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Fabrication of Spatially Confined Complex Oxides

DOI :

10.3791/50573-v

July 1st, 2013

July 1st, 2013

9,302 Views

1Materials Science and Technology Division, Oak Ridge National Laboratory, 2Department of Physics & Astronomy, University of Tennessee, Knoxville

We describe the use of pulsed laser deposition (PLD), photolithography and wire-bonding techniques to create micrometer scale complex oxides devices. The PLD is utilized to grow epitaxial thin films. Photolithography and wire-bonding techniques are introduced to create practical devices for measurement purposes.

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