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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

DOI :

10.3791/53260-v

December 7th, 2015

December 7th, 2015

7,518 Views

1Department of Microelectronics, Delft University of Technology

A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.

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Low Temperature

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