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Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

DOI :

10.3791/57502-v

June 23rd, 2018

June 23rd, 2018

7,545 Views

1School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology

We present a detailed method to fabricate a deformable lateral NIPIN phototransistor array for curved image sensors. The phototransistor array with an open mesh form, which is composed of thin silicon islands and stretchable metal interconnectors, provides flexibility and stretchability. The parameter analyzer characterizes the electrical property of the fabricated phototransistor.

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Flexible Image Sensor

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