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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

DOI :

10.3791/58272-v

10:25 min

September 14th, 2018

September 14th, 2018

9,535 Views

1Center for Functional Nanomaterials, Brookhaven National Laboratory

We use an aberration-corrected scanning transmission electron microscope to define single-digit nanometer patterns in two widely-used electron-beam resists: poly (methyl methacrylate) and hydrogen silsesquioxane. Resist patterns can be replicated in target materials of choice with single-digit nanometer fidelity using liftoff, plasma etching, and resist infiltration by organometallics.

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Single digit Nanometer

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