Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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11:44 min
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August 15th, 2014
DOI :
August 15th, 2014
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Chapters in this video
0:05
Title
1:08
Fabrication of Electrostatic Fringing-field Actuated (EFFA) MEMS Fixed-fixed Beams
8:28
Experimental Validation of Dynamic Waveform Biasing
10:23
Results: Measured Pull-down and Released States of a MEMS Bridge
11:16
Conclusion
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