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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

DOI :

10.3791/50297-v

February 27th, 2013

February 27th, 2013

15,198 Views

1Department of Energy and NEMAS - Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, 2Center for Nano Science and Technology, Instituto Italiano di Tecnologia

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

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