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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

DOI :

10.3791/55276-v

January 27th, 2017

January 27th, 2017

13,935 Views

1Department of Bioengineering, Stanford University, 2Microfluidic Foundry, Stanford University, 3Department of Genetics, Stanford University, 4Chem-H Institute, Stanford University

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

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