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JoVE Journal

Chemistry

This content is Open Access.

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

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07:24 min

May 10th, 2021

May 10th, 2021

5,132 Views

0:04

Introduction

0:59

Transmission Electron Microscopy (TEM) Alignment for Beam-Rocking

2:36

Incident Beam Collimation and Pivot Point Setup

3:47

Electron-Channeling Pattern (ECP) Acquisition

4:30

Energy-Dispersive X-Ray Analysis

5:10

Results: Representative ECP and ICP Emission Imaging

6:46

Conclusion

Transcribir

We provide a general outline of quantitative microanalysis methods for estimating the site occupancies of impurities and their chemical states by taking advantage of electron-channeling phenomena under incident electron beam-rocking conditions, which reliably extract information from minority species, light elements, oxygen vacancies, and other point/line/planar defects.

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