In Situ Time-dependent Dielectric Breakdown in the Transmission Electron Microscope: A Possibility to Understand the Failure Mechanism in Microelectronic Devices
8.7K Views
•
09:26 min
•
June 26th, 2015
DOI :
June 26th, 2015
•Chapters in this video
0:05
Title
1:35
Sample Preparation
2:30
Focused Ion Beam Thinning in a Scanning Electron Microscope
3:53
Sample Transfer to the Transmission Electron Microscope
4:29
Establishing the Electrical Connection
5:19
In Situ Time-dependent Dielectric Breakdown Experiment
6:50
Computed Tomography
7:22
Results: Failure Mechanism in Microelectronic Devices
8:34
Conclusion
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