作者要感谢瑞安东为他的帮助和有用的技术讨论。 作者还希望承认Birck纳米技术中心的技术人员的协助和支持。这项工作是由美国国防高级研究计划局在普渡微波可重构倏逝模式腔体滤波器支持的研究。并且还通过可靠性，完整性和微生存能力和能源部的预测下，大奖号DE-FC5208NA28617国家核安全局中心。的观点，意见，和/或本文件所载/简报调查结果仅代表作者本人/主持人，不应该被解释为代表官方的观点或政策，任何明示或暗示，美国国防部高级研究计划局或部国防部。

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作者什么都没有透露。

低残余应力Au膜的沉积和干燥的释放与XeF的2个在该装置的制造成功至关重要的组件。时相比，平行板场致动器静电边缘场致动器提供相对低的力。 &gt; 60兆帕典型的MEMS薄膜应力将导致过高的驱动电压，其可以潜在地危及EFFA MEMS的可靠性。由于这个原因，电镀配方仔细特征在于，得到的薄膜具有低的双向轴向平均应力。此外，在本研究中，需要热循环的处理步骤使用硅作为牺牲层的类型，?...

微机电系统（MEMS）利用几个致动机构来实现机械位移。最流行的是热，压电，磁和静电。对于短的切换时间，静电致动是最流行 ​​的技术1，2。在实际应用中，临界阻尼的机械设计提供初始上升时间和稳定时间之间的最佳折衷。在施加直流偏压和致动膜片向下朝下拉电极，所述沉降时间是不是一个显著问题作为膜将抓拍下来并粘附到介电涂层的致动电极。几个应用都得益于上述静电驱动设计3 - 8。然而，电介质涂覆的下拉电极的存在下，使致动器易于介电充电和静摩擦。 MEMS膜可以利用一条underdamped机械设计，实现了快速的初始上升时间。欠阻尼的机械设计的一个例子是静电边缘场致动（EFFA）的MEMS。这种拓扑结构中表现出了远远低于易受困扰静电基础的设计9-20典型的失效机理。不存在平行对置电极，因此在平行电场的是为什么这些MEMS被适当地称为“边缘场”致动（ 图1）。为EFFA设计，​​下拉电极被分成两个单独的电极被定位侧向偏移到所述移动膜，完全消除了装置的可动部件和固定部件之间的重叠。然而，从可动膜下方的去除衬底显著降低了挤压膜阻尼部件从而增加了稳定时间。 图2B是所述沉降时间响应于STANDAR一例D的步骤偏置。瞬态，或直流动力施加在实时的偏压可用于提高所述沉降时间20-26。 图2C和2D定性地说明了如何随时间变化的波形可以有效地消除振铃。以前的研究工作，利用数值计算方法来计算输入偏压的精确的电压和定时，以改善切换时间。这项工作的方法使用紧凑型封闭形式的表达式来计算输入偏置波形参数。此外，以前的工作集中在平行板驱动。而这些结构体被设计成欠阻尼的，挤压膜阻尼仍然在此配置中可用。在这项工作中提出的致动方法是边缘场致动。在此配置中挤压膜阻尼被有效地消除。这代表了一种极端的情况下，所述MEMS束的机械阻尼是非常低的。本文介绍了如何制作的EFFA的MEMS开发冰和执行测量以实验验证了波形的概念。

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			<td height="21" style="height:21px;width:251px;">Chemical</td>
			<td style="width:163px;">Company</td>
			<td style="width:137px;">Catalogue number</td>
			<td style="width:195px;">Comments (optional)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Buffered oxide etchant</td>
			<td>Mallinckrodt Baker</td>
			<td>1178</td>
			<td>Silicon dioxide etch, Ti etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Acetone</td>
			<td>Mallinckrodt Baker</td>
			<td>5356</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Isopropyl alcohol</td>
			<td>Honeywell</td>
			<td>BDH-140</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hexamethyldisilizane</td>
			<td>Mallinckrodt Baker</td>
			<td>5797</td>
			<td>adhesion promoter</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Microposit SC 1827 Positive Photoresist</td>
			<td>Shipley Europe Ltd</td>
			<td>44090</td>
			<td>Pattern, electroplating</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Microposit MF-26A developer</td>
			<td>Shipley Europe Ltd</td>
			<td>31200</td>
			<td>Develop SC 1827</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Tetramethylammonium hydroxide</td>
			<td>Sigma-Aldrich</td>
			<td>334901</td>
			<td>Bulk Si etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrofluroic acid</td>
			<td>Sciencelab.com</td>
			<td>SLH2227</td>
			<td>Silicon dioxide etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Sulfuric acid</td>
			<td>Sciencelab.com</td>
			<td>SLS2539</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrogen peroxide</td>
			<td>Sciencelab.com</td>
			<td>SLH1552</td>
			<td>Wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Transene Sulfite Gold TSG-250</td>
			<td>Transense</td>
			<td>110-TSG-250</td>
			<td>Au electroplating solution</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Baker PRS-3000 Positive Resist Stripper</td>
			<td>Mallinckrodt Baker</td>
			<td>6403</td>
			<td>Photoresist stripper</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Gold etchant type TFA</td>
			<td>Transense</td>
			<td>060-0015000</td>
			<td>Au etch</td>
		</tr>
	</tbody>
</table>

real-time dc-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic mems actuators

机械欠静电边缘场的MEMS致动器响应于一个单位阶跃输入偏置电压众所周知的快速切换操作。然而，在权衡了改进的开关性能是一个相对长的稳定时间，以达到每个间隙高度响应于各种应用的电压。瞬时偏压波形用来帮助减少开关次数静电边缘场MEMS致动器具有高的机械品质因数。去除边缘场致动器的底部衬底将创建的低机械阻尼环境必要有效测试的概念。下层基板的除去也有在装置的问候失败由于静摩擦的可靠性性能显着改善。虽然直流偏置动力是提高稳定时间是有用的，所需的压摆率典型的MEMS器件可以放置在充电p咄咄逼人的要求UMPS的完全集成的芯片设计。此外，可能存在挑战整合基板去除步骤到后端-行的商业的CMOS处理步骤。相比常规步骤施力结果制成致动器的实验验证表明了50倍的切换时间的改善。相较于理论计算，实验结果有较好的一致性。

图4中的设置是用来捕获偏转与微机电桥时代特征。通过使用在其连续测量模式下，激光多普勒振动计，精确的电压和时间的参数，可以发现以产生最小的光束的振动所期望的间隙高度， 图5示出了对应于60伏间隙高度，例如电子束偏转。可以看出，几乎所有的振荡的被除去。不仅是动态波形的一个间隙高度有用的，但对于所有的间隙尽可能的高度。这表现在图6</stro...

Watch this Scientific Journal Video about Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators at JoVE.com

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

当执行使用传统的一步偏置开关操作的边缘电场静电MEMS驱动器会导致固有的低挤压膜阻尼条件和长期稳定时间坚固的设备设计。实时的切换时间的改善，提供直流动态波形降低了边缘场的建立时间之间的转换时，MEMS致动器向上到向下和向下到向上的状态。

实时直流偏置的动态法切换时间改善严重欠阻尼边缘化场静电MEMS致动器

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

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10.2K 次观看.  University of California, Davis. 当执行使用传统的一步偏置开关操作的边缘电场静电MEMS驱动器会导致固有的低挤压膜阻尼条件和长期稳定时间坚固的设备设计。实时的切换时间的改善，提供直流动态波形降低了边缘场的建立时间之间的转换时，MEMS致动器向上到向下和向下到向上的状态。 

视频: Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an elastomeric dielectric membrane sandwiched between two compliant electrodes. The large actuation strains of these transducers when used as actuators (over 300% area strain) and their soft and compliant nature has been exploited for a wide range of applications, including electrically tunable optics, haptic feedback devices, wave-energy harvesting, deformable cell-culture devices, compliant grippers, and propulsion of a bio-inspired fish-like airship. In most cases, DETs are made with a commercial proprietary acrylic elastomer and with hand-applied electrodes of carbon powder or carbon grease. This combination leads to non-reproducible and slow actuators exhibiting viscoelastic creep and a short lifetime. We present here a complete process flow for the reproducible fabrication of DETs based on thin elastomeric silicone films, including casting of thin silicone membranes, membrane release and prestretching, patterning of robust compliant electrodes, assembly and testing. The membranes are cast on flexible polyethylene terephthalate (PET) substrates coated with a water-soluble sacrificial layer for ease of release. The electrodes consist of carbon black particles dispersed into a silicone matrix and patterned using a stamping technique, which leads to precisely-defined compliant electrodes that present a high adhesion to the dielectric membrane on which they are applied.

This manuscript shows the fabrication process for the manufacture of dielectric elastomer soft actuators based on silicone membranes. The three key stages of production are presented in detail: blade casting of thin silicone membranes; pad printing of compliant electrodes; and the assembly of all the components.

有机硅为基础的介电弹性体致动器的制作工艺

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

科研

工程学

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

紧凑的镜头少数字全息显微镜的MEMS检测与表征

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Free-form Light Actuators &amp;#8212; Fabrication and Control of Actuation in Microscopic Scale

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

自由形式的光驱动器 - 制作和开动控制在微观尺度

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 &#176;C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

3D碳微机电系统（C-MEMS）的制造

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

高效宽量程可调谐 MEMS 滤波器的设计与表征方法

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending deformation and low input. However, their monotonous bending motion form in two-dimensional (2-D) space keeps them away from wide applications. This paper presents a detailed fabrication method of soft pneumatic network actuators with oblique chambers, to explore their motions in three-dimensional (3-D) space. The design of oblique chambers enables actuators with tunable coupled bending and twisting capabilities, which gives them the possibility to move dexterously in flexible manipulators, to become biologically inspired robots and medical devices. The fabrication process is based on the molding method, including the silicone elastomer preparation, chamber and base parts fabrication, actuator assembly, tubing connections, checks for leaks, and actuator repair. The fabrication method guarantees the rapid manufacturing of a series of actuators with only a few modifications in the molds. The test results show the high quality of the actuators and their prominent bending and twisting capabilities. Experiments of the gripper demonstrate the advantages of the development in adapting to objects with different diameters and providing sufficient friction.

Here we present a fabrication method of soft pneumatic network actuators with oblique chambers. The actuators are capable of generating coupled bending and twisting motions, which broadens their application in soft robotics.

斜腔软气动网络驱动器的研制

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending ...

Optimized Sealing Process and Real-Time Monitoring of Glass-to-Metal Seal Structures

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to demonstrate a novel protocol to characterize and measure residual stress in a glass-to-metal seal structure without destroying the insulation and hermeticity of sealing materials. In this research, a femto-laser inscribed fiber Bragg grating sensor is used. The glass-to-metal seal structure that is measured consists of a metal shell, sealing glass, and Kovar conductor. To make the measurements worthwhile, the specific heat treatment of metal-to-glass seal (MTGS) structure is explored to obtain the model with best hermeticity. Then, the FBG sensor is embedded into the path of sealing glass and becomes well-fused with the glass as the temperature cools to RT. The Bragg wavelength of FBG shifts with the residual stress generated in sealing the glass. To calculate the residual stress, the relationship between Bragg wavelength shift and strain is applied, and the finite element method is also used to make the results reliable. The online monitoring experiments of residual stress in sealing glass are carried out at different loads, such as high temperature and high pressure, to broaden functions of this protocol in harsh environments.

Key procedures to optimize the sealing process and achieve real-time monitoring of the metal-to-glass seal (MTGS) structure are described in detail. The embedded fiber Bragg grating (FBG) sensor is designed to achieve online monitoring of temperature and high-level residual stress in the MTGS with simultaneous environmental pressure monitoring.

玻璃到金属密封结构的优化密封工艺和实时监控

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to ...

Rapid Manufacturing of Thin Soft Pneumatic Actuators and Robots

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a laser cutter machine. The method starts with the lamination of thermoplastic polyurethane (TPU) sheets using a heat press for 10 min at the temperature of ~93 &#176;C. Next, the parameters of the laser cutter machine are optimized to produce a rectangular balloon with maximum burst pressure. Using the optimized parameters, the soft actuators are laser cut/welded three times sequentially. Next, a dispensing needle is attached to the actuator, allowing it to be inflated. The effect of geometrical parameters on the deflection of the actuator are studied systematically by varying the channel width and length. Finally, the performance of the actuator is characterized using an optical camera and a fluid dispenser. Conventional fabrication methods of soft pneumatic actuators based on silicone molding are time consuming (several hours). They also result in strong but bulky actuators, which limits the actuator&#8217;s applications. Moreover, microfabrication of thin pneumatic actuators is both time-consuming and expensive. The proposed manufacturing method in the current work resolves these issues by introducing a fast, simple, and cost-effective fabrication method of ultrathin pneumatic actuators.

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with a thin form factor. The fabrication method starts with lamination of thermoplastic polyurethane (TPU) sheets followed by laser cutting/welding of a two-dimensional pattern to form actuators and robots.

快速制造薄软气动执行器和机器人

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different materials show variability in resistive switching properties due to the intrinsic nature of the material used, leading to discrepancies in the field because of underlying operation mechanisms. This highlights a need for a reliable technique to understand mechanisms using nanostructural observations. This protocol explains a detailed process and methodology of in&#160;situ nanostructural analysis as a result of electrical biasing using transmission electron microscopy (TEM). It provides visual and reliable evidence of underlying nanostructural changes in real time memory operations. Also included is the methodology of fabrication and electrical characterizations for asymmetric crossbar structures incorporating amorphous vanadium oxide. The protocol explained here for vanadium oxide films can be easily extended to any other materials in a metal-dielectric-metal sandwiched structure. Resistive switching crossbars are predicted to serve the programmable logic and neuromorphic circuits for next-generation memory devices, given the understanding of the operation mechanisms. This protocol reveals the switching mechanism in a reliable, timely, and cost-effective way in any type of resistive switching materials, and thereby predicts the device&#39;s applicability.

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Presented here is a protocol for analyzing nanostructural changes during in&#160;situ biasing with transmission electron microscopy (TEM) for a stacked metal-insulator-metal structure. It has significant applications in resistive switching crossbars for the next generation of programmable logic circuits and neuromimicking hardware, to reveal their underlying operation mechanisms and practical applicability.

基于混合相位a-VOx的不对称横杆的偏置和制造现场传输电子显微镜

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

碳基离子机电活性软执行器的制造

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...