この努力は完全に米国DOE、基礎エネルギー科学、材料科学と工学部門のオフィスによってサポートされていました。

1。サンプル成長作製<ol><li>アセトン、その後10分ごとに、超音波洗浄器で水となたSrTiO 3やのLaAlO 3などのミスカット角&lt;0.1度を有する5ミリメートル×5ミリメートル×0.5ミリメートル単結晶基板を清掃してください。 、30秒間10％フッ化水素に基板をエッチングSrTiO 3を上にTiO 2の終了を取得し、1100℃アニール続いて1分、℃で10時間、Cのために水の中で洗浄する。洗浄後、超高真空条件に適しヒーター基板上にマウントします。 </li><li> PLDの真空チャンバ内にヒーターを取り付け、2×10E-5 Torrの酸素と室を埋めるために、チャンバー酸素源を開きます。 800ヒータ温度を上昇させる°C、それは20分間アニールすることができます。温度はコンピュータ制御高温計や熱電対を使用して監視できます。 </li><li>成膜を開始するには、1の1-2 J / cm 2とし、レーザ周波数のレーザフルエンスを使用して、エキシマレーザーパルス化を開始するまたは2 Hzの。レーザパルスは、ターゲット材料に衝突し、プルーム磁束を生成する。フラックスは、基板上に、酸素環境とデポジットを貫通する。 </li><li>反射高エネルギー電子線回折（RHEED）は、単位細胞の増殖をモニターし、表面品質7を確認するために使用することができる。この手法は、非常に明確な厚さの監視が可能となります。 </li><li>フィルムは、所望の厚さである場合、レーザーをオフにして、5℃/分でヒーター温度を下げる。ヒータを室温まで冷却した後、酸素源をオフにしてサンプルを削除します。 </li><li> 域外アニールを成長した後、真空中で長期間後に存在していてもよい、酸素欠陥を除去するために、酸化物材料を用いることができる。酸素を流す1気圧の下でチューブ炉でサンプルを置きます。 20から温度を上げ°C〜700°C 5℃/分で、2〜20時間アニールした後、700°Cの温度を下げる°C 2℃/分。重要無TEはこれに悪影響表面品質に影響を与えることができ、負の結晶品質に影響を及ぼす可能性があるので、酸素空孔を充填する際に膜成長時に使用されるものより高い温度でポストアニールをしないようになる。 </li></ol> 2。フォトリソグラフィ作製<ol><li>超音波で10分間ずつアセトン、次に水でサンプルを清掃してください。光学顕微鏡は、試料表面が大きい粒子のクリーンであることを確認するために使用することができる。 （図2a） </li><li>コー​​トを1ミクロンの厚さのフォトレジスト層をスピン。これらの数字は、使用される特定のレジストに依存しているものの、典型的な回転速度と持続時間は、6,000 rpmで、80秒程度です。フォトレジストを硬化させる2分間115℃の熱板上のサンプルを置きます。光学顕微鏡下でフォトレジストの品質をチェックします。コー​​ティングのない泡立ちと均一に表示されます。 </li><li>被ばく線量と9秒間UV光で事前定義されたリソグラフィマスクの下にサンプルを公開するためにマスクアライナを使用約90 MJ / cm 2である。再度、これらの数字は、使用されるフ​​ォトレジストに固有になります。マスクで覆われているPRの一部は、そのプロパティを変更し、化学的な現像液に溶解することができるが、ポジ型フォトレジストを用いる場合には、マスクによって覆われたフォトレジストの一部は、その化学的性質を変更しない。 110で、フォトレジスト及びサンプルを加熱80℃のためのC秒さらに露光されたフォトレジストを硬化する。 </li><li> 25-35秒間現像液のサンプルを洗浄します。すぐにサンプルを取り出し、30秒間水で洗い流してください。ポジ型フォトレジストが使用される場合に覆われている部分が残るが、マスクによって覆われていないフォトレジストの部分が洗い流される。現像工程の期間が正確にフォトレジストの寸法及び品質（図2b）を制御することが重要であることに注意してください。 </li><li>比率1:1:1ヨウ化カリウム、塩酸と水の溶液を準備します。 Tをすすぐためにプラスチック製のピンセットを使用して、約10秒間酸で、彼はサンプル。薄膜の保護されていない部分がエッチングで除去される。直ちに60秒間純水のサンプルをすすいでください。薄膜が完全にエッチングされたかどうかを確認するために光学顕微鏡で確認してください。そうでない場合は、エッチ酸を2〜3秒以上を追加して、すぐに純水で洗い流し、その後、光学顕微鏡と一緒に再度確認する。すべての保護されていない膜がエッチング除去されるまで、この手順を繰り返します。このプロセスは、エッチング液の強さと膜厚によって制御される。多くのマンガン酸化物の代表的なエッチング速度は、1〜4程度/上記の1時01分01秒ソリューション比秒です。 </li><li>残ったフォトレジストを除去するために20秒間アセトンにサンプルを洗浄します。顕微鏡（ 図2Cおよび2D）でサンプルの品質をチェックします。 </li></ol> 3。ワイヤボンディング接続<ol><li>接触に適し電線に開口領域を残すリソグラフィマスクを使用して上記の手順2.1から2.3を繰り返して、フォトマスクを使用したパッド。試料上に5nmのTiおよび100nmのAuのを蒸発させ、アセトンですすぎ。これは、フォトレジストを除去し、所望のコンタクトパッドジオメトリ（ 図3a）を残す。 </li><li>サンプルパックの上にサンプルをマウントするために、GEのニスを使用してください。 15分で硬化することができます。 </li><li>ワイヤーボンダーのステージ上のサンプル位置を固定し、サンプルパックからのTi / Auの接点（ 図3b）へのAl配線を接続するために、ワイヤボンダーを使用しています。その後、電気的測定を行う。 </li></ol>

<ol>
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X., Zhang, Z., Wu, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Dependence+of+negative+differential+resistance+on+electronic+phase+separation+in+unpatterned+manganite+films.">Dependence of negative differential resistance on electronic phase separation in unpatterned manganite films.</a> Applied Physics Letters. 100, 62402-62404 (2012).</li><li>Ichimiya, A., I, P. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Reflection High Energy Electron Diffraction. , (2004).</li><li>Guo, H., Sun, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Growth+diagram+of+La0.7Sr0.3MnO3+thin+films+using+pulsed+laser+deposition.">Growth diagram of La0.7Sr0.3MnO3 thin films using pulsed laser deposition.</a> arXiv. , 1210.5989 (2012).</li><li>Ward, T. Z., Gai, Z., Guo, H. W., Yin, L. F., Shen, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Dynamics+of+a+first-order+electronic+phase+transition+in+manganites.">Dynamics of a first-order electronic phase transition in manganites.</a> Physical Review B. 83, 125125 (2011).</li><li>Ward, T. 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X., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Giant+Discrete+Steps+in+Metal-Insulator+Transition+in+Perovskite+Manganite+Wires.">Giant Discrete Steps in Metal-Insulator Transition in Perovskite Manganite Wires.</a> Physical Review Letters. 97, 167201 (2006).</li><li>Wu, T., Mitchell, J. 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利害の衝突は宣言されていない。

Siなどの半導体材料の単一の要素とは異なり、複合材料の製造は、複雑な構造と複数の要素がすべて考慮しなければならないという事実によるより困難にすることができる。複合酸化物デバイスを製造するためのフォトリソグラフィーの使用は、他の閉じ込め技術とは対照的に、プロトタイプの比較的低コストかつ高速である。理解するが、いくつかの重要な制限があります。フォトリソグ?...

第一及び高品位のデバイスに向かって最も重要な工程の一つは、エピタキシャル酸化物薄膜の成長である。単結晶基板をターゲット材料を堆積させるために &quot;鋳型&quot;として使用される。異なる堆積方法のうち、パルスレーザー堆積（PLD）は、4,5良い品質の薄膜を取得するための最良の方法の一つである。成長プロセスは、酸素環境下で約800℃まで基板を加熱し、ターゲット材料に衝突し、基板上に堆積される磁束を生成するためにレーザパルスを用い含む。典型的なシステムを図1に示されている。 パターン化されていないフィルムは、フィルムの寸法を低減し、エキゾチックな新しい物理6を明らかにするために示されているが、新しい現象やデバイス製造を探索するより多くの機会を提供します。フォトリソグラフィーは、1μmのオーダーまでの面内のサンプル寸法を縮小するために使用することができる。フォトリソグラフィープロセスの詳細なプロトコルは、意志以下に説明する。この手法は、異なるひずみ状態で開催されたエピタキシャル膜で閉じ込め効果の調査を可能にし、最も広く使われている基板と互換性があります。 多くの複合酸化物が低温および/または高磁場での興味深い特性を有することから、装置及び計測機器との間の電気接続は非常に重要である。高品質の接点は、4探針の幾何学的形状で、パッドと測定装置との間の接続を行うために、ワイヤボンダーを用いてAuのコンタクトパッドを蒸発させることによって形成することができる。正常に終了したら、これらの接続を容易4 K〜400 Kと±9 T.までの磁界範囲の広い温度範囲内で極端な測定環境に耐えることができる

<table border="1">
 <tbody>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Reagent/Material</td>
 </tr>
 <tr>
 <td>SrTiO3(001) &amp; LaAlO3(100) substrates</td>
 <td>CrysTec GmbH</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Microposit S1813 Photoresist</td>
 <td>Shipley</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>CD-26 Developer</td>
 <td>Shipley</td>
 <td>38490</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>GE varnish</td>
 <td>Lakeshore</td>
 <td>VGE-7031</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Equipment</td>
 </tr>
 <tr>
 <td>Reflected High Energy Electron Diffraction (RHEED)</td>
 <td>Staib Instruments</td>
 <td>&nbsp;</td>
 <td>35 kV TorrRHEED</td>
 </tr>
 <tr>
 <td>Mask Aligner</td>
 <td>ABM</td>
 <td>Model 85-3 (350 W) Lightsource</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Resistivity Puck</td>
 <td>Quantum Design</td>
 <td>P102</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Wire Bonder</td>
 <td>Kulicke &amp; Soffa</td>
 <td>04524-0XDA-000-00</td>
 <td>&nbsp;</td>
 </tr>
 </tbody>
</table>

fabrication of spatially confined complex oxides

このような高いTcの超伝導体、マルチフェロイック、および巨大磁​​気抵抗などの複雑な材料は、その中に存在する固有の強い電子相関に起因する電子·磁気特性を持っている。これらの材料は、非常に異なる抵抗性及び磁気的挙動の領域が単結晶合金材料内に共存できる電子相分離を有することができる。電子ドメインの固有の大きさで、かつ下記長さスケールにこれらの材料の規模を低減することにより、新規な挙動を露出させることができる。そのためのこのとスピン電荷格子軌道秩序パラメータは、各空間輸送測定のため、これらの材料を減らし、相関長を伴うという事実は、複雑な動作を駆動する基本的な物理学を理解する上で重要なステップです。これらの材料はまた1-3電子機器の次の世代になるための大きな可能性を提供しています。従って、低次元の作製ナノまたは微細構造は、新しい機能を実現するために非常に重要である。これは、高品質薄膜成長から正確な電子物性の特性への複数の制御可能なプロセスが含まれます。ここでは、複合酸化マンガンデバイスのための高品質の微細構造の製造プロトコルを提示する。薄膜成長、フォトリソグラフィ、及びワイヤボンディングの詳細な説明と必要な機器が示されている。

本論文では、試料調製のフォトリソグラフィおよびワイヤボンディング側面に主に焦点を当てています。膜成長手続きに関する詳細は、当社の他の最近の刊行物8に記載されています。 フォトリソグラフィは、電子相関長と電子相分離9-13を調査する目的で、複合酸化物中の次元を制御するための重要な方法である。 図2は、プロセス中のステ?...

Watch this Scientific Journal Video about Fabrication of Spatially Confined Complex Oxides at JoVE.com

Fabrication of Spatially Confined Complex Oxides

我々は、パルスレーザー堆積（PLD）、フォトリソグラフィ及びマイクロメートルスケールの複合酸化物デバイスを作成するためのワイヤボンディング技術の使用を記載している。 PLDは、エピタキシャル薄膜を成長させるために利用される。フォトリソグラフィとワイヤボンディング技術は、測定目的のための実用的なデバイスを作成するために導入される。

空間的に閉じ込められた複合酸化物の作製

Complex materials such as high Tc superconductors, multiferroics, and colossal magnetoresistors have electronic and magnetic properties that arise from ...

fabrication-of-spatially-confined-complex-oxides

Research

JoVE Journal

Engineering

9.4K ビュー.  Oak Ridge National Laboratory. 我々は、パルスレーザー堆積（PLD）、フォトリソグラフィ及びマイクロメートルスケールの複合酸化物デバイスを作成するためのワイヤボンディング技術の使用を記載している。 PLDは、エピタキシャル薄膜を成長させるために利用される。フォトリソグラフィとワイヤボンディング技術は、測定目的のための実用的なデバイスを作成するために導入され?...

ビデオ: Fabrication of Spatially Confined Complex Oxides

Measuring Spatially- and Directionally-varying Light Scattering from Biological Material

Light interacts with an organism's integument on a variety of spatial scales. For example in an iridescent bird: nano-scale structures produce color; the milli-scale structure of barbs and barbules largely determines the directional pattern of reflected light; and through the macro-scale spatial structure of overlapping, curved feathers, these directional effects create the visual texture. Milli-scale and macro-scale effects determine where on the organism's body, and from what viewpoints and under what illumination, the iridescent colors are seen. Thus, the highly directional flash of brilliant color from the iridescent throat of a hummingbird is inadequately explained by its nano-scale structure alone and questions remain. From a given observation point, which milli-scale elements of the feather are oriented to reflect strongly? Do some species produce broader "windows" for observation of iridescence than others? These and similar questions may be asked about any organisms that have evolved a particular surface appearance for signaling, camouflage, or other reasons.
In order to study the directional patterns of light scattering from feathers, and their relationship to the bird's milli-scale morphology, we developed a protocol for measuring light scattered from biological materials using many high-resolution photographs taken with varying illumination and viewing directions. Since we measure scattered light as a function of direction, we can observe the characteristic features in the directional distribution of light scattered from that particular feather, and because barbs and barbules are resolved in our images, we can clearly attribute the directional features to these different milli-scale structures. Keeping the specimen intact preserves the gross-scale scattering behavior seen in nature. The method described here presents a generalized protocol for analyzing spatially- and directionally-varying light scattering from complex biological materials at multiple structural scales.

We present a non-destructive method for sampling spatial variation in the direction of light scattered from structurally complex materials. By keeping the material intact, we preserve gross-scale scattering behavior, while concurrently capturing fine-scale directional contributions with high-resolution imaging. Results are visualized in software at biologically-relevant positions and scales.

生物材料からの空間的及び道順変化する光散乱の測定

Light interacts with an organism's integument on a variety of spatial scales. For example in an iridescent bird: nano-scale structures produce color; the ...

工学

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas allows the deposition of metal oxides with tunable morphology, structure, density and stoichiometry by a proper control of the plasma plume expansion dynamics. Such versatility can be exploited to produce nanostructured films from compact and dense to nanoporous characterized by a hierarchical assembly of nano-sized clusters. In particular we describe the detailed methodology to fabricate two types of Al-doped ZnO (AZO) films as transparent electrodes in photovoltaic devices: 1) at low O2 pressure, compact films with electrical conductivity and optical transparency close to the state of the art transparent conducting oxides (TCO) can be deposited at room temperature, to be compatible with thermally sensitive materials such as polymers used in organic photovoltaics (OPVs); 2) highly light scattering hierarchical structures resembling a forest of nano-trees are produced at higher pressures. Such structures show high Haze factor (&gt;80%) and may be exploited to enhance the light trapping capability. The method here described for AZO films can be applied to other metal oxides relevant for technological applications such as TiO2, Al2O3, WO3 and Ag4O4.

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

パルスレーザー蒸着法によるナノエンジニアリング透明導電性酸化物の作製

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Experimental Measurement of Settling Velocity of Spherical Particles in Unconfined and Confined Surfactant-based Shear Thinning Viscoelastic Fluids

An experimental study is performed to measure the terminal settling velocities of spherical particles in surfactant based shear thinning viscoelastic (VES) fluids. The measurements are made for particles settling in unbounded fluids&#160;and fluids between parallel walls. VES fluids over a wide range of rheological properties are prepared and rheologically characterized. The rheological characterization involves steady shear-viscosity and dynamic oscillatory-shear measurements to quantify the viscous and elastic properties respectively. The settling velocities under unbounded conditions are measured in beakers having diameters at least 25x the diameter of particles. For measuring settling velocities between parallel walls, two experimental cells with different wall spacing are constructed. Spherical particles of varying sizes are gently dropped in the fluids and allowed to settle. The process is recorded with a high resolution video camera and the trajectory of the particle is recorded using image analysis software. Terminal settling velocities are calculated from the data.
The impact of elasticity on settling velocity in unbounded fluids is quantified by comparing the experimental settling velocity to the settling velocity calculated by the inelastic drag predictions of Renaud et al.1&#160;Results show that elasticity of fluids can increase or decrease the settling velocity. The magnitude of reduction/increase is a function of the rheological properties of the fluids and properties of particles. Confining walls are observed to cause a retardation effect on settling and the retardation is measured in terms of wall factors.

This paper demonstrates the experimental procedure to measure terminal settling velocities of spherical particles in surfactant-based shear thinning viscoelastic fluids. Fluids over a wide range of rheological properties are prepared and settling velocities are measured for a range of particle sizes in unbounded fluids and fluids between parallel walls.

閉じ込められていない狭間性界面活性剤ベースの剪断間粘弾性流体における球状粒子の沈降速度の実験的測定

An experimental study is performed to measure the terminal settling velocities of spherical particles in surfactant based shear thinning viscoelastic ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

作製とマイクロ流体光力学発振器のテスト

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Atomically Traceable Nanostructure Fabrication

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure.

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

アトミックトレーサブルナノ構造作製

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

超伝導共振器の作製と評価

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Simultaneous Multi-surface Anodizations and Stair-like Reverse Biases Detachment of Anodic Aluminum Oxides in Sulfuric and Oxalic Acid Electrolyte

After reporting on the two-step anodization, nanoporous anodic aluminum oxides (AAOs) have been widely utilized in the versatile fields of fundamental sciences and industrial applications owing to their periodic arrangement of nanopores with relatively high aspect ratio. However, the techniques reported so far, which could be only valid for mono-surface anodization, show critical disadvantages, i.e., time-consuming as well as complicated procedures, requiring toxic chemicals, and wasting valuable natural resources. In this paper, we demonstrate a facile, efficient, and environmentally clean method to fabricate nanoporous AAOs in sulfuric and oxalic acid electrolytes, which can overcome the limitations that result from conventional AAO fabricating methods. First, plural AAOs are produced at one time through simultaneous multi-surfaces anodization (SMSA), indicating mass-producibility of the AAOs with comparable qualities. Second, those AAOs can be separated from the aluminum (Al) substrate by applying stair-like reverse biases (SRBs) in the same electrolyte used for the SMSAs, implying simplicity and green technological characteristics. Finally, a unit sequence consisting of the SMSAs sequentially combined with SRBs-based detachment can be applied repeatedly to the same Al substrate, which reinforces the advantages of this strategy and also guarantees the efficient usage of natural resources.

A protocol for fabricating nanoporous anodic aluminum oxides via simultaneous multi-surfaces anodization followed by stair-like reverse biases detachments is presented. It can be applied repeatedly to the same aluminum substrate, exhibiting a facile, high-yield, and environmentally clean strategy.

同時マルチ表面 Anodizations、階段のような逆バイアスで硫酸陽極酸化アルミニウムとシュウ酸電解質の剥離

After reporting on the two-step anodization, nanoporous anodic aluminum oxides (AAOs) have been widely utilized in the versatile fields of fundamental ...

Fabrication of Superhydrophobic Metal Surfaces for Anti-Icing Applications

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in industry. The wettability of the produced surface was analyzed by bouncing drop experiments and the topography was analyzed by confocal microscopy. In addition, we show various methodologies to measure its durability and anti-icing properties. Superhydrophobic surfaces hold a special texture that must be preserved to keep their water-repellency. To fabricate durable surfaces, we followed two strategies to incorporate a resistant texture. The first strategy is a direct incorporation of roughness to the metal substrate by acid etching. After this surface texturization, the surface energy was decreased by silanization or fluoropolymer deposition. The second strategy is the growth of a ceria layer (after surface texturization) that should enhance the surface hardness and corrosion resistance. The surface energy was decreased with a stearic acid film.
The durability of the superhydrophobic surfaces was examined by a particle impact test, mechanical wear by lateral abrasion, and UV-ozone resistance. The anti-icing properties were explored by studying the ability to repeal subcooled water, freezing delay, and ice adhesion.

We illustrate several methodologies to produce superhydrophobic metal surfaces and to explore their durability and anti-icing properties.

防氷用超撥水の金属表面の作製

Several ways to produce superhydrophobic metal surfaces are presented in this work. Aluminum was chosen as the metal substrate due to its wide use in ...

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (Cu variant) entropy-stabilized oxides. Phase pure and chemically homogeneous (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (x = 0.20, 0.27, 0.33) and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O (x = 0.11, 0.27) ceramic pellets are synthesized and used in the deposition of ultra-high quality, phase pure, single crystalline thin films of the target stoichiometry. A detailed methodology for the deposition of smooth, chemically homogeneous, entropy-stabilized oxide thin films by pulsed laser deposition on (001)-oriented MgO substrates is described. The phase and crystallinity of bulk and thin film materials are confirmed using X-ray diffraction. Composition and chemical homogeneity are confirmed by X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy. The surface topography of thin films is measured with scanning probe microscopy. The synthesis of high quality, single crystalline, entropy-stabilized oxide thin films enables the study of interface, size, strain, and disorder effects on the properties in this new class of highly disordered oxide materials.

The synthesis of high quality bulk and thin film (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O and (Mg0.25(1-x)Co0.25(1-x)Ni0.25(1-x)CuxZn0.25(1-x))O entropy-stabilized oxides is presented.

バルクと組成バリエーション エントロピー安定化酸化物薄膜合成

Here, we present a procedure for the synthesis of bulk and thin film multicomponent (Mg0.25(1-x)CoxNi0.25(1-x)Cu0.25(1-x)Zn0.25(1-x))O (Co variant) and ...

Fabrication of Soft Pneumatic Network Actuators with Oblique Chambers

Soft pneumatic network actuators have become one of the most promising actuation devices in soft robotics which benefits from their large bending deformation and low input. However, their monotonous bending motion form in two-dimensional (2-D) space keeps them away from wide applications. This paper presents a detailed fabrication method of soft pneumatic network actuators with oblique chambers, to explore their motions in three-dimensional (3-D) space. The design of oblique chambers enables actuators with tunable coupled bending and twisting capabilities, which gives them the possibility to move dexterously in flexible manipulators, to become biologically inspired robots and medical devices. The fabrication process is based on the molding method, including the silicone elastomer preparation, chamber and base parts fabrication, actuator assembly, tubing connections, checks for leaks, and actuator repair. The fabrication method guarantees the rapid manufacturing of a series of actuators with only a few modifications in the molds. The test results show the high quality of the actuators and their prominent bending and twisting capabilities. Experiments of the gripper demonstrate the advantages of the development in adapting to objects with different diameters and providing sufficient friction.

Here we present a fabrication method of soft pneumatic network actuators with oblique chambers. The actuators are capable of generating coupled bending and twisting motions, which broadens their application in soft robotics.