Die Autoren möchten sich Ryan Tung für seine Hilfe und nützliche technische Diskussionen. Die Autoren möchten auch die Hilfe und Unterstützung des technischen Personals Birck Nanotechnology Center bestätigen. Diese Arbeit wurde von der Defense Advanced Research Projects Agency unter der Purdue Mikrowelle Reconfigurable Evanescent-Mode unterstützt Cavity Filter-Studie. Und auch von NNSA Center of Vorhersage von Zuverlässigkeit, Integrität und Überlebensfähigkeit von Microsystems und des Energieministeriums unter Preis Nummer DE-FC5208NA28617. Die Ansichten, Meinungen und / oder Ergebnisse in diesem Papier / Präsentation enthalten sind, sind die der Autoren / Referenten und sollte nicht als Vertreter der offiziellen Ansichten oder Strategien interpretiert werden, weder ausdrücklich noch stillschweigend, von der Defense Advanced Research Projects Agency oder der Abteilung der Verteidigung.

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Die Autoren haben nichts zu offenbaren.

Niedrige Restspannung Au Filmabscheidung und eine Trocken Release mit XeF 2 sind kritisch Komponenten in der erfolgreichen Herstellung der Vorrichtung. Elektrostatische streufeld Aktoren bieten relativ geringen Kräften im Vergleich zu Parallelplattenfeldaktoren. Typische MEMS Dünnschicht Spannungen von&gt; 60 MPa wird in einer übermäßig hohen Antriebsspannungen, die potenziell gefährden können, die Zuverlässigkeit von MEMS EFFA führen. Aus diesem Grund ist die Galvanik Rezept wird sorgfältig charakt...

Mikroelektromechanische Systeme (MEMS) nutzen mehrere Betätigungsmechanismen, um mechanische Verschiebung zu erreichen. Die beliebtesten sind thermische, piezoelektrische, magneto und elektrostatische. Für kurze Schaltzeit, ist die elektrostatische Betätigung die beliebteste Technik 1, 2. In der Praxis kritisch-gedämpfte mechanische Designs liefern den besten Kompromiss zwischen Anfangsanstiegszeit und Einschwingzeit. Nach Anwendung der DC-Bias und das Betätigen der Membran nach unten in Richtung der Pull-Down-Elektrode ist der Einschwingzeit kein großes Problem wie die Membran wird sich zu reißen und sich an die dielektrische beschichtete Elektrode Betätigung. 8 - mehrere Anwendungen aus der oben genannten elektrostatische Betätigung Design 3 profitiert. Jedoch ist das Vorhandensein der dielektrischen beschichteten Pulldown-Elektrode der Aktor anfällig dielektrische Aufladung und Haftreibung. MEMS-Membranen können eine u nutzennderdamped mechanische Konstruktion, um eine schnelle Anfangsanstiegszeit zu erzielen. Ein Beispiel für eine unterkritisch gedämpfte mechanische Aufbau ist die elektrostatische Randfeld betätigt (EFFA) MEMS. Diese Topologie ist weit weniger Anfälligkeit für typische Ausfallmechanismen, die elektrostatische basierte Designs 9-20 Pest ausgestellt. Das Fehlen der Gegenelektrode parallel und folglich die parallelen elektrischen Feld ist, warum diese MEMS angemessen &quot;streufeld&quot; betätigt (Abbildung 1) genannt. Zur EFFA Konstruktion wird der Pull-down-Elektrode in zwei getrennte Elektroden, die seitlich zu der Bewegungs Membran versetzt angeordnet sind, vollständig die Überlappung zwischen den beweglichen und feststehenden Teilen der Vorrichtung unterteilt. Jedoch ist die Entfernung des Substrats von unterhalb der beweglichen Membran reduziert die Squeeze-Film-Dämpfung Komponente, wodurch die Einstellzeit erhöht wird. 2B ist ein Beispiel für die Setzzeit in Reaktion auf STANDARd Schritt Vorspannung. Transiente oder DC-Vorspannung angelegt dynamische in Echtzeit verwendet werden, um die Einschwingzeit 20-26 verbessern. 2C und 2D veranschaulichen, wie ein qualitativ zeitlich variierenden Wellenform effektiv das Klingeln beenden. Früheren Forschungsbemühungen verwenden numerische Verfahren, um die genaue Spannung und Zeitpunkte der Eingangs-Bias zu berechnen, um die Schaltzeit zu verbessern. Das Verfahren in dieser Arbeit verwendet kompakte geschlossene Form Ausdrücke, um die Eingangs-Bias-Wellenform-Parameter berechnen. Darüber hinaus konzentrierte sich auf frühere Arbeiten parallel Platte Betätigung. Während die Strukturen sind für unterdämpft ist, ist Squeeze-Film-Dämpfung noch in dieser Konfiguration. Die in dieser Arbeit vorgestellten Verfahren ist die Betätigung streufeld Betätigung. In dieser Konfiguration Squeeze-Film-Dämpfung wird effektiv eliminiert. Dies stellt einen Extremfall, wo die mechanische Dämpfung der MEMS Strahl ist sehr gering. Dieses Papier beschreibt, wie die EFFA MEMS dev herzustellenICES und die Messung durchführen, um experimentell zu validieren die Wellenform-Konzept.

<table border="0" cellpadding="0" cellspacing="0" width="746">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:251px;">Chemical</td>
			<td style="width:163px;">Company</td>
			<td style="width:137px;">Catalogue number</td>
			<td style="width:195px;">Comments (optional)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Buffered oxide etchant</td>
			<td>Mallinckrodt Baker</td>
			<td>1178</td>
			<td>Silicon dioxide etch, Ti etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Acetone</td>
			<td>Mallinckrodt Baker</td>
			<td>5356</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Isopropyl alcohol</td>
			<td>Honeywell</td>
			<td>BDH-140</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hexamethyldisilizane</td>
			<td>Mallinckrodt Baker</td>
			<td>5797</td>
			<td>adhesion promoter</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;">Microposit SC 1827 Positive Photoresist</td>
			<td>Shipley Europe Ltd</td>
			<td>44090</td>
			<td>Pattern, electroplating</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Microposit MF-26A developer</td>
			<td>Shipley Europe Ltd</td>
			<td>31200</td>
			<td>Develop SC 1827</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Tetramethylammonium hydroxide</td>
			<td>Sigma-Aldrich</td>
			<td>334901</td>
			<td>Bulk Si etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrofluroic acid</td>
			<td>Sciencelab.com</td>
			<td>SLH2227</td>
			<td>Silicon dioxide etch</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Sulfuric acid</td>
			<td>Sciencelab.com</td>
			<td>SLS2539</td>
			<td>wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Hydrogen peroxide</td>
			<td>Sciencelab.com</td>
			<td>SLH1552</td>
			<td>Wafer clean</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Transene Sulfite Gold TSG-250</td>
			<td>Transense</td>
			<td>110-TSG-250</td>
			<td>Au electroplating solution</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Baker PRS-3000 Positive Resist Stripper</td>
			<td>Mallinckrodt Baker</td>
			<td>6403</td>
			<td>Photoresist stripper</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;">Gold etchant type TFA</td>
			<td>Transense</td>
			<td>060-0015000</td>
			<td>Au etch</td>
		</tr>
	</tbody>
</table>

real-time dc-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic mems actuators

Mechanisch unterdämpften elektrostreufeld MEMS-Betätigungsglieder sind für ihre schnelle Schaltvorgang in Reaktion auf eine Einheitsschritteingabe Vorspannung bekannt. Der Kompromiß für das verbesserte Schaltleistung ist jedoch eine relativ lange Beruhigungszeit, um jeden Spalthöhe in Abhängigkeit von verschiedenen angelegten Spannungen zu erreichen. Transient angelegten Vorspannung Wellenformen werden eingesetzt, um reduzierten Schaltzeiten für elektrostreufeld MEMS Antriebe mit hohen mechanischen Qualitätsfaktoren zu erleichtern. Entfernen der zugrunde liegenden Substrat der streufeld Aktor erstellt der niedrigen mechanischen Dämpfungs Umgebung erforderlich, um effektiv testen das Konzept. Das Entfernen des darunterliegenden Substrats ist auch eine wesentliche Verbesserung der Funktionsfähigkeit der Vorrichtung im Hinblick auf Versagen aufgrund von Haftreibung. Obwohl DC-dynamische Vorspannung ist nützlich bei der Verbesserung der Einschwingzeit, die geforderten Anstiegsgeschwindigkeiten für typische MEMS aggressive Anforderungen an die Ladungs ​​p platzierenUMPS für voll integrierte On-Chip-Designs. Darüber hinaus kann es Herausforderungen die Integration der Substratentfernung Schritt in die Back-End-of-Line-CMOS-kommerziellen Verarbeitungsschritte sein. Experimentelle Validierung hergestellt Aktuatoren zeigt eine Verbesserung von 50x in Schaltzeit im Vergleich zu herkömmlichen Schrittvorspann Ergebnisse. Im Vergleich zu theoretischen Berechnungen, sind die experimentellen Ergebnisse in guter Übereinstimmung.

Der Aufbau in Figur 4 verwendet wird, um die Auslenkung gegenüber der Zeit Merkmale der MEMS Brücken aufzunehmen. Durch die Verwendung des Laser-Doppler-Vibrometer im kontinuierlichen Messmodus kann die genaue Spannung und Zeit-Parameter gefunden werden, die in minimalen Strahlschwingung für die gewünschte Spalthöhe führen. 5 veranschaulicht ein Beispiel Strahlablenkung entsprechend der 60 V Spalthöhe. Es ist ersichtlich, dass nahezu alle der Schwingung wird entfernt. Nicht nur i...

Watch this Scientific Journal Video about Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators at JoVE.com

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Das robuste Design des Geräts streufeldelektrostatische MEMS Aktoren Ergebnisse in inhärent niedrigen Squeeze-Film-Dämpfung Bedingungen und lange Einschwingzeiten bei der Durchführung von Schaltvorgängen mit herkömmlichen Schritt Vorspannung. Echtzeit-Schaltzeitverbesserung mit DC-dynamischen Wellenformen reduziert die Einschwingzeit des streufeld MEMS-Aktoren, wenn zwischen up-to-down und down-to-up-Staaten.

Echtzeit-DC-Vorspannung dynamische Verfahren zur Verbesserung Schaltzeit in stark unterdämpft Fransen-Bereich Elektroantriebe MEMS

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

real-time-dc-dynamic-biasing-method-for-switching-time-improvement

Research

JoVE Journal

Engineering

10.2K Aufrufe.  University of California, Davis.  Das robuste Design des Geräts streufeldelektrostatische MEMS Aktoren Ergebnisse in inhärent niedrigen Squeeze-Film-Dämpfung Bedingungen und lange Einschwingzeiten bei der Durchführung von Schaltvorgängen mit herkömmlichen Schritt Vorspannung. Echtzeit-Schaltzeitverbesserung mit DC-dynamischen Wellenformen reduziert die Einschwingzeit des streufeld MEMS-Aktoren, wenn zwischen up-to-down und down-to-up-Staaten. 

Serie: Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an elastomeric dielectric membrane sandwiched between two compliant electrodes. The large actuation strains of these transducers when used as actuators (over 300% area strain) and their soft and compliant nature has been exploited for a wide range of applications, including electrically tunable optics, haptic feedback devices, wave-energy harvesting, deformable cell-culture devices, compliant grippers, and propulsion of a bio-inspired fish-like airship. In most cases, DETs are made with a commercial proprietary acrylic elastomer and with hand-applied electrodes of carbon powder or carbon grease. This combination leads to non-reproducible and slow actuators exhibiting viscoelastic creep and a short lifetime. We present here a complete process flow for the reproducible fabrication of DETs based on thin elastomeric silicone films, including casting of thin silicone membranes, membrane release and prestretching, patterning of robust compliant electrodes, assembly and testing. The membranes are cast on flexible polyethylene terephthalate (PET) substrates coated with a water-soluble sacrificial layer for ease of release. The electrodes consist of carbon black particles dispersed into a silicone matrix and patterned using a stamping technique, which leads to precisely-defined compliant electrodes that present a high adhesion to the dielectric membrane on which they are applied.

This manuscript shows the fabrication process for the manufacture of dielectric elastomer soft actuators based on silicone membranes. The three key stages of production are presented in detail: blade casting of thin silicone membranes; pad printing of compliant electrodes; and the assembly of all the components.

Herstellungsverfahren einer Silikonbasis Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

Forschung

Ingenieurwesen

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

Compact-Objektiv lose digitale holografische Mikroskop für MEMS-Inspektion und Charakterisierung

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Free-form Light Actuators &amp;#8212; Fabrication and Control of Actuation in Microscopic Scale

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

Freiform-Lichtaktoren - Herstellung und Steuerung der Betätigung in mikroskopischer Skala

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 &#176;C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

Herstellung von 3D-Carbon-Mikroelektromechanischen Systemen (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

Design und Charakterisierung Methodik für effiziente Weitbereichs-abstimmbaren MEMS-Filter

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending deformation and low input. However, their monotonous bending motion form in two-dimensional (2-D) space keeps them away from wide applications. This paper presents a detailed fabrication method of soft pneumatic network actuators with oblique chambers, to explore their motions in three-dimensional (3-D) space. The design of oblique chambers enables actuators with tunable coupled bending and twisting capabilities, which gives them the possibility to move dexterously in flexible manipulators, to become biologically inspired robots and medical devices. The fabrication process is based on the molding method, including the silicone elastomer preparation, chamber and base parts fabrication, actuator assembly, tubing connections, checks for leaks, and actuator repair. The fabrication method guarantees the rapid manufacturing of a series of actuators with only a few modifications in the molds. The test results show the high quality of the actuators and their prominent bending and twisting capabilities. Experiments of the gripper demonstrate the advantages of the development in adapting to objects with different diameters and providing sufficient friction.

Here we present a fabrication method of soft pneumatic network actuators with oblique chambers. The actuators are capable of generating coupled bending and twisting motions, which broadens their application in soft robotics.

Herstellung von weichen pneumatische Netzwerk Aktoren mit schrägen Kammern

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending ...

Optimized Sealing Process and Real-Time Monitoring of Glass-to-Metal Seal Structures

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to demonstrate a novel protocol to characterize and measure residual stress in a glass-to-metal seal structure without destroying the insulation and hermeticity of sealing materials. In this research, a femto-laser inscribed fiber Bragg grating sensor is used. The glass-to-metal seal structure that is measured consists of a metal shell, sealing glass, and Kovar conductor. To make the measurements worthwhile, the specific heat treatment of metal-to-glass seal (MTGS) structure is explored to obtain the model with best hermeticity. Then, the FBG sensor is embedded into the path of sealing glass and becomes well-fused with the glass as the temperature cools to RT. The Bragg wavelength of FBG shifts with the residual stress generated in sealing the glass. To calculate the residual stress, the relationship between Bragg wavelength shift and strain is applied, and the finite element method is also used to make the results reliable. The online monitoring experiments of residual stress in sealing glass are carried out at different loads, such as high temperature and high pressure, to broaden functions of this protocol in harsh environments.

Key procedures to optimize the sealing process and achieve real-time monitoring of the metal-to-glass seal (MTGS) structure are described in detail. The embedded fiber Bragg grating (FBG) sensor is designed to achieve online monitoring of temperature and high-level residual stress in the MTGS with simultaneous environmental pressure monitoring.

Optimierter Versiegelungsprozess und Echtzeitüberwachung von Glas-Metall-Dichtungsstrukturen

Residual stress is an essential factor to keeping the hermeticity and robustness of a glass-to-metal seal structure. The purpose of this report is to ...

Rapid Manufacturing of Thin Soft Pneumatic Actuators and Robots

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a laser cutter machine. The method starts with the lamination of thermoplastic polyurethane (TPU) sheets using a heat press for 10 min at the temperature of ~93 &#176;C. Next, the parameters of the laser cutter machine are optimized to produce a rectangular balloon with maximum burst pressure. Using the optimized parameters, the soft actuators are laser cut/welded three times sequentially. Next, a dispensing needle is attached to the actuator, allowing it to be inflated. The effect of geometrical parameters on the deflection of the actuator are studied systematically by varying the channel width and length. Finally, the performance of the actuator is characterized using an optical camera and a fluid dispenser. Conventional fabrication methods of soft pneumatic actuators based on silicone molding are time consuming (several hours). They also result in strong but bulky actuators, which limits the actuator&#8217;s applications. Moreover, microfabrication of thin pneumatic actuators is both time-consuming and expensive. The proposed manufacturing method in the current work resolves these issues by introducing a fast, simple, and cost-effective fabrication method of ultrathin pneumatic actuators.

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with a thin form factor. The fabrication method starts with lamination of thermoplastic polyurethane (TPU) sheets followed by laser cutting/welding of a two-dimensional pattern to form actuators and robots.

Schnelle Fertigung von dünnen Soft Pneumatikantrieben und Robotern

This protocol describes a method for rapid manufacturing of soft pneumatic actuators and robots with an ultrathin form factor using a heat press and a ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different materials show variability in resistive switching properties due to the intrinsic nature of the material used, leading to discrepancies in the field because of underlying operation mechanisms. This highlights a need for a reliable technique to understand mechanisms using nanostructural observations. This protocol explains a detailed process and methodology of in&#160;situ nanostructural analysis as a result of electrical biasing using transmission electron microscopy (TEM). It provides visual and reliable evidence of underlying nanostructural changes in real time memory operations. Also included is the methodology of fabrication and electrical characterizations for asymmetric crossbar structures incorporating amorphous vanadium oxide. The protocol explained here for vanadium oxide films can be easily extended to any other materials in a metal-dielectric-metal sandwiched structure. Resistive switching crossbars are predicted to serve the programmable logic and neuromorphic circuits for next-generation memory devices, given the understanding of the operation mechanisms. This protocol reveals the switching mechanism in a reliable, timely, and cost-effective way in any type of resistive switching materials, and thereby predicts the device&#39;s applicability.

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

Presented here is a protocol for analyzing nanostructural changes during in&#160;situ biasing with transmission electron microscopy (TEM) for a stacked metal-insulator-metal structure. It has significant applications in resistive switching crossbars for the next generation of programmable logic circuits and neuromimicking hardware, to reveal their underlying operation mechanisms and practical applicability.

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Basierend auf Mixed-Phased a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

Herstellung von kohlenstoffbasierten ionischen Elektromechanischen Soft Actuatoren

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...