Begin by preparing a graphene etching solution in a 50 milliliter beaker. To do so, add 4.6 grams of ammonium per sulfate, or APS, to 20 milliliters of molecular grade water in the beaker. Cover it with aluminum foil and allow the APS to dissolve completely.
To prepare the CVD graphene section for MMA coating, carefully cut a square section of the graphene. Transfer the section to a cover slip in a clean petri dish, and cover the dish for transporting it to the spin coder. Next, set the spin coder to a 60 second high speed spin at 2, 500 rotations per minute.
Carefully transfer the CVD graphene section to the appropriately-sized chuck. Press the take or absorb button to engage the vacuum pump and affix the graphene to the chuck. Then apply MMA to the center of the CVD graphene square.
Close the lid. Pull the vacuum and immediately press the start or stop button. After disengaging the vacuum pump, once the spinning has stopped, using tweezers, carefully retrieve the MMA-coated CVD graphene.
Invert the graphene such that the coated side is facing down, and place it back on the glass cover slip. Next, using flat tip tweezers, transfer the CVD graphene on the cover slip into the glow discharger and glow discharge for 30 seconds at 25 milliampere. Return the graphene on the cover slip to the petri dish.
Finally, cover it for transporting it to the copper etching area.
