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In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

DOI :

10.3791/61026-v

May 13th, 2020

May 13th, 2020

3,780 Views

1Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, RMIT University, 2RMIT Microscopy and Microanalysis Facility, RMIT University

Presented here is a protocol for analyzing nanostructural changes during in situ biasing with transmission electron microscopy (TEM) for a stacked metal-insulator-metal structure. It has significant applications in resistive switching crossbars for the next generation of programmable logic circuits and neuromimicking hardware, to reveal their underlying operation mechanisms and practical applicability.

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