Mass flow conctroller</td>
			<td>PROTEC INSTRUMENTS</td>
			<td>PC-540</td>
			<td></td>
		</tr>
		<tr>
			<td>Pressure conctroller</td>
			<td>MKS</td>
			<td>600 series&#160;</td>
			<td></td>
		</tr>
		<tr>
			<td>Heater</td>
			<td>UPGRADE INSTRUMENT CO.</td>
			<td>UI-TC 3001</td>
			<td></td>
		</tr>
		<tr>
			<td>Sputter gun</td>
			<td>AJA INTERNATIONAL</td>
			<td>A320-HA</td>
			<td></td>
		</tr>
		<tr>
			<td>DEZn 1.5M</td>
			<td>ACROS ORGANIC USA, New Jersey</td>
			<td></td>
			<td>also called Diethylzinc (C2H5)2Zn</td>
		</tr>
		<tr>
			<td>Spin coater&#160;</td>
			<td>SWIENCO</td>
			<td>PW - 490</td>
			<td></td>
		</tr>
		<tr>
			<td>I-V measurement</td>
			<td>Keithley</td>
			<td>Model: 2400</td>
			<td></td>
		</tr>
		<tr>
			<td>Photocondutive measurement&#160;</td>
			<td>Home-built</td>
			<td></td>
			<td></td>
		</tr>
		<tr>
			<td>UV light sourse</td>
			<td>Panasonic</td>
			<td>ANUJ 6160</td>
			<td></td>
		</tr>
		<tr>
			<td>Mask aligner</td>
			<td>Karl Suss</td>
			<td>MJB4</td>
			<td></td>
		</tr>
		<tr>
			<td>Photoresist</td>
			<td>Shipley a Rohm &#38; Haas company</td>
			<td>S1813</td>
			<td></td>
		</tr>
		<tr>
			<td>Developer</td>
			<td>Shipley a Rohm &#38; Haas company</td>
			<td>MF319</td>
			<td></td>
		</tr>
		<tr>
			<td>Silicon wafer</td>
			<td>E-Light Technology Inc</td>
			<td>12/0801</td>
			<td></td>
		</tr>
		<tr>
			<td>Glass substrate</td>
			<td>CORNING</td>
			<td>1737</td>
			<td>P-type / Boron</td>
		</tr>
	</tbody>
</table>

synthesis and characterization of high c-axis zno thin film by plasma enhanced chemical vapor deposition system and its uv photodetector application

Neste estudo, o óxido de zinco (ZnO), películas finas com alta -axis C (0002) orientação preferencial, foram com sucesso e eficazmente sintetizado em silício (Si) substratos através de diferentes temperaturas sintetizados utilizando deposição de vapor químico de plasma melhorado sistema (PECVD). Os efeitos de diferentes temperaturas sintetizados sobre a estrutura de cristal, morfologia de superfície e propriedades ópticas têm sido investigados. A difracção de raios-X (DRX) padrões indicou que a intensidade de pico (0002) tornou-se mais forte de difracção com o aumento da temperatura até 400 sintetizado o C. A intensidade de difração (0002) tornou-se mais fraca pico gradualmente acompanhando com aparência de (10-10) pico de difração como a temperatura sintetizado até superior a 400 o C. A RT fotoluminescência (PL) espectros exibiu uma forte perto de banda-edge (NBE) emissão observada em cerca de 375 nm e uma emissão desprezível de nível profundo (DL), localizado a cerca de 575 nm under alta c -axis ZnO filmes finos. Microscopia eletrônica de varredura de emissão de campo (FE-SEM) revelou imagens da superfície homogênea e com pequena granulometria. Os filmes finos de ZnO também foram sintetizados sobre substratos de vidro sob os mesmos parâmetros para medir a transmitância. Para efeitos de aplicação ultravioleta (UV) fotodetector, a platina interdigitada (Pt) de filme fino (espessura ~ 100 nm) fabricada através de processo de litografia óptica convencional e de rádio frequência (RF) pulverização catódica. A fim de atingir o contacto óhmico, o dispositivo foi recozido em circunstâncias de árgon a 450 ° C por um sistema de tratamento térmico rápido (RTA) durante 10 min. Após as medições sistemáticas, a corrente-tensão (I - V) Curva de foto e resultados de resposta fotocorrente correntes dependentes do tempo e escuras exibiu uma boa responsividade e fiabilidade, o que indica que a elevada c -axis ZnO película fina é uma camada de detecção adequadofotodetector para aplicação de UV.

O ZnO (0002) filmes finos com elevado c -axis orientação preferencial foram sintetizados com sucesso para os substratos de Si usando o sistema de PECVD. O dióxido de carbono (CO 2) e o dietil-zinco (DEZn) foram usados ​​como precursores de oxigénio e zinco, respectivamente. A estrutura de cristal de filmes finos de ZnO foi caracterizada por difracção de raios-X (Figura 4), ​​indicando que a película fina de ZnO sintetizados a 400 ° C com o pico mais forte (...

Watch this Scientific Journal Video about Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application at JoVE.c

Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.

Síntese e Caracterização de alta c-eixo ZnO Thin Film por Plasma aprimorado Chemical Vapor Deposition Sistema e sua Aplicação Photodetector UV

In this study, zinc oxide (ZnO) thin films with high c-axis (0002) preferential orientation have been successfully and effectively synthesized onto ...

synthesis-characterization-high-c-axis-zno-thin-film-plasma-enhanced

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JoVE Journal

Engineering

15.1K visualizações.  National Taipei University of Technology (TAIPEI TECH). We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.

Vídeo: Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

Polycrystalline Silicon Thin-film Solar cells with Plasmonic-enhanced Light-trapping

One of major approaches to cheaper solar cells is reducing the amount of semiconductor material used for their fabrication and making cells thinner. To compensate for lower light absorption such physically thin devices have to incorporate light-trapping which increases their optical thickness. Light scattering by textured surfaces is a common technique but it cannot be universally applied to all solar cell technologies. Some cells, for example those made of evaporated silicon, are planar as produced and they require an alternative light-trapping means suitable for planar devices. Metal nanoparticles formed on planar silicon cell surface and capable of light scattering due to surface plasmon resonance is an effective approach.
The paper presents a fabrication procedure of evaporated polycrystalline silicon solar cells with plasmonic light-trapping and demonstrates how the cell quantum efficiency improves due to presence of metal nanoparticles.
To fabricate the cells a film consisting of alternative boron and phosphorous doped silicon layers is deposited on glass substrate by electron beam evaporation. An Initially amorphous film is crystallised and electronic defects are mitigated by annealing and hydrogen passivation. Metal grid contacts are applied to the layers of opposite polarity to extract electricity generated by the cell. Typically, such a ~2 &mu;m thick cell has a short-circuit current density (Jsc) of 14-16 mA/cm2, which can be increased up to 17-18 mA/cm2 (~25% higher) after application of a simple diffuse back reflector made of a white paint.
To implement plasmonic light-trapping a silver nanoparticle array is formed on the metallised cell silicon surface. A precursor silver film is deposited on the cell by thermal evaporation and annealed at 23&deg;C to form silver nanoparticles. Nanoparticle size and coverage, which affect plasmonic light-scattering, can be tuned for enhanced cell performance by varying the precursor film thickness and its annealing conditions. An optimised nanoparticle array alone results in cell Jsc enhancement of about 28%, similar to the effect of the diffuse reflector. The photocurrent can be further increased by coating the nanoparticles by a low refractive index dielectric, like MgF2, and applying the diffused reflector. The complete plasmonic cell structure comprises the polycrystalline silicon film, a silver nanoparticle array, a layer of MgF2, and a diffuse reflector. The Jsc for such cell is 21-23 mA/cm2, up to 45% higher than Jsc of the original cell without light-trapping or ~25% higher than Jsc for the cell with the diffuse reflector only.
Introduction
Light-trapping in silicon solar cells is commonly achieved via light scattering at textured interfaces. Scattered light travels through a cell at oblique angles for a longer distance and when such angles exceed the critical angle at the cell interfaces the light is permanently trapped in the cell by total internal reflection (Animation 1: Light-trapping). Although this scheme works well for most solar cells, there are developing technologies where ultra-thin Si layers are produced planar (e.g. layer-transfer technologies and epitaxial c-Si layers) 1 and or when such layers are not compatible with textures substrates (e.g. evaporated silicon) 2. For such originally planar Si layer alternative light trapping approaches, such as diffuse white paint reflector 3, silicon plasma texturing 4 or high refractive index nanoparticle reflector 5 have been suggested.
Metal nanoparticles can effectively scatter incident light into a higher refractive index material, like silicon, due to the surface plasmon resonance effect 6. They also can be easily formed on the planar silicon cell surface thus offering a light-trapping approach alternative to texturing. For a nanoparticle located at the air-silicon interface the scattered light fraction coupled into silicon exceeds 95% and a large faction of that light is scattered at angles above critical providing nearly ideal light-trapping condition (Animation 2: Plasmons on NP). The resonance can be tuned to the wavelength region, which is most important for a particular cell material and design, by varying the nanoparticle average size, surface coverage and local dielectric environment 6,7. Theoretical design principles of plasmonic nanoparticle solar cells have been suggested 8. In practice, Ag nanoparticle array is an ideal light-trapping partner for poly-Si thin-film solar cells because most of these design principle are naturally met. The simplest way of forming nanoparticles by thermal annealing of a thin precursor Ag film results in a random array with a relatively wide size and shape distribution, which is particularly suitable for light-trapping because such an array has a wide resonance peak, covering the wavelength range of 700-900 nm, important for poly-Si solar cell performance. The nanoparticle array can only be located on the rear poly-Si cell surface thus avoiding destructive interference between incident and scattered light which occurs for front-located nanoparticles 9. Moreover, poly-Si thin-film cells do not requires a passivating layer and the flat base-shaped nanoparticles (that naturally result from thermal annealing of a metal film) can be directly placed on silicon further increases plasmonic scattering efficiency due to surface plasmon-polariton resonance 10.
The cell with the plasmonic nanoparticle array as described above can have a photocurrent about 28% higher than the original cell. However, the array still transmits a significant amount of light which escapes through the rear of the cell and does not contribute into the current. This loss can be mitigated by adding a rear reflector to allow catching transmitted light and re-directing it back to the cell. Providing sufficient distance between the reflector and the nanoparticles (a few hundred nanometers) the reflected light will then experience one more plasmonic scattering event while passing through the nanoparticle array on re-entering the cell and the reflector itself can be made diffuse - both effects further facilitating light scattering and hence light-trapping. Importantly, the Ag nanoparticles have to be encapsulated with an inert and low refractive index dielectric, like MgF2 or SiO2, from the rear reflector to avoid mechanical and chemical damage 7. Low refractive index for this cladding layer is required to maintain a high coupling fraction into silicon and larger scattering angles, which are ensured by the high optical contrast between the media on both sides of the nanoparticle, silicon and dielectric 6. The photocurrent of the plasmonic cell with the diffuse rear reflector can be up to 45% higher than the current of the original cell or up to 25% higher than the current of an equivalent cell with the diffuse reflector only.

Polycrystalline silicon thin-film solar cells on glass are fabricated by deposition of boron and phosphorous doped silicon layers followed by crystallisation, defect passivation and metallisation. Plasmonic light-trapping is introduced by forming Ag nanoparticles on the silicon cell surface capped with a diffused reflector resulting in ~45% photocurrent enhancement.

Silício policristalino de película fina de células solares com plasmonic avançada Luz-caça com armadilhas

One of major approaches to cheaper solar cells is reducing the amount of semiconductor material used for their fabrication and making cells thinner. To ...

Engenharia

Encapsulation and Permeability Characteristics of Plasma Polymerized Hollow Particles

In this protocol, core-shell nanostructures are synthesized by plasma enhanced chemical vapor deposition. We produce an amorphous barrier by plasma polymerization of isopropanol on various solid substrates, including silica and potassium chloride. This versatile technique is used to treat nanoparticles and nanopowders with sizes ranging from 37 nm to 1 micron, by depositing films whose thickness can be anywhere from 1 nm to upwards of 100 nm. Dissolution of the core allows us to study the rate of permeation through the film. In these experiments, we determine the diffusion coefficient of KCl through the barrier film by coating KCL nanocrystals and subsequently monitoring the ionic conductivity of the coated particles suspended in water. The primary interest in this process is the encapsulation and delayed release of solutes. The thickness of the shell is one of the independent variables by which we control the rate of release. It has a strong effect on the rate of release, which increases from a six-hour release (shell thickness is 20 nm) to a long-term release over 30 days (shell thickness is 95 nm). The release profile shows a characteristic behavior: a fast release (35% of the final materials) during the first five minutes after the beginning of the dissolution, and a slower release till all of the core materials come out.

We have used plasma enhanced chemical vapor deposition to deposit thin films ranging from a few nm to several 100 nm on nano-sized particles of various materials. We subsequently etch the core material to produce hollow nanoshells whose permeability is controlled by the thickness of the shell. We characterize the permeability of these coatings to small solutes and demonstrate that these barriers can provide sustained release of the core material over several days.

Encapsulamento e Permeabilidade características das partículas de plasma polimerizados ocas

In this protocol, core-shell nanostructures are synthesized by plasma enhanced chemical vapor deposition. We produce an amorphous barrier by plasma ...

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding combined with layer transfer enables the replication of arbitrary surface patterns from a master structure onto the functional material. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes. In particular we demonstrate the fabrication of patterned transparent zinc oxide electrodes for light trapping applications in solar cells.

We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes.

Nanomoulding de Materiais Funcionais, um método de replicação Versátil Complementar Padrão para nanoimpressão

We describe a nanomoulding technique which  allows low-cost nanoscale patterning of functional materials, materials stacks  and full devices. Nanomoulding ...

Synthesis and Microdiffraction at Extreme Pressures and Temperatures

High pressure compounds and polymorphs are investigated for a broad range of purposes such as determine structures and processes of deep planetary interiors, design materials with novel properties, understand the mechanical behavior of materials exposed to very high stresses as in explosions or impacts. Synthesis and structural analysis of materials at extreme conditions of pressure and temperature entails remarkable technical challenges. In the laser heated diamond anvil cell (LH-DAC), very high pressure is generated between the tips of two opposing diamond anvils forced against each other; focused infrared laser beams, shined through the diamonds, allow to reach very high temperatures on samples absorbing the laser radiation. When the LH-DAC is installed in a synchrotron beamline that provides extremely brilliant x-ray radiation, the structure of materials under extreme conditions can be probed in situ. LH-DAC samples, although very small, can show highly variable grain size, phase and chemical composition. In order to obtain the high resolution structural analysis and the most comprehensive characterization of a sample, we collect diffraction data in 2D grids and combine powder, single crystal and multigrain diffraction techniques. Representative results obtained in the synthesis of a new iron oxide, Fe4O5 1 will be shown.

The laser heated diamond anvil cell combined with synchrotron micro-diffraction techniques allows researchers to explore the nature and properties of new phases of matter at extreme pressure and temperature (PT) conditions. Heterogeneous samples can be characterized in situ under high pressure by 2D mapping and combined powder, single-crystal and multigrain diffraction approaches.

Síntese e microdiffraction a pressões e temperaturas extremas

High pressure compounds and polymorphs are investigated for a broad range of purposes such as determine structures and processes of deep planetary ...

Making Record-efficiency SnS Solar Cells by Thermal Evaporation and Atomic Layer Deposition

Tin sulfide (SnS) is a candidate absorber material for Earth-abundant, non-toxic solar cells. SnS offers easy phase control and rapid growth by congruent thermal evaporation, and it absorbs visible light strongly. However, for a long time the record power conversion efficiency of SnS solar cells remained below 2%. Recently we demonstrated new certified record efficiencies of 4.36% using SnS deposited by atomic layer deposition, and 3.88% using thermal evaporation. Here the fabrication procedure for these record solar cells is described, and the statistical distribution of the fabrication process is reported. The standard deviation of efficiency measured on a single substrate is typically over 0.5%. All steps including substrate selection and cleaning, Mo sputtering for the rear contact (cathode), SnS deposition, annealing, surface passivation, Zn(O,S) buffer layer selection and deposition, transparent conductor (anode) deposition, and metallization are described. On each substrate we fabricate 11 individual devices, each with active area 0.25 cm2. Further, a system for high throughput measurements of current-voltage curves under simulated solar light, and external quantum efficiency measurement with variable light bias is described. With this system we are able to measure full data sets on all 11 devices in an automated manner and in minimal time. These results illustrate the value of studying large sample sets, rather than focusing narrowly on the highest performing devices. Large data sets help us to distinguish and remedy individual loss mechanisms affecting our devices.

Tin sulfide (SnS) is a candidate material for Earth-abundant, non-toxic solar cells. Here, we demonstrate the fabrication procedure of the SnS solar cells employing atomic layer deposition, which yields 4.36% certified power conversion efficiency, and thermal evaporation which yields 3.88%.

Fazendo Record-eficiência SnS Células solares por evaporação térmica e Deposição Camada Atómica

Tin sulfide (SnS) is a candidate absorber material for Earth-abundant, non-toxic solar cells. SnS offers easy phase control and rapid growth by congruent ...

Preparation of ZnO Nanorod/Graphene/ZnO Nanorod Epitaxial Double Heterostructure for Piezoelectrical Nanogenerator by Using Preheating Hydrothermal

Well-aligned ZnO nanostructures have been intensively studied over the last decade for remarkable physical properties and enormous applications. Here, we describe a one-step fabrication technique to synthesis freestanding ZnO nanorod/graphene/ZnO nanorod double heterostructure. The preparation of the double heterostructure is performed by using thermal chemical vapor deposition (CVD) and preheating hydrothermal technique. In addition, the morphological properties were characterized by using the scanning electron microscopy (SEM). The utility of freestanding double heterostructure is demonstrated by fabricating the piezoelectric nanogenerator. The electrical output is improved up to 200% compared to that of a single heterostructure owing to the coupling effect of the piezoelectricity between the arrays of ZnO nanorods on the top and bottom of graphene. This unique double heterostructure have a tremendous potential for applications of electrical and optoelectrical devices where the high number density and specific surface area of nanorod are needed, such as pressure sensor, immuno-biosensor and dye-sensitized solar cells.

One-step fabrication method for obtaining freestanding epitaxial double heterostructure is presented. This approach could achieve ZnO coverage with a higher number density than that of the epitaxial single heterostructure, leading to a piezoelectric nanogenerator with an increased output electrical performance.

Preparação de ZnO nanorod / Grafeno / ZnO nanorod Epitaxial Duplo heterostructure para piezoelétricos nanogenerator usando pré-aquecimento Hydrothermal

Well-aligned ZnO nanostructures have been intensively studied over the last decade for remarkable physical properties and enormous applications. Here, we ...

In Situ Monitoring of the Accelerated Performance Degradation of Solar Cells and Modules: A Case Study for Cu(In,Ga)Se2 Solar Cells

The levelized cost of electricity (LCOE) of photovoltaic (PV) systems is determined by, among other factors, the PV module reliability. Better prediction of degradation mechanisms and prevention of module field failure can consequently decrease investment risks as well as increase the electricity yield. An improved knowledge level can for these reasons significantly decrease the total costs of PV electricity. 
In order to better understand and minimize the degradation of PV modules, the occurring degradation mechanisms and conditions should be identified. This should preferably happen under combined stresses, since modules in the field are also simultaneously exposed to multiple stress factors. Therefore, two 'Combined Stress test with in situ measurement' setups have been designed and constructed. These setups allow the simultaneous use of humidity, temperature, illumination, and electrical biases as independently controlled stress factors on solar cells and minimodules. The setups also allow real-time monitoring of the electrical properties of these samples. This protocol presents these setups and describes the experimental possibilities. Moreover, results obtained with these setups are also presented: various examples about the influence of both deposition and degradation conditions on the stability of thin film Cu(In,Ga)Se2 (CIGS) as well as Cu2ZnSnSe4 (CZTS) solar cells are described. Results on the temperature dependency of CIGS solar cells are also presented.

In Situ Monitoring of the Accelerated Performance Degradation of Solar Cells and Modules: A Case Study for CuIn,GaSe2 Solar Cells

Two &#39;Combined Stress test with in situ measurement&#39; setups, which allow real-time monitoring of accelerated degradation of solar cells and modules, were designed and constructed. These setups allow the simultaneous use of humidity, temperature, electrical biases, and illumination as independently controlled stress factors. The setups and various experiments executed are presented.

In Situ Monitoramento da degradação desempenho acelerado de células solares e módulos: um estudo de caso de Cu (In, Ga) Se2 células solares

The levelized cost of electricity (LCOE) of photovoltaic (PV) systems is determined by, among other factors, the PV module reliability. Better prediction ...

Well-aligned Vertically Oriented ZnO Nanorod Arrays and their Application in Inverted Small Molecule Solar Cells

This manuscript describes how to design and fabricate efficient inverted solar cells, which are based on a two-dimensional conjugated small molecule (SMPV1) and [6,6]-phenyl-C71-butyric acid methyl ester (PC71BM), by utilizing ZnO nanorods (NRs) grown on a high quality Al-doped ZnO (AZO) seed layer. The inverted SMPV1:PC71BM solar cells with ZnO NRs that grew on both a sputtered and sol-gel processed AZO seed layer are fabricated. Compared with the AZO thin film prepared by the sol-gel method, the sputtered AZO thin film exhibits better crystallization and lower surface roughness, according to X-ray diffraction (XRD) and atomic force microscope (AFM) measurements. The orientation of the ZnO NRs grown on a sputtered AZO seed layer shows better vertical alignment, which is beneficial for the deposition of the subsequent active layer, forming better surface morphologies. Generally, the surface morphology of the active layer mainly dominates the fill factor (FF) of the devices. Consequently, the well-aligned ZnO NRs can be used to improve the carrier collection of the active layer and to increase the FF of the solar cells. Moreover, as an anti-reflection structure, it can also be utilized to enhance the light harvesting of the absorption layer, with the power conversion efficiency (PCE) of solar cells reaching 6.01%, higher than the sol-gel based solar cells with an efficiency of 4.74%.

This manuscript describes how to design and fabricate efficient inverted SMPV1:PC71BM solar cells with ZnO nanorods (NRs) grown on a high quality Al-doped ZnO (AZO) seed layer. The well-aligned vertically oriented ZnO NRs exhibit high crystalline properties. The power conversion efficiency of solar cells can reach 6.01%.

Bem alinhados verticalmente orientado ZnO Nanorod matrizes e sua aplicação em invertida pequena molécula células solares

This manuscript describes how to design and fabricate efficient inverted solar cells, which are based on a two-dimensional conjugated small molecule ...

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present an advanced method for fabricating ultra-thin color films with improved characteristics. The proposed process addresses several fabrication issues, including large area processing. Specifically, the protocol describes a process for fabricating ultra-thin color films using an electron beam evaporator for oblique angle deposition of germanium (Ge) and gold (Au) on silicon (Si) substrates.&#160; Film porosity produced by the oblique angle deposition induces color changes in the ultra-thin film. The degree of color change depends on factors such as deposition angle and film thickness. Fabricated samples of the ultra-thin color films showed improved color tunability and color purity. In addition, the measured reflectance of the fabricated samples was converted into chromatic values and analyzed in terms of color. Our ultra-thin film fabricating method is expected to be used for various ultra-thin film applications such as flexible color electrodes, thin film solar cells, and optical filters. Also, the process developed here for analyzing the color of the fabricated samples is broadly useful for studying various color structures.

We present a detailed method for fabricating ultra-thin color films with improved characteristics for optical coatings. The oblique angle deposition technique using an electron beam evaporator allows improved color tunability and purity. Fabricated films of Ge and Au on Si substrates were analyzed by reflectance measurements and color information conversion.

Fabricação de filmes de cor ultra-fino com altamente absorvente Media usando ângulo oblíquo deposição

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (Cu variant) entropy-stabilized oxides. Phase pure and chemically homogeneous (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) ceramic pellets are synthesized and used in the deposition of ultra-high quality, phase pure, single crystalline thin films of the target stoichiometry. A detailed methodology for the deposition of smooth, chemically homogeneous, entropy-stabilized oxide thin films by pulsed laser deposition on (001)-oriented MgO substrates is described. The phase and crystallinity of bulk and thin film materials are confirmed using X-ray diffraction. Composition and chemical homogeneity are confirmed by X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy. The surface topography of thin films is measured with scanning probe microscopy. The synthesis of high quality, single crystalline, entropy-stabilized oxide thin films enables the study of interface, size, strain, and disorder effects on the properties in this new class of highly disordered oxide materials.

The synthesis of high quality bulk and thin film (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O entropy-stabilized oxides is presented.

Granel e síntese de película fina de óxidos de entropia-estabilizado em termos de composição variantes

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and ...