Gold and Silver/Gold Catalyst Thin Film Deposition
5:17
Silver/Gold Catalyst Thin Film Dealloying
6:01
Mac-imprint Operation
7:33
Results: Representative Au Porous Stamp and Si Mac-imprint Imaging
8:31
Conclusion
Transcription
Our protocol provides a new patterning method for silicon that enables for the creation of three-dimensional hierarchical microstructures that enable the design of metasurface-based microoptic elements and waveguide technologies. This protocol all
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A protocol for metal-assisted chemical imprinting of 3D microscale features with sub-20 nm shape accuracy into solid and porous silicon wafers is presented.