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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

7.6K Views

09:20 min

December 7th, 2015

DOI :

10.3791/53260-v

December 7th, 2015


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Keywords Carbon Nanotubes

Chapters in this video

0:05

Title

0:46

Bottom Metal and Interlayer Dielectric Deposition

3:23

Catalyst Deposition and CNT Growth

5:07

Topside Metallization

7:17

Results: Characterization of Vertically-aligned Carbon Nanotubes

8:41

Conclusion

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